JP2002260595A5 - - Google Patents

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Publication number
JP2002260595A5
JP2002260595A5 JP2001334157A JP2001334157A JP2002260595A5 JP 2002260595 A5 JP2002260595 A5 JP 2002260595A5 JP 2001334157 A JP2001334157 A JP 2001334157A JP 2001334157 A JP2001334157 A JP 2001334157A JP 2002260595 A5 JP2002260595 A5 JP 2002260595A5
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JP
Japan
Prior art keywords
processing space
microwave
reflector
ultraviolet
plasma lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001334157A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002260595A (ja
Filing date
Publication date
Priority claimed from US09/702,519 external-priority patent/US6559460B1/en
Application filed filed Critical
Publication of JP2002260595A publication Critical patent/JP2002260595A/ja
Publication of JP2002260595A5 publication Critical patent/JP2002260595A5/ja
Pending legal-status Critical Current

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JP2001334157A 2000-10-31 2001-10-31 紫外線ランプシステムおよび方法 Pending JP2002260595A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/702,519 US6559460B1 (en) 2000-10-31 2000-10-31 Ultraviolet lamp system and methods
US09/702519 2000-10-31

Publications (2)

Publication Number Publication Date
JP2002260595A JP2002260595A (ja) 2002-09-13
JP2002260595A5 true JP2002260595A5 (https=) 2005-06-30

Family

ID=24821534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001334157A Pending JP2002260595A (ja) 2000-10-31 2001-10-31 紫外線ランプシステムおよび方法

Country Status (4)

Country Link
US (2) US6559460B1 (https=)
JP (1) JP2002260595A (https=)
CN (1) CN1260013C (https=)
DE (1) DE10153204A1 (https=)

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US20100242299A1 (en) * 2003-01-09 2010-09-30 Con-Trol-Cure, Inc. Uv curing system and process
US6933683B2 (en) * 2003-02-27 2005-08-23 Nordson Corporation Microwave powered lamphead having external shutter
CN1449872B (zh) * 2003-04-10 2010-05-12 上海复旦辰光科技有限公司 一种利用微波清洁材料表面的方法及其装置
JP2005193088A (ja) * 2003-12-26 2005-07-21 Japan Storage Battery Co Ltd エキシマランプ照射装置
US7109669B2 (en) * 2004-04-08 2006-09-19 Nordson Corporation Microwave lamp power supply that can withstand failure in high voltage circuit
FR2869719B1 (fr) * 2004-04-29 2007-03-30 Pascal Sortais Source lumineuse a resonance cyclotronique d'electrons
US20050250346A1 (en) * 2004-05-06 2005-11-10 Applied Materials, Inc. Process and apparatus for post deposition treatment of low k dielectric materials
US20050286263A1 (en) * 2004-06-23 2005-12-29 Champion David A Plasma lamp with light-transmissive waveguide
CN100435982C (zh) * 2004-07-09 2008-11-26 赫恩龙 物件涂装uv漆的固化方法及其设备
WO2006104731A2 (en) * 2005-03-31 2006-10-05 Wms Gaming Inc. Wagering games with unlockable bonus rounds
FR2884043A1 (fr) * 2005-04-01 2006-10-06 Pascal Sortais Source lumineuse alimentee par radiofrequence pour traitements de substances et procede d'utilisation d'une telle source
US20060251827A1 (en) * 2005-05-09 2006-11-09 Applied Materials, Inc. Tandem uv chamber for curing dielectric materials
US20060249175A1 (en) * 2005-05-09 2006-11-09 Applied Materials, Inc. High efficiency UV curing system
US7777198B2 (en) 2005-05-09 2010-08-17 Applied Materials, Inc. Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation
US7372058B2 (en) * 2005-09-27 2008-05-13 Asml Netherlands B.V. Ex-situ removal of deposition on an optical element
US7692171B2 (en) * 2006-03-17 2010-04-06 Andrzei Kaszuba Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors
US7909595B2 (en) * 2006-03-17 2011-03-22 Applied Materials, Inc. Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections
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US7863834B2 (en) * 2007-06-29 2011-01-04 Nordson Corporation Ultraviolet lamp system and method for controlling emitted UV light
DE102007031629B3 (de) * 2007-07-06 2009-03-19 Eastman Kodak Co. Mit Mikrowellen angeregte Strahlungsquelle
DE102007031628B4 (de) * 2007-07-06 2012-06-21 Eastman Kodak Co. UV-Strahlungsquelle
US7923706B2 (en) * 2008-10-03 2011-04-12 Nordson Corporation Ultraviolet curing apparatus for continuous material
US20100096569A1 (en) * 2008-10-21 2010-04-22 Applied Materials, Inc. Ultraviolet-transmitting microwave reflector comprising a micromesh screen
WO2010077132A1 (en) 2008-12-31 2010-07-08 Draka Comteq B.V. Uvled apparatus for curing glass-fiber coatings
EP2388239B1 (en) 2010-05-20 2017-02-15 Draka Comteq B.V. Curing apparatus employing angled UV-LEDs
US8871311B2 (en) 2010-06-03 2014-10-28 Draka Comteq, B.V. Curing method employing UV sources that emit differing ranges of UV radiation
WO2012009628A1 (en) * 2010-07-16 2012-01-19 Nordson Corporation Lamp systems and methods for generating ultraviolet light
EP2418183B1 (en) 2010-08-10 2018-07-25 Draka Comteq B.V. Method for curing coated glass fibres providing increased UVLED intensitiy
EP2445313B1 (en) * 2010-10-21 2015-05-13 Electrolux Home Products Corporation N.V. Microwave oven cavity and microwave oven
KR101928348B1 (ko) 2011-04-08 2018-12-12 어플라이드 머티어리얼스, 인코포레이티드 자외선 처리, 화학적 처리, 및 증착을 위한 장치 및 방법
US9750091B2 (en) * 2012-10-15 2017-08-29 Applied Materials, Inc. Apparatus and method for heat treatment of coatings on substrates
US20150123015A1 (en) * 2013-11-04 2015-05-07 Nordson Corporation Apparatus and methods for irradiating substrates with ultraviolet light
US9117619B2 (en) * 2013-11-07 2015-08-25 Electronics And Telecommunications Research Institute Device for generating heavy-ion beam and method thereof
US10002752B2 (en) 2014-07-07 2018-06-19 Nordson Corporation Systems and methods for determining the suitability of RF sources in ultraviolet systems
US10520251B2 (en) * 2015-01-15 2019-12-31 Heraeus Noblelight America Llc UV light curing systems, and methods of designing and operating the same
JP6379118B2 (ja) 2016-01-10 2018-08-22 Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 光照射装置
US11532328B2 (en) 2018-05-18 2022-12-20 Samsung Electronics Co., Ltd. Method for fabricating semiconductor chip by using multi-curing apparatus and multi-curing apparatus
EP4131655B1 (en) * 2020-03-31 2025-11-19 Agc Inc. Wireless transmission system
CN115090477A (zh) * 2022-08-05 2022-09-23 安徽艾雅伦新材料科技有限公司 一种pvc板材防静电镀膜设备及其镀膜方法

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JPH0637521Y2 (ja) * 1988-10-05 1994-09-28 高橋 柾弘 マイクロ波励起による紫外線発生装置
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