DE10153204A1 - Ultraviolettlampensystem und Verfahren - Google Patents
Ultraviolettlampensystem und VerfahrenInfo
- Publication number
- DE10153204A1 DE10153204A1 DE10153204A DE10153204A DE10153204A1 DE 10153204 A1 DE10153204 A1 DE 10153204A1 DE 10153204 A DE10153204 A DE 10153204A DE 10153204 A DE10153204 A DE 10153204A DE 10153204 A1 DE10153204 A1 DE 10153204A1
- Authority
- DE
- Germany
- Prior art keywords
- radiation
- substrate
- microwave
- processing space
- reflector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 125
- 238000000576 coating method Methods 0.000 title claims abstract description 17
- 239000011248 coating agent Substances 0.000 title claims abstract description 16
- 239000000835 fiber Substances 0.000 title claims abstract description 14
- 238000000034 method Methods 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims description 107
- 238000012545 processing Methods 0.000 claims description 54
- 230000005540 biological transmission Effects 0.000 claims description 17
- 230000001678 irradiating effect Effects 0.000 claims description 9
- 239000003365 glass fiber Substances 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000007493 shaping process Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 10
- 239000000203 mixture Substances 0.000 description 9
- 238000009826 distribution Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 238000001228 spectrum Methods 0.000 description 4
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 239000012777 electrically insulating material Substances 0.000 description 3
- 230000005670 electromagnetic radiation Effects 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 239000005297 pyrex Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- NQLVQOSNDJXLKG-UHFFFAOYSA-N prosulfocarb Chemical compound CCCN(CCC)C(=O)SCC1=CC=CC=C1 NQLVQOSNDJXLKG-UHFFFAOYSA-N 0.000 description 2
- 108090000623 proteins and genes Proteins 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000006880 cross-coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229940020445 flector Drugs 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229920002313 fluoropolymer Polymers 0.000 description 1
- 239000004811 fluoropolymer Substances 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000000615 nonconductor Substances 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
- Plasma Technology (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Surface Treatment Of Glass Fibres Or Filaments (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/702,519 US6559460B1 (en) | 2000-10-31 | 2000-10-31 | Ultraviolet lamp system and methods |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE10153204A1 true DE10153204A1 (de) | 2002-07-18 |
Family
ID=24821534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE10153204A Withdrawn DE10153204A1 (de) | 2000-10-31 | 2001-10-27 | Ultraviolettlampensystem und Verfahren |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US6559460B1 (https=) |
| JP (1) | JP2002260595A (https=) |
| CN (1) | CN1260013C (https=) |
| DE (1) | DE10153204A1 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007031628A1 (de) * | 2007-07-06 | 2009-01-15 | Eastman Kodak Co. | UV-Strahlungsquelle |
| DE102007031629B3 (de) * | 2007-07-06 | 2009-03-19 | Eastman Kodak Co. | Mit Mikrowellen angeregte Strahlungsquelle |
| DE112007000821B4 (de) | 2006-03-31 | 2022-08-18 | Energetiq Technology Inc. | Lasergetriebene Lichtquelle |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020079796A1 (en) * | 2000-12-22 | 2002-06-27 | Okamitsu Jeffrey K. | Wavelength selective optical reflector with integral light trap |
| GB2375603B (en) * | 2001-05-17 | 2005-08-10 | Jenact Ltd | Control system for microwave powered ultraviolet light sources |
| US20100242299A1 (en) * | 2003-01-09 | 2010-09-30 | Con-Trol-Cure, Inc. | Uv curing system and process |
| US6933683B2 (en) * | 2003-02-27 | 2005-08-23 | Nordson Corporation | Microwave powered lamphead having external shutter |
| CN1449872B (zh) * | 2003-04-10 | 2010-05-12 | 上海复旦辰光科技有限公司 | 一种利用微波清洁材料表面的方法及其装置 |
| JP2005193088A (ja) * | 2003-12-26 | 2005-07-21 | Japan Storage Battery Co Ltd | エキシマランプ照射装置 |
| US7109669B2 (en) * | 2004-04-08 | 2006-09-19 | Nordson Corporation | Microwave lamp power supply that can withstand failure in high voltage circuit |
| FR2869719B1 (fr) * | 2004-04-29 | 2007-03-30 | Pascal Sortais | Source lumineuse a resonance cyclotronique d'electrons |
| US20050250346A1 (en) * | 2004-05-06 | 2005-11-10 | Applied Materials, Inc. | Process and apparatus for post deposition treatment of low k dielectric materials |
| US20050286263A1 (en) * | 2004-06-23 | 2005-12-29 | Champion David A | Plasma lamp with light-transmissive waveguide |
| CN100435982C (zh) * | 2004-07-09 | 2008-11-26 | 赫恩龙 | 物件涂装uv漆的固化方法及其设备 |
| WO2006104731A2 (en) * | 2005-03-31 | 2006-10-05 | Wms Gaming Inc. | Wagering games with unlockable bonus rounds |
| FR2884043A1 (fr) * | 2005-04-01 | 2006-10-06 | Pascal Sortais | Source lumineuse alimentee par radiofrequence pour traitements de substances et procede d'utilisation d'une telle source |
| US20060251827A1 (en) * | 2005-05-09 | 2006-11-09 | Applied Materials, Inc. | Tandem uv chamber for curing dielectric materials |
| US20060249175A1 (en) * | 2005-05-09 | 2006-11-09 | Applied Materials, Inc. | High efficiency UV curing system |
| US7777198B2 (en) | 2005-05-09 | 2010-08-17 | Applied Materials, Inc. | Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation |
| US7372058B2 (en) * | 2005-09-27 | 2008-05-13 | Asml Netherlands B.V. | Ex-situ removal of deposition on an optical element |
| US7692171B2 (en) * | 2006-03-17 | 2010-04-06 | Andrzei Kaszuba | Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors |
| US7909595B2 (en) * | 2006-03-17 | 2011-03-22 | Applied Materials, Inc. | Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections |
| US7863834B2 (en) * | 2007-06-29 | 2011-01-04 | Nordson Corporation | Ultraviolet lamp system and method for controlling emitted UV light |
| US7923706B2 (en) * | 2008-10-03 | 2011-04-12 | Nordson Corporation | Ultraviolet curing apparatus for continuous material |
| US20100096569A1 (en) * | 2008-10-21 | 2010-04-22 | Applied Materials, Inc. | Ultraviolet-transmitting microwave reflector comprising a micromesh screen |
| WO2010077132A1 (en) | 2008-12-31 | 2010-07-08 | Draka Comteq B.V. | Uvled apparatus for curing glass-fiber coatings |
| EP2388239B1 (en) | 2010-05-20 | 2017-02-15 | Draka Comteq B.V. | Curing apparatus employing angled UV-LEDs |
| US8871311B2 (en) | 2010-06-03 | 2014-10-28 | Draka Comteq, B.V. | Curing method employing UV sources that emit differing ranges of UV radiation |
| WO2012009628A1 (en) * | 2010-07-16 | 2012-01-19 | Nordson Corporation | Lamp systems and methods for generating ultraviolet light |
| EP2418183B1 (en) | 2010-08-10 | 2018-07-25 | Draka Comteq B.V. | Method for curing coated glass fibres providing increased UVLED intensitiy |
| EP2445313B1 (en) * | 2010-10-21 | 2015-05-13 | Electrolux Home Products Corporation N.V. | Microwave oven cavity and microwave oven |
| KR101928348B1 (ko) | 2011-04-08 | 2018-12-12 | 어플라이드 머티어리얼스, 인코포레이티드 | 자외선 처리, 화학적 처리, 및 증착을 위한 장치 및 방법 |
| US9750091B2 (en) * | 2012-10-15 | 2017-08-29 | Applied Materials, Inc. | Apparatus and method for heat treatment of coatings on substrates |
| US20150123015A1 (en) * | 2013-11-04 | 2015-05-07 | Nordson Corporation | Apparatus and methods for irradiating substrates with ultraviolet light |
| US9117619B2 (en) * | 2013-11-07 | 2015-08-25 | Electronics And Telecommunications Research Institute | Device for generating heavy-ion beam and method thereof |
| US10002752B2 (en) | 2014-07-07 | 2018-06-19 | Nordson Corporation | Systems and methods for determining the suitability of RF sources in ultraviolet systems |
| US10520251B2 (en) * | 2015-01-15 | 2019-12-31 | Heraeus Noblelight America Llc | UV light curing systems, and methods of designing and operating the same |
| JP6379118B2 (ja) | 2016-01-10 | 2018-08-22 | Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 | 光照射装置 |
| US11532328B2 (en) | 2018-05-18 | 2022-12-20 | Samsung Electronics Co., Ltd. | Method for fabricating semiconductor chip by using multi-curing apparatus and multi-curing apparatus |
| EP4131655B1 (en) * | 2020-03-31 | 2025-11-19 | Agc Inc. | Wireless transmission system |
| CN115090477A (zh) * | 2022-08-05 | 2022-09-23 | 安徽艾雅伦新材料科技有限公司 | 一种pvc板材防静电镀膜设备及其镀膜方法 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3872349A (en) * | 1973-03-29 | 1975-03-18 | Fusion Systems Corp | Apparatus and method for generating radiation |
| CA1024246A (en) * | 1973-08-22 | 1978-01-10 | Donald M. Spero | Apparatus and method for generating radiation |
| US4042850A (en) | 1976-03-17 | 1977-08-16 | Fusion Systems Corporation | Microwave generated radiation apparatus |
| JPS55152567A (en) * | 1979-05-18 | 1980-11-27 | Oak Seisakusho:Kk | Coating and drying apparatus for wire and bar |
| JPS60191038A (ja) * | 1984-03-07 | 1985-09-28 | Oak Seisakusho:Kk | 紫外線照射装置 |
| US4535753A (en) | 1984-04-12 | 1985-08-20 | Leo Zayauskas | Radiant heat collector |
| US4710638A (en) * | 1986-02-10 | 1987-12-01 | Fusion Systems Corporation | Apparatus for treating coatings |
| US4800090A (en) * | 1987-03-11 | 1989-01-24 | Musser's Potato Chips, Inc. | Infrared and microwave energy treatment of food |
| JPH0621167Y2 (ja) * | 1987-08-07 | 1994-06-01 | 高橋 柾弘 | マイクロ波励起による紫外線発生装置 |
| JPH0637521Y2 (ja) * | 1988-10-05 | 1994-09-28 | 高橋 柾弘 | マイクロ波励起による紫外線発生装置 |
| JPH072184Y2 (ja) * | 1988-07-27 | 1995-01-25 | ウシオ電機株式会社 | 紫外線による処理装置 |
| DE3919334A1 (de) | 1989-06-13 | 1990-12-20 | Tetsuhiro Kano | Reflektor fuer eine leuchte |
| FR2674526B1 (fr) | 1991-03-29 | 2002-05-03 | France Telecom | Dispositif a source de rayonnement ultraviolet induit par des micro-ondes, pour la polymerisation d'objets photopolymerisables. |
| EP1232673A1 (en) * | 1999-10-27 | 2002-08-21 | Fusion Uv Systems, Inc. | Uv oven for curing magnet wire coatings |
-
2000
- 2000-10-31 US US09/702,519 patent/US6559460B1/en not_active Expired - Fee Related
-
2001
- 2001-04-04 US US09/826,028 patent/US6657206B2/en not_active Expired - Fee Related
- 2001-10-27 DE DE10153204A patent/DE10153204A1/de not_active Withdrawn
- 2001-10-31 CN CNB011359919A patent/CN1260013C/zh not_active Expired - Fee Related
- 2001-10-31 JP JP2001334157A patent/JP2002260595A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112007000821B4 (de) | 2006-03-31 | 2022-08-18 | Energetiq Technology Inc. | Lasergetriebene Lichtquelle |
| DE112007003819B4 (de) * | 2006-03-31 | 2024-05-16 | Energetiq Technology Inc. | Lasergetriebene Lichtquelle |
| DE102007031628A1 (de) * | 2007-07-06 | 2009-01-15 | Eastman Kodak Co. | UV-Strahlungsquelle |
| DE102007031629B3 (de) * | 2007-07-06 | 2009-03-19 | Eastman Kodak Co. | Mit Mikrowellen angeregte Strahlungsquelle |
| DE102007031628B4 (de) * | 2007-07-06 | 2012-06-21 | Eastman Kodak Co. | UV-Strahlungsquelle |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2002260595A (ja) | 2002-09-13 |
| US6559460B1 (en) | 2003-05-06 |
| CN1357415A (zh) | 2002-07-10 |
| US20020050575A1 (en) | 2002-05-02 |
| US6657206B2 (en) | 2003-12-02 |
| CN1260013C (zh) | 2006-06-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8139 | Disposal/non-payment of the annual fee |