JP2002208484A - 有機ｅｌディスプレイ及びその製造方法 - Google Patents

有機ｅｌディスプレイ及びその製造方法

Info

Publication number
JP2002208484A
JP2002208484A JP2001004640A JP2001004640A JP2002208484A JP 2002208484 A JP2002208484 A JP 2002208484A JP 2001004640 A JP2001004640 A JP 2001004640A JP 2001004640 A JP2001004640 A JP 2001004640A JP 2002208484 A JP2002208484 A JP 2002208484A
Authority
JP
Japan
Prior art keywords
organic
film
thin film
layer
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001004640A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002208484A5 (enExample
Inventor
Isamu Oshita
勇 大下
Terukazu Watanabe
輝一 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tohoku Pioneer Corp
Original Assignee
Tohoku Pioneer Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tohoku Pioneer Corp filed Critical Tohoku Pioneer Corp
Priority to JP2001004640A priority Critical patent/JP2002208484A/ja
Priority to US10/041,668 priority patent/US20020093286A1/en
Priority to KR1020020001677A priority patent/KR100819216B1/ko
Publication of JP2002208484A publication Critical patent/JP2002208484A/ja
Publication of JP2002208484A5 publication Critical patent/JP2002208484A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/131—Interconnections, e.g. wiring lines or terminals

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroluminescent Light Sources (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP2001004640A 2001-01-12 2001-01-12 有機ｅｌディスプレイ及びその製造方法 Pending JP2002208484A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001004640A JP2002208484A (ja) 2001-01-12 2001-01-12 有機ｅｌディスプレイ及びその製造方法
US10/041,668 US20020093286A1 (en) 2001-01-12 2002-01-10 Organic EL display and method for producing the same
KR1020020001677A KR100819216B1 (ko) 2001-01-12 2002-01-11 유기 ｅｌ 디스플레이 및 그 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001004640A JP2002208484A (ja) 2001-01-12 2001-01-12 有機ｅｌディスプレイ及びその製造方法

Publications (2)

Publication Number Publication Date
JP2002208484A true JP2002208484A (ja) 2002-07-26
JP2002208484A5 JP2002208484A5 (enExample) 2007-12-20

Family

ID=18872797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001004640A Pending JP2002208484A (ja) 2001-01-12 2001-01-12 有機ｅｌディスプレイ及びその製造方法

Country Status (3)

Country Link
US (1) US20020093286A1 (enExample)
JP (1) JP2002208484A (enExample)
KR (1) KR100819216B1 (enExample)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005322564A (ja) * 2004-05-11 2005-11-17 Sony Corp 表示装置の製造方法および表示装置
JP2005340208A (ja) * 2004-05-25 2005-12-08 Samsung Sdi Co Ltd 有機エレクトロルミネッセンス表示装置及びその製造方法
JP2005340198A (ja) * 2004-05-21 2005-12-08 Lg Electron Inc 有機電界発光表示素子およびその製造方法
KR100674012B1 (ko) 2004-11-25 2007-01-25 엘지전자 주식회사 유기 전계 발광 소자 및 이를 제조하는 방법
JP2008166258A (ja) * 2007-01-04 2008-07-17 Samsung Sdi Co Ltd 有機電界発光表示装置及びその製造方法
JP2009054603A (ja) * 2008-12-09 2009-03-12 Sanyo Electric Co Ltd 有機電界発光パネルの製造方法
JP2012033497A (ja) * 2004-09-29 2012-02-16 Semiconductor Energy Lab Co Ltd 表示装置
JP2012146606A (ja) * 2011-01-14 2012-08-02 Mitsubishi Heavy Ind Ltd 照明用有機ｅｌ素子およびその製造方法
US8441185B2 (en) 2005-10-17 2013-05-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device with improved pixel arrangement
WO2019123655A1 (ja) * 2017-12-22 2019-06-27 シャープ株式会社 表示デバイスの製造方法、および表示デバイスの製造装置

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4865165B2 (ja) * 2001-08-29 2012-02-01 株式会社半導体エネルギー研究所 発光装置の作製方法
JP2004071554A (ja) * 2002-07-25 2004-03-04 Sanyo Electric Co Ltd 有機ｅｌパネルおよびその製造方法
WO2005050597A1 (en) 2003-11-14 2005-06-02 Semiconductor Energy Laboratory Co., Ltd. Light-emitting device and method for manufacturing the same
KR100669211B1 (ko) * 2004-11-25 2007-01-16 엘지전자 주식회사 액티브 매트릭스형 유기 전계 발광 소자 및 이를 제조하는방법
US9092807B1 (en) 2006-05-05 2015-07-28 Appnexus Yieldex Llc Network-based systems and methods for defining and managing multi-dimensional, advertising impression inventory
JP6302186B2 (ja) 2012-08-01 2018-03-28 株式会社半導体エネルギー研究所 表示装置
JP6204012B2 (ja) 2012-10-17 2017-09-27 株式会社半導体エネルギー研究所 発光装置
JP6076683B2 (ja) 2012-10-17 2017-02-08 株式会社半導体エネルギー研究所 発光装置
JP6155020B2 (ja) 2012-12-21 2017-06-28 株式会社半導体エネルギー研究所 発光装置及びその製造方法
JP6216125B2 (ja) 2013-02-12 2017-10-18 株式会社半導体エネルギー研究所 発光装置
JP6104649B2 (ja) 2013-03-08 2017-03-29 株式会社半導体エネルギー研究所 発光装置
US10943271B2 (en) 2018-07-17 2021-03-09 Xandr Inc. Method and apparatus for managing allocations of media content in electronic segments
CN110610972B (zh) * 2019-09-19 2022-06-03 京东方科技集团股份有限公司 一种显示基板及其制备方法、显示装置
CN120826105A (zh) * 2024-04-11 2025-10-21 上海和辉光电股份有限公司 显示面板及其制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5701055A (en) * 1994-03-13 1997-12-23 Pioneer Electronic Corporation Organic electoluminescent display panel and method for manufacturing the same
US5773931A (en) * 1996-09-06 1998-06-30 Motorola, Inc. Organic electroluminescent device and method of making same
JP2815004B2 (ja) * 1996-10-30 1998-10-27 日本電気株式会社 表示装置およびその製造方法
JP3541625B2 (ja) * 1997-07-02 2004-07-14 セイコーエプソン株式会社 表示装置及びアクティブマトリクス基板
WO1999010862A1 (en) * 1997-08-21 1999-03-04 Seiko Epson Corporation Active matrix display
JP3580092B2 (ja) * 1997-08-21 2004-10-20 セイコーエプソン株式会社 アクティブマトリクス型表示装置
JP4269195B2 (ja) * 1998-09-25 2009-05-27 ソニー株式会社 発光又は調光素子、及びその製造方法
KR100595170B1 (ko) * 1999-03-17 2006-07-03 엘지전자 주식회사 풀-컬러 유기 ｅｌ 디스플레이 패널 및 그 제조방법
KR100606439B1 (ko) * 1999-04-08 2006-07-31 엘지.필립스 엘시디 주식회사 전기발광소자 제조방법
EP1096568A3 (en) * 1999-10-28 2007-10-24 Sony Corporation Display apparatus and method for fabricating the same
TW484238B (en) * 2000-03-27 2002-04-21 Semiconductor Energy Lab Light emitting device and a method of manufacturing the same
US6596443B2 (en) * 2001-03-12 2003-07-22 Universal Display Corporation Mask for patterning devices

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005322564A (ja) * 2004-05-11 2005-11-17 Sony Corp 表示装置の製造方法および表示装置
JP2005340198A (ja) * 2004-05-21 2005-12-08 Lg Electron Inc 有機電界発光表示素子およびその製造方法
US7504656B2 (en) 2004-05-25 2009-03-17 Samsung Mobile Display Co., Ltd. Organic light emitting display device and method of fabricating the same
JP2005340208A (ja) * 2004-05-25 2005-12-08 Samsung Sdi Co Ltd 有機エレクトロルミネッセンス表示装置及びその製造方法
US11233105B2 (en) 2004-09-29 2022-01-25 Semiconductor Energy Laboratory Co., Ltd. Display device, electronic apparatus, and method of fabricating the display device
US11552145B2 (en) 2004-09-29 2023-01-10 Semiconductor Energy Laboratory Co., Ltd. Display device, electronic apparatus, and method of fabricating the display device
US11778870B2 (en) 2004-09-29 2023-10-03 Semiconductor Energy Laboratory Co., Ltd. Display device, electronic apparatus, and method of fabricating the display device
JP2012033497A (ja) * 2004-09-29 2012-02-16 Semiconductor Energy Lab Co Ltd 表示装置
US9893130B2 (en) 2004-09-29 2018-02-13 Semiconductor Energy Laboratory Co., Ltd. Display device, electronic apparatus, and method of fabricating the display device
US10937847B2 (en) 2004-09-29 2021-03-02 Semiconductor Energy Laboratory Co., Ltd. Display device, electronic apparatus, and method of fabricating the display device
US8786178B2 (en) 2004-09-29 2014-07-22 Semiconductor Energy Laboratory Co., Ltd. Display device, electronic apparatus, and method of fabricating the display device
US9147713B2 (en) 2004-09-29 2015-09-29 Semiconductor Energy Laboratory Co., Ltd. Display device, electronic apparatus, and method of fabricating the display device
US10403697B2 (en) 2004-09-29 2019-09-03 Semiconductor Energy Laboratory Co., Ltd. Display device, electronic apparatus, and method of fabricating the display device
US10038040B2 (en) 2004-09-29 2018-07-31 Semiconductor Energy Laboratory Co., Ltd. Display device, electronic apparatus, and method of fabricating the display device
US9530829B2 (en) 2004-09-29 2016-12-27 Semiconductor Energy Laboratory Co., Ltd. Display device, electronic apparatus, and method of fabricating the display device
KR100674012B1 (ko) 2004-11-25 2007-01-25 엘지전자 주식회사 유기 전계 발광 소자 및 이를 제조하는 방법
JP2019207881A (ja) * 2005-10-17 2019-12-05 株式会社半導体エネルギー研究所 表示装置
JP2020031064A (ja) * 2005-10-17 2020-02-27 株式会社半導体エネルギー研究所 表示装置
US9893325B2 (en) 2005-10-17 2018-02-13 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having a structure that prevents defects due to precision, bending and the like of a mask without increasing manufacturing steps
US9536932B2 (en) 2005-10-17 2017-01-03 Semiconductor Energy Laboratory Co., Ltd. Method of making a semiconductor lighting emitting device that prevents defect of the mask without increasing steps
JP2016012566A (ja) * 2005-10-17 2016-01-21 株式会社半導体エネルギー研究所 発光装置
US10199612B2 (en) 2005-10-17 2019-02-05 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having reduced upper surface shape of a partition in order to improve definition and manufacturing method thereof
US12127466B2 (en) 2005-10-17 2024-10-22 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
US9224792B2 (en) 2005-10-17 2015-12-29 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP2013179097A (ja) * 2005-10-17 2013-09-09 Semiconductor Energy Lab Co Ltd 発光装置
JP2017004971A (ja) * 2005-10-17 2017-01-05 株式会社半導体エネルギー研究所 表示装置
US8441185B2 (en) 2005-10-17 2013-05-14 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device with improved pixel arrangement
US11171315B2 (en) 2005-10-17 2021-11-09 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having a structure which prevents a defect due to precision and bending and manufacturing method thereof
JP2022017346A (ja) * 2005-10-17 2022-01-25 株式会社半導体エネルギー研究所 表示装置
US11770965B2 (en) 2005-10-17 2023-09-26 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and manufacturing method thereof
JP2008166258A (ja) * 2007-01-04 2008-07-17 Samsung Sdi Co Ltd 有機電界発光表示装置及びその製造方法
JP2009054603A (ja) * 2008-12-09 2009-03-12 Sanyo Electric Co Ltd 有機電界発光パネルの製造方法
JP2012146606A (ja) * 2011-01-14 2012-08-02 Mitsubishi Heavy Ind Ltd 照明用有機ｅｌ素子およびその製造方法
WO2019123655A1 (ja) * 2017-12-22 2019-06-27 シャープ株式会社 表示デバイスの製造方法、および表示デバイスの製造装置

Also Published As

Publication number Publication date
US20020093286A1 (en) 2002-07-18
KR20020061114A (ko) 2002-07-22
KR100819216B1 (ko) 2008-04-02

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