JP2002181730A - 外観検査装置 - Google Patents
外観検査装置Info
- Publication number
- JP2002181730A JP2002181730A JP2000378104A JP2000378104A JP2002181730A JP 2002181730 A JP2002181730 A JP 2002181730A JP 2000378104 A JP2000378104 A JP 2000378104A JP 2000378104 A JP2000378104 A JP 2000378104A JP 2002181730 A JP2002181730 A JP 2002181730A
- Authority
- JP
- Japan
- Prior art keywords
- scanning unit
- unit
- inspection
- scanning
- reciprocating motion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 title claims abstract description 45
- 238000011179 visual inspection Methods 0.000 claims abstract description 9
- 238000005286 illumination Methods 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 abstract description 28
- 238000012360 testing method Methods 0.000 abstract description 26
- 238000004519 manufacturing process Methods 0.000 abstract description 11
- 230000008859 change Effects 0.000 abstract description 2
- 238000012937 correction Methods 0.000 abstract description 2
- 229910000679 solder Inorganic materials 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 102100033040 Carbonic anhydrase 12 Human genes 0.000 description 2
- 101000867855 Homo sapiens Carbonic anhydrase 12 Proteins 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 101000801109 Homo sapiens Transmembrane protein 131 Proteins 0.000 description 1
- 101000854908 Homo sapiens WD repeat-containing protein 11 Proteins 0.000 description 1
- 102100033700 Transmembrane protein 131 Human genes 0.000 description 1
- 102100020705 WD repeat-containing protein 11 Human genes 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Input (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000378104A JP2002181730A (ja) | 2000-12-12 | 2000-12-12 | 外観検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000378104A JP2002181730A (ja) | 2000-12-12 | 2000-12-12 | 外観検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002181730A true JP2002181730A (ja) | 2002-06-26 |
| JP2002181730A5 JP2002181730A5 (enExample) | 2008-10-23 |
Family
ID=18846730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000378104A Pending JP2002181730A (ja) | 2000-12-12 | 2000-12-12 | 外観検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002181730A (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002310934A (ja) * | 2001-04-18 | 2002-10-23 | Saki Corp:Kk | 外観検査装置 |
| JP2004226319A (ja) * | 2003-01-24 | 2004-08-12 | Saki Corp:Kk | 外観検査装置および画像取得方法 |
| JP2007523333A (ja) * | 2004-02-18 | 2007-08-16 | イスラ ヴィズィオーン ジュステーム アーゲー | 表面検査方法及びそのシステム |
| WO2008026559A1 (en) | 2006-08-28 | 2008-03-06 | I-Pulse Kabushiki Kaisha | Substrate inspecting apparatus |
| JP2010107249A (ja) * | 2008-10-28 | 2010-05-13 | Saki Corp:Kk | 被検査体の検査装置 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02251200A (ja) * | 1989-02-27 | 1990-10-08 | American Teleph & Telegr Co <Att> | 基板組立方法，基板検査方法および装置 |
| JPH0875663A (ja) * | 1994-08-31 | 1996-03-22 | Ibiden Co Ltd | プリント配線板の検査装置 |
| JPH08254500A (ja) * | 1995-03-16 | 1996-10-01 | Saki Corp:Kk | 外観検査装置 |
| JP2000019063A (ja) * | 1998-07-06 | 2000-01-21 | Sokkia Co Ltd | プラズマディスプレイパネルの電極パターン検査装置 |
| JP2000065753A (ja) * | 1998-08-26 | 2000-03-03 | Olympus Optical Co Ltd | 画像取り込み装置 |
| JP2000106480A (ja) * | 1998-07-28 | 2000-04-11 | Matsushita Electric Works Ltd | 配線パタ―ン検査装置 |
| JP2000162146A (ja) * | 1998-11-24 | 2000-06-16 | Nippon Electro Sensari Device Kk | 表面検査装置 |
-
2000
- 2000-12-12 JP JP2000378104A patent/JP2002181730A/ja active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02251200A (ja) * | 1989-02-27 | 1990-10-08 | American Teleph & Telegr Co <Att> | 基板組立方法，基板検査方法および装置 |
| JPH0875663A (ja) * | 1994-08-31 | 1996-03-22 | Ibiden Co Ltd | プリント配線板の検査装置 |
| JPH08254500A (ja) * | 1995-03-16 | 1996-10-01 | Saki Corp:Kk | 外観検査装置 |
| JP2000019063A (ja) * | 1998-07-06 | 2000-01-21 | Sokkia Co Ltd | プラズマディスプレイパネルの電極パターン検査装置 |
| JP2000106480A (ja) * | 1998-07-28 | 2000-04-11 | Matsushita Electric Works Ltd | 配線パタ―ン検査装置 |
| JP2000065753A (ja) * | 1998-08-26 | 2000-03-03 | Olympus Optical Co Ltd | 画像取り込み装置 |
| JP2000162146A (ja) * | 1998-11-24 | 2000-06-16 | Nippon Electro Sensari Device Kk | 表面検査装置 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002310934A (ja) * | 2001-04-18 | 2002-10-23 | Saki Corp:Kk | 外観検査装置 |
| JP2004226319A (ja) * | 2003-01-24 | 2004-08-12 | Saki Corp:Kk | 外観検査装置および画像取得方法 |
| JP2007523333A (ja) * | 2004-02-18 | 2007-08-16 | イスラ ヴィズィオーン ジュステーム アーゲー | 表面検査方法及びそのシステム |
| WO2008026559A1 (en) | 2006-08-28 | 2008-03-06 | I-Pulse Kabushiki Kaisha | Substrate inspecting apparatus |
| JP2010107249A (ja) * | 2008-10-28 | 2010-05-13 | Saki Corp:Kk | 被検査体の検査装置 |
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Legal Events
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