JP2002181730A5 - - Google Patents
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- Publication number
- JP2002181730A5 JP2002181730A5 JP2000378104A JP2000378104A JP2002181730A5 JP 2002181730 A5 JP2002181730 A5 JP 2002181730A5 JP 2000378104 A JP2000378104 A JP 2000378104A JP 2000378104 A JP2000378104 A JP 2000378104A JP 2002181730 A5 JP2002181730 A5 JP 2002181730A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000378104A JP2002181730A (ja) | 2000-12-12 | 2000-12-12 | 外観検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000378104A JP2002181730A (ja) | 2000-12-12 | 2000-12-12 | 外観検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002181730A JP2002181730A (ja) | 2002-06-26 |
| JP2002181730A5 true JP2002181730A5 (enExample) | 2008-10-23 |
Family
ID=18846730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000378104A Pending JP2002181730A (ja) | 2000-12-12 | 2000-12-12 | 外観検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002181730A (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4669151B2 (ja) * | 2001-04-18 | 2011-04-13 | 株式会社サキコーポレーション | 外観検査装置 |
| JP4166587B2 (ja) * | 2003-01-24 | 2008-10-15 | 株式会社サキコーポレーション | 外観検査装置および体積検査方法 |
| DE102004007828B4 (de) * | 2004-02-18 | 2006-05-11 | Isra Vision Systems Ag | Verfahren und System zur Inspektion von Oberflächen |
| EP2058646A1 (en) | 2006-08-28 | 2009-05-13 | I-Pulse Kabushiki Kaisha | Substrate inspecting apparatus |
| JP5296490B2 (ja) * | 2008-10-28 | 2013-09-25 | 株式会社サキコーポレーション | 被検査体の検査装置 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4929845A (en) * | 1989-02-27 | 1990-05-29 | At&T Bell Laboratories | Method and apparatus for inspection of substrates |
| JPH0875663A (ja) * | 1994-08-31 | 1996-03-22 | Ibiden Co Ltd | プリント配線板の検査装置 |
| JP3170598B2 (ja) * | 1995-03-16 | 2001-05-28 | 株式会社サキコーポレーション | 外観検査装置 |
| JP2000019063A (ja) * | 1998-07-06 | 2000-01-21 | Sokkia Co Ltd | プラズマディスプレイパネルの電極パターン検査装置 |
| JP2000106480A (ja) * | 1998-07-28 | 2000-04-11 | Matsushita Electric Works Ltd | 配線パタ―ン検査装置 |
| JP2000065753A (ja) * | 1998-08-26 | 2000-03-03 | Olympus Optical Co Ltd | 画像取り込み装置 |
| JP4190636B2 (ja) * | 1998-11-24 | 2008-12-03 | 日本エレクトロセンサリデバイス株式会社 | 表面検査装置 |
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2000
- 2000-12-12 JP JP2000378104A patent/JP2002181730A/ja active Pending