JP2002156744A - ペリクル収納容器 - Google Patents
ペリクル収納容器Info
- Publication number
- JP2002156744A JP2002156744A JP2000350606A JP2000350606A JP2002156744A JP 2002156744 A JP2002156744 A JP 2002156744A JP 2000350606 A JP2000350606 A JP 2000350606A JP 2000350606 A JP2000350606 A JP 2000350606A JP 2002156744 A JP2002156744 A JP 2002156744A
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- tray
- jig
- storage container
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims abstract description 33
- 238000003860 storage Methods 0.000 claims description 43
- 239000000463 material Substances 0.000 claims description 18
- 239000000853 adhesive Substances 0.000 claims description 13
- 230000001070 adhesive effect Effects 0.000 claims description 13
- 210000005069 ears Anatomy 0.000 claims description 5
- 230000037431 insertion Effects 0.000 abstract 2
- 238000003780 insertion Methods 0.000 abstract 2
- 239000010408 film Substances 0.000 description 58
- 239000010410 layer Substances 0.000 description 43
- 239000010409 thin film Substances 0.000 description 12
- 230000000694 effects Effects 0.000 description 11
- 229920002678 cellulose Polymers 0.000 description 8
- 239000001913 cellulose Substances 0.000 description 8
- 229920008347 Cellulose acetate propionate Polymers 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 239000000243 solution Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 4
- 229940081735 acetylcellulose Drugs 0.000 description 4
- 229920002301 cellulose acetate Polymers 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 229910052731 fluorine Inorganic materials 0.000 description 4
- 239000011737 fluorine Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 239000000020 Nitrocellulose Substances 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229920001220 nitrocellulos Polymers 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- SMEGJBVQLJJKKX-HOTMZDKISA-N [(2R,3S,4S,5R,6R)-5-acetyloxy-3,4,6-trihydroxyoxan-2-yl]methyl acetate Chemical compound CC(=O)OC[C@@H]1[C@H]([C@@H]([C@H]([C@@H](O1)O)OC(=O)C)O)O SMEGJBVQLJJKKX-HOTMZDKISA-N 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229920006217 cellulose acetate butyrate Polymers 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- 239000000706 filtrate Substances 0.000 description 2
- 229920002313 fluoropolymer Polymers 0.000 description 2
- 239000004811 fluoropolymer Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 2
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- NBBJYMSMWIIQGU-UHFFFAOYSA-N Propionic aldehyde Chemical compound CCC=O NBBJYMSMWIIQGU-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 229910001634 calcium fluoride Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 229940116333 ethyl lactate Drugs 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- GJRQTCIYDGXPES-UHFFFAOYSA-N iso-butyl acetate Natural products CC(C)COC(C)=O GJRQTCIYDGXPES-UHFFFAOYSA-N 0.000 description 1
- FGKJLKRYENPLQH-UHFFFAOYSA-M isocaproate Chemical compound CC(C)CCC([O-])=O FGKJLKRYENPLQH-UHFFFAOYSA-M 0.000 description 1
- OQAGVSWESNCJJT-UHFFFAOYSA-N isovaleric acid methyl ester Natural products COC(=O)CC(C)C OQAGVSWESNCJJT-UHFFFAOYSA-N 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- -1 polyfluoroacrylate Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000350606A JP2002156744A (ja) | 2000-11-17 | 2000-11-17 | ペリクル収納容器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000350606A JP2002156744A (ja) | 2000-11-17 | 2000-11-17 | ペリクル収納容器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002156744A true JP2002156744A (ja) | 2002-05-31 |
| JP2002156744A5 JP2002156744A5 (enrdf_load_stackoverflow) | 2008-03-13 |
Family
ID=18823803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000350606A Pending JP2002156744A (ja) | 2000-11-17 | 2000-11-17 | ペリクル収納容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002156744A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009196708A (ja) * | 2008-01-21 | 2009-09-03 | Nec Engineering Ltd | チップ収容トレイ |
| US20120202001A1 (en) * | 2011-02-08 | 2012-08-09 | Shin-Etsu Chemical Co., Ltd. | Pellicle kit for manufacturing a pellicle |
| WO2016121635A1 (ja) * | 2015-01-26 | 2016-08-04 | 株式会社ニコン | マスクケース、保管装置及び方法、搬送装置及び方法、並びに露光装置 |
| KR20200079793A (ko) * | 2018-12-26 | 2020-07-06 | 주식회사 에프에스티 | 초극자외선 리소그라피용 펠리클의 검사에 사용되는 캡슐 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0197961A (ja) * | 1987-10-09 | 1989-04-17 | Nikon Corp | 露光用原板作成装置及び方法 |
| JPH05323583A (ja) * | 1992-05-15 | 1993-12-07 | Fujitsu Ltd | ペリクル貼り付け装置 |
| JPH0683042A (ja) * | 1992-09-04 | 1994-03-25 | Nikon Corp | フレームの貼着装置 |
| JPH0714428U (ja) * | 1993-08-12 | 1995-03-10 | 株式会社ヤマザキ電機 | ガラス基板類の連続熱処理装置 |
| JPH0992702A (ja) * | 1995-09-27 | 1997-04-04 | Dainippon Screen Mfg Co Ltd | 基板収納カセット、インターフェイス機構および基板処理装置 |
| JPH09106066A (ja) * | 1995-10-09 | 1997-04-22 | Nikon Corp | ペリクルライナーの剥離方法 |
| JP2000258897A (ja) * | 1999-03-05 | 2000-09-22 | Shin Etsu Chem Co Ltd | ペリクル収納容器 |
-
2000
- 2000-11-17 JP JP2000350606A patent/JP2002156744A/ja active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0197961A (ja) * | 1987-10-09 | 1989-04-17 | Nikon Corp | 露光用原板作成装置及び方法 |
| JPH05323583A (ja) * | 1992-05-15 | 1993-12-07 | Fujitsu Ltd | ペリクル貼り付け装置 |
| JPH0683042A (ja) * | 1992-09-04 | 1994-03-25 | Nikon Corp | フレームの貼着装置 |
| JPH0714428U (ja) * | 1993-08-12 | 1995-03-10 | 株式会社ヤマザキ電機 | ガラス基板類の連続熱処理装置 |
| JPH0992702A (ja) * | 1995-09-27 | 1997-04-04 | Dainippon Screen Mfg Co Ltd | 基板収納カセット、インターフェイス機構および基板処理装置 |
| JPH09106066A (ja) * | 1995-10-09 | 1997-04-22 | Nikon Corp | ペリクルライナーの剥離方法 |
| JP2000258897A (ja) * | 1999-03-05 | 2000-09-22 | Shin Etsu Chem Co Ltd | ペリクル収納容器 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009196708A (ja) * | 2008-01-21 | 2009-09-03 | Nec Engineering Ltd | チップ収容トレイ |
| US20120202001A1 (en) * | 2011-02-08 | 2012-08-09 | Shin-Etsu Chemical Co., Ltd. | Pellicle kit for manufacturing a pellicle |
| US8663756B2 (en) * | 2011-02-08 | 2014-03-04 | Shin-Etsu Chemical Co., Ltd. | Pellicle kit for manufacturing a pellicle |
| KR101906131B1 (ko) | 2011-02-08 | 2018-10-10 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 펠리클 제조용 키트 |
| WO2016121635A1 (ja) * | 2015-01-26 | 2016-08-04 | 株式会社ニコン | マスクケース、保管装置及び方法、搬送装置及び方法、並びに露光装置 |
| JPWO2016121635A1 (ja) * | 2015-01-26 | 2017-11-16 | 株式会社ニコン | マスクケース、保管装置及び方法、搬送装置及び方法、並びに露光装置 |
| KR20200079793A (ko) * | 2018-12-26 | 2020-07-06 | 주식회사 에프에스티 | 초극자외선 리소그라피용 펠리클의 검사에 사용되는 캡슐 |
| KR102172722B1 (ko) | 2018-12-26 | 2020-11-02 | 주식회사 에프에스티 | 초극자외선 리소그라피용 펠리클의 검사에 사용되는 캡슐 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20050617 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20071113 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080125 |
|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20080130 |
|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20090401 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100914 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20110201 |