JP2001259358A - 排ガス処理装置 - Google Patents
排ガス処理装置Info
- Publication number
- JP2001259358A JP2001259358A JP2000073386A JP2000073386A JP2001259358A JP 2001259358 A JP2001259358 A JP 2001259358A JP 2000073386 A JP2000073386 A JP 2000073386A JP 2000073386 A JP2000073386 A JP 2000073386A JP 2001259358 A JP2001259358 A JP 2001259358A
- Authority
- JP
- Japan
- Prior art keywords
- exhaust gas
- water
- intake pipe
- water spray
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 155
- 239000007921 spray Substances 0.000 claims abstract description 78
- 239000007787 solid Substances 0.000 claims abstract description 53
- 239000007788 liquid Substances 0.000 claims abstract description 43
- 230000002745 absorbent Effects 0.000 claims description 7
- 239000002250 absorbent Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 88
- 238000005507 spraying Methods 0.000 description 20
- 238000004519 manufacturing process Methods 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 9
- 229910001873 dinitrogen Inorganic materials 0.000 description 9
- 239000000126 substance Substances 0.000 description 7
- 239000000243 solution Substances 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- -1 polyethylene Polymers 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000012780 transparent material Substances 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000008400 supply water Substances 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 239000005341 toughened glass Substances 0.000 description 2
- 101100316860 Autographa californica nuclear polyhedrosis virus DA18 gene Proteins 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
- Gas Separation By Absorption (AREA)
- Accessories For Mixers (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000073386A JP2001259358A (ja) | 2000-03-16 | 2000-03-16 | 排ガス処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000073386A JP2001259358A (ja) | 2000-03-16 | 2000-03-16 | 排ガス処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001259358A true JP2001259358A (ja) | 2001-09-25 |
| JP2001259358A5 JP2001259358A5 (enExample) | 2007-03-15 |
Family
ID=18591638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000073386A Pending JP2001259358A (ja) | 2000-03-16 | 2000-03-16 | 排ガス処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001259358A (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006167664A (ja) * | 2004-12-17 | 2006-06-29 | Rohm Co Ltd | 排ガスの水洗浄装置 |
| CN114210165A (zh) * | 2021-12-16 | 2022-03-22 | 贵州鑫泰源开发投资有限公司 | 一种基于高效的铝箔加工装置 |
| CN114210190A (zh) * | 2021-12-16 | 2022-03-22 | 贵州省六盘水双元铝业有限责任公司 | 一种电解铝用高效烟气净化装置 |
| CN117680068A (zh) * | 2024-02-01 | 2024-03-12 | 山东润宏新材料有限公司 | 一种溴化处理反应釜 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52110278A (en) * | 1976-03-15 | 1977-09-16 | Nippon Chem Ind Co Ltd:The | Gas/liquid contact apparatus of large self-suction capacity |
| JPS62125827A (ja) * | 1985-11-25 | 1987-06-08 | Seitetsu Kagaku Co Ltd | 三塩化ホウ素含有ガスの除害法 |
| JPH04346815A (ja) * | 1991-05-21 | 1992-12-02 | Mitsubishi Heavy Ind Ltd | 排ガス洗浄装置のスケール防止方法 |
| JPH10156137A (ja) * | 1996-12-03 | 1998-06-16 | Takuma Co Ltd | 排ガス中和設備およびその運転方法 |
-
2000
- 2000-03-16 JP JP2000073386A patent/JP2001259358A/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52110278A (en) * | 1976-03-15 | 1977-09-16 | Nippon Chem Ind Co Ltd:The | Gas/liquid contact apparatus of large self-suction capacity |
| JPS62125827A (ja) * | 1985-11-25 | 1987-06-08 | Seitetsu Kagaku Co Ltd | 三塩化ホウ素含有ガスの除害法 |
| JPH04346815A (ja) * | 1991-05-21 | 1992-12-02 | Mitsubishi Heavy Ind Ltd | 排ガス洗浄装置のスケール防止方法 |
| JPH10156137A (ja) * | 1996-12-03 | 1998-06-16 | Takuma Co Ltd | 排ガス中和設備およびその運転方法 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006167664A (ja) * | 2004-12-17 | 2006-06-29 | Rohm Co Ltd | 排ガスの水洗浄装置 |
| CN114210165A (zh) * | 2021-12-16 | 2022-03-22 | 贵州鑫泰源开发投资有限公司 | 一种基于高效的铝箔加工装置 |
| CN114210190A (zh) * | 2021-12-16 | 2022-03-22 | 贵州省六盘水双元铝业有限责任公司 | 一种电解铝用高效烟气净化装置 |
| CN114210190B (zh) * | 2021-12-16 | 2024-05-24 | 贵州省六盘水双元铝业有限责任公司 | 一种电解铝用高效烟气净化装置 |
| CN117680068A (zh) * | 2024-02-01 | 2024-03-12 | 山东润宏新材料有限公司 | 一种溴化处理反应釜 |
| CN117680068B (zh) * | 2024-02-01 | 2024-04-19 | 山东润宏新材料有限公司 | 一种溴化处理反应釜 |
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Legal Events
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| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070122 |
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