JP2001208796A - Autohandler - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an autohandler capable of reducing the size with a small number of actuators. SOLUTION: The autohandler 1 horizontally carrying an integrated circuit 32 for testing from a supply containing position P1 to a measuring position P2, has a main shaft 10 driven to be rotated around a vertical rotary shaft CL, and in the autohandler one or more hands 13 are connected around a main shaft freely rotatably with the shaft and freely movably up and down, part holders 19 and 19a are provided freely attaching and detaching integrated circuit parts on the hand and moving blocks 27a, 31a and 31b where a guide plane is horizontally formed are provided freely movably to drive up and down in the constitution. Since the integrated circuit parts 32 are carried horizontally from the supply containing position P1 to the measuring position P2 in a way rotated around a rotating shaft CL by the main shaft 10, only a drive motor 11 for rotating and driving the main shaft 10 is enough as an actuator for horizontally carrying the integrated circuit parts so that the constitution of the autohandler can be simplified.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic transfer system for testing an integrated circuit component such as an IC in a horizontal direction between a predetermined supply and storage position and a measurement position in a test apparatus. Regarding the handler.

[0002]

2. Description of the Related Art Generally, in this type of autohandler, it is required to quickly transfer an integrated circuit component horizontally between a predetermined supply storage position and a measurement position in a test apparatus.

In such a horizontal transfer, an actuator in the X and Y directions is usually provided with two actuators.
Not only is this necessary, the device becomes large, but also at the time of high-speed transportation, these actuators also need to be controlled at high speed, which makes the test device complicated and expensive.

[0003] As for the basic performance of the apparatus, it is necessary to securely hold the posture of the integrated circuit component during transport, and to transport the integrated circuit component.

SUMMARY OF THE INVENTION It is a first object of the present invention to provide an auto-handler capable of reducing the size of an apparatus with a small number of actuators. It is a second object of the present invention to provide an automatic handler that generates less noise during operation.

[0005]

According to the first aspect of the present invention, there is provided the following:
In the auto-handler (1) that transports the integrated circuit component (32) to be tested from the position (supply storage position) to the second position (measurement position), the main shaft (10) driven to rotate about the rotation axis (CL) is used. ), One or more hands (13) are connected around the main shaft so as to be rotatable together with the main shaft and movably in the direction of the rotation axis (directions of arrows A and B), and The first position and the second position are equally divided and arranged on the circumference, the hand and the main shaft (10) are connected by cam means (5c, 16), and the standby position (X1) of the first position is set. ) And the standby position (X2) of the second position, the cam means movably couples the hand in the rotation axis direction, and the hand is provided with component holding portions (19, 19a) to hold the component. The part (19, 19a) holds or releases the integrated circuit component And cam means releasing means (5d, 5e, 5f) for releasing the engagement between the hand and the cam means (5c, 16) are provided at the first position and the second position, respectively. Movement block (27a, 31)
a, 31b), and when the hand is positioned at the standby position (X1, X2) between the first position and the second position, the hand engages with the moving block, and the moving block ( 27a, 31a, 31b) in the vertical direction to move the hand up and down.

According to a second aspect of the present invention, in the first aspect of the present invention, the moving blocks (31a, 31b) arranged at the second position (for example, the measurement position) are arranged in the rotation direction of the hand (the direction of arrow E). A plurality of blocks (3
1a, 31b), and the plurality of blocks move independently of each other in the rotation axis direction.

According to a third aspect of the present invention, in the second aspect of the present invention, at the standby positions (X1, X2), the plurality of blocks (31a, 31b) are connected to the rotating shaft via a connecting surface (31d). It is characterized in that it is aligned in the orthogonal plane direction.

A fourth aspect of the present invention is characterized in that, in the third aspect of the present invention, the connecting surface is formed obliquely with respect to the moving direction of the hand (the direction of arrow E).

According to a fifth aspect of the present invention, in the third aspect of the present invention, an introduction portion (GD) is provided on the connecting surface of the block (31b) located on the downstream side in the moving direction of the hand (13), in the upper guide surface of the block. The plurality of blocks (31a, 3a) are located below the upper guide surface (31c) of the upstream block (31a) facing the end (31f) of the (31c).
1b) is formed.

According to a sixth aspect of the present invention, in the invention of the fifth aspect, a gradient (31e) in which the thickness (t) of the block is reduced toward the upstream block (31a) is reduced by the introduction portion (GD). It is configured to have.

According to a seventh aspect of the present invention, in the first aspect of the present invention, the first position (for example, the supply accommodating position) is set at a plurality of positions around the main shaft (10).

<Operation> When the main shaft (10) is rotated, the hand (13) around the main shaft (10) is positioned at a first position (for example, a supply accommodating position), and the cam means (5c,
16) is released, and the moving block (2) is released.
7a). In that state, the moving block (27
a) is moved downward, for example, and the component holder (19, 1) is moved.
9a) holds the integrated circuit component (32).

Next, the moving block (27a) is moved to, for example, the upper standby position (X1), the main shaft (10) is rotated, and the hand (13) is moved by the cam means (5c, 16) to the integrated circuit component (32). ) And the standby position (X2) of the second position (for example, the measurement position), and the cam unit (5)
c, 16) is disengaged. In this state, the moving block (27a) is moved, for example, downward, and the integrated circuit component (32) held in the component holding unit (19, 19a).
Is carried into a predetermined measurement position (X2).

The moving blocks (31a, 31b) arranged at the second position (for example, the measuring position) are independently driven to move, for example, in the vertical direction, and the connecting surface (31d) is moved by the hand (13). When the hand (13) is formed obliquely to the moving direction (the direction of the arrow E), the hand (13) passes through the connecting block (31) when passing between the moving blocks (31a, 31b).
d). Furthermore, the end (31f) of the upper guide surface (31c) of the downstream block is formed so as to be located below the upper guide surface (31c) of the opposing upstream block (31a). Even if the upstream moving block (31a) moves slightly downward due to the weight of the hand (13), the hand (1
3) The end (31f) of the downstream block (31b)
Without any collision with the downstream block (31
b).

The numbers and the like in parentheses are for convenience showing corresponding elements in the drawings, and therefore, the description is not limited to the description on the drawings.

<Effect of the Invention> According to the first aspect of the present invention,
Since the integrated circuit component is conveyed horizontally from the first position to the second position in such a manner as to be rotated around the rotation axis by the rotating main shaft, the main shaft is rotated as an actuator for conveying the integrated circuit component. Only the driving motor to be driven is required, and the configuration of the auto handler can be simplified.

Further, the hand can be moved in the direction of the rotation axis by using the rotation of the main shaft by the cam means, so that the integrated circuit component is previously moved by using the rotation of the main shaft by the moving stroke. As a result, the moving drive distance of the moving block can be reduced accordingly, which can contribute to a reduction in the cycle time required for measurement and a reduction in the size of the driving mechanism of the moving block.

According to the second aspect of the present invention, the movable block disposed at the second position is independently provided so as to be movable in the direction of the rotation axis so as to be freely movable. Even if suction failure or misalignment occurs,
It is only necessary to stop only the moving block that drives the hand in which the suction failure or the like has occurred (or to perform an operation corresponding to the suction failure or the like), and an efficient measurement operation can be performed.

According to the third aspect of the present invention, the plurality of blocks are provided at the standby position of the second position so as to be aligned via the connecting surface in a plane direction orthogonal to the rotation axis. The hand can be smoothly moved between the blocks via the connecting surface.

According to the fourth aspect of the present invention, since the connecting surface is formed oblique to the moving direction of the hand, the hand becomes oblique to the connecting surface when passing between the moving blocks. You can pass in the form. Thereby, when the hand passes through the connecting surface, it is prevented that the hand comes into contact with the entire surface of the connecting surface at one time, and the generation of noise accompanying it is prevented,
Smooth movement between blocks becomes possible.

According to the fifth aspect of the present invention, the introduction unit
When the hand moves from the block to the hand, it is possible to prevent the occurrence of a situation in which the hand collides with the end and generates noise or vibration.
This also prevents the posture of the integrated circuit component from being tilted due to the vibration.

According to the sixth aspect of the present invention, the introduction portion can be formed with a simple configuration.

According to the seventh aspect of the present invention, the supply position of the integrated circuit component with respect to the second position and the accommodation position can be provided separately, and the versatility of the device can be improved.

[0024]

FIG. 1 is a side view showing an example of an auto-handler, FIG. 2 is a sectional view taken along line XX of FIG. 1, FIG. 3 is a sectional view taken along line DD of FIG. 2, and FIG. 5 is a plan view showing the hand at the measurement position, FIG. 6 is a side view of FIG. 5, FIG. 7 is an enlarged view of FIG. 5, FIG. 8 is an enlarged view of FIG. 9 is a side view showing another example of the auto handler, FIG.
Is a cross-sectional view taken along the line YY in FIG. 9, FIG. 11 is a plan view showing the operation of the hand in FIG. 10, and FIG.
FIG. 13 is an enlarged plan view of the hand portion, and FIG. 13 is a side view of FIG.

An auto-handler 1 for transporting integrated circuit components such as ICs in the horizontal direction is provided as shown in FIGS.
It has a body 2, and a top plate 3 is provided in the body 2 in a horizontal direction. As shown in FIG. 3, a cylindrical shaft body 5 is fixed to the top plate 3 via a small-diameter portion 5a, and is formed above the small-diameter portion 5a in the drawing to have a larger diameter than the small-diameter portion 5a. The large diameter portion 5b is provided. As shown in FIG.
A cam groove 5c is formed around the large diameter portion 5b around the axis CL of the large diameter portion 5b. As shown in FIGS. 1 and 4, the cam groove 5c is formed in an annular shape so as to communicate between the supply accommodating position P1 of the integrated circuit component and the measuring position P2. As shown in FIG. 2, the supply accommodating position P1 and the measuring position P2 are set at a 180 ° pitch around a main shaft 10 described later.

As shown in FIGS. 2 and 4, at positions corresponding to the supply accommodating position P1 and the measuring position P2, the cam grooves 5c are cutout grooves 5d and 5e in the Z-axis directions indicated by arrows A and B.
-5f is formed. At the position corresponding to the supply accommodating position, the cam groove 5c is formed with two notch grooves 5d and 5e in parallel, and at the position corresponding to the measurement position, the cam groove 5c has a greater height than the two notch grooves 5d and 5e. A notch groove 5e formed wide is formed.

In the upper part of FIGS. 3 and 4, a main shaft 10 is connected via bearings 7 and 8 of a shaft body 5 so as to be rotatable in the directions of arrows E and F about the above-mentioned axis CL set vertically. ing. The main shaft 10 is connected to a drive motor 11 provided on the frame 2a of the body 2. As shown in FIGS. 2 and 3, a sleeve 12 formed in a tubular shape is provided on the main shaft 10 so as to cover the periphery of the shaft body 5 with a predetermined gap therebetween. The sleeve 12 is formed with four pairs of eight slits 12a in the directions of arrows A and B in total. On both sides of each slit 12a, a linear bearing 1
2b and 12b are provided in parallel along the slit 12a, and the linear bearing 12 of each pair of slits 12a is provided.
Hands 13 are provided at b and 12b so as to be movable in the Z-axis direction. Each hand 13 is provided as a set of two hands at a pitch of 90 °, and a total of eight sets of four hands are provided.

As shown in FIG. 4, each hand 13 has a bracket 15 movably supported in the Z-axis direction by linear bearings 12b.
5, a cam follower 16 is provided so as to be rotatably fitted into and engaged with the cam groove 5c through the slit 12a. The overhanging piece of the bracket 15 has a suction portion 17.
A suction head 19 capable of sucking an integrated circuit component such as an IC is provided below the suction unit 17 in a detachable and replaceable manner corresponding to the integrated circuit component to be sucked and conveyed. The suction head 19 is formed with a component suction portion 19a capable of sucking an integrated circuit component, and a pair of guide rollers 20 is formed on the bracket 15 so as to oppose each other in a vertical direction to form a predetermined gap GP. It is provided in the form.

As shown in FIGS. 1 and 3, hand driving devices 21 to 23 are provided at positions corresponding to the supply accommodating position P1 and the measuring position P2. Supply storage position P
One hand driving device 21 is arranged in 1 and two hand driving devices 22 and 23 are arranged in parallel at the measurement position P2.

As shown in FIG. 3, the hand drive device 21 has a drive motor 25 provided on the body 2a, and the drive motor 25 is connected to a linear feed mechanism 26 composed of a ball screw and a nut. The linear feed mechanism 26 is connected so that the rod 27 can be moved and driven in the directions of arrows A and B which are the Z-axis directions. As shown in FIG. 2, a block 27 a formed of a flat plate and having a substantially circular arc is fixed below the rod 27. The guide surface 27b of the block 27a is arranged on a predetermined circumference centered on the axis CL of the main shaft 10.

As shown in FIG. 1, the hand driving device 22
Reference numeral 23 includes drive motors 29 provided on the body 2a, and a linear feed mechanism 30 including a ball screw and a nut is connected to each drive motor 29. A rod 31 is connected to the linear feed mechanism 30 so as to be movable and movable in the directions of arrows A and B, which are Z-axis directions. As shown in FIG. 2, a flat plate-shaped substantially circular arc-shaped block 31 b is fixed to the lower end portion of the rod 31 of the hand drive device 22, and the lower end portion of the rod 31 of the hand drive device 23 is substantially flat plate-shaped. A block 31a formed in an arc is fixed.

Similarly to the block 27a, the block 31a is placed on the predetermined circumference centered on the axis CL of the main shaft 10.
-The guide surface 31c of 31b is arrange | positioned. Further, the guide surfaces 31c of the blocks 31a and 31b are formed so as to be aligned in the circumferential direction along the direction of the arrow E which is the moving direction of the hand at the predetermined standby position X2. 2, 5, and 7
As shown in the figure, the guide surface 31 of each block 31a / 31b
It has an opposing connecting surface 31d formed diagonally with respect to the rolling direction of the pair of guide rollers 20 that is in rolling contact with c, that is, the direction of arrow E that is the moving direction of the hand 13. Blocks 31a and 31b are provided so that the band can move in the horizontal direction in FIG.
As shown in FIG. 8, a gradient 31e whose thickness t becomes thinner toward the block 31a side is formed as a guide roller introduction portion GD on the connecting surface 31d facing the block 31b and the block 31a via the gap GP1. Have been.

Next, the operation will be described. Auto handler 1
Has the above configuration, so that the auto handler 1
, The supply accommodating position P1 set around the main shaft 10
When the integrated circuit component 32 is transported between the measurement position P2 and the measurement position P2, first, the integrated circuit component 32 to be transported to the measurement position P2 is mounted on a well-known component stocker 33 in FIG.
As shown in (1), supply is made to the supply accommodating position P1 using a conveyor means or the like (not shown).

When the integrated circuit component 32 is supplied to the supply accommodating position P1, the drive motor 11 is driven to rotate the main shaft 10 in the direction of arrow E. The sleeve 12 similarly rotates in the direction of arrow E, and one of the four hands 1
3 approaches the supply accommodating position P1. When the sleeve 12 rotates, the cam follower 16 of each hand 13 is turned into the cam groove 5c.
Roll inside. The bracket 15 moves along the slit 12a of the sleeve 12 in the vertical direction in FIG. The cam groove 5c is located at the uppermost position in the drawing at the supply accommodating position P1, and therefore is located in the direction of arrow A, and at the measuring position P2, at the lowermost position in the drawing.
Therefore, since the hand 13 is formed so as to be located in the direction of arrow B, one hand 13 moves upward in the figure as it approaches the supply accommodating position P1. Below, one set of hands 1
3 will be described, but the same applies to the other set of hands 13. Therefore, hereinafter, only one set of hands 13 will be described, and the description of the operation of the other set of hands 13 will be omitted.

Thus, as shown in FIG.
When moving toward the supply accommodating position P1 while moving in the direction of arrow A, one set of guide rollers 20 of each hand 13 sandwiches the guide surface 27b of the block 27a positioned at the predetermined standby position X1 from both upper and lower sides. Get on.

Next, each cam follower 16 of the hand 13
However, when aligned with the notch grooves 5d and 5e at the supply accommodating position P1, the drive motor 11 is stopped, and the hand 13 is stopped and held at that position via the main shaft 10 and the sleeve 12. In this state, the cam follower 16 is disengaged from the cam groove 5c. However, since each hand 13 is held on the block 27a by the guide roller 20, it does not move in the vertical direction in FIG.

In this state, the standby position X above the integrated circuit component 32 to be sucked positioned at the supply accommodating position P1.
First, the suction head 19 of each hand 13 is positioned. Next, the drive motor 25 is driven to rotate, and the block 27a is moved in the direction of arrow B in FIG. Then block 2
A pair of hands 13 connected and supported by 7a move in such a manner that the cam followers 16 move in the notch grooves 5d and 5e in the direction of arrow B. Then, the component suction portion 19a of the suction head 19 of the hand 13 comes into contact with the integrated circuit component 32 positioned at the supply accommodating position P1. In this state,
The component suction section 19a is driven to suck and hold the integrated circuit component 32 on the component suction section 19a, and the drive motor 25 is again driven to rotate in the reverse direction to raise the block 27a in the direction of arrow A to the standby position X1. 13 cam followers 1
6 is positioned at a position matching the cam groove 5c.

Next, the drive motor 11 is rotated to drive the hand 13 at the supply accommodation position P1 via the sleeve 12.
Is rotated along with the other three sets of hands 13 along the cam groove 5c in the direction of arrow E in FIG. 2 to position the hand 13 at the measurement position P2. As described above, since the cam groove 5c has the lowest height in the Z-axis direction at the measurement position P2, the hand 13 is positioned at the measurement position P2 while gradually moving in the direction of arrow B.

At this time, as shown in FIG.
Moves from the state of rolling in the cam groove 5c to the notch groove 5f, as in the case of the supply accommodating position P1, and moves onto the blocks 31a and 31b arranged at the standby position X2 of the measuring position P2. 4 and FIG. 5, it is supported in a riding manner. As described above, the blocks 31a and 31b are divided into two parts via the connecting surface 31d in a manner corresponding to the hands 13 and 13, respectively.
Of the hand 13 on the left side of FIG.
After passing through, the connecting surface 31d passes through the block 31
Move to b.

At this time, the hand 13 that has moved from the cam groove 5c to the notch groove 5f side and is no longer supported by the cam groove 5c is connected to the block 31a, so that the load of the hand 13 causes the block 31a to sink downward and block. 31a
-A step in the vertical direction occurs on the connecting surface 31d between the 31b.
However, as shown in FIGS. 7 and 8, the connecting surface 1d of the blocks 31a and 31b is formed obliquely with respect to the direction of arrow E which is the rolling direction of the guide roller 20 on the guide surface 31c. A guide surface 31c near a connecting surface 31d opposed to the connecting surfaces 31b and 31a via the gap GP1 includes:
As shown in FIG. 8, there is formed a gradient 31e whose thickness t decreases toward the block 31a side. Therefore, even if the hand 13 is on the block 31a and the load slightly lowers the block 31a in FIG.
When the end 31f on the block 31b side is located higher than the tip 31g on the block 31a side, movement becomes easy. Also, since the connecting surface 31d is formed obliquely,
Since the guide roller 20 does not ride on the entire surface of the connecting surface 31d at the same time, even if there is a step on the connecting surface 31d, the connecting surface 31d does not collide with the entire outer peripheral surface of the guide roller 20 and has a small resistance. Block 31b
Can move to the side.

As shown in FIG. 8, since the end 31f is lower than the end 31g due to the gradient 31e forming the guide roller introduction portion GD, the guide roller 20 above the hand 13 in FIG. When the vehicle moves from the position 31b to the position 31b, the end 31f on the side of the block 31b is not run on, so that it does not collide with the end 31f and emit noise, and the guide roller 20 inadvertently vibrates in the vertical direction. Therefore, it can be smoothly moved to the block 31b side.

In this manner, the pair of hands 13 positioned at the measurement position P2 is held while being supported by the respective blocks 31a and 31b. In this state, the drive motor 29 is driven, and the hand 13 holding the integrated circuit component 32 by suction is held through the linear feed mechanism 30 in the direction of arrow B, and the cam follower 16 is moved downward in the notch groove 5f in the drawing. Move in the form of moving. Then, the integrated circuit component 32 sucked by the component suction portion 19a of each suction head 19 moves in the direction of the arrow B with the blocks 31a and 31b being independent from each other, and each of the measurement positions P at the lower part in the figure.
2, the suction is released, and the integrated circuit component 32 is placed at a predetermined measurement position P2.

At this time, the suction heads 19 are independently driven by the hand driving devices 22 and 23 in the Z-axis direction. Therefore, when the integrated circuit components 32 are mounted on the measurement position P2, some troubles are caused. When this occurs, only the hand 13 that has picked up the failed integrated circuit component 32 can drive the corresponding hand driving device 22 or 23 and mount it again at the measurement position P2. Therefore, it is not necessary to remount the integrated circuit component 32 which has no problem with respect to the mounting at the measurement position P2, which is convenient.

With one set of integrated circuit components 32 mounted at the predetermined measurement position P2, one set of hands 13 keeps the integrated circuit components 32 pressed. In this state, the integrated circuit component 32 is tested by an IC tester. When the test is completed, the integrated circuit component 32 is sucked and the hand driving devices 22 and 23 are driven to position the blocks 31a and 31b upward at the standby position X2.

Next, the drive motor 11 is driven again, and the hand 13 holding the integrated circuit component 32 via the main shaft 10 is sucked.
Is rotationally driven in the direction of arrow E in FIG. 2 to move the hand 13 from the measurement position P2 in the direction of arrow E in FIG. Then, the hand 13 moves the guide roller 20 to the blocks 31a and 31b.
The cam follower 16 further engages with the cam groove 5c, and moves toward the supply accommodating position P1 along the large diameter portion 5b of the shaft body 5 in the direction of arrow E along the cam groove 5c.

When the hand 13 holding the tested integrated circuit component 32 moves to the standby position X1 of the supply accommodating position P1 and is supported by the block 27a of the hand driving device 21, the driving motor 25 Is driven to lower the hand 13 downward in FIG. 3, and the tested integrated circuit component 32 held by the component suction portion 19a is stored in a predetermined storage location. Thereafter, the empty suction head 19 is again moved to the standby position X1, the integrated circuit component 32 which has been tested is moved to the next step, and the next integrated circuit component 32 to be tested is transported by the transport means (not shown). One set of hands 1 that have been transported and positioned at the supply storage position P1 and transported the tested circuit circuit component 32 to the supply storage position P1 just before as described above.
3, the integrated circuit component 32 to be newly tested is sucked, and the transport operation is started toward the measurement position P2.

In the above embodiment, the connecting surfaces 31d of the blocks 31a and 31b of the hand driving devices 22 and 23 are used.
Is formed obliquely with respect to the direction of arrow E which is the rolling direction of the guide roller 20 on the guide surface 31c. However, the connecting surfaces 31d and 31d are not necessarily formed obliquely. As shown in FIG. 13, the guide roller 20 may be formed so as to be orthogonal to the direction of arrow E which is the rolling direction of the guide roller 20. Block 31a.
Guide roller introduction part G formed on the connecting surface 31d of the base 31b
D is a shape in which the end 31f of the upper guide surface 31c on the block 31a side of the block 31b located on the downstream side in the moving direction of the hand 13 is located lower than the end 31g of the upper guide surface 31c on the block 31a side. As long as
The shape is not limited to the gradient 31e, and may be any shape. Also,
The guide roller introduction portion GD does not need to be formed over the entire surface of the connecting surface 31d on the block 31b side, and as shown in FIG.
The tip T of the connecting surface 31d, which is a portion riding on 1b
You may make it form only in P.

Further, the hands 13 may be provided in any manner other than providing two sets of two hands.
Depending on the number of integrated circuit components 32 conveyed at one time, a set of one or a plurality of hands 13 may be arranged on the same circumference around the rotation center CL of the spindle 10 at a predetermined angular pitch. Good.

It is not necessary to provide a hand driving device at the measurement position P2 in correspondence with each hand 13. Like the supply accommodating position P1, a single hand driving device is used to move a plurality of hands 13 in the vertical direction. Can be simultaneously driven.

Further, the position for supplying the integrated circuit component 32 to be tested and the position for accommodating the tested integrated circuit component 32 do not necessarily have to be the same, and are set at different positions around the main shaft 10. It is possible as well.

[Brief description of the drawings]

FIG. 1 is a side view showing an example of an auto handler.

FIG. 2 is a sectional view taken along line XX of FIG. 1;

FIG. 3 is a sectional view taken along the line DD in FIG. 2;

FIG. 4 is an enlarged view around a shaft body,

FIG. 5 is a plan view showing the hand at a measurement position,

6 is a side view of FIG. 5,

FIG. 7 is an enlarged view of FIG.

FIG. 8 is an enlarged view of FIG. 6,

FIG. 9 is a side view showing another example of the auto handler.

10 is a sectional view taken along line YY of FIG. 9;

11 is a plan view showing the operation of the hand in FIG. 10,

12 is an enlarged plan view of a hand part in FIG. 10,

FIG. 13 is a side view of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Auto handler 5c ... Cam means (cam groove) 5d, 5e, 5f ... Cam means releasing means (notch groove) 10 ... Spindle 13 ... Hand 16 ... Cam means (cam follower) 19 ... Parts Holding part (suction head) 19a ... Component holding part (component suction part) 27a, 31a, 31b ... Block 31c ... Guide surface 31d ... Connecting surface 31e ... Gradient 31f ... End 32 ... Integrated circuit component CL: Rotating shaft (axis) GD: Introducing section (guide roller introducing section) X1, X2: Standby position

Claims (7)

[Claims] 1. An auto-handler for transporting an integrated circuit component to be tested from a first position to a second position, the auto-handler having a main shaft rotationally driven about a rotation axis, and one or more main shafts around the main shaft. A hand rotatably coupled with the main shaft and movably connected in the direction of the rotation axis, the first position and the second position are equally divided and arranged on a circumference around the center of the rotation axis; The main shaft is connected by cam means, and the hand is movably connected in the direction of the rotation axis by the cam means between the standby position at the first position and the standby position at the second position. A holding unit, a component holding unit for holding or releasing the integrated circuit component, and a cam unit releasing unit for releasing the engagement between the hand and the cam unit at the first position and the second position; Moving block at first position and second position When the hand is positioned at the standby position between the first position and the second position, the hand is engaged with the moving block, and the moving block is driven to move up and down to move the hand. An auto handler characterized by ascending and descending. 2. The moving block arranged at the second position has a plurality of blocks arranged along a rotation direction of the hand, and the plurality of blocks are independent of each other in the rotation axis direction. 2. The auto-handler according to claim 1, wherein the auto-handler is moved. 3. The auto-handler according to claim 2, wherein at the standby position, the plurality of blocks are aligned via a connecting surface in a plane direction orthogonal to the rotation axis. 4. The auto-handler according to claim 3, wherein the connecting surface is formed obliquely to a moving direction of the hand. 5. A shape in which an introduction portion is located below an upper guide surface of an upstream block facing an end of an upper guide surface of the block at a joining surface of the block located on the downstream side in the movement direction of the hand. 5. The auto-handler according to claim 3, wherein the plurality of blocks are formed by the following. 6. The auto-handler according to claim 5, wherein the introduction section has a gradient in which the thickness of the block decreases toward the upstream block. 7. The auto-handler according to claim 1, wherein the first position is set at a plurality of positions around the spindle.