JP6372911B2 - Electronic component posture correction apparatus and electronic component posture correction method for IC handler - Google Patents

Description

  The present invention relates to an IC handler that transports an electronic component such as a semiconductor chip between a tray and a measurement unit, and in particular corrects a defective posture of the electronic component with respect to a pocket (storage unit) due to a conveyance mistake and corrects the posture of the pocket. It is related with the electronic component attitude | position correction apparatus and electronic component attitude | position correction method which are arrange | positioned by.

  In general, an electronic component inspection apparatus for inspecting the quality of electronic components such as semiconductor chips includes an IC handler (conveying robot) for conveying the electronic components to be inspected from the tray to the measuring unit, and the electronic components after the measurement inspection. An IC handler is used to return the measurement unit to the tray.

  An example of such an IC handler is described in Patent Document 1. Patent Document 1 describes an IC handler that moves an electronic component between a tray and an electronic component inspection apparatus.

JP 2006-337044 A

  The IC handler described in Patent Document 1 includes a component region in which a tray in which a large number of electronic components are stored is positioned, an inspection region having an inspection socket in which electronic components are loaded, and the inspection region and the component region. And a component moving device for moving electronic components between the two. A plurality of component areas are provided side by side in a direction perpendicular to the direction away from the inspection area in plan view, and the component moving device sucks the electronic area between the tray of the component area and the inspection socket without releasing it. It is characterized by having a moving suction nozzle.

  According to this IC handler, all electronic components can be moved between the tray and the inspection socket without moving the component moving device beyond the tray in a direction away from the inspection socket side. Therefore, the tact time can be shortened as compared with the conventional IC handler.

  However, in an electronic component inspection apparatus equipped with such an IC handler, there is no mechanism / device that automatically corrects the transport error when an electronic component transport error is caused by the IC handler. The operator had to correct it manually.

This point is explained as follows.
In general, an inspection device for an electronic component such as a semiconductor chip is provided with a plurality of IC handlers for transporting the electronic component. The IC handler has a suction nozzle for sucking and holding electronic components, and the electronic components are delivered by the plurality of IC handlers between the tray and the rotary carrier using the suction nozzles. . Then, the electronic component before measurement is conveyed from the rotating conveyance body to the test socket of the measurement unit for performing measurement, and after the measurement is completed, the electronic component is collected from the test socket through the rotation conveyance body to the collection tray. It is like that.

  Specifically, the electronic components stored in the pocket of the supply tray are sucked and held by the suction nozzle of the IC handler supply robot hand, transported to the rotary transport body or the movable transport body, and stored in the pocket made of the recessed portion. Is done. The electronic components stored in the pockets of the rotary carrier or the movable carrier are sucked and held by the carrier robot, conveyed to the test socket of the measurement unit, and predetermined measurement is performed in the pocket of the test socket. After the measurement, the measured electronic component is again sucked and held by the transport robot and transported to the rotary transport body or the pocket of the movable transport body. Then, it is sucked and held by a collection robot hand at a predetermined position, and is detached and stored in a pocket of a predetermined collection tray according to the measurement result in the measurement unit.

  In this case, the electronic component conveyed by the supply robot hand or the collection robot hand needs to be arranged in a correct posture at a predetermined position of the pocket in either case of the rotating conveyance body or the moving conveyance body. If the electronic component is not placed in the correct posture in the pocket, the electronic component cannot be sucked and held by the suction nozzle, and the electronic component can be transported to the pocket of the rotary carrier or the movable carrier. It is not possible.

  In general, the pockets of the rotary carrier and the movable carrier are formed as rectangular recesses that are slightly larger than the electronic component to be inspected. A taper portion inclined inward is provided at the edge of the pocket, and each side of the electronic component is guided by the taper portion so that the electronic component is arranged in a correct posture in the pocket.

  However, in rare cases, the electronic component is caught at a taper portion of the pocket of the rotary carrier or the movable carrier at a rate of about once every several thousand to tens of thousands of times, and the electronic component is not placed in the correct posture in the pocket. It was happening. In such a case, the electronic component could not be picked up by the suction nozzle, causing an electronic component transport error and causing the IC handler to stop operating. In order to eliminate this transport mistake, it is necessary for the operator to manually remove the electronic components, or to manually insert the electronic components into the pockets and place them in the correct posture. There was a problem that the operation of the parts inspection apparatus was temporarily stopped.

  As means for preventing the operation of the electronic component inspection apparatus from being stopped, for example, the following method is conceivable. One of the methods is that the size of the pocket of the rotary carrier or the movable carrier is sufficiently larger than the electronic component to be inspected so that the edge of the electronic component is accommodated in the pocket without contacting the edge of the pocket. After that, the pocket is narrowed so that the electronic component is arranged in the correct posture at the center of the pocket. The second method is to take an image of an electronic component with a camera, calculate its position and orientation, determine whether the position and orientation are good, and if the correct orientation is not placed at a predetermined position, A method for correcting the position and orientation is conceivable.

  However, in the case of the method 1, a mechanism for changing the size of the pocket is required, and in the method 2, a camera is required. Therefore, in both cases of method 1 and method 2, the structure of the rotary carrier, the moving carrier, and other structures become complicated in order to realize those mechanisms, and the mechanism of the IC handler including the rotary carrier is complicated. Therefore, there is a problem that the cost of the electronic component inspection apparatus is increased.

  The present invention has been made in view of the above-described conventional problems, and an electronic component can be formed by using a conventional mechanism without providing a new mechanism. When the electronic component is caught in the part and not placed in the correct posture in the pocket, the electronic component can be placed in the pocket in the correct posture by vibrating or moving the rotary carrier or the movable carrier. Accordingly, it is possible to provide an electronic component posture correcting apparatus and an electronic component posture correcting method for an IC handler that can eliminate an electronic component conveyance error by an IC handler, increase electronic component conveyance efficiency, and improve inspection efficiency. It is aimed.

  The present invention relates to an electronic component posture correcting device for an IC handler that conveys electronic components between a first pocket of a tray at a first position and a second pocket of a rotary conveyance body or a movable conveyance body at a second position. . This electronic component posture correcting device is configured such that a robot hand that holds and holds an electronic component between the first pocket and the second pocket and the electronic component stored in the second pocket at the second position are in a correct posture. A posture detector for detecting whether or not the device is disposed, a moving mechanism for moving the rotary carrier or the movable carrier between the second position and the rotation measuring robot for checking the quality of the electronic component, and posture detection A posture correction mechanism is provided that operates the moving mechanism to vibrate the rotating transport body or to reciprocate the moving transport body when the electronic components are not arranged in the correct posture according to the detection result of the container. Yes.

  The moving mechanism of the rotary transport body includes a rotary table that rotates the rotary transport body on a track passing through the second position, and a table drive mechanism that rotationally drives the rotary table. The posture correcting mechanism is rotated by the table drive mechanism. The table may be configured to be slightly vibrated.

  The moving mechanism of the moving transport body includes a reciprocating mechanism that reciprocates the moving transport body on a trajectory passing through the second position, and the attitude correction mechanism reciprocates the moving transport body by the reciprocating mechanism to slightly vibrate. It is good to comprise so that it may.

  For the fine vibration of the rotary carrier or the movable carrier by the posture correction mechanism, the amplitude may be set within the range of 0.5 mm to 1.0 mm, and the vibration time may be set within the range of 0.5 second to 2.0 seconds. preferable.

  The present invention also relates to a method for correcting the attitude of an electronic component of an IC handler that conveys an electronic component between a first pocket of a tray and a second pocket of a rotary carrier or a movable carrier. This electronic component attitude correction method uses an attitude detector to detect the attitude of an electronic component that is attracted and held by a robot hand and stored in a pocket of a rotary carrier or a movable carrier, and determines whether the attitude is good or not. Accordingly, when the electronic component is not arranged in the correct posture with respect to the pocket, the rotation carrier or the movable carrier is slightly vibrated so that the electronic component is arranged in the correct posture in the pocket. It is a feature.

  According to the electronic component posture correcting apparatus and electronic component posture correcting method of the present invention, a complicated structure / mechanism for correcting the posture of the electronic component is added to the IC handler, or the electronic component is more accurately positioned. A simple mechanism and method that simply vibrates or moves the rotary carrier or the movable carrier that has the pocket in which the electronic component is stored without any control, and corrects the mistake in conveying the electronic component so that the pocket is in the correct posture. The effect that it can arrange | position can be acquired.

It is explanatory drawing which shows schematic structure of the 1st Example of the electronic component inspection apparatus provided with the electronic component attitude | position correction apparatus of the IC handler of this invention. It is sectional drawing for demonstrating the electronic component attitude | position correction apparatus of the IC handler of the electronic component inspection apparatus shown in FIG. FIG. 3A illustrates a rotary carrier used in the electronic component posture correcting device of the IC handler of the electronic component inspection apparatus shown in FIG. 1, and FIG. 3A shows a state in which the electronic components are arranged in a correct posture in the pocket of the rotary carrier. 3B is a cross-sectional view taken along the line VV in FIG. 3A, FIG. 3C is a plan view showing a state in which electronic components are illegally arranged in the pocket of the rotating carrier, and FIG. 3D is a cross-sectional view taken along the line WW in FIG. FIG. It is a block diagram which shows schematic structure of the 1st Example of the electronic component inspection apparatus provided with the electronic component attitude | position correction apparatus of the IC handler of this invention. It is a flowchart explaining operation | movement of the 1st Example of the electronic component inspection apparatus provided with the electronic component attitude | position correction apparatus of the IC handler of this invention. It is a flowchart explaining the operation | movement of the fine vibration in the flowchart shown in FIG. It is explanatory drawing which shows schematic structure of the 2nd Example of the electronic component inspection apparatus provided with the electronic component attitude | position correction apparatus of the IC handler of this invention. It is explanatory drawing for demonstrating the electronic component attitude | position correction apparatus of the IC handler of the electronic component inspection apparatus shown in FIG. FIG. 9A illustrates a moving carrier used in the electronic component posture correcting device of the IC handler of the electronic component inspection apparatus shown in FIG. 7, and FIG. 9A shows a state where the electronic components are arranged in the correct posture in the pocket of the moving carrier. 9B is a cross-sectional view taken along the line XX of FIG. 9A, FIG. 9C is a plan view showing a state in which electronic components are illegally arranged in the pocket of the moving carrier, and FIG. 9D is a cross-sectional view taken along the line YY of FIG. FIG. It is a block diagram which shows schematic structure of the 2nd Example of the electronic component inspection apparatus provided with the electronic component attitude | position correction apparatus of the IC handler of this invention. It is a flowchart explaining operation | movement of the 2nd Example of the electronic component inspection apparatus provided with the electronic component attitude | position correction apparatus of the IC handler of this invention. It is a flowchart explaining the fine vibration by the reciprocating movement in the flowchart shown in FIG. It is a block diagram which shows schematic structure of the control part of the electronic component inspection apparatus provided with the electronic component attitude | position correction apparatus of the IC handler of this invention.

In the following, an example of an electronic component inspection apparatus provided with an electronic component posture correcting device for an IC handler according to the present invention will be described with reference to FIGS.
First, a description will be given of a first embodiment of an electronic component inspection apparatus provided with an electronic component posture correcting apparatus for an IC handler according to the present invention with reference to FIGS. 1 to 6 and FIG.

  As shown in FIG. 1, an electronic component inspection apparatus 1 having an IC handler electronic component attitude correcting device according to a first embodiment of the present invention includes a tray unit 2, an IC handler 3, a measuring unit 4, And a control unit 5.

  First, the electronic component 6 as a product to be inspected by the electronic component inspection apparatus 1 to be inspected for product quality will be described. Examples of the electronic component 6 include QFP (Quad Flat Package) and QFN (Quad Flat No-lead Package). In the first embodiment, QFP and QFN having a square package with an outer dimension of 4 mm are applied.

  As shown in FIG. 1, the tray unit 2 includes a supply tray 10, a recovery first tray 11, a recovery second tray 12, a recovery third tray 13, a recovery empty tray 14, and a tray transporter 15. . Ten or more supply trays 10 are used in an overlapping manner, and can be automatically taken out one by one in order from the top in a state where the stored electronic components 6 are empty. The single trays 10 to 14 are the same, and are formed of a rectangular flat plate.

  Each of the trays 10 to 14 is provided with a plurality of pockets 16, which are a plurality of storage units capable of individually storing the electronic components 6, arranged on the upper surface thereof like a grid. Each pocket 16 is formed as a quadrangular recess having a similar shape slightly larger than the applied electronic component 6. The edges of the four sides of each pocket 16 are provided with tapered portions inclined inward, and the corresponding sides of the electronic component 6 are guided by the tapered portions so that the electronic component 6 is placed in the pocket 16 in a correct posture. It is configured to be.

  The supply tray 10, the recovery first tray 11, the recovery second tray 12, and the recovery empty tray 14 are arranged side by side, and the recovery third tray 13 is disposed at a position facing the recovery empty tray 14. As a whole, it has an L-shaped arrangement structure. In the supply tray 10, a large number of electronic components 6 as inspection targets for measuring whether or not the electronic components 6 have a predetermined function / performance are stored one by one in one pocket. The collection first tray 11 is for storing the electronic parts 6 which are non-defective products whose measurement results are determined to have a predetermined function / performance among the measured electronic parts.

  The collection second tray 12 is for storing electronic components 6 whose measured results do not have a predetermined function / performance among the measured electronic components, but whose deficiencies are determined to be mild. It is. Here, the “slightly defective product” corresponds to, for example, an electronic component whose measured value is slightly inferior to the pass / fail judgment standard and whose measurement needs to be repeated. The electronic component 6 collected in the collected second tray 12 is sent to a re-examination because of a minor defect as a measurement result, and the measurement is performed again.

  The collection third tray 13 is for storing the electronic components 6 whose measurement results do not have a predetermined function / performance among the measured electronic components, and whose deficiencies are determined to be serious matters. belongs to. Here, the “severely defective product” is, for example, when the package has a large flaw and is inappropriate as a product, or the measured value greatly deviates from the acceptance criteria, or the measurement is impossible. This applies to electronic parts that are considered to be clearly defective products. The electronic component 6 collected in the collection third tray 13 is processed as a defective product without performing the measurement again.

  The collection empty tray 14 is replenished as needed to any tray from the collection first tray 11 to the collection third tray 13, and the electronic components 6 are collected in all the pockets 16 of the tray. Used as a replacement tray. All of the pockets of the collection empty tray 14 are initially empty.

  The tray transporter 15 includes a suction pad 20 that can suck and remove the trays one by one, and a pad support arm 21 for transporting the suction pad 20. The pad support arm 21 moves in a first direction (hereinafter referred to as “a”) so that it can move between four types of trays, that is, a supply tray 10, a collection first tray 11, a collection second tray 12, and a collection empty tray 14 arranged side by side. It is configured to be movable in the “X-axis direction”).

  The suction pad 20 moved by the pad support arm 21 is normally arranged at the substantially central portion with respect to each of the trays 10 to 12 and 14, but in the X-axis direction in the planar direction. The position is adjustable in the Y-axis direction, which is the second direction orthogonal to each other. The tray transporter 15 transports the supply tray 10 that has been emptied by transporting all of the electronic components 6 to the collection empty tray 14, or all the pockets 16 are disposed in the electronic components 6 of the emptied supply tray 10. Are transported onto the collection first tray 11 to the collection third tray 13 that are full of and stacked on the tray. The supply tray thus transported is used as a new collection tray.

  Further, the IC handler 3 is arranged in association with five sets of trays 10 to 14 arranged in an L shape when viewed from the plane. The IC handler 3 includes a supply robot hand 31 and a collection robot hand 32 that suck and hold the electronic component 6 and convey it, a rotary table 36 including three rotary transfer bodies 33, 34, and 35, and the rotary table 36. A table driving mechanism 37 that rotates and two sets of posture detectors 38 and 39 that detect the quality of the posture of the electronic component 6 disposed in the pocket 60 of the three rotary conveyance bodies 33, 34, and 35 are provided. Yes.

Here, the pockets 16 of the supply tray 10, the recovery first tray 11, the recovery second tray 12, and the recovery third tray 13 are defined as the first pockets, and the pockets 60 of the three rotary conveyance bodies 33 to 35 are defined as the first pockets. It is defined as 2 pockets. In addition, all the positions where the supply robot hand 31 sucks and holds the electronic component 6 from the first pocket 60 of the supply tray 10 and the recovery robot hand 32 the first pocket 60 of the recovery first tray 11 to the recovery third tray 13. All positions where the electronic component 6 is housed are defined as the first position. Then, the position where the supply robot hand 31 places the electronic component 6 in the second pocket 60 of each of the rotary conveyance bodies 33 to 35 and the position where the collection robot hand 32 sucks and holds the electronic component 6 from the second pocket 60 are second. Is defined as the position of.

  The supply robot hand 31 and the collection robot hand 32 are provided at both ends of the robot arm 41 in the longitudinal direction. Both robot hands 31 and 32 are each provided with a suction nozzle 42 that can suck and hold the electronic component 6 and can detach the held electronic component 6. The two suction nozzles 42 and 42 can move independently in the Z-axis direction, which is a third direction perpendicular to the plane direction having the X-axis and the Y-axis, and can individually suck and separate the electronic component 6. It is configured to be removable.

  The moving base 44 is configured to be movable in the X-axis direction by a timing belt (not shown). The timing belt is guided by a guide rail 45 extending in the X-axis direction and can run endlessly in the longitudinal direction. As the moving base 44 moves in the X-axis direction, the supply robot hand 31 can move from one end to the other end in the width direction of the supply tray 10, and the recovery robot hand 32 recovers from one end of the recovery first tray 11. It can move to the other end of the collection third tray 13 through the second tray 12.

  Slide bearings 46 are attached to both ends of the guide rail 45 in the longitudinal direction. Each slide bearing 46 is penetrated by a guide bar 47 extending in the Y-axis direction. In FIG. 1, reference numeral 48 denotes a drive motor for reciprocating the guide rail 45 in the Y-axis direction, and a rotation shaft 48a of the drive motor 48 extends in the X-axis direction. Belt wheels 49 are attached to both ends of the rotation shaft 48a in the axial direction. One end of a transmission belt 49a is hooked on each belt wheel 49, and the other end of the transmission belt 49a extends in the Y-axis direction and is hooked on a belt wheel (not shown). A pair of slide bearings 46 are fixed to the pair of transmission belts 49a.

  Thus, when the rotary shaft 48a is rotationally driven by the drive motor 48, the rotational force is transmitted from the left and right belt wheels 49 to the left and right transmission belts 49a. As a result, the guide rail 45 is moved in the Y-axis direction by being guided by the pair of guide bars 47 according to the rotation direction of the drive motor 48. Through the movement of the guide rail 45 in the Y-axis direction and the movement of the moving base 44 that moves along the longitudinal direction of the guide rail 45, the supply robot hand 31 and the recovery robot hand 32 are connected to the supply tray 10 and the recovery process. It is possible to move above all the pockets from one tray 11 to the collection third tray 13 and above the rotary table 36.

As shown in FIGS. 1 and 2, the rotary table 36 is rotatably supported in the horizontal direction and is configured to be rotatable by a table drive mechanism 37. The table drive mechanism 37 includes a drive motor 50, a drive pulley 51, a transmission belt 52, and the like. The drive motor 50 is fixed to the device frame 54 via the motor bracket 53 with the axial direction of the rotary shaft 50a directed in the vertical direction. A drive pulley 51 is fixed to a rotation shaft 50a of the drive motor 50, and one end of a transmission belt 52 is hooked on the drive pulley 50a. The other end of the transmission belt 52 is hooked on a pulley portion provided on the rotary table 36.

  As the drive motor 50, for example, a stepping motor can be applied, and according to an input signal, the rotary table 36 can be continuously rotated by 120 degrees, or a minute angle can be reciprocated to generate micro vibrations. is there. Three rotary transport bodies 33, 34, and 35 are supported on the upper surface of the rotary table 36 so as to be rotatable at equal angular intervals (120 degrees) in the circumferential direction. The three rotary conveyance bodies 33 to 35 are rotated by the planetary gear train 55 in the same phase. The planetary gear train 55 includes a sun gear 56 having the same rotation center as that of the rotary table 36, three planetary gears 57 disposed on the outer periphery of the sun gear 56 at equal angular intervals, and three rotary transport bodies 33. To 35, the gear portions 58 are provided.

  The sun gear 56 of the planetary gear train 55 is integrally provided at the rotation center of the rotary table 36, and three planetary gears 57 are meshed with the outer periphery of the sun gear 56, and the three planetary gears are engaged. 57 is meshed with each gear portion 58 of the three rotary conveyance bodies 33 to 35. The three planetary gears 57 are rotatably supported on the rotary table 36 by pivots provided upright on the upper surface of the rotary table 36.

  Thus, when the rotary table 36 is rotated by the table driving mechanism 37, the sun gear 56 integrated with the rotary table 36 rotates by the same angle, and the rotational force is transmitted to the three gear portions 58 via the three planetary gears 57. The As a result, the three rotary conveyance bodies 33 to 35 revolve outside the planetary gear 57 by an angle corresponding to the rotation angle while revolving outside the sun gear 56 by an angle equal to the rotation angle of the turntable 36. . The rotation ratio of the three rotary conveyance bodies 33 to 35 is configured such that when the rotary table 36 rotates 120 degrees, the three rotary conveyance bodies 33 to 35 rotate by one rotation.

  Regarding the rotational movement of the three rotary transport bodies 33 to 35, a line connecting any two of the rotary transport bodies is arranged so as to be parallel to the X axis, and the remaining one rotary transport body is connected. When it is located on the extended line in the Y-axis direction in the middle part of the line, this position is defined as a “second position” in this embodiment. Normally, the three rotary conveyance bodies 33 to 35 are rotated and moved in units of 120 degrees so as to secure the second position.

  The three rotary conveyance bodies 33 to 35 have the same shape and structure, and a pocket 60 formed of a rectangular concave portion is provided at the center of the upper surface of the disk-shaped main body. As illustrated in FIGS. 3A to 3D, the pockets 60 of the rotary conveyance bodies 33 to 35 are formed as rectangular recesses that are slightly larger than the electronic component 6 to be inspected. Further, tapered portions 61 inclined inward are respectively provided at the edges of the four sides of the pocket 60, and by guiding each side of the electronic component 6 with these tapered portions 61, electrons are placed at predetermined positions in the pocket 60. The component 6 is configured so as to be arranged in a correct posture (the state shown in FIGS. 3A to 3B).

  The shape and size of the pocket 60 for storing the electronic component 6 vary depending on the shape and size (size) of the electronic component 6 to be measured, but the size of the opening is necessary for placing the electronic component 6. It is preferable to set a size obtained by adding an allowable value of about 0.5 mm to 0.6 mm to the size of the mounting portion. Thus, if the size of the opening is set to the size of the electronic component 6 plus an allowable value of 0.5 mm to 0.6 mm, the electronic component 6 is completely stored in the pocket 60. This is because measurement can be performed by connecting all terminals of the electronic component 6 to predetermined terminals.

  The inclination angle of the taper portion 61 of the electronic component 6 is preferably set within a range of 18 degrees to 25 degrees. When the inclination angle of the taper portion 61 is within a range of 18 ° or more and 25 ° or less, the electronic component 6 is disposed so as to be caught by the taper portion 61 of the pocket 60 without requiring high conveyance position accuracy. Even so, there is an advantage that the electronic component 6 can slide into the placement portion due to its own weight and can be placed in a correct posture on the predetermined placement portion.

  On the upper surfaces of the three rotary conveyance bodies 33 to 35, a photometric groove 62 is provided which passes through a pocket 60 formed in the center and continues from one end to the other end in the diameter direction. The photometric groove 62 is used for detecting the quality of the posture of the electronic component 6 accommodated in the pocket 60. In the central part of two sides facing one side of the pocket 60, the photometric groove 62 extends in a direction perpendicular to the side. Has been extended. The photometric grooves 62 of the three rotary conveyance bodies 33 to 35 extend in a direction parallel to the X axis at the second position. Further, in the second position, each rotary transport is related to the rotary transport body positioned closest to the supply tray 10 and the rotary transport body positioned closest to the recovery second tray 12. Posture detectors 38 and 39 for measuring the quality of the posture of the electronic component 6 arranged on the body are provided.

  As shown in FIGS. 2 and 3A to 3D, the posture detectors 38 and 39 are photoelectric sensors having the same configuration, and the light emitting element 64 disposed on the outer side of the photometric groove 62 with the rotary carrier interposed therebetween. And a light receiving element 65 disposed on the outer side of the other side of the photometric groove 62 with the rotary carrier interposed therebetween. As the light emitting element 64, for example, a light emitting diode can be applied, and as the light receiving element 65, for example, a photodiode can be applied. The light emitting element 64 is arranged so that the light emitting portion faces one side of the photometric groove 62, and the light receiving element 65 is arranged so that the light receiving portion faces the other side of the photometric groove 62.

  As shown in FIGS. 1 and 2, the light emitting element 64 and the light receiving element 65 are fixed to a device frame 54 that rotatably supports the rotary table 36, and the light emitting element 64 and the light receiving element 65 do not move. . In the drawing, reference numeral 66 denotes a bracket for fixing and supporting the light emitting element 64, and reference numeral 67 is a bracket for fixing and supporting the light receiving element 65.

  3A and 3B show a state in which the electronic component 6 is arranged in the correct posture in the pocket 60 of the rotary conveyance bodies 33 to 35. FIG. In this case, the light emitted from the light emitting element 64 can pass above the electronic component, and the light is received by the light receiving element 65 without being disturbed by the electronic component 6. On the other hand, FIG. 3C and FIG. 3D show a state in which the electronic component 6 is disposed in an incorrect posture in the pocket 60 of the rotary conveyance bodies 33 to 35. In this case, since the light emitted from the light emitting element 64 is blocked from traveling by the electronic component, the light is not received by the light receiving element 65. When the light receiving element 65 receives an optical signal, an on signal is output from the attitude detectors 38 and 39, and when not received, an off signal is output.

  The measurement unit 4 is provided so as to be located on the side of the three rotary conveyance bodies 33 to 35 mounted on the rotary table 36 that rotates in this way. The measurement unit 4 includes a test socket 70 that measures the quality of the electronic component 6 and a rotation measurement robot 71 that conveys the electronic component 6 between the test socket 70 and the rotating conveyance body.

  The test socket 70 measures the quality of the electronic component 6. By arranging the electronic component 6 at a predetermined position of the test socket 70, the terminal of the electronic component 6 is connected to the wiring circuit, and it is measured whether or not the electronic component 6 has a predetermined performance / function. It is configured to be possible.

  The rotation measuring robot 71 includes a rotating pivot 72 erected on the apparatus frame 54, a cylindrical rotating body 73 that is rotatably supported by the rotating pivot 72, and a pair of transports provided on the rotating body 73. The robot 74, 75 and the suction nozzle 76 provided in each of the transfer robots 74, 75 are provided.

  The rotating body 73 is configured to be capable of rotating 180 degrees reciprocally around the rotation pivot 72 by a driving force of a driving motor (not shown). The pair of transfer robots 74 and 75 are arranged on the outer peripheral surface of the rotating body 73 so as to protrude outward in the radial direction at positions rotated and rotated by 180 degrees. It is configured to be movable. The pair of transfer robots 74 and 75 transfer the electronic component 6 between any of the three rotary transfer bodies 33 to 35 and the test socket 70, and are positioned at the second position around the rotary pivot 72. A test socket 70 is disposed below the second transfer robot 75 at a position rotated by 180 degrees with respect to one rotary transfer body.

  A suction nozzle 76 is held at the center of each of the transfer robots 74 and 75 with the suction port capable of sucking and holding the electronic component 6 facing downward. Of the pair of transfer robots 74 and 75, the suction nozzle 76 of one transfer robot faces the pocket 60 of the rotary transfer body, and the suction nozzle 76 of the other transfer robot faces the pocket of the test socket 70. Of the pair of transfer robots 74 and 75, the first transfer robot 74 sucks and holds the electronic components stored in the pocket 60 of the rotary transfer body, and stores them in the pocket of the test socket 70. The second transfer robot 75 sucks and holds the electronic components stored in the pockets of the test socket 70 and transfers them to the pockets 60 of the rotary transfer body. A schematic configuration of the electronic component inspection apparatus 1 having the above-described configuration is shown as a block diagram in FIG.

  The operations of the measurement unit 4, the IC handler 3, and the tray unit 2 of the electronic component inspection apparatus 1 having such a configuration are controlled by the control unit 5 and execute predetermined operations. The control unit 5 has a configuration as shown in FIG. That is, as shown in FIG. 13, the control unit 5 includes a control device 80, a display device 81, an input device 82, and the like.

  The display device 81 is configured by a device capable of displaying an image, such as a liquid crystal display. The display device 81 can display, for example, measurement results of the electronic device 6 and other information. The input device 82 is configured by a device capable of inputting information such as a touch panel, for example. Control information is input to the input device 82 by an operator's operation in order to control the control device 80. The control device 80 includes a CPU 83, a hard disk drive 84, an IO control board 85, a display processing unit 86, a motor control board 87, an input interface 88, a RAM 89, and the like, which are electrically connected via a bus 90, respectively. ing.

The control device 80 includes sensors 91 including posture detectors 38 and 39 and other various sensors, switches 92 including a power switch and various other switches, and electromagnetic cylinders such as the suction nozzle 42 and the suction nozzle 76. A motor 93 for driving a motor 93 for driving a motor 93 for driving the rotary table 36, a motor for rotating the rotation measuring robot 71, and other motors 94 are connected. CPU83 while monitoring the state of the sensors 91 and switches 92 through the IO control board 85, via the operation of the motor control board 8 7, by driving the motors 94 and the solenoid cylinder such 93 corresponding Then, the electronic robot 6 is transported by operating the supply robot hand 31 and the collection robot hand 32.

  The hard disk drive 84 includes an OS (operation system) for controlling the operation of the electronic component inspection apparatus 1 and an IC handler control program for controlling the operation of the IC handler 3 based on various data of the IC handler 3. It is stored so that it can be read. The handler control program stored in the hard disk drive 84 is read out to the RAM 89. The IO control board 85 reads the state of the sensors 91 and the state of the switches 92 of the IC handler 3 and controls the operation of the electromagnetic cylinders 93. A display device 81 is connected to the display processing unit 86, and processes input information, calculation information, and the like and displays them on the display device 81.

  The motor control board 87 can control a plurality of motors of the motors 94. An input device 82 is connected to the input interface 88, and a signal input to the input device 82 is passed to the CPU 83 and the RAM 89. The IC handler 3 is activated and stopped by information input to the input device 82 or information input from the sensors 91 and switches 92 via the IO control board 85. The RAM 89 is used as an area for storing programs and data, or as a work area for storing data used for processing by the CPU 83.

The outline of the operation of the electronic component inspection apparatus 1 having such a configuration is as follows.
The supply robot hand 31 moves to the top of the supply tray 10 and moves up and down to suck and hold the electronic component 6 at the first position of the supply tray 10. Then, the supply robot hand 31 conveys the electronic component 6 to the first rotary conveyance body 33 and moves up and down to store the electronic component 6 in the pocket 60. At the same time, the collection robot hand 32 moves up and down and sucks and holds the electronic component 6 after measurement stored in the pocket 60 of the third rotary conveyance body 35. Then, the collection robot hand 32 conveys to any one of the collection first tray 11, the collection second tray 12, and the collection third tray 13 according to the measurement result, and moves up and down to place the electronic component in the pocket 16. Remove 6 and store.

  Next, the supply robot hand 31 moves to the position of the next pocket 16 of the supply tray 10. Thus, the supply robot 31 repeats the supply operation of the electronic component 6 until the electronic component 6 in the designated supply tray 10 is exhausted.

  The electronic component 6 disposed in the pocket 60 of the first rotary transport body 33 moves to the position of the second rotary transport body 34 by rotating the rotary table 36 by 120 degrees. In the pocket 60 of the second rotary conveyance body 34 at this position, when there is an electronic component 6 that has already been measured, the electronic component 6 is accommodated, and the rotary table 36 rotates 120 degrees. Is carried to the position of the third rotary carrier 35. Then, the electronic robot 6 is sucked and held by the collection robot hand 32 that has moved to the position of the third rotary conveyance body 35, and is conveyed to the corresponding collection tray according to the measurement result, and detached and stored in the pocket 16. By doing so, recovery is performed.

  On the other hand, the rotation measuring robot 71 sucks and holds the electronic component 6 arranged in the pocket 60 of the second rotating transport body 34 by the first transport robot 74. Next, the rotation measurement robot 71 rotates the rotating body 73 by 180 degrees, places an electronic component at a predetermined position of the test socket 70, and starts measurement. At the same time, after the electronic component 6 after measurement is sucked and held by the second transfer robot 75, it is moved to the position of the second rotary transfer body 34 by the rotation of the rotary body 73 and measured in the pocket 60. The subsequent electronic component 6 is detached and stored. The electronic component 6 housed in the pocket 60 of the second rotary transport body 34 is moved to the position of the third rotary transport body 35 by the rotation of the rotary table 36 by 120 degrees, and the corresponding robot robot 32 performs the corresponding operation from this position. To be collected in a collection tray.

  The detailed operation of the electronic component inspection apparatus 1 having such a configuration is, for example, as follows. 5 and 6 show a flowchart of the operation of the control unit 5 in the electronic component inspection apparatus 1. In this case, in advance, dozens of trays stored in the pocket 16 of the electronic component to be measured are stacked on the supply tray 10 in advance. In contrast, the collection first tray 11, the collection second tray 12, and the collection third tray 13 are each provided with a tray with empty pockets, and the collection empty tray 14 has empty pockets. Place several trays on top of each other. Generally, measurement of performance and function of the electronic component 6 is started in such a tray arrangement state.

  As shown in FIG. 5, when supply and storage of the electronic component 6 is started, first, the supply robot hand 31 moves to the supply tray 10 in step S1. This is because the guide rail 45 is moved in the Y-axis direction and the movement base 44 is moved in the X-axis direction, and the suction nozzle 42 of the supply robot hand 31 is moved above the pocket 16 at the first position of the supply tray 10. It is executed by positioning. Next, the process proceeds to step S <b> 2, and the electronic component 6, which is a product, is sucked and held by the suction nozzle 42 of the supply robot hand 31. Next, it transfers to step S3 and the supply robot hand 31 is conveyed to the 1st rotation conveyance body 33 in a 2nd position. This operation is also executed by moving the guide rail 45 in the Y-axis direction and moving the movement base 44 in the X-axis direction.

  Next, the process proceeds to step S <b> 4, and the electronic component 6 held by the suction nozzle 42 of the supply robot hand 31 is stored in the pocket 60 of the first rotary conveyance body 33. This is executed by releasing the suction force of the suction nozzle 42 and dropping it into the pocket 60 by the weight of the electronic component 6. At the same time, when the measured electronic component 6 is stored in the pocket 60 of the third rotary conveyance body 35 located at the second position by the suction nozzle 42 of the collection robot hand 32, the electronic component 6 is adsorbed and held. At this time, when the electronic component 6 is not stored in the pocket 60 of the third rotary transport body 35 as in the initial stage of the inspection, the suction nozzle 42 does not hold the electronic component 6.

  Next, it transfers to step S5 and it is determined whether the electronic component 6 accommodated in the pocket 60 of the 1st rotation conveyance body 33 is arrange | positioned in the mounting part with the correct attitude | position. The posture of the electronic component 6 is also determined for the electronic component 6 accommodated in the third rotary transport body 35, and the determination method is that for the electronic component 6 of the first rotary transport body 33. The description thereof will be omitted. The determination in step S5 is performed based on a detection signal of the attitude detector 38 (the attitude detector 39 is for the third rotary carrier 35 with respect to the electronic component 6).

  That is, as shown in FIGS. 3A and 3B, when the electronic component 6 is arranged in a correct posture at a predetermined position in the pocket 60, the posture is arranged on one side of the photometric groove 62 of the rotary carrier 33. The light emitted from the light emitting element 64 of the detector 38 passes above the electronic component 6 and is input to the light receiving element 65 disposed on the other side of the photometric groove 62. Thereby, it can be known that the electronic component 6 is disposed in a correct posture at a predetermined position in the pocket 60. In this case, the process proceeds to step S8.

  On the other hand, as shown in FIGS. 3C and 3D, when one side of the electronic component 6 is caught by the edge of the pocket 60 and is not disposed in a correct position at a predetermined position in the pocket 60, the photometric groove 62 is used. Light emitted from the light emitting element 64 disposed on one side of the light does not collide with the electronic component 6 and is not input to the light receiving element 65 disposed on the other side of the photometric groove 62. Thereby, it can be known that the electronic component 6 is not arranged in a correct posture at a predetermined position in the pocket 60. In this case, the process proceeds to step S6.

  In step S <b> 6, when the electronic component 6 is not placed at a predetermined position in the pocket 60 in the correct posture based on the detection result by the posture detector 38, the posture of the electronic component 6 is corrected by slightly vibrating the rotary carrier 33. . Then, the process proceeds to step S <b> 7, and it is determined again whether or not the electronic component 6 is arranged in a correct posture at a predetermined position in the pocket 60. Details of the operations from step S5 to step S7 are shown in FIG.

  In FIG. 6, in step S <b> 5 </ b> A, it is determined whether or not the electronic component 6 is placed in a correct posture at a predetermined position in the pocket 60 based on the detection result of the posture detector 38 that is a photoelectric sensor. In this determination, when the light emitted from the light emitting element 64 is input to the light receiving element 65, it is determined that the electronic component 6 is arranged in a correct posture at a predetermined position in the pocket 60, and the process proceeds to step S9. Transition. In step S9, the table drive mechanism 37 is operated to rotate the rotary table 36 by 120 degrees.

  On the other hand, when the light emitted from the light emitting element 64 is not input to the light receiving element 65, the process proceeds to step S <b> 5 </ b> B, and the light is emitted from the light emitting element 64 for a time during which no light is input to the light receiving element 65. It is determined whether or not a predetermined time has elapsed since the last time. In this determination, if the predetermined time has not elapsed, the process returns to step S5A, and this determination is repeated until the predetermined time elapses. On the other hand, when the predetermined time has elapsed, the process proceeds to step S6A and step S6B, and an attitude correction operation for correcting the attitude of the electronic component 6 is executed.

  In step S <b> 6 </ b> A, the rotary carrier 33 is rotated forward for a minute time through the operation of the rotary table 36. Subsequently, the process proceeds to step S <b> 6 </ b> B, and the rotary conveyance body 33 is reversed for a minute time through the operation of the rotary table 36. And it transfers to step S6C and it is determined whether the normal rotation operation | movement and the reverse rotation operation | movement of the rotary conveyance body 33 were performed more than predetermined time. In this determination, when the time for forward / reverse operation of the rotary transport body 33 does not elapse for a predetermined time, the process returns to step S6A and the fine vibration operation is repeated until the predetermined time elapses. On the other hand, when a predetermined time has elapsed for the forward / reverse operation of the rotary transport body 33, the process proceeds to step S7A.

  The amplitude of the minute vibration that repeats the forward / reverse operation of the rotary conveyance body 33 based on this step S6 is preferably in the range of 0.5 mm to 1.0 mm. If the amplitude of the micro-vibration of the pocket 60 is in the range of 0.5 mm to 1.0 mm, the time during which the electronic component 6 is placed on the placement portion of the pocket 60 by the micro-vibration falls within a practical range, and the electronic component There is a merit that 6 can be prevented from jumping out from the opening edge of the pocket 60.

  The vibration time of the rotary carrier 33 is preferably in the range of 0.5 seconds to 2.0 seconds, and the frequency of the fine vibration is preferably in the range of 100 Hz to 200 Hz. If the pocket microvibration time is in the range of 0.5 seconds to 2.0 seconds, the decrease in the transport operation of the IC handler 3 due to the pocket vibration time can be kept within a practical range. And if the vibration frequency of the rotary conveyance body 33 is in the range of 100 Hz to 200 Hz, when the electronic component is an IC, LSI, or the like, the function / characteristics inside the electronic component may be damaged by slight vibration. There is no merit.

  In addition, although a method is also conceivable in which an electronic component is conveyed while always giving a slight vibration, in that case, an excessive burden may be imposed on a plurality of conveying robots and the like. Therefore, a method of giving a fine vibration operation is preferable only when a storage error occurs in the pockets of the rotary transport bodies 33 to 35 and the mobile transport body described later.

  In step S <b> 7 </ b> A, based on the detection result of the posture detector 38, it is determined again whether or not the electronic component 6 is arranged in a correct posture at a predetermined position in the pocket 60. If the light emitted from the light emitting element 64 is input to the light receiving element 65 by this determination, it is determined that the electronic component 6 is arranged in a correct posture at a predetermined position in the pocket 60, and the process proceeds to step S9. Transition. On the other hand, when the light emitted from the light emitting element 64 is not input to the light receiving element 65, the process proceeds to step S <b> 7 </ b> B, and the light is emitted from the light emitting element 64 for a time during which no light is input to the light receiving element 65. It is determined whether or not a predetermined time has elapsed since the last time.

  In this determination, if the predetermined time has not elapsed, the process returns to step S7A and this determination is repeated until the predetermined time elapses. On the other hand, if the predetermined time has elapsed, it is determined that the electronic component 6 could not be corrected to the correct posture even by this fine vibration method, and a warning message is displayed to temporarily stop the transport operation of the IC handler 3. Let Then, the electronic component 6 missed by the operation operator of the electronic component inspection apparatus 1 is removed or the arrangement state of the electronic component is improved, and the conveying operation is repeated again.

  Next, in FIG. 5, the process proceeds to step S <b> 8, whether or not the first transfer robot 74 of the rotation measuring robot 71 positioned on the pocket 60 side of the rotary transfer body 34 is in the raised position, and the test socket 70 side. It is determined whether or not the second transfer robot 75 located at is in the raised position. This determination is to determine whether or not the rotary table 36 may be rotated. When one or both of the transfer robots 74 and 75 are not in the raised position, the transfer robots 74 and 75 move the upper and lower sides. It is determined that the operation is being performed or that the electronic component 6 disposed in the test socket 70 is being measured, and the state where the rotary table 36 is not rotating is maintained. The determination in step S8 is repeated until both the first transfer robot 74 and the second transfer robot 75 are located at the raised positions.

  On the other hand, if it is determined in step S8 that both the first transfer robot 74 and the second transfer robot 75 are in the raised position, the process proceeds to step S10 and the table driving device 37 is moved. Is operated to rotate the rotary table 36 by 120 degrees. At this time, when the measured electronic component 6 stored in the pocket 60 of the third rotary transport body 35 located at the second position in step S4 is suction-held by the suction nozzle 42 of the recovery robot hand 32 In step S11, the collection robot hand 32 is set to one of the collection first tray 11, the collection second tray 12, or the collection third tray 13 according to the measurement result of the electronic component 6 by the rotation measurement robot 71. Move.

  Next, the process proceeds to step S12, and the electronic component 6 sucked and held by the suction nozzle 42 in the corresponding pocket 16 of the tray is stored in the corresponding pocket 16 of the tray. Next, it transfers to step S13 and it is determined whether the measurement of the electronic component 6 is continued. This determination is performed by checking whether or not the number of measured electronic components 6 has reached the number of measurements input before the start of measurement. In step S13, when the number of measurements has not reached the numerical value input in advance, it is determined that the operation is continued, the process returns to step S1, and the above processing is repeated. On the other hand, when the number of measurements has reached the numerical value input in advance, the process is terminated.

  On the other hand, in parallel with the process of step S11, the process proceeds to step S14, where the rotary table 36 rotates 120 degrees and moves to the position of the second rotary transfer body 34. The first transfer robot 74 located at a position holds the electronic component 6 accommodated in the pocket 60 of the second rotary transfer body 34 and lifts the first transfer robot 74. Then, the process proceeds to step S15 to determine whether or not the measurement operation of the electronic component 6 by the rotation measurement robot 71 is being performed.

  If it is determined in step S15 that the electronic component 6 is being measured, the process in step S15 is repeated until the measurement operation is completed. On the other hand, when it is determined that the measurement operation of the electronic component 6 is not in progress, the process proceeds to step S16, and the second transfer robot 75 located on the socket side of the rotation measurement robot 71 is raised. Then, the process proceeds to step S17.

  In step S17, the rotating body 73 of the rotation measuring robot 71 is rotated 180 degrees, the second transfer robot 75 is moved to the rotating transfer body side, and the first transfer robot 74 is moved to the socket side. Next, the process proceeds to step S18, and the suction nozzle 76 of the second transfer robot 75 is lowered. Then, the process proceeds to step S <b> 19, and the measured electronic component 6 held by the suction nozzle 76 of the second transport robot 75 is detached and stored in the pocket 60 of the second rotary transport body 34. Subsequently, the process proceeds to step S20, and the suction nozzle 76 of the second transfer robot 75 is raised.

  Simultaneously with the processing after step S18, the processing of step S21 is executed, the suction nozzle 76 of the first transfer robot 74 is lowered, and the electronic component 6 before measurement is stored in the pocket of the test socket 70. Next, the process proceeds to step S22, and measurement of the electronic component 6 placed at a predetermined position of the test socket 70 is started. Then, the process returns to step S8, and the following processing is repeated. Through the above processing, the performance and characteristics of the electronic component 6 can be inspected.

  Even when a transport error by the IC handler 3 occurs during the measurement of the electronic component 6 as described above, the correct operation by the fine vibration is performed to correct the transport error and place the correct position at a predetermined position of the pocket. Thus, the electronic component 6 can be efficiently inspected without stagnation in the measurement work.

  Next, a second embodiment of the electronic component inspection apparatus provided with the electronic component posture correcting apparatus for an IC handler according to the present invention will be described with reference to FIGS. 7 to 12 and FIG.

  As shown in FIG. 7, an electronic component inspection apparatus 101 including an IC handler electronic component attitude correcting device according to a second embodiment of the present invention includes a tray unit 102, an IC handler 103, a measuring unit 104, A control unit 105 having the same configuration as that of the control unit 5 is provided.

  First, the electronic component 106 as a product to be inspected that is inspected for quality by the electronic component inspection apparatus 101 will be described. Examples of the electronic component 106 include QFP and QFN. In the second embodiment, QFP and QFN having a square package with an outer dimension of 15 mm are applied.

  As shown in FIG. 7, the tray unit 102 includes a supply tray 110, a supply empty tray 109, a recovery first tray 111, a recovery second tray 112, a recovery third tray 113, a recovery empty tray 114, and a tray transporter 115. And. Ten or more supply trays 110 are used in an overlapping manner, and can be automatically taken out one by one in order from the upper side in a state where the stored electronic components 106 are empty. In the supply empty tray 109, all the electronic components 106 are taken out from the supply tray 110, and empty trays are conveyed and stacked.

  The single trays 109 to 114 are the same, and are made of a rectangular plate. Each of the trays 109 to 114 is provided with a plurality of pockets 116 that are capable of individually storing the electronic components 106 on the upper surface of the trays 109 to 114 so as to be arranged like a grid. Each pocket 116 is formed as a rectangular recess having a similar shape slightly larger than the applied electronic component 106. Further, tapered portions inclined inward are provided at the edges of the four sides of each pocket 116, and the corresponding side of the electronic component 106 is guided by the tapered portion, so that the electronic component 106 is in a correct posture with respect to the pocket 116. It is comprised so that it may be arranged.

  The supply tray 110, the supply empty tray 109, the recovery empty tray 114, the recovery first tray 111, and the recovery second tray 112 are arranged side by side, and the recovery third tray 112 is disposed at a position facing the recovery second tray 112. The tray 113 is disposed, and has an L-shaped arrangement structure as a whole. In the supply tray 110, a large number of electronic components 106 to be inspected for measuring whether or not the electronic components 106 have a predetermined function / performance are stored one by one in one pocket. The collection first tray 111 is for storing the electronic parts 106 which are non-defective products whose measured results are determined to have a predetermined function / performance among the measured electronic parts.

  The collection second tray 112 is for storing the electronic components 106 whose measured results do not have a predetermined function / performance among the measured electronic components but whose deficiencies are determined to be light. It is. Here, the “slightly defective product” corresponds to, for example, an electronic component whose measured value is slightly inferior to the pass / fail judgment standard and whose measurement needs to be repeated. Since the electronic component 106 collected in the second collection tray 112 has a minor defect as a measurement result, the electronic component 106 is sent to a re-inspection and measurement is performed again.

  The collection third tray 113 is for storing the electronic components 106 whose measurement results do not have a predetermined function / performance among the measured electronic components, and whose deficiencies are determined to be serious matters. belongs to. Here, the “severely defective product” is, for example, when the package has a large flaw and is inappropriate as a product, or the measured value greatly deviates from the acceptance criteria, or the measurement is impossible. This applies to electronic components that are clearly considered defective products. The electronic component 106 collected in the collection third tray 113 is processed as a defective product without performing another measurement.

  The collection empty tray 114 is replenished as needed to any tray from the collection first tray 111 to the collection third tray 113, and the electronic components 106 are collected in all the pockets 116 of the tray. Used as a replacement tray. The pockets of the collection empty tray 114 are initially all empty.

  The tray transporter 115 includes a suction pad 120 that can suck and remove the trays one by one, and a pad support arm 121 for transporting the suction pad 120. The pad support arm 121 is configured to move between five types of trays, a supply tray 110, a supply empty tray 109, a recovery empty tray 114, a recovery first tray 111, and a recovery second tray 112 arranged side by side. (Hereinafter referred to as “X-axis direction”).

The suction pad 120 moved by the pad support arm 121 is normally arranged at the substantially central portion with respect to each of the trays 109 to 112, 114. The position is adjustable in the Y-axis direction, which is the second direction orthogonal to each other. The tray transporting device 115, or conveying the feed tray 1 10 becomes empty supply empty tray 109 electronic component 106 is conveyed all the collecting tray 114 is empty, all the pockets 116 e It is transported to any one of the recovery first tray 111 to the recovery third tray 113 filled with the parts 106, and is superposed on the tray.

Further, the IC handler 103 is disposed in association with the six sets of trays 109 to 114 arranged in an L shape when viewed from above. The IC handler 103 adsorbs the electronic component 106 to the rotation measurement robot 171, the supply conveyance body 133 that conveys the electronic component 106 before measurement, the recovery conveyance body 134 that collects the electronic component 106 after measurement from the rotation measurement robot 171, and the electronic component 106. The supply robot hand 131 that holds and conveys between the supply tray 110 and the supply conveyance body 132 and the electronic component 106 are sucked and held, and the collection conveyance body 134 and the collection first tray 111, the collection second tray 112, or the collection second tray 112 are collected. A collection robot hand 132 that conveys between one of the three trays 113, and a reciprocating machine that conveys the supply conveyance body 133 and the collection conveyance body 134 between the position where the electronic component 106 is received from each tray and the rotation measuring robot 171. and structure, appearance of the electronic component 106 disposed in the respective pockets 160 of the feed carrier 133 and recovered carrier 134 It has two sets of detecting the quality of the posture detector, and the like.

  Here, the pockets 116 of the supply tray 110, the recovery first tray 111, the recovery second tray 112, and the recovery third tray 113 are defined as first pockets, and the pockets 160 of the supply transport body 133 and the recovery transport body 134 are defined. Used as a second pocket. Further, all the positions where the supply robot hand 131 sucks and holds the electronic component 106 from the first pocket 160 of the supply tray 110 and the collection robot hand 132 are placed in the first pocket 160 of the collection first tray 110 to the collection third tray 113. All positions where the electronic component 106 is accommodated are defined as the first position. The position where the supply robot hand 131 places the electronic component 106 in the second pocket 160 of the supply conveyance body 133 and the position where the collection robot hand 132 sucks and holds the electronic component 106 from the second pocket 160 are the second position. Shall be defined.

  The supply robot hand 131 and the collection robot hand 132 are guided by a guide bar 141 and configured to be individually movable in the X-axis direction. The supply robot hand 131 is movable within the range so as to cover the entire range above the supply tray 110 and the supply empty tray 109, and the recovery robot hand 132 is connected to the recovery empty tray 114 and the recovery first tray. 11 is movable within the range so as to cover the entire upper range from the collection third tray 113.

  Both robot hands 131 and 132 are each provided with two suction nozzles 142A and 142B that can suck and hold the electronic component 106 and detach the held electronic component 106. The distance between the two suction nozzles 142A and 142B can be adjusted in the X-axis direction, and can be moved up and down independently in the Z-axis direction, which is a third direction perpendicular to the plane direction having the X-axis and the Y-axis. In other words, the electronic component 106 can be sucked and detached independently.

Both robot hands 131 and 132 are configured to be individually movable in the X-axis direction by a timing belt (not shown). The timing belt is guided by a guide rail (not shown) that extends in the X-axis direction and can travel endlessly in the X-axis direction. The supply robot 110 can move from one end to the other end in the width direction of the supply empty tray 109 from the supply tray 110, and the recovery robot hand 132 passes through the recovery first tray 111 from one end of the recovery empty tray 114 to the recovery third tray 11 3. It is possible to move to the other end.

  As shown in FIGS. 7 and 8, both ends of the guide bar 141 in the longitudinal direction are respectively attached to a pair of transmission belts 147 and 147 extending in the Y-axis direction. Each transmission belt 147 is spanned between a pair of belt wheels 148 and 148 arranged at a predetermined distance in the Y-axis direction. A driving motor 149 is connected to each one of the belt wheels 148 so as to be able to transmit power, and the driving force of the pair of driving motors 149 and 149 is passed through the pair of belt wheels 148 and 148. 147 and 147 can each transmit power.

  Thus, when the left and right drive motors 149 and 149 are driven, the pair of transmission belts 147.147 travels in the Y-axis direction. As a result, the supply robot hand 131 and the collection robot hand 132 held by the guide bar 141 approach the rotation measurement robot 171 or move away from the rotation measurement robot 171 according to the rotation direction of the drive motor 149, respectively. Moved individually. When the guide bar 141 moves in the Y-axis direction and the guide bar 141 moves in the axial direction, the two suction nozzles 142A of the supply robot hand 131 move when approaching the rotation measuring robot 171. 142A conveys the two electronic components 106 and 106 before measurement sucked and held by the supply tray 110 to the supply conveyance body 133. On the other hand, the two electronic parts 106 and 106 after measurement held by the two suction nozzles 142B and 142B of the collection robot hand 132 when moving in a direction away from the rotation measuring robot 171 are three. It is conveyed to one of the two collection trays.

  The rotation measuring robot 171 is the same as the rotation measuring robot 71 in the first embodiment described above. The difference is that the shape and size of the parts related to the size and shape of the electronic component are different. This is the point. Therefore, here, the detailed description of the rotation measuring robot 171 uses only the description of the rotation measuring robot 71 and describes only the outline thereof. That is, the rotation measuring robot 171 includes a rotating pivot that is erected on the apparatus frame 154, a cylindrical rotating body 173 that is rotatably supported by the rotating pivot, and a pair of transports provided on the rotating body 173. Robots 174 and 175 and suction nozzles and the like provided on the transfer robots 174 and 175 are provided.

  The rotating body 173 is configured to be capable of rotating 180 degrees reciprocally about the rotation axis as a rotation center by the driving force of the driving motor. The pair of transfer robots 174 and 175 are arranged on the outer peripheral surface of the rotating body 173 so as to protrude radially outward at a position rotationally displaced by 180 degrees, and can be moved up and down independently. It is configured. The first transport robot 174 transports the electronic component 106 before measurement between the supply transport body 133 and the test socket 170, and the second transport robot 175 transports between the test socket 170 and the recovery transport body 134. The electronic component 106 after measurement is conveyed.

  The supply conveyance body 133 and the collection conveyance body 134 are disposed so as to face each other at a position opposite to the test socket 170 with the rotating body 173 interposed therebetween. Further, the supply transport body 133 and the recovery transport body 134 are placed on a pair of guide rails 155 and 155 extending in the X-axis direction, and are configured to be movable in the X-axis direction. As shown in FIG. 7, the supply transport body 133 is normally disposed at a position facing the supply tray 110, and is positioned on the electronic component transport side of the rotation measuring robot 171 by the operation of the first drive motor 156. It is transported between the position of the first transport robot 174. Further, the recovery transport body 134 is normally disposed at a position facing the recovery first tray 111, and the second transport robot 175 positioned on the electronic component transport side of the rotation measuring robot 171 by the operation of the second drive motor 157. It is conveyed between the positions of

  As the first drive motor 156 and the second drive motor 157, for example, a stepping motor can be applied, and the supply transport body 133 and the recovery transport body 134 are moved by a predetermined distance in the X-axis direction according to the input signal, Or, it can reciprocate a minute distance to generate fine vibrations.

  The supply transport body 133 and the recovery transport body 134 have the same shape and structure, and are provided with four pockets 160 formed of quadrangular concave portions on the top surface of a rectangular main body arranged in two rows. It has been. As shown in FIGS. 9A to 9D, the pockets 160 of both the carriers 133 and 134 are formed as rectangular recesses that are slightly larger than the electronic component 106 to be inspected. And the taper part 161 inclined inward is provided in the edge of the four sides of the pocket 160, respectively, By guide | inducing each side of the electronic component 106 with these taper parts 161-161, the predetermined position in the pocket 160 is provided. The electronic component 106 is arranged in a correct posture (the state shown in FIGS. 9A to 9B).

  The shape and dimensions of the pocket 160 for storing the electronic component 106 vary depending on the shape and size (size) of the electronic component 106 to be measured, but the size of the opening is necessary for placing the electronic component 106. It is preferable to set a size obtained by adding an allowable value of about 0.5 mm to 0.6 mm to the size of the mounting portion. Thus, if the size of the opening is set to the size of the electronic component 106 plus an allowable value of 0.5 to 0.6 mm, the electronic component 106 is completely stored in the pocket 160. This is because it is possible to perform measurement by connecting all terminals of the electronic component 106 to predetermined terminals.

  Note that the inclination angle of the taper portion 161 of the electronic component 106 is preferably set within a range of 18 degrees to 25 degrees. When the inclination angle of the taper portion 161 is within a range of 18 ° to 25 °, the electronic component 106 is arranged so as to be caught by the taper portion 161 of the pocket 160 without requiring high conveyance position accuracy. Even so, there is an advantage that the electronic component 106 is slid into the placement portion by its own weight and is placed in a correct posture on the predetermined placement portion.

A suction hole 165 penetrating each of the transport bodies 133 and 134 in the vertical direction is provided at the center of the bottom surface of the supply transport body 133 and the recovery transport body 134. The suction hole 165 is used to detect the quality of the electronic component 106 accommodated in the pocket 160. The suction hole 165, a suction device (not shown) communicated with the suction hole 165, and a suction A posture detector is constituted by a pressure detector (not shown) that detects the pressure in the hole 165. The determination of the posture acceptability by the posture detector, electronic components 106 can be performed by looking at the suction pressure of the pocket 160 is housed.

That is, as shown in FIGS. 9A and 9B, when the electronic component 106 is correctly placed at a predetermined position, the suction hole 165 is blocked by the electronic component 106. Therefore, in this case, since the suction pressure is large (negative pressure is large), it can be known that the electronic component 106 is correctly arranged at a predetermined position. On the other hand, as shown in FIG. 9C and FIG. 9D, when the electronic component 106 is caught by the edge of the pocket 160 and is not correctly arranged at a predetermined position, the suction hole 165 is blocked by the electronic component 106. There is no. Therefore, in this case, since the suction pressure is small (negative pressure is small), it can be known that the electronic component 106 is not correctly arranged at a predetermined position. A detection signal of this attitude detector is supplied to the control unit 105.

A schematic configuration of the electronic component inspection apparatus 101 having the above-described configuration is shown as a block diagram in FIG.
The operations of the measurement unit 104, the IC handler 103, and the tray unit 102 of the electronic component inspection apparatus 101 are controlled by the control unit 105 to execute predetermined operations. The control unit 105 is the same as the control unit 5 in the first embodiment described above, and has a configuration as shown in FIG. Therefore, the description of the control unit 105 is omitted here.

The outline of the operation of the electronic component inspection apparatus 101 having such a configuration is as follows.
The supply robot hand 131 moves to the leading position of the supply tray 110 and moves up and down to suck and hold the two electronic components 106 and 106 at the first position of the supply tray 110. Then, the supply robot hand 131 conveys the two electronic components 106 and 106 to the initial storage position of the supply conveyance body 133, and moves up and down to separate into the two pockets 160 and 160 of the supply conveyance body 133. Store. Further, the supply robot hand 131 moves to the next position of the supply tray 110, moves up and down, sucks and holds the two electronic components 106 and 106, and supplies the two electronic components 106 and 106 to the supply transport body. The two pockets 160 and 160 of 133 are separated and stored. As a result, four electronic components 106 to 106 are arranged one by one in the four pockets 160 to 160 of the supply transport body 133, and the first transport robot 174 of the rotation measuring robot 171 is positioned in the supply transport body 133. It is moved to the electronic component transfer position.

  In response to this, the first transfer robot 174 of the rotation measuring robot 171 sucks and holds the four electronic components 106 to 106 housed in the four pockets 160 to 160 of the supply transfer body 133, and then holds the rotation body 173. Rotate 180 degrees. Thereby, the first transfer robot 174 moves to the test side position, and the second transfer robot 175 moves to the product transfer position. At the same time, the supply transport body 133 returns to the initial position facing the supply robot hand 131.

  After the rotation measuring robot 171 rotates 180 degrees, the first transfer robot 174 places the four electronic components 106 to 106 at predetermined positions of the test socket 170 and starts measuring the four electronic components 106 to 106. . At the same time, the collection conveyance body 134 moves to the product conveyance position of the rotation measuring robot 171, and the second conveyance robot 175 transfers the four electronic components 106 to 106 after the measurement to the four pockets 160 to 160 of the collection conveyance body 134. Separate into 160 and store. Thereafter, the collection transport body 134 returns to the initial position, and the collection robot hand 132 moves to that position.

  The collection robot hand 132 moves up and down to suck and hold the two electronic components 106 and 106 after measurement, and according to the measurement result, the collection first tray 111, the collection second tray 112, or the collection third tray 113. Move to one of the positions. Then, the suction nozzle 142B of the collecting robot hand 132 is moved up and down to dispose the two electronic components 106 and 106 in the two pockets 116 of the tray. The collection robot hand 132 again moves to the position of the collection conveyance body 134, moves up and down, and sucks and holds the two electronic components 106 and 106. Depending on the measurement result, the collection first tray 111 and the collection first are collected. It moves to either the second tray 112 or the collection third tray 113. Then, the suction nozzle of the collection robot hand 132 is moved up and down to dispose the two electronic components 106 and 106 in the two pockets 116 of the tray.

  Thus, the electronic parts 106 before measurement stored in the supply tray 110 are transferred by the delivery robot hand 131, the supply transport body 133, the rotation measurement robot 171, the recovery transport body 134, and the recovery robot hand 132. Depending on the measurement results of performance, characteristics, etc., they are sequentially transported to any one of the collection trays from the collection first tray 111 to the collection third tray 113, and are separated from the pocket 116.

  The detailed operation of the electronic component inspection apparatus 101 having such a configuration is, for example, as follows. 11 and 12 are flowcharts showing the operation of the control unit 105 in the electronic component inspection apparatus 101. FIG. In this case, in advance, ten or more trays in which the electronic components 106 to be measured are stored in the pockets 116 are stacked on the supply tray 110. On the other hand, trays with empty pockets are arranged in the recovery first tray 111, the recovery second tray 112, and the recovery third tray 113, respectively, and the pockets 116 are empty in the recovery empty tray 114. Place dozens of stacked trays. Generally, measurement of performance and function of the electronic component 106 is started in such a tray arrangement state.

  As shown in FIG. 11, when the supply and storage of the electronic component 106 is started, first, the supply robot hand 131 moves to the supply tray 110 in step S31. This is because the guide bar 141 is moved in the Y-axis direction and the supply robot hand 131 is moved in the X-axis direction, and the suction nozzle 142A of the supply robot hand 131 is moved above the pocket 116 at the first position of the supply tray 110. It is executed by positioning. Next, the process proceeds to step S <b> 32, and the electronic component 106 as a product is sucked and held by the suction nozzle 142 </ b> A of the supply robot hand 131. Next, the process proceeds to step S33, and the supply robot hand 131 is transferred to the supply transfer body 133 at the second position. This operation is also executed by moving the guide bar 141 in the Y-axis direction and moving the supply robot hand 131 in the X-axis direction.

  Next, the process proceeds to step S 34, and the two electronic components 106 and 106 held by the two suction nozzles 142 A and 142 A of the supply robot hand 31 are placed in the two pockets 160 and 160 of the supply transport body 133. Separate and store. This is executed by releasing the suction force of the suction nozzle 142 </ b> A and dropping it into the pocket 160 by the weight of the electronic component 106.

Next, the process proceeds to step S <b> 35, and it is determined whether or not each electronic component 106 stored in the pocket 160 of the supply transport body 133 is placed on the mounting portion in a correct posture. Although the posture of the electronic component 106 is determined for each electronic component 106 accommodated in the collection conveyance body 134, the determination method is the same as that for the electronic component 106 of the supply conveyance body 133. The description is omitted. The determination of the step S35, the posture detector (those for electronic component 106 of the recovered carrier 134 by the posture detector.) Is performed based on the detection signal of.

That is, as shown in FIGS. 9A and 9B, when the electronic component 106 is arranged in a correct posture at a predetermined position in the pocket 160, the suction force when the electronic component 160 is attracted to the pocket 160 by the posture detector . You can know by watching. That is, if the pressure value detected by the pressure detector of the attitude detector is a large value, it is determined that it is arranged in the correct attitude shown in FIGS. 9A and 9B, and if the detected pressure value is a small value, It determines with arrange | positioning with the incorrect attitude | position shown to 9C and 9D. If it is determined in step S35 that the electronic component 106 is disposed in the correct posture in the pocket 160, the process proceeds to step S38. If it is determined that the electronic component 106 is disposed in the incorrect posture, the process proceeds to step S36. Transition.

  In step S36, since the electronic component 106 is not arranged at a predetermined position in the pocket 160 in a correct posture, the posture of the electronic component 106 is corrected by slightly vibrating the supply transport body 133. Then, the process proceeds to step S <b> 37, and it is determined again whether or not the electronic component 106 is arranged in a correct posture at a predetermined position in the pocket 160. Details of the micro-vibration operation from step S35 to step S37 are shown in FIG.

In FIG. 12, the suction pressure by the suction device of the posture detector is detected in step S35A, and when the pressure value is a large value (a large negative pressure), the electronic component 106 is correctly positioned at a predetermined position in the pocket 160. It determines with having arrange | positioned with the attitude | position, and transfers to step S38. On the other hand, if the value of the suction pressure by the suction device is a small value (small negative pressure), it is determined that the electronic component 106 is disposed in a wrong posture at a predetermined position in the pocket 160, Control goes to step S35B.

  In step S35B, it is determined whether the negative pressure detection time by the suction device has passed a predetermined time. In this determination, when the predetermined detection time has not elapsed, the process returns to step S35A, and the processes of step S35B and step S35B are repeated. On the other hand, if the predetermined detection time has elapsed in the determination in step S35B, the process proceeds to step S36A and step S36B, and an attitude correction operation for correcting the attitude of the electronic component 106 is executed.

  That is, in step S36A, the supply transport body 133 is moved to one side in the X-axis direction (forward rotation) through the operation of the transport body drive mechanism 137, and then the process proceeds to step S36B, where the transport body drive mechanism 137 is moved. Through this operation, the supply transport body 133 is moved to the other side in the X-axis direction (reverse movement). Then, the process proceeds to step S36C, and it is determined whether or not the forward movement and the reverse movement of the supply transport body 133 have been performed a predetermined number of times. In this determination, when the forward rotation movement and the reverse rotation movement of the supply transport body 133 are not performed a predetermined number of times, the process returns to step S36A, and the fine vibration operation in steps S36A and S36B is repeated until the predetermined number of times is performed. On the other hand, when the forward rotation movement and the reverse rotation movement of the supply transport body 133 have been performed a predetermined number of times, the process proceeds to step S37A.

  The amplitude of the minute vibration that repeats the forward movement and the reverse movement of the supply conveyance body 133 based on this step S36 is preferably in the range of 0.5 mm or more and 1.0 mm or less. If the amplitude of the minute vibration is within a range of 0.5 mm to 1.0 mm, the time during which the electronic component 106 is arranged on the placement portion of the pocket 160 by the minute vibration is within a practical range, and the electronic component 106 Is advantageous in that it can be prevented from jumping out from the opening edge of the pocket 160.

  The vibration time of the supply conveyance body 133 is preferably in the range of 0.5 second to 2.0 seconds, and the frequency of the fine vibration is preferably in the range of 100 Hz to 200 Hz. If the minute vibration time is in the range of 0.5 seconds to 2.0 seconds, the decrease in the transport operation of the IC handler 103 due to the vibration time can be kept within a practical range. And if the vibration frequency of the supply conveyance body 133 is in the range of 100 Hz to 200 Hz, when the electronic component is an IC, LSI, or the like, the function / characteristics inside the electronic component may be damaged by slight vibration. There is no merit.

  In addition, although a method is also conceivable in which an electronic component is conveyed while always giving a slight vibration, in that case, an excessive burden may be imposed on a plurality of conveying robots and the like. For this reason, a method of giving a fine vibration operation only when a storage error in the pocket of the supply conveyance body 133 (also in the case of the collection conveyance body 134) occurs is preferable.

In step S37A, based on the detection result of the posture detector , it is determined again whether or not the electronic component 106 is placed at a predetermined position in the pocket 160 in a correct posture. In this determination, when the value of the suction pressure by the suction device of the posture detector is a large negative pressure, it is determined that the electronic component 106 is arranged in a correct posture at a predetermined position in the pocket 160, and step S38. Migrate to On the other hand, when the value of the suction pressure by the suction device is a small negative pressure, it is determined that the electronic component 106 is disposed in an incorrect posture at a predetermined position in the pocket 160, and the process proceeds to step S37B. To do.

  In step S37B, it is determined whether the negative pressure detection time by the suction device has passed a predetermined time. In this determination, when the predetermined detection time has not elapsed, the process returns to step S37A, and the processes of step S37A and step S37B are repeated. On the other hand, if the predetermined detection time has passed in the determination in step S37B, it is determined that the electronic component 106 could not be corrected to the correct posture even by this fine vibration method, and a warning message is displayed. Then, the conveying operation of the IC handler 103 is temporarily stopped. Then, the electronic component 106 missed by the operation operator of the electronic component inspection apparatus 101 is removed, or the arrangement state of the electronic component 106 is improved and the conveying operation is repeated again.

  Next, in FIG. 11, in step S <b> 38, the supply robot hand 131 is moved to the initial position of the supply conveyance body 133 and then moved to the position on the electronic component supply side of the rotation measurement robot 171. Next, the process proceeds to step S39, and the electronic component 106 is sucked and held by the first transfer robot 174 of the rotation measuring robot 171 located on the electronic component supply side. And it transfers to step S40 and returns the supply conveyance body 133 to the first position. Next, the process proceeds to step S41, and the collection carrier 134 is moved to a position on the electronic component supply side. Then, the process returns to step 31.

  On the other hand, in parallel with the process of step S40, the process proceeds to step S42 to determine whether or not the measurement operation of the electronic component 106 by the rotation measurement robot 171 is performed. If it is determined in step S42 that the electronic component 106 is being measured, the process in step S42 is repeated until the measurement operation is completed. On the other hand, when it is determined that the measurement operation of the electronic component 106 is not in progress, the process proceeds to step S43 and the second transfer robot 75 located on the socket side of the rotation measurement robot 171 is raised, The rotating body 173 of the rotation measuring robot 171 is rotated 180 degrees, the second transfer robot 175 is moved to the electronic component supply side, and the first transfer robot 174 is moved to the test socket side.

  Next, the process proceeds to step S44, where the suction nozzle of the second transfer robot 175 is lowered to suck and hold the electronic component 106 before measurement, the electronic component 106 is set in the test socket 170, and the electronic component 106 Start measuring. Then, after the measurement of the electronic component 106 is completed, the process returns to step S39. In parallel with the processing of step S44, the process proceeds to step S45, and the measured electronic component 106 held by the suction nozzle of the second transfer robot 175 is stored in the pocket 160 of the collection transfer body 134. Subsequently, the process proceeds to step S46, and the collection carrier 134 is returned to the initial position.

  Next, the process proceeds to step S <b> 47, and the collection robot hand 132 is moved to the position of the collection conveyance body 134. Next, the process proceeds to step S48, and the measured electronic component 106 is sucked and held by the suction nozzle 142B of the collection robot hand 132. Then, the process proceeds to step S49, and the collection robot hand 132 is moved to the position of the corresponding collection tray according to the measurement result of the measured electronic component. Thereafter, the process proceeds to step S50, the suction nozzle 142B of the collection robot hand 132 is lowered, and the measured electronic component 106 is detached and stored in the pocket 116 of the collection tray.

  Next, it transfers to step S51 and it is determined whether the measurement of the electronic component 106 is continued. This determination is performed by checking whether or not the number of measured electronic components 106 has reached the number of measurements input before the start of measurement. In step S51, when the number of measurements has not reached the numerical value input in advance, it is determined that the operation is continued, the process returns to step S41, and the above processing is repeated. On the other hand, when the number of measurements has reached the numerical value input in advance, the process is terminated. Through the above processing, the performance / characteristics of the electronic component 106 can be inspected.

  Even when a transport error by the IC handler 103 occurs during the measurement of the electronic component 106 as described above, the transport error is corrected to correct the transport error at a predetermined position in the pocket 160 by performing the correction operation by the fine vibration. The electronic component 106 can be disposed, and the electronic component 106 can be efficiently inspected without causing a stagnation in measurement work.

  As described above, the present invention is not limited to the first and second embodiments described above, and various modifications can be made within an equivalent range, and the invention described in the claims. It will be readily appreciated by those skilled in the art that various modifications can be made within the scope of the above.

DESCRIPTION OF SYMBOLS 1,101 ... Electronic component inspection apparatus 2,102 ... Tray part, 3,103 ... IC handler, 4,104 ... Measurement part, 5,105 ... Control part, 6,106 ... Electronic part, 10,110 ... Supply tray 11, 111 ... Recovery first tray, 12, 112 ... Recovery second tray, 13, 113 ... Recovery third tray, 14, 114 ... Empty tray for recovery, 15, 115 ... Tray transporter, 20, 120 ... Adsorption Pad 31, 131 ... Supply robot hand, 32, 132 ... Recovery robot hand, 33, 34, 35 ... Rotating carrier, 36 ... Rotating table, 37 ... Table drive mechanism (moving mechanism), 38, 39 ... Posture detector 50 ... Drive motor 52 ... Transmission belt 60,160 ... Pocket 61,161 ... Tapered portion 62 ... Photometric groove 70,170 ... Test socket 71 171 ... Rotation measuring robot, 74,75,174,175 ... Transport robot, 76 ... Suction nozzle, 80 ... Control device, 109 ... Supply empty tray, 133 ... Supply carrier (moving carrier), 134 ... Recovery carrier ( (Moving carrier), 137 ... reciprocating mechanism, 165 ... suction hole

Claims (5)

An electronic component attitude correction device for an IC handler that conveys electronic components between a first pocket of a tray at a first position and a second pocket of a rotary carrier or a movable carrier at a second position ,
The electronic component housed in the second pocket in the second position is placed in a correct posture by the robot hand that sucks and holds the electronic component and conveys it between the first pocket and the second pocket. an attitude detector for detecting whether it has,
When the electronic component in accordance with a detection result of the previous SL posture detector are not arranged in the correct position, to check with the rotary conveyance member or the moving carrier of the second position, the quality of the electronic component A posture correcting mechanism that operates a moving mechanism that moves in a horizontal direction with the rotation measuring robot to cause the rotating and conveying body to rotate forward and backward , or to reciprocate the moving and conveying body;
An electronic component posture correcting device for an IC handler. The moving mechanism of the rotary transport body is a rotary table for circulating the rotary transport body on a track passing through the second position;
A table drive mechanism for rotating the rotary table, Ru provided with,
Electronic components posture correction device of 請 Motomeko 1 IC handler described. Wherein the moving mechanism of the moving carrier is the moving carrier, Ru with a reciprocating mechanism for reciprocating the orbit passing through the second position,
Electronic components posture correction device of 請 Motomeko 1 IC handler described. The reciprocating movement of the forward operation and the reverse operation or the moving carrier of the posture correcting said rotary conveying member by mechanism, the amplitude is in the range from 0.5mm to 1.0 mm, vibration time from 0.5 seconds 2 Within the range of .0 seconds ,
Electronic component attitude adjustment device 請 Motomeko 2 or 3 IC handler according. An electronic component attitude correction method for an IC handler that conveys electronic components between a first pocket of a tray and a second pocket of a rotary carrier or a movable carrier,
Detecting said electronic component posture stored in the second pocket of said held attraction rotating conveying member or the mobile carrier by the robot hand in a posture detector to determine the quality of the attitude,
Depending on the determination result, when the electronic component is not arranged in the correct posture with respect to the second pocket, the rotating carrier is moved forward and backward in the horizontal direction or the moving carrier is moved in the horizontal direction. A method of correcting an electronic component posture of an IC handler, wherein the electronic component is corrected to reciprocate so that the electronic component is disposed in a correct posture in the second pocket.

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