JP2013071230A - Positioning mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily position a plate-like workpiece in a temporary placement means before the plate-like workpiece is conveyed to the center of a machining table.SOLUTION: A temporary placement means 20 includes a temporary placement table base 21, at least two side face supports 22 and 22a, and a temporary placement table 23 for temporarily placing the plate-like workpieces 3a and 3b. The temporary placement table base 21 is inclined downward in a perpendicular direction to a line connecting the two side face supports from the center of the temporary placement table, a blow-up port 24 for blowing up air is formed on the temporary placement table 23, and an air supply source 26 for blowing up the air is connected to the blow-up port 24. The plate-like workpieces 3a and 3b are floated by the air blown up from the blow-up port 24 of the temporary placement table 23 and moved to the lower part of the temporary placement table base 21 by the dead weight of the plate-like workpieces 3a and 3b, side faces of the plate-like workpieces 3a and 3b are brought into contact with the two side face supports 22 and 22a, and positioning is completed.

Description

  The present invention relates to a positioning mechanism for aligning the center of a workpiece with the center of a processing table.

  In a processing device in which a plate-shaped workpiece is transferred from the temporary placement table to the processing table and processed, the plate shape is set so that the center of the processing table coincides with the center of the plate-shaped workpiece in order to perform processing with high accuracy. The workpiece is conveyed to the machining table (see, for example, Patent Documents 1 and 2 below).

  As a method for transporting the plate workpiece to the machining table so that the center of the machining table and the center of the plate workpiece are aligned, for example, the center of the plate workpiece is aligned with the center of the temporary table, and the temporary placement is performed. A method of transporting a plate-like work by a transport means that moves from the center of the table to the center of the processing table, or a means of transport that moves from the center of the temporary placement table to the center of the processing table by detecting the center of the plate-like work using a temporary placement table. There is a method in which the difference between the center of the table and the center of the plate workpiece is corrected and conveyed. In any of the alignment methods, a drive shaft for aligning the center of the plate-like workpiece on the temporary placement table is required.

JP 2004-255568 A Japanese Patent Laid-Open No. 7-211766

  However, in the temporary placement table as described above, for example, the plate-like workpiece held on the temporary placement table is rotated by the rotation of the drive shaft, and the center of the plate-like workpiece and the center of the processing table are matched. Therefore, a mechanism for alignment for conveying the plate-like workpiece to the center of the processing table is complicated.

  The present invention has been made in view of the above circumstances, and provides a positioning mechanism that can easily perform positioning of a plate-shaped workpiece for transporting so that the center of the plate-shaped workpiece and the center of the processing table coincide with each other. The purpose is to provide.

  The present invention relates to a processing apparatus provided with a temporary placing means for temporarily placing a plate-like work and a carrying-in means for carrying the plate-like work into the temporary placing means, and positioning the plate-like work at a predetermined position of the temporary placing means. With regard to the positioning mechanism, the temporary placement means includes at least two side surface support portions that support the side surface of the plate-like workpiece on the temporary placement table base, and a temporary placement table that temporarily places the plate-like workpiece in the center. The base is inclined downward in a direction perpendicular to the line connecting the two side support portions from the center of the temporary table, and a blow-up port for blowing air is formed on the temporary table, and air is blown on the blow-up port. The plate-like workpiece to which the air supply source is connected and is carried in by the carrying-in means is levitated by the air blown up from the blow-up port of the temporary placing table, and is temporarily laid by the weight of the plate-like workpiece. Can move downward in the table base, the sides of the plate-shaped workpiece is in contact with the two side supports positioning is completed.

  In the above positioning mechanism, a plurality of side support fixing holes that can attach and fix the side support to the temporary table base are provided, and the shape and size of the plate-like workpiece are obtained by inserting the side support into the side support fixing holes. It is desirable to be able to respond to changes in

  In the present invention, the temporary placement table base in the temporary placement means is provided with at least two side surface support portions for supporting the side surface of the plate-like workpiece and a temporary placement table for temporarily placing the plate-like workpiece in the center. Is inclined downward in a direction perpendicular to the line connecting the two side support portions from the center of the temporary table, and the temporary table is provided with an air outlet for blowing air, and an air supply source for blowing air to the air outlet Since the plate-like workpiece is levitated by the air blown up from the air outlet, the plate-like workpiece is moved downward by the weight of the plate-like workpiece and brought into contact with the two side support portions. The center of the workpiece can be positioned at a certain position, and the plate-like workpiece can be transferred from that center to align with the center of the processing table.Therefore, a drive shaft for centering the plate workpiece is not required, and the center of the plate workpiece and the center of the processing table can be easily aligned. In addition, the number of parts in the positioning mechanism can be reduced.

  In addition, since the temporary table base is provided with a plurality of side support fixing holes for attaching and fixing the side support, the side support is provided in each side support fixing hole in accordance with the change in the size of the plate-like workpiece. By inserting, each plate-like workpiece can be centered corresponding to plate-like workpieces having different shapes and sizes.

It is a perspective view which shows typically an example of the processing apparatus provided with the temporary placement means which is a positioning mechanism. It is a top view which shows the 1st example of the temporary placement means to perform center alignment of a circular plate-shaped workpiece. It is a front view which shows the 1st example of the temporary placement means to perform center alignment of a circular plate-shaped workpiece. It is a top view which shows the 2nd example of the temporary placement means to perform center alignment of a circular plate-shaped workpiece. It is a front view which shows the 2nd example of the temporary placement means which centers the circular plate-shaped workpiece. It is a top view which shows the 1st example of the temporary placement means which centers the square-shaped plate-shaped workpiece | work. It is a front view which shows the 1st example of the temporary placement means which centers the square-shaped plate-shaped workpiece | work. It is a top view which shows the 2nd example of the temporary placement means to perform center alignment of a rectangular plate-shaped workpiece. It is a top view which shows the 1st example of the temporary placement means which can respond to the change of the size of a plate-shaped workpiece. It is a top view which shows the 2nd example of the temporary placement means which can respond to the change of the size of a plate-shaped workpiece.

  A processing apparatus 1 shown in FIG. 1 is an example of a processing apparatus that includes a positioning mechanism according to the present invention, holds a plate-like workpiece on a processing table 6, and performs a grinding process. The processing apparatus 1 is configured by arranging various apparatuses for conveying, positioning, grinding, and cleaning a workpiece on the upper surface of a rectangular base 2.

  As shown in FIG. 1, a disc-shaped rotary table 5 is disposed near the center of the upper surface of the base 2. The rotary table 5 is provided with a plurality of processing tables 6 that can hold and rotate the workpiece. And the process table 6 can be revolved by rotation of the turntable 5. FIG.

  A supply cassette 4A and a recovery cassette 4B are provided in the upper front part of the base 2, and the workpieces before processing are stacked and accommodated in the supply cassette 4A, and the processed workpieces after processing are stored in the recovery cassette 4B. Objects are stacked and accommodated.

  In the vicinity of the supply cassette 4A and the recovery cassette 4B, loading means 10 for carrying out the workpiece from the supply cassette 4A and loading the workpiece into the recovery cassette 4B is disposed. The carry-in means 10 includes a robot pick 11 for taking out a workpiece and a bendable arm 12. The carry-in means 10 is supported by a side portion of a linear motion rail 13 extending in the X-axis direction. 13 can be moved linearly in the X-axis direction.

  As shown in FIG. 1, in the vicinity of one end of the linear motion rail 13, a temporary placement means 20 is disposed in the movable region of the carry-in means 10 to temporarily place the workpiece and align it. The temporary placement means 20 includes a temporary placement table base 21, two side surface support portions 22 that support the side surface of the workpiece, and a temporary placement table 23 that temporarily places the workpiece in the center of the temporary placement table base 21. It has.

  As shown in FIG. 1, a conveying means 30 that conveys a workpiece from the temporary placement table 23 to the machining table 6 is disposed on the upper surface of the base 2. The conveyance means 30 includes a linear motion shaft 31 that enables the workpiece to be conveyed from the temporary placement table 23 to the machining table 6, and a suction pad 32 that sucks and holds the workpiece and moves along the linear motion shaft 31. I have.

  A first processing means 40 that performs rough grinding on the workpiece and a second processing means 50 that performs finish grinding on the workpiece that has been subjected to rough grinding are arranged at the rear of the upper surface of the base 2. It is installed. Further, on the right side of the upper surface of the base 2, third processing means 60 for performing dry polishing processing or the like for removing the grinding distortion formed on the workpiece and flattening it is disposed. The third processing means 60 is supported by a support plate 61 and can move the linear motion rail 62 in the X-axis direction. The third processing means 60 is not limited to the one that performs dry polishing. For example, a CMP process may be performed.

  Next, on the left side of the upper surface of the base 2, a transfer robot 70 for transferring the processed workpiece held on the processing table 6 is disposed. The transfer robot 70 includes a pivotable arm 71 and a suction pad 72 attached to the tip of the arm 71. The transfer robot 70 is disposed on a rectangular parallelepiped rail 73 and can freely move on the linear rail 73 in the Y-axis direction.

  In the movable area of the transfer robot 70 on the front surface of the upper surface of the base 2, a cleaning means 80 for cleaning the processed workpiece is disposed. The cleaning means 80 includes a cleaning nozzle 81 for spraying a cleaning liquid and a spinner table 82 that can rotate at high speed.

  In the following, a plurality of examples of the configuration of the positioning mechanism according to the present invention will be described.

  The temporary placement means 20 shown in FIG. 2 is a first example of a positioning mechanism for centering a circular plate-shaped workpiece 3a. The temporary placement means 20 includes a temporary placement table base 21, two side surface support portions 22 that support the side surfaces of the plate-like workpiece 3 a, and a temporary placement table that temporarily places the plate-like workpiece 3 a in the center of the temporary placement table base 21. 23.

  As shown in FIG. 3, the temporary placement table base 21 is supported by a plurality of support portions 7 </ b> A and 7 </ b> B that are erected on the upper surface of the base 2. In the present embodiment, the height of the support portion 7A is adjusted to be lower than the height of the support portion 7B, and the temporary table base 21 is inclined so that the side on which the side surface support portion 22 is disposed is lowered. It is supported in the state. Further, the temporary placement table 23 disposed on the temporary placement table base 21 is also inclined in the same direction as the inclination of the temporary placement table base 21.

  The side support portions 22 shown in FIG. 2 are formed in a rectangular parallelepiped shape, and at least two side support portions 22 are disposed on the upper surface of the temporary placement table base 21 on the side where the height is low. As shown in FIG. 2, the temporary placement table base 21 is inclined downward from the center of the temporary placement table 23 toward the direction of the perpendicular 230 to the line 220 connecting the centers of the two side surface support portions 22.

  As shown in FIG. 3, the temporary placement table 23 is disposed at the center of the upper surface of the temporary placement table base 21, and a blowing port 24 for blowing air is formed at the center of the temporary placement table 23. In addition, an air hole that communicates with the blowing port 24 and sends air to the blowing port 24 is formed in the central portion of the temporary placement table base 21, and a supply nozzle 25 is provided directly below the air hole. The supply nozzle 25 is connected to an air supply source 26.

  In the temporary placement means 20 configured as described above, the plate-like workpiece 3 a is carried from the supply cassette 4 </ b> A by the carry-in means 10 shown in FIG. 1 and placed on the temporary placement table 23. In the temporary placement means 20, the air sent from the air supply source 26 is blown up by the blow-up port 24, so that the plate-like workpiece 3 a placed on the upper surface of the temporary placement table 23 is pushed up and floated. After that, when the blowing of air from the blow-up port 24 is stopped, the plate-like workpiece 3a that has been levitated falls due to its own weight and moves toward the lower side of the inclined temporary table base 21. At this time, the downward direction of the plate-like workpiece 3a is the direction of the arrow of the perpendicular line 230 shown in FIG. Therefore, positioning can be completed by bringing the side surface of the plate-like workpiece 3a into contact with the side surface support portion 22 without causing much friction or collision between the plate-like workpiece 3a and the side surface support portion 22 in the descending process.

  The temporary placement means 20a shown in FIG. 4 is a second example of a positioning mechanism for centering a circular plate-shaped workpiece 3a. The side surface support part 22a in this example is formed in a columnar shape. This side surface support part 22a is arrange | positioned on the circular arc centering on the center of the temporary placement table 23, and the surrounding surface is a contact surface which contacts the plate-shaped workpiece | work 3a. The temporary placement table base 21 is inclined downward from the center of the temporary placement table 23 toward a perpendicular line 230a to a line 220a connecting the centers of the two side surface support portions 22a.

  As shown in FIG. 5, similarly to the example shown in FIG. 3, an air outlet 24 that blows air is formed at the center of the temporary placement table 23, and the temporary placement table base 21 also communicates with the air outlet 24. And a supply nozzle 25 is provided directly below the air opening of the temporary table base 21. The supply nozzle 25 is connected to an air supply source 26.

  Also in the temporary placement means 20a shown in FIGS. 4 and 5, when the circular plate-shaped workpiece 3a is carried in and placed on the temporary placement table 23 by the carry-in means 10 shown in FIG. By blowing up the incoming air through the blow-up port 24, the plate-like workpiece 3a is pushed upward and floated. Thereafter, when the blow-up of air from the air outlet 24 is stopped, the plate-like workpiece 3a that has floated moves toward the lower side of the temporary placement table base 21 that is supported by being tilted by its own weight. At this time, the downward direction of the plate-like workpiece 3a is the direction of the arrow of the perpendicular line 230a shown in FIG. Therefore, the positioning can be completed by bringing the plate-like workpiece 3a into contact with the side surface support portion 22a without causing much friction or collision between the plate-like workpiece 3a and the side surface support portion 22a.

  The temporary placement means 20b shown in FIG. 6 is a first example of a positioning mechanism for centering a rectangular plate-shaped workpiece 3b. The temporary placing means 20b includes a rectangular parallelepiped side support 22 and a cylindrical side support 22a one by one. The temporary placement table base 21 is inclined downward from the center of the temporary placement table 23 toward a perpendicular line 230b to a line 220b connecting the centers of the two side surface support portions 22 and 22a.

  As shown in FIG. 7, the structure in which the air from the air supply source 26 is blown up from the air outlet 24 is the same as the example shown in FIGS. 3 and 5. Also in the temporary placement means 20b shown in FIGS. 6 and 7, when the circular plate-like workpiece 3b is carried in and placed on the temporary placement table 23 by the carry-in means 10 shown in FIG. By blowing up the incoming air through the blow-up port 24, the plate-like workpiece 3b is pushed upward and floated. Thereafter, when the blow-up of air from the air outlet 24 is stopped, the plate-like workpiece 3b that has been lifted moves toward the lower side of the temporary placement table base 21 that is supported by being tilted by its own weight. At this time, the downward direction of the plate-like workpiece 3b is the direction of the arrow of the perpendicular line 230b shown in FIG. Therefore, the positioning can be completed by bringing the plate-like workpiece 3b into contact with the side surface support portion 22a without causing much friction or collision between the plate-like workpiece 3b and the side surface support portion 22a.

  The temporary placement means 20c shown in FIG. 8 is a second example of a positioning mechanism for centering a rectangular plate-shaped workpiece 3b. The temporary placement means 20c includes two rectangular parallelepiped side support portions 22 as in the temporary placement means 20 shown in FIGS. The temporary placement table base 21 is inclined downward from the center of the temporary placement table 23 toward a direction of a perpendicular line 230c to a line 220c connecting the centers of the two side surface support portions 22. The process until the plate-like workpiece 3b comes into contact with the side surface support portion 22 and is positioned is the same as the temporary placement means 20 shown in FIGS.

  The temporary placement means 20d shown in FIG. 9 is a first example of a positioning mechanism that can cope with changes in the shape and size of a plate-like workpiece. The temporary placement means 20 includes a temporary placement table base 21, two side surface support portions 22 that are fixed to the temporary placement table base 21 and support the side surfaces of the circular plate-shaped workpiece 3 a, and a plate in the center of the temporary placement table base 21. And a temporary placement table 23 for temporarily placing the workpiece 3a, and a plurality of side surface support portion fixing holes 27 for attaching and fixing the side surface support portion 22 are formed on the upper surface of the temporary placement table base 21.

  The side surface support portions 22 can be inserted into the respective side surface support portion fixing holes 27 in accordance with changes in the shape and size of the plate-like workpiece, as indicated by a two-dot chain line. Even if the side surface support portion 22 is fixed to any side surface support portion fixing hole 27, the direction from the center of the temporary placement table 23 to the perpendicular line 230 d from the center of the two side surface support portions 22, 22 a to the line 220 d. And tilted downward. Therefore, each plate-like workpiece can be centered corresponding to plate-like workpieces having different shapes and sizes.

  The temporary placement means 20e shown in FIG. 10 is a second example of a positioning mechanism that can cope with a change in the size of a plate-like workpiece. The temporary placing means 20e includes a plurality of cylindrical side support portions 22a. In the temporary placement means 20e, a plurality of side surface support portion fixing holes 27a for attaching and fixing the side surface support portions 22a to the upper surface of the temporary placement table base 21 are radially formed.

  The side support portions 22a can be inserted into the respective side support portion fixing holes 27a in accordance with the change in the size of the plate-like workpiece. Even if the side surface support part 22a is fixed to any side surface support part fixing hole 27, it is downward toward the direction of the perpendicular 230e from the center of the temporary placement table 23 to the line 220e connecting the centers of the two side surface support parts 22a. Leaning on. Therefore, also in this temporary placement means 20e, similarly to the temporary placement means 20d shown in FIG. 9, it is possible to center the respective plate-like workpieces corresponding to the plate-like workpieces having different shapes and sizes.

  In any of the examples described above, the plate-shaped workpiece is lifted upward by the air blown upward, the plate-shaped workpiece is lowered along the inclination of the temporary placement table 23, and the side support portion and the side surface of the plate-shaped workpiece are lowered. And the plate-shaped workpiece is supported at a fixed position, so the drive shaft for centering the plate-shaped workpiece is not required, and alignment is performed to align the center of the plate-shaped workpiece with the center of the processing table. It can be done easily.

  When the plate-like workpiece is positioned at a fixed position in the temporary placement means in this way, the plate-like workpiece is then transferred to the machining table 6 by the conveying means 30 shown in FIG. A plate-like workpiece can be held at a predetermined position.

  2 to 10 can be mounted on various processing apparatuses other than the processing apparatus 1 shown in FIG.

1: Processing device 2: Base 3a, 3b: Plate-like workpiece 4A: Supply cassette 4B: Collection cassette 5: Rotating table 6: Processing table 7A, 7B: Support unit 10: Loading means 11: Robot pick 12: Arm 13: Support rails 20, 20a, 20b, 20c, 20d, 20e: Temporary placing means (positioning mechanism)
21: Temporary placement table base 22, 22a: Side support 23: Temporary placement tables 230, 230a, 230b, 230c, 230d, 230e: Vertical line 24: Blowing port 25: Supply nozzle 26: Air supply source 27, 27a: Fixed hole 30: Conveying means 31: Linear motion shaft 32: Suction pad 40: First processing means 50: Second processing means 60: Third processing means 61: Support plate 62 Linear motion shaft 70: Conveying robot 71: Arm 72 : Adsorption pad 73: Linear motion rail 80: Cleaning means 81: Cleaning nozzle 82: Spinner table

Claims (2)

Positioning for positioning the plate-like workpiece at a predetermined position of the temporary-placement means in a processing apparatus comprising temporary placement means for temporarily placing the plate-like workpiece and loading means for carrying the plate-like workpiece into the temporary placement means Mechanism,
The temporary placement means includes at least two side surface support portions that support the side surfaces of the plate-like workpiece in the temporary placement table base, and a temporary placement table that temporarily places the plate-like workpiece in the center,
The temporary table base is inclined downward in a direction perpendicular to a line connecting the two side surface support portions from the center of the temporary table.
The temporary table is formed with a blow-up port for blowing air,
An air supply source for blowing air is connected to the air outlet,
The plate-like work carried in by the carrying-in means is levitated by the air blown up from the blow-up opening of the temporary placement table, moves toward the lower side of the temporary placement table base by its own weight, A positioning mechanism in which positioning is completed when the side surface of the plate-shaped workpiece contacts the two side surface support portions. The temporary table base is provided with a plurality of side support fixing holes that can fix the side support.
The positioning mechanism according to claim 1, wherein the side surface support portion is inserted into the side surface support portion fixing hole, so that the shape and size of the plate-like workpiece can be changed.

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