JP5841798B2 - Grinding equipment - Google Patents

Description

  The present invention relates to a grinding apparatus provided with a chuck table for sucking and holding a workpiece.

  Grinding of a plate-shaped workpiece or the like by a grinding apparatus is performed by holding the plate-shaped workpiece on a chuck table. Specifically, the chuck table is provided with a porous plate formed of a porous member and a base for supporting the porous plate, and a plate-like workpiece is sucked and held on the holding surface of the porous plate to thereby grind the grinding wheel. Grinding is performed by contacting the plate-like workpiece while rotating (see, for example, Patent Document 1 below).

JP 2004-014939 A

  However, in such a grinding apparatus, the plate-like workpiece is sucked and held on the holding surface of the porous plate of the chuck table, and the plate-like workpiece is ground while rotating the grinding wheel. When the suction force becomes larger than the holding force, the plate-like workpiece being ground may be displaced laterally from the holding surface of the porous plate. Therefore, if grinding is continued on the plate workpiece in this state, grinding failure may occur in the plate workpiece or the plate workpiece itself may be broken.

  The present invention has been made in view of the above circumstances, and during grinding of a plate-shaped workpiece, when the rotational force of the grinding wheel becomes larger than the suction force for sucking and holding the plate-shaped workpiece, the plate-shaped workpiece is The object is to prevent the chuck table from shifting laterally from the holding surface of the porous plate.

Grinding device according to the present invention includes at least with the grinding device and the chuck table, and a grinding means for grinding the disk-shaped workpiece held on the chuck table to suck and hold the disk-shaped workpiece, the chuck table suction area, to transmit a suction holding plate for sucking and holding the formed from a disc-shaped workpiece outer diameter small-diameter porous member disk-shaped workpiece, the suction to the suction holding plate while supporting the suction holding plate and a base having, on an upper surface of the base board outside the said suction holding plate, confinement ring a ring-shaped to prevent lateral displacement of the disk-shaped workpiece W is embedded, the restriction ring, said is sucked by the suction region provided inside the base, the inner diameter of the limiting ring is disk-shaped workpiece holding surface of the suction holding plate when the inner circumference and the disc-shaped workpiece periphery said limiting ring is in contact with the The size is not exposed , The height of the restriction ring which projects from the base stand top surface is lower in height than the finished thickness of the disk-shaped workpiece held on the chuck table.

  In the present invention, a chuck table provided in a grinding apparatus includes a suction holding plate that sucks and holds a plate-like workpiece, and a base that has a suction region that supports the suction holding plate and transmits a suction force to the suction holding plate. A ring-shaped limiting ring is embedded on the upper surface of the base and outside the suction holding plate. The inner diameter of the restriction ring is such that the plate-like work holding surface of the suction holding plate is not exposed when the inner circumference of the restriction ring and the outer periphery of the plate-like work are in contact with each other, and the restriction ring protrudes from the upper surface of the base Since the height of the grinding wheel is lower than the finished thickness of the plate-like workpiece held on the chuck table, the rotational force of the grinding wheel that grinds the plate-like workpiece becomes larger than the suction force that sucks and holds the plate-like workpiece. Even if the suction force is lost to the rotational force of the grinding wheel, it is possible to prevent the plate-like workpiece from being laterally displaced from the holding surface of the suction holding plate by contacting the plate-like workpiece on the inner periphery of the limiting ring. It is possible to prevent the workpiece from being poorly ground and the plate-shaped workpiece itself from being broken.

It is a perspective view which shows typically the grinding device provided with two or more chuck tables. It is a top view of the chuck table concerning an embodiment. It is sectional drawing which shows the structure of the chuck table which concerns on embodiment.

  A grinding apparatus 10 shown in FIG. 1 is an example of a grinding apparatus equipped with a plurality of chuck tables 1 that can prevent lateral displacement of a workpiece. First, the apparatus configuration of the grinding apparatus 10 will be described with reference to FIG.

  The grinding apparatus 10 includes a rectangular parallelepiped apparatus base 11 extending in the Y-axis direction, and a rotatable disk-shaped rotary table 12 is disposed at the center of the upper surface of the apparatus base 11. Further, a plurality of chuck tables 1 that can prevent the lateral displacement of the workpiece are disposed on the upper surface of the rotary table 12.

  The chuck table 1 includes a suction holding plate 2 that sucks and holds a workpiece and a base 3 that supports the suction holding plate 2. The chuck table 1 is supported by a chuck table base 4. The chuck table 1 can rotate, and the chuck table 1 can be revolved by the rotation of the rotary table 12.

  A rear portion of the apparatus base 11 is provided with a first grinding means 20 that performs rough grinding on a workpiece and a second grinding means 30 that performs finish grinding. The first grinding means 20 includes a rotatable spindle 21, a grinding wheel 22 attached to the lower end of the spindle 21, and a grinding wheel 23 for rough grinding fixed to the lower part of the grinding wheel 22. . The second grinding means 30 includes a rotatable spindle 31, a grinding wheel 32 attached to the lower end of the spindle 31, and a grinding wheel 33 for finish grinding fixed to the lower part of the grinding wheel 32. ing. Then, the grinding wheel 22 can be rotated by the rotation of the spindle 21, and the grinding wheel 32 can be rotated by the rotation of the spindle 31.

  On the upper surface of the rear part of the apparatus base 11, moving units 40 that support the first grinding means 20 and the second grinding means 30 and move up and down in the Z-axis direction are arranged. The moving unit 40 includes a rectangular parallelepiped support base 41, a ball screw 42 extending in the Z-axis direction, a motor 43 connected to one end of the ball screw 42, and a pair of guides arranged in parallel with the ball screw 42. A rail 44 and a moving base 45 for controlling the height positions of the first grinding means 20 and the second grinding means 30 are provided.

  A pair of guide rails 44 are in sliding contact with one surface of the moving base 45, and a nut structure (not shown) is formed in the center portion, and a ball screw 42 is screwed into the nut structure. Then, when the ball screw 42 rotated by the motor 43 rotates, the moving base 45 is guided by the guide rail 44 and moves in the Z-axis direction. In addition, the first grinding means 20 and the second grinding means 20 are moved. Each of the grinding means 30 can be raised and lowered in the Z-axis direction.

  A supply cassette 13 and a recovery cassette 14 are provided on the front surface 11 a of the apparatus base 11. The supply cassette 13 stores a workpiece before processing, and the recovery cassette 14 stores a workpiece after processing. Has been.

  In the vicinity of the supply cassette 13 and the recovery cassette 14, a transfer robot 15 that carries out the workpiece from the supply cassette 13 and loads the workpiece into the recovery cassette 14 is disposed. Temporary placement means 16 for temporarily placing the workpiece before processing and cleaning means 19 for cleaning the workpiece after processing are disposed in the movable region of the transfer robot 15.

  In the vicinity of the temporary placement means 16, a first transport means 17 for transporting the workpiece temporarily placed on the temporary placement means 16 to the chuck table 1 located in the attachment / detachment area P is disposed. Further, in the vicinity of the cleaning unit 19, a second transfer unit 18 is provided for transferring the processed workpiece held on the chuck table 1 located in the attachment / detachment region P to the cleaning unit 19.

  Next, the configuration and operation of the chuck table 1 according to the present embodiment will be described in more detail.

  The chuck table 1 shown in FIG. 2 shows a state in which the plate-like workpiece W is held on the holding surface 2 a of the suction holding plate 2. The suction holding plate 2 has a smaller diameter than the outer diameter of the plate-like workpiece W, and is composed of a porous member such as porous ceramics.

  As shown in FIG. 3, the base 3 fits and supports the suction holding plate 2, and a plurality of suction areas 6 a communicating with the suction holding plate 2 are formed inside the base 3. A chuck table base 4 that supports the chuck table 1 is connected to the lower portion of the base 3. A communication passage 4 a communicating with the suction region 6 a is formed inside the chuck table base 4, and the communication passage 4 a is connected to a plate-like workpiece suction source 7. Accordingly, the suction force generated from the plate-like workpiece suction source 7 is transmitted to the suction holding plate 2 through the communication path 4a of the chuck table base 4 and the suction region 6a of the base 3, and is placed on the holding surface 2a. The lower surface of the workpiece W can be sucked.

  As shown in FIG. 3, a limiting ring 5 for preventing lateral displacement of the plate-like workpiece W is embedded in the upper surface of the base 3. The restriction ring 5 is formed in a ring shape as shown in FIG. 2 and is embedded outside the suction holding plate 2.

  Here, the inner diameter of the limit ring 5 is the center of the plate-like workpiece W when the outer circumference Ws of the plate-like workpiece W comes into contact with the inner circumference 5a of the limit ring 5 as shown in the enlarged right side view of FIG. As a reference, the holding surface 2a of the suction holding plate 2 located on the side opposite to the abutted position has a size that is not exposed from the outer periphery Ws of the plate-like workpiece W. That is, as shown in the left partial enlarged view of FIG. 3, the limiting ring 5 is in a state where the outer periphery 2b of the suction holding plate 2 does not protrude beyond the outer periphery Ws of the plate-like workpiece W and the holding surface 2a is not exposed. It has an inner diameter.

  The holding position of the plate-like workpiece W is not necessarily the center of the chuck table 1. Therefore, as shown in FIG. 2, the entire holding surface 2 a of the suction holding plate 2 may be held at a position hidden from the plate-like workpiece W and at a position inside the limiting ring 5.

  When the entire holding surface 2 a of the suction holding plate 2 is in contact with the plate-like workpiece W, the suction force from the plate-like workpiece suction source 7 is transmitted to the plate-like workpiece W without being leaked.

  As shown in the partially enlarged view of FIG. 3, the limiting ring 5 is embedded so as to protrude from the upper surface of the base 3. The height H of the protruding portion of the limiting ring 5 from the upper surface of the base 3 is lower than the finished thickness T of the plate-like workpiece W held on the chuck table 1. Thereby, it is possible to prevent the grinding wheels 23 and 33 shown in FIG. 1 from coming into contact with the limiting ring 5 when the plate-like workpiece W is ground.

  A suction region 6 b connected to the restriction ring 5 is formed inside the base 3 in order to suck and hold the restriction ring 5. A suction hole 8 communicating with the suction region 6 b is also formed in the chuck table base 4. The suction hole 8 is connected to a limiting ring suction source 9 that generates a suction force. Thereby, the suction force generated from the restriction ring suction source 9 is transmitted to the restriction ring 5 through the suction hole 8 and the suction region 6b, and the restriction ring 5 can be sucked. The limiting ring 5 can be sucked and held on the base 3.

  Below, operation | movement of the grinding apparatus 10 carrying the chuck table 1 comprised as mentioned above is demonstrated.

  The transport robot 15 shown in FIG. 1 takes out the plate-like workpiece W stored in the supply cassette 13 and transports it to the temporary placement means 16. After the workpiece W which has been in the temporary placement means 16 is positioned at a certain position, the first transport means 17 is activated, and the plate-like workpiece W is transported from the temporary placement means 16 to the chuck table 1 waiting in the attachment / detachment region P. To do.

  When the plate-like workpiece W is placed on the holding surface 2a of the suction holding plate 2 of the chuck table 1, suction is started from the plate-like workpiece suction source 7 shown in FIG.

  The suction force from the plate-like workpiece suction source 7 is transmitted to the suction holding plate 2 through the communication path 4a and the suction region 6a. Then, the plate-like workpiece W placed on the holding surface 2 a is sucked and held through the air holes formed in the suction holding plate 2.

  After the plate-like workpiece W is sucked and held, the chuck table 1 starts to rotate and the rotary table 12 rotates to sequentially feed the chuck table 1 below the first grinding means 20 and the second grinding means 30.

  When the chuck table 1 is positioned below the first grinding means 20, the grinding wheel 22 is rotated and the grinding wheel 23 is also rotated. Further, the moving unit 40 is operated, and the ball screw 42 is rotated by the rotation of the motor 43 so that the moving base 45 is guided by the guide rail 44 and descends in the Z-axis direction. At the same time, the first grinding means 20 supported by the moving base 45 is also lowered while rotating the grinding wheel 23.

  The rotating grinding wheel 23 comes into contact with the plate-like workpiece W held on the chuck table 1 to perform grinding. At this time, when the rotational force of the grinding wheel 23 becomes larger than the suction force from the suction source 7 to the plate-like workpiece W, that is, the suction force transmitted from below the plate-like workpiece W is the rotational force of the grinding stone 23. If it is defeated, the plate-like workpiece W is laterally displaced from the holding surface 2 a of the suction holding plate 2.

  However, in the chuck table 1, even if pressure due to the rotation of the grinding wheel 23 is applied to the plate-like workpiece W, as shown in FIG. 3, the plate is placed on the inner periphery 5 a of the limiting ring 5 embedded in the base 3. Since the plate-like workpiece W abuts, the lateral displacement of the plate-like workpiece W can be prevented. Therefore, it is possible to prevent grinding failure of the plate-shaped workpiece and cracking of the plate-shaped workpiece itself.

  After the grinding by the first grinding means 20, the rotary table 12 is rotated, the chuck table 1 is moved below the second grinding means 30, and the plate-like workpiece W subjected to the rough grinding is applied. Finish grinding is performed. Even in the second grinding means 30, as in the first grinding means 20, as shown in FIG. 3, even when the rotational force of the grinding wheel 33 becomes larger than the suction force from the suction source 7 to the plate-like workpiece W. Since the plate-like workpiece W comes into contact with the inner periphery 5a of the limiting ring 5 embedded in the base 3, lateral displacement of the plate-like workpiece W can be prevented.

  When all the grinding is performed on the plate-like workpiece W, since the grinding waste adheres to the plate-like workpiece W, the plate-like workpiece W moves to the cleaning process. The chuck table 1 is moved to the attachment / detachment region P by rotating the rotary table 12, and the plate-like workpiece W is transferred to the cleaning unit 19 by the second transfer unit 18.

  After cleaning by the cleaning means 19, the plate-like workpiece W is transferred to the collection cassette 14 by the transfer robot 15 and stored.

  The restriction ring 5 shown in FIG. 3 is sucked and held on the base 3 by suction of the restriction ring suction source 9, but may be fixed to the base 3 with screws.

1: chuck table 2: suction holding plate 2a: holding surface 2b: outer periphery 3: base 4: chuck table base 4a: communication path 5: restriction ring 5a: inner periphery 6a, 6b: suction area 7: plate workpiece suction source 8: Suction hole 9: Restriction ring suction source 10: Grinding device 11: Device base 11a: Front surface 12: Rotary table 13: Supply cassette 14: Collection cassette 15: Transport robot 16: Temporary placement means 17: First transport means 18 : Second conveying means 19: cleaning means 20: first grinding means 21: spindle 22: grinding wheel 23: grinding wheel 30: second grinding means 31: spindle 32: grinding wheel 33: grinding wheel 40: moving unit 41: support base 42: ball screw 43: motor 44: guide rail 45: moving base W: plate-like work Ws: outer periphery H: protruding part height T: finished thickness P: detachable area

Claims (1)

A chuck table for sucking and holding the disk-shaped workpiece, and at least with the grinding apparatus and a grinding means for grinding the disk-shaped workpiece held on the chuck table,
The chuck table, and a suction holding plate for sucking and holding the formed from a disc-shaped workpiece outer diameter small-diameter porous member disk-shaped workpiece,
A base having a suction area for supporting the suction holding plate and transmitting a suction force to the suction holding plate;
On the upper surface of the base and outside the suction holding plate, a ring-shaped limiting ring that prevents lateral displacement of the disk-shaped workpiece W is embedded,
The restriction ring is sucked by a suction region provided inside the base,
The inner diameter of the limiting ring is sized to the inside periphery and the disk-shaped workpiece periphery the restriction ring disk-shaped workpiece holding surface of the suction holding plate is not exposed when in contact with,
The height of the limiting ring which projects from the base stand top surface is lower in height than the finished thickness of the disk-shaped workpiece held on the chuck table,
Grinding equipment.

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