JP6560110B2 - Cutting equipment - Google Patents

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JP6560110B2
JP6560110B2 JP2015233110A JP2015233110A JP6560110B2 JP 6560110 B2 JP6560110 B2 JP 6560110B2 JP 2015233110 A JP2015233110 A JP 2015233110A JP 2015233110 A JP2015233110 A JP 2015233110A JP 6560110 B2 JP6560110 B2 JP 6560110B2
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cutting
workpiece
chuck table
carry
axis direction
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JP2017103274A (en
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聡 花島
聡 花島
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Disco Corp
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Disco Corp
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Priority to TW105132911A priority patent/TWI691018B/en
Priority to KR1020160158016A priority patent/KR102463660B1/en
Priority to CN201611071041.5A priority patent/CN107030902B/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052—Wet cleaning only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Dicing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Description

本発明は、半導体ウエーハ等の被加工物を切削加工するための切削装置に関する。   The present invention relates to a cutting apparatus for cutting a workpiece such as a semiconductor wafer.

半導体デバイス製造工程においては、略円板形状である半導体ウエーハの表面に格子状に配列された分割予定ラインによって複数の領域が区画され、この区画された領域にＩＣ、ＬＳＩ等のデバイスを形成する。そして、半導体ウエーハを分割予定ラインに沿って切断することによりデバイスが形成された領域を分割して個々の半導体デバイスを製造している。   In the semiconductor device manufacturing process, a plurality of regions are partitioned by division lines arranged in a lattice pattern on the surface of a substantially disc-shaped semiconductor wafer, and devices such as ICs and LSIs are formed in the partitioned regions. . Then, the semiconductor wafer is cut along the planned division line to divide the region where the device is formed to manufacture individual semiconductor devices.

半導体ウエーハ等の被加工物を分割予定ラインに沿って切断する切削装置は、被加工物を保持するチャックテーブルと、該チャックテーブルに保持された被加工物に切削加工を施す切削手段と、該切削手段によって切削された加工済みの被加工物を洗浄する洗浄手段とを具備し、半導体ウエーハ等の被加工物を分割予定ラインに沿って精度よく切断して個々のデバイスに分割することができる。   A cutting apparatus for cutting a workpiece such as a semiconductor wafer along a division line, a chuck table for holding the workpiece, a cutting means for cutting the workpiece held on the chuck table, A cleaning means for cleaning the processed workpiece cut by the cutting means, and the workpiece such as a semiconductor wafer can be accurately cut along the division line and divided into individual devices. .

また、被加工物を保持するチャックテーブルを２個配設するとともに、チャックテーブルに保持された被加工物に切削加工を施す切削手段を２個配設することによって生産効率を高めた切削装置が下記特許文献１に開示されている。   Further, there is provided a cutting apparatus that increases production efficiency by disposing two chuck tables for holding a workpiece and arranging two cutting means for cutting the workpiece held on the chuck table. It is disclosed in the following Patent Document 1.

特許第４５７１８５１号公報Japanese Patent No. 4571551

しかるに、上記特許文献１に開示された切削装置においては、一方のチャックテーブルに保持された被加工物に対して２個の切削手段を用いて切削加工を実施すと、他のチャックテーブルに保持された被加工物に対する作業が中断されることになり、必ずしも生産効率が良好とはいえないという問題がある。   However, in the cutting apparatus disclosed in Patent Document 1, when cutting is performed on the workpiece held on one chuck table using two cutting means, the workpiece is held on the other chuck table. There is a problem that the work on the processed workpiece is interrupted and the production efficiency is not necessarily good.

本発明は上記事実に鑑みてなされたものであり、その主たる技術的課題は、生産効率が良好で装置の大型化を抑制することができる切削装置を提供することにある。   This invention is made | formed in view of the said fact, The main technical subject is providing the cutting device which has favorable production efficiency and can suppress the enlargement of an apparatus.

上記主たる技術課題を解決するため、本発明によれば、被加工物に切削加工を施す切削装置であって、
被加工物を保持し加工送り方向（Ｘ軸方向）に移動可能に構成されＸ軸方向と直交する割り出し送り方向（Ｙ軸方向）に互いに隣接して配設される第１のチャックテーブルおよび第２のチャックテーブルと、
該第１のチャックテーブルおよび該第２のチャックテーブルに保持された被加工物にそれぞれ切削加工を施す第１の切削機構および第２の切削機構と、
該第１の切削機構および該第２の切削機構によって切削された被加工物を洗浄する洗浄手段と、を具備し、
該第１のチャックテーブルは被加工物を搬出入する第１の搬出入領域と該第１の切削機構が配設された第１の切削領域に位置付けられるように構成され、該第２のチャックテーブルは該第１の搬出入領域とＹ軸方向の直線上に隣接し被加工物を搬出入する第２の搬出入領域と該第２の切削機構が配設された第２の切削領域に位置付けられるように構成されており、
該第１の切削機構はＹ軸方向の直線上に配設された２本の回転スピンドルと該２本の回転スピンドルの互いに対向する端部にそれぞれ装着された切削ブレードとを備えた第１の切削手段および第２の切削手段とを具備し、該第２の切削機構はＹ軸方向の直線上に配設された２本の回転スピンドルと該２本の回転スピンドルの互いに対向する端部にそれぞれ装着された切削ブレードとを備えた第１の切削手段および第２の切削手段とを具備し、
該第１の切削機構と該第２の切削機構は該第１の搬出入領域と該第２の搬出入領域との中間位置を軸として点対称の位置に配設されており、
該洗浄手段は、該第１の搬出入領域と該第２の搬出入領域とを結ぶＹ軸方向の直線上に配設される、
ことを特徴とする切削装置が提供される。 In order to solve the main technical problem, according to the present invention, a cutting device for performing a cutting process on a workpiece,
A first chuck table configured to hold a workpiece and move in the machining feed direction (X-axis direction) and disposed adjacent to each other in an index feed direction (Y-axis direction) perpendicular to the X-axis direction; 2 chuck tables,
A first cutting mechanism and a second cutting mechanism that respectively cut the workpieces held by the first chuck table and the second chuck table;
Cleaning means for cleaning the workpiece cut by the first cutting mechanism and the second cutting mechanism,
The first chuck table is configured to be positioned in a first loading / unloading area for loading / unloading a workpiece and a first cutting area in which the first cutting mechanism is disposed, and the second chuck table The table is adjacent to the first loading / unloading area on the straight line in the Y-axis direction, and is provided in a second loading / unloading area for loading / unloading a workpiece and a second cutting area in which the second cutting mechanism is disposed. Configured to be positioned,
The first cutting mechanism includes a first rotary spindle arranged on a straight line in the Y-axis direction and a first cutting blade mounted on each of opposite ends of the two rotary spindles. Cutting means and second cutting means, and the second cutting mechanism has two rotary spindles arranged on a straight line in the Y-axis direction and ends of the two rotary spindles facing each other. A first cutting means and a second cutting means each having a cutting blade mounted thereon,
The first cutting mechanism and the second cutting mechanism are disposed at point-symmetrical positions around an intermediate position between the first carry-in / out area and the second carry-in / out area,
The cleaning means is disposed on a straight line in the Y-axis direction connecting the first carry-in / out area and the second carry-in / out area.
A cutting device is provided.

上記第１の搬出入領域と第２の搬出入領域と洗浄手段とに被加工物を搬送する搬送手段を備えている。
また、上記洗浄手段の上方に被加工物を仮置きする２本のガイドレールが間隔調整可能に構成された仮置き手段が配設され、上記搬送手段は、仮置き手段に仮置きされた切削加工前の被加工物を第１の搬出入領域に位置付けられた第１のチャックテーブルおよび第２の搬出入領域に位置付けられた第２のチャックテーブルに搬送するとともに、洗浄手段から洗浄済の被加工物を仮置き手段に搬送し、また、第１の搬出入領域に位置付けられた第１のチャックテーブルおよび該第２の搬出入領域に位置付けられた第２のチャックテーブルから切削加工済の被加工物を洗浄手段に搬送する。
上記搬送手段は、第１の搬送手段と第２の搬送手段を具備し、該第１の搬送手段は、仮置き手段に仮置きされた切削加工前の被加工物を第１の搬出入領域に位置付けられた第１のチャックテーブルおよび第２の搬出入領域に位置付けられた第２のチャックテーブルに搬送するとともに、洗浄手段から洗浄済の被加工物を仮置き手段に搬送し、第２の搬送手段、第１の搬出入領域に位置付けられた第１のチャックテーブルおよび第２の搬出入領域に位置付けられた第２のチャックテーブルから切削加工済の被加工物を洗浄手段に搬送する。
また、上記仮置き手段に隣接してＸ軸方向に被加工物を収容したカセットが載置されるカセットテーブルが配設され、Ｘ軸方向に進退してカセットテーブルに載置されたカセットに収容された切削加工前の被加工物を仮置き手段に搬出するとともに仮置き手段から洗浄済の被加工物をカセットに搬入する搬出入手段が配設されている。 Conveying means for conveying the workpiece to the first carry-in / out area, the second carry-in / out area, and the cleaning means is provided.
In addition, a temporary placement means is provided in which the two guide rails for temporarily placing the workpiece are arranged above the cleaning means so that the distance between the guide rails can be adjusted, and the conveying means is a cutting tool temporarily placed on the temporary placement means. The workpiece before processing is transported to the first chuck table positioned in the first carry-in / out area and the second chuck table located in the second carry-in / out area, and the cleaned workpiece is washed from the cleaning means. The workpiece is transported to the temporary placing means, and the first chuck table positioned in the first loading / unloading area and the second chuck table positioned in the second loading / unloading area are cut and processed. Transport the workpiece to the cleaning means.
The conveying means includes a first conveying means and a second conveying means, and the first conveying means transfers a workpiece temporarily placed on the temporary placing means before cutting to a first carry-in / out area. The first chuck table positioned at the second position and the second chuck table positioned at the second loading / unloading area, and the cleaned workpiece from the cleaning means is transferred to the temporary placing means, The machined workpiece is conveyed from the conveying means, the first chuck table positioned in the first carry-in / out area, and the second chuck table located in the second carry-in / out area to the cleaning means.
In addition, a cassette table on which a cassette containing a workpiece in the X-axis direction is placed adjacent to the temporary placement means, and is accommodated in a cassette placed on the cassette table by moving back and forth in the X-axis direction. An unloading / unloading means for unloading the workpiece before cutting to the temporary placement means and loading the cleaned workpiece from the temporary placement means into the cassette is provided.

本発明による切削装置は、被加工物を保持し加工送り方向（Ｘ軸方向）に移動可能に構成されＸ軸方向と直交する割り出し送り方向（Ｙ軸方向）に互いに隣接して配設される第１のチャックテーブルおよび第２のチャックテーブルと、
第１のチャックテーブルおよび第２のチャックテーブルに保持された被加工物にそれぞれ切削加工を施す第１の切削機構および第２の切削機構と、
第１の切削機構および第２の切削機構によって切削された被加工物を洗浄する洗浄手段と、を具備し、
第１のチャックテーブルは被加工物を搬出入する第１の搬出入領域と第１の切削機構が配設された第１の切削領域に位置付けられるように構成され、第２のチャックテーブルは第１の搬出入領域とＹ軸方向の直線上に隣接し被加工物を搬出入する第２の搬出入領域と第２の切削機構が配設された第２の切削領域に位置付けられるように構成されており、
第１の切削機構はＹ軸方向の直線上に配設された２本の回転スピンドルと２本の回転スピンドルの互いに対向する端部にそれぞれ装着された切削ブレードとを備えた第１の切削手段および第２の切削手段とを具備し、第２の切削機構はＹ軸方向の直線上に配設された２本の回転スピンドルと２本の回転スピンドルの互いに対向する端部にそれぞれ装着された切削ブレードとを備えた第１の切削手段および第２の切削手段とを具備し、
第１の切削機構と第２の切削機構は第１の搬出入領域と第２の搬出入領域との中間位置を軸として点対称の位置に配設されており、
洗浄手段は、第１の搬出入領域と第２の搬出入領域とを結ぶＹ軸方向の直線上に配設されるので、第１のチャックテーブルおよび第２のチャックテーブルと第１の切削機構および第２の切削機構と洗浄手段の配置に無駄な空間がなく切削装置を小型に構成することができるとともに、作業者が切削ブレードの交換等をする際にアクセスが良好で作業性が向上する。
また、本発明による切削装置においては、第１の切削領域に位置付けられた第１のチャックテーブルに保持された被加工物に対して第１の切削機構を構成する第１の切削手段と第２の切削手段の２個の切削ブレードを作用させて切削加工を施すとともに、第２の切削領域に位置付けられた第２のチャックテーブルに保持された被加工物に対して第２の切削機構を構成する第１の切削手段と第２の切削手段の２個の切削ブレードを作用させて同時に所定の切削加工を施すことが可能となり、生産性をより向上させることができる。 The cutting device according to the present invention is configured to hold a workpiece and move in the machining feed direction (X-axis direction) and is disposed adjacent to each other in an index feed direction (Y-axis direction) orthogonal to the X-axis direction. A first chuck table and a second chuck table;
A first cutting mechanism and a second cutting mechanism that respectively cut the workpieces held by the first chuck table and the second chuck table;
Cleaning means for cleaning the workpiece cut by the first cutting mechanism and the second cutting mechanism,
The first chuck table is configured to be positioned in a first loading / unloading area for loading / unloading a workpiece and a first cutting area in which a first cutting mechanism is disposed, and the second chuck table is configured to The first loading / unloading area is positioned adjacent to the first loading / unloading area on the straight line in the Y-axis direction, and the second loading / unloading area for loading / unloading the workpiece and the second cutting area provided with the second cutting mechanism are configured. Has been
The first cutting mechanism includes a first cutting means including two rotary spindles arranged on a straight line in the Y-axis direction and cutting blades respectively mounted on opposite ends of the two rotary spindles. And a second cutting means, and the second cutting mechanism is mounted on the two rotating spindles arranged on the straight line in the Y-axis direction and the opposite ends of the two rotating spindles, respectively. A first cutting means comprising a cutting blade and a second cutting means,
The first cutting mechanism and the second cutting mechanism are disposed at point-symmetrical positions around an intermediate position between the first carry-in / out area and the second carry-in / out area,
Since the cleaning means is disposed on the straight line in the Y-axis direction connecting the first carry-in / out area and the second carry-in / out area, the first chuck table, the second chuck table, and the first cutting mechanism In addition, there is no wasted space in the arrangement of the second cutting mechanism and the cleaning means, and the cutting apparatus can be configured in a small size, and when the operator replaces the cutting blade, the access is good and the workability is improved. .
In the cutting apparatus according to the present invention, the first cutting means and the second cutting member constituting the first cutting mechanism with respect to the workpiece held by the first chuck table positioned in the first cutting region. The two cutting blades of the cutting means are applied to perform cutting, and the second cutting mechanism is configured for the work piece held by the second chuck table positioned in the second cutting region. The two cutting blades of the first cutting means and the second cutting means can be operated to perform predetermined cutting at the same time, and the productivity can be further improved.

本発明に従って構成された切削装置の斜視図。The perspective view of the cutting device comprised according to this invention. 図１に示す切削装置を構成する一部の構成要素を分解して示す斜視図。The perspective view which decomposes | disassembles and shows the one part component which comprises the cutting device shown in FIG. 図１に示す切削装置を構成する他の一部の構成要素を分解して示す斜視図。The perspective view which decomposes | disassembles and shows the other one part component which comprises the cutting device shown in FIG.

以下、本発明に従って構成された切削装置の好適な実施形態について、添付図面を参照して詳細に説明する。   Hereinafter, a preferred embodiment of a cutting device configured according to the present invention will be described in detail with reference to the accompanying drawings.

図１には本発明に従って構成された切削装置の一実施形態の斜視図が示されており、図２には図１に示す切削装置を構成する一部の構成要素を分解して示す斜視図が示されており、図３には図１に示す切削装置を構成する他の一部の構成要素を分解して示す斜視図が示されている。
図示の実施形態における切削装置は、静止基台２と、該静止基台２上に配設され被加工物を保持する第１のチャックテーブル機構３および第２のチャックテーブル機構４と、第１のチャックテーブル機構３に保持された被加工物および第２のチャックテーブル機構４に保持された被加工物にそれぞれ切削加工を施す第１の切削機構５および第２の切削機構６とを具備している。 FIG. 1 is a perspective view of an embodiment of a cutting device constructed according to the present invention, and FIG. 2 is an exploded perspective view showing some components constituting the cutting device shown in FIG. FIG. 3 is an exploded perspective view showing another part of the constituent elements of the cutting apparatus shown in FIG.
The cutting device in the illustrated embodiment includes a stationary base 2, a first chuck table mechanism 3 and a second chuck table mechanism 4 which are disposed on the stationary base 2 and hold a workpiece, A first cutting mechanism 5 and a second cutting mechanism 6 for cutting the workpiece held by the chuck table mechanism 3 and the workpiece held by the second chuck table mechanism 4, respectively. ing.

第１のチャックテーブル機構３は、図１および図２に示すように静止基台２上に加工送り方向（Ｘ軸方向）に沿って配設された一対のＸ軸案内レール３１、３１と、該一対のＸ軸案内レール３１、３１上に摺動可能に配設された移動基台３２と、該移動基台３２上に配設された円筒状の支持部材３３に回転可能に支持された被加工物を保持する第１のチャックテーブル３４と、該第１のチャックテーブル３４が配設された移動基台３２を一対のＸ軸案内レール３１、３１に沿って加工送り方向（Ｘ軸方向）に移動させるための第１の加工送り手段３５とを具備している。主に図２を参照して説明を続けると、第１のチャックテーブル３４は、円筒状の支持部材３３に回転可能に支持されたテーブル本体３４１と、該テーブル本体３４１の上面に配設された吸着チャック３４２と、後述する被加工物であるウエーハをダイシングテープを介して支持する環状のフレームを固定するためのクランプ３４３を具備している。テーブル本体３４１は、外径が後述する被加工物としてのウエーハの外径より大きくウエーハをダイシングテープを介して支持する環状のフレームの内径より小さく形成されている。吸着チャック３４２は、ポーラスセラミックスによって形成され図示しない吸引手段に接続されており、適宜負圧が作用せしめられるようになっている。従って、吸着チャック３４２上に載置された被加工物は、図示しない吸引手段を作動することにより吸着チャック３４２上に吸引保持される。また、第１のチャックテーブル３４は、円筒状の支持部材３３内に配設された図示しないパルスモータによって回動せしめられるようになっている。   As shown in FIGS. 1 and 2, the first chuck table mechanism 3 includes a pair of X-axis guide rails 31, 31 disposed on the stationary base 2 along the processing feed direction (X-axis direction), The pair of X-axis guide rails 31, 31 is rotatably supported by a movable base 32 slidably disposed on the pair of X-axis guide rails 31, and a cylindrical support member 33 disposed on the movable base 32. A first chuck table 34 that holds a workpiece and a moving base 32 on which the first chuck table 34 is disposed are moved along a pair of X-axis guide rails 31 and 31 in a processing feed direction (X-axis direction). And a first processing feed means 35 for moving to. The description will be continued mainly with reference to FIG. 2. The first chuck table 34 is provided on a table main body 341 rotatably supported by a cylindrical support member 33 and an upper surface of the table main body 341. A suction chuck 342 and a clamp 343 for fixing an annular frame for supporting a wafer as a workpiece to be described later via a dicing tape are provided. The table main body 341 is formed to have an outer diameter larger than an outer diameter of a wafer as a workpiece to be described later and smaller than an inner diameter of an annular frame that supports the wafer via a dicing tape. The suction chuck 342 is made of porous ceramics and is connected to suction means (not shown) so that a negative pressure is appropriately applied. Therefore, the workpiece placed on the suction chuck 342 is sucked and held on the suction chuck 342 by operating a suction means (not shown). Further, the first chuck table 34 is rotated by a pulse motor (not shown) disposed in the cylindrical support member 33.

上記第１の加工送り手段３５は、一対のＸ軸案内レール３１、３１の間に平行に配設された雄ネジロッド３５１と、雄ネジロッド３５１の一端部を回転可能に支持する軸受３５２と、雄ネジロッド３５１の他端に連結され該雄ネジロッド３５１を正転または逆転駆動するパルスモータ３５３とによって構成されている。このように構成された第１の切削送り手段３５は、それぞれ雄ネジロッド３５１が上記移動基台３２に形成された図示しない雌ネジに螺合される。従って、第１の切削送り手段３５は、それぞれパルスモータ３５３を駆動して雄ネジロッド３５１を正転または逆転駆動することにより、上記移動基台３２に配設された第１のチャックテーブル３４を一対のＸ軸案内レール３１、３１に沿って図１および図２において矢印Ｘで示す加工送り方向（Ｘ軸方向）に移動することができる。このように構成された第１の加工送り手段３５は、第１のチャックテーブル３４を被加工物を搬出入する図１および図２に示す第１の搬出入領域Ａ１と図１において第１の切削機構５が配設された第１の切削領域Ｂ１に位置付けるようになっている。   The first processing feed means 35 includes a male screw rod 351 disposed in parallel between the pair of X-axis guide rails 31, 31, a bearing 352 that rotatably supports one end of the male screw rod 351, and a male A pulse motor 353 is connected to the other end of the screw rod 351 and drives the male screw rod 351 to rotate forward or backward. In the first cutting feed means 35 configured as described above, the male screw rod 351 is screwed to a female screw (not shown) formed on the moving base 32. Therefore, the first cutting feed means 35 drives the pulse motor 353 to drive the male screw rod 351 in the normal direction or the reverse direction, so that the first chuck table 34 disposed on the movable base 32 is paired. The X-axis guide rails 31 and 31 can be moved in the machining feed direction (X-axis direction) indicated by the arrow X in FIGS. 1 and 2. The first processing feeding means 35 configured as described above is configured to have a first loading / unloading area A1 shown in FIGS. 1 and 2 for loading / unloading a workpiece to / from the first chuck table 34 and the first loading / unloading area A1 shown in FIG. The cutting mechanism 5 is positioned in the first cutting area B1.

第２のチャックテーブル機構４は、上記第１のチャックテーブル機構３とＹ軸方向に隣接して配設されており、上記第１のチャックテーブル機構３と同様に構成されている。即ち、第２のチャックテーブル機構４は、図１および図２に示すように静止基台２上に加工送り方向（Ｘ軸方向）に沿って上記第１のチャックテーブル機構３を構成する一対のＸ軸案内レール３１、３１と平行に配設された一対のＸ軸案内レール４１、４１と、該一対のＸ軸案内レール４１、４１上に摺動可能に配設された移動基台４２と、該移動基台４２上に配設された円筒状の支持部材４３に回転可能に支持された被加工物を保持する第２のチャックテーブル４４と、該第２のチャックテーブル４４が配設された移動基台４２を一対のＸ軸案内レール４１、４１に沿って加工送り方向（Ｘ軸方向）に移動させるための第２の加工送り手段４５とを具備している。第２のチャックテーブル４４は、円筒状の支持部材４３に回転可能に支持されたテーブル本体４４１と、該テーブル本体４４１の上面に配設された吸着チャック４４２と、後述する被加工物であるウエーハをダイシングテープを介して支持する環状のフレームを固定するためのクランプ４４３を具備している。テーブル本体４４１は、外径が後述する被加工物としてのウエーハの外径より大きくウエーハをダイシングテープを介して支持する環状のフレームの内径より小さく形成されている。吸着チャック４４２は、ポーラスセラミックスによって形成され図示しない吸引手段に接続されており、適宜負圧が作用せしめられるようになっている。従って、吸着チャック４４２上に載置された被加工物は、図示しない吸引手段を作動することにより吸着チャック４４２上に吸引保持される。また、第２のチャックテーブル４４は、円筒状の支持部材４３内に配設された図示しないパルスモータによって回動せしめられるようになっている。   The second chuck table mechanism 4 is disposed adjacent to the first chuck table mechanism 3 in the Y-axis direction, and is configured in the same manner as the first chuck table mechanism 3. That is, as shown in FIGS. 1 and 2, the second chuck table mechanism 4 has a pair of components constituting the first chuck table mechanism 3 on the stationary base 2 along the processing feed direction (X-axis direction). A pair of X-axis guide rails 41, 41 disposed in parallel with the X-axis guide rails 31, 31, and a moving base 42 slidably disposed on the pair of X-axis guide rails 41, 41; A second chuck table 44 for holding a workpiece rotatably supported by a cylindrical support member 43 disposed on the movable base 42, and the second chuck table 44. And a second machining feed means 45 for moving the movable base 42 along the pair of X-axis guide rails 41 and 41 in the machining feed direction (X-axis direction). The second chuck table 44 includes a table main body 441 that is rotatably supported by a cylindrical support member 43, a suction chuck 442 disposed on the upper surface of the table main body 441, and a wafer that is a workpiece to be described later. Is provided with a clamp 443 for fixing an annular frame that supports the frame through a dicing tape. The table main body 441 is formed to have an outer diameter larger than an outer diameter of a wafer as a workpiece to be described later and smaller than an inner diameter of an annular frame that supports the wafer via a dicing tape. The suction chuck 442 is formed of porous ceramics and is connected to suction means (not shown) so that a negative pressure is appropriately applied. Therefore, the workpiece placed on the suction chuck 442 is sucked and held on the suction chuck 442 by operating a suction means (not shown). Further, the second chuck table 44 is rotated by a pulse motor (not shown) disposed in the cylindrical support member 43.

上記第２の加工送り手段４５は、図１および図２に示すように一対のＸ軸案内レール４１、４１の間に平行に配設された雄ネジロッド４５１と、雄ネジロッド４５１の一端部を回転可能に支持する軸受４５２と、雄ネジロッド４５１の他端に連結され該雄ネジロッド４５１を正転または逆転駆動するパルスモータ４５３とによって構成されている。このように構成された第２の切削送り手段４５は、それぞれ雄ネジロッド４５１が上記移動基台４２に形成された図示しない雌ネジに螺合される。従って、第２の切削送り手段４５は、それぞれパルスモータ４５３を駆動して雄ネジロッド４５１を正転または逆転駆動することにより、上記移動基台４２に配設された第２のチャックテーブル４４を一対のＸ軸案内レール４１、４１に沿って図１および図２において矢印Ｘで示す加工送り方向に移動することができる。このように構成された第２の加工送り手段４５は、第２のチャックテーブル４４を上記第１の搬出入領域Ａ１とＹ軸方向の直線上に隣接し被加工物を搬出入する第２の搬出入領域Ａ２と図１において第２の切削機構６が配設された第２の切削領域Ｂ２に位置付けるようになっている。   As shown in FIGS. 1 and 2, the second processing feed means 45 rotates a male screw rod 451 disposed in parallel between the pair of X-axis guide rails 41 and 41 and one end of the male screw rod 451. It comprises a bearing 452 that supports it, and a pulse motor 453 that is connected to the other end of the male screw rod 451 and drives the male screw rod 451 to rotate forward or reverse. In the second cutting feed means 45 configured as described above, the male screw rod 451 is screwed into a female screw (not shown) formed on the moving base 42. Accordingly, the second cutting feed means 45 drives the pulse motor 453 to drive the male screw rod 451 in the normal direction or the reverse direction, so that the second chuck table 44 disposed on the moving base 42 is paired. The X-axis guide rails 41 and 41 can be moved in the machining feed direction indicated by the arrow X in FIGS. 1 and 2. The second processing feed means 45 configured as described above is a second processing unit for transferring the workpiece to and from the second chuck table 44 adjacent to the first loading / unloading area A1 on the straight line in the Y axis direction. It is positioned in the carry-in / out area A2 and the second cutting area B2 in which the second cutting mechanism 6 is disposed in FIG.

上述した第１のチャックテーブル機構３と第２のチャックテーブル機構４は、第１の搬出入領域Ａ１と第２の搬出入領域Ａ２との中間位置を軸として点対称の位置に配設されている。
なお、図示の実施形態においては第１のチャックテーブル機構３の第１の加工送り手段３５を構成するパルスモータ３５３と第２のチャックテーブル機構４の第２の加工送り手段４５を構成するパルスモータ４５３をそれぞれ第１の切削機構５と第２の切削機構６が配設される側と反対側（Ｘ軸方向における内側）に配設した例を示したが、パルスモータ３５３とパルスモータ４５３を第１の切削機構５と第２の切削機構６が配設される側（Ｘ軸方向における外側）にそれぞれ配設することによりメンテナンスが良好となる。 The first chuck table mechanism 3 and the second chuck table mechanism 4 described above are disposed at point-symmetrical positions around the intermediate position between the first carry-in / out area A1 and the second carry-in / out area A2. Yes.
In the illustrated embodiment, the pulse motor 353 constituting the first machining feed means 35 of the first chuck table mechanism 3 and the pulse motor constituting the second machining feed means 45 of the second chuck table mechanism 4 are shown. Although the example in which 453 is disposed on the side opposite to the side on which the first cutting mechanism 5 and the second cutting mechanism 6 are disposed (inside in the X-axis direction) is shown, the pulse motor 353 and the pulse motor 453 are illustrated. Maintenance is improved by disposing the first cutting mechanism 5 and the second cutting mechanism 6 on the side where the first cutting mechanism 5 and the second cutting mechanism 6 are disposed (outside in the X-axis direction).

次に、第１の切削機構５および第２の切削機構６について説明する。
第１の切削機構５は、図１に示すように上記静止基台２上において第１の切削領域Ｂ１に配設された門型の支持フレーム５１を具備している。この門型の支持フレーム５１は、Ｙ軸方向に間隔を置いて配設された第１の柱部５１１および第２の柱部５１２と、該第１の柱部５１１と第２の柱部５１２の上端を連結し矢印Ｘで示す加工送り方向と直交する割り出し送り方向（Ｙ軸方向）に沿って配設された支持部５１３とからなっており、上記第１のチャックテーブル機構３を跨ぐように配設されている。 Next, the first cutting mechanism 5 and the second cutting mechanism 6 will be described.
As shown in FIG. 1, the first cutting mechanism 5 includes a gate-shaped support frame 51 disposed on the stationary base 2 in the first cutting region B1. The gate-shaped support frame 51 includes a first pillar portion 511 and a second pillar portion 512 that are disposed at intervals in the Y-axis direction, and the first pillar portion 511 and the second pillar portion 512. And a support portion 513 disposed along an index feed direction (Y-axis direction) orthogonal to the machining feed direction indicated by the arrow X so as to straddle the first chuck table mechanism 3. It is arranged.

上記門型の支持フレーム５１を構成する支持部５１３の外側の側面５１３ａには、第１の切削手段５ａと第２の切削手段５ｂが配設されている。図２を参照して説明を続けると、第１の切削手段５ａおよび第２の切削手段５ｂは、それぞれ割り出し移動基台５２と切り込み移動基台５３およびスピンドルユニット５４を具備している。なお、第１の切削手段５ａと第２の切削手段５ｂは、実質的に同一の構成であるため、第１の切削手段５ａに付けた符号を参照して説明する。第１の切削手段５ａの割り出し移動基台５２および第２の切削手段５ｂの割り出し移動基台５２は、それぞれ上記支持部５１３の外側の側面５１３ａに設けられた一対のＹ軸案内レール５１０、５１０と嵌合する一対の被案内溝５２０、５２０が設けられており、この一対の被案内溝５２０、５２０を一対のＹ軸案内レール５１０、５１０に嵌合することにより、割り出し移動基台５２は一対のＹ軸案内レール５１０、５１０に沿って移動可能に構成される。なお、第１の切削手段５ａの割り出し移動基台５２および第２の切削手段５ｂの割り出し移動基台５２における支持部５１３の外側の側面５１３ａと対向する一方の面には、それぞれ後述する割り出し送り手段との干渉を防ぐための逃げ溝５２１が形成されている。また、第１の切削手段５ａの割り出し移動基台５２および第２の切削手段５ｂの割り出し移動基台５２の他方の面には、それぞれ矢印Ｚで示す切り込み送り方向に沿って一対のＺ軸案内レール５２２、５２２が設けられている。   A first cutting means 5a and a second cutting means 5b are disposed on the outer side surface 513a of the support portion 513 constituting the portal-type support frame 51. Continuing the description with reference to FIG. 2, the first cutting means 5 a and the second cutting means 5 b include an indexing movement base 52, a cutting movement base 53, and a spindle unit 54, respectively. In addition, since the 1st cutting means 5a and the 2nd cutting means 5b are substantially the same structures, it demonstrates with reference to the code | symbol attached to the 1st cutting means 5a. The indexing movement base 52 of the first cutting means 5a and the indexing movement base 52 of the second cutting means 5b are respectively a pair of Y-axis guide rails 510, 510 provided on the outer side surface 513a of the support portion 513. A pair of guided grooves 520 and 520 that are fitted to each other are provided. By fitting the pair of guided grooves 520 and 520 to the pair of Y-axis guide rails 510 and 510, the index movement base 52 is It is configured to be movable along a pair of Y-axis guide rails 510 and 510. The index feed base 52 of the first cutting means 5a and the index movement base 52 of the second cutting means 5b are respectively provided with one of the surfaces facing the outer side surface 513a of the index movement base 52, which will be described later. An escape groove 521 for preventing interference with the means is formed. A pair of Z-axis guides are provided on the other surfaces of the indexing movement base 52 of the first cutting means 5a and the indexing movement base 52 of the second cutting means 5b along the cutting feed direction indicated by the arrow Z, respectively. Rails 522 and 522 are provided.

上記第１の切削手段５ａの切り込み移動基台５３および第２の切削手段５ｂの切り込み移動基台５３は、それぞれ割り出し移動基台５２に設けられた一対のＺ軸案内レール５２２、５２２と嵌合する図示しない被案内溝が設けられており、この被案内溝を一対のＺ軸案内レール５２２、５２２に嵌合することにより、切り込み移動基台５３は一対のＺ軸案内レール５２２、５２２に沿って矢印Ｚで示す切り込み送り方向（Ｚ軸方向）に移動可能に構成される。   The cutting movement base 53 of the first cutting means 5a and the cutting movement base 53 of the second cutting means 5b are fitted with a pair of Z-axis guide rails 522 and 522 provided on the index movement base 52, respectively. The guide moving groove 53 is provided along the pair of Z-axis guide rails 522 and 522 by fitting the guided groove to the pair of Z-axis guide rails 522 and 522. And configured to be movable in the cutting feed direction (Z-axis direction) indicated by an arrow Z.

図２を参照して説明を続けると、上記スピンドルユニット５４は、第１の切削手段５ａと第２の切削手段５ｂの切り込み移動基台５３の下面にそれぞれ装着されている。この第１の切削手段５ａのスピンドルユニット５４および第２の切削手段５ｂのスピンドルユニット５４は、それぞれスピンドルハウジング５４１と、該スピンドルハウジング５４１に回転可能に支持された回転スピンドル５４２と、該回転スピンドル５４２の一端に装着された切削ブレード５４３と、切削水を供給する切削水供給管５４４および回転スピンドル５４２を回転駆動する図示しないサーボモータを具備しており、回転スピンドル５４２の軸線方向が矢印Ｙで示す割り出し送り方向（Ｙ軸方向）の直線上に位置付けられるように配設されている。そして、第１の切削手段５ａのスピンドルユニット５４を構成する切削ブレード５４３と第２の切削手段５ｂのスピンドルユニット５４を構成する切削ブレード（図示せず）は、互いに対向して配設されている。なお、第１の切削手段５ａのスピンドルユニット５４および第２の切削手段５ｂのスピンドルユニット５４を構成するスピンドルハウジング５４１には、それぞれ上記第１のチャックテーブル３４に保持された被加工物の加工領域を撮像するための撮像手段５４０が配設されている。   Continuing the description with reference to FIG. 2, the spindle unit 54 is mounted on the lower surface of the cutting movement base 53 of the first cutting means 5a and the second cutting means 5b. The spindle unit 54 of the first cutting means 5a and the spindle unit 54 of the second cutting means 5b are respectively a spindle housing 541, a rotary spindle 542 rotatably supported by the spindle housing 541, and the rotary spindle 542. A cutting blade 543 mounted on one end of the head, a cutting water supply pipe 544 for supplying cutting water, and a servo motor (not shown) for rotationally driving the rotating spindle 542. The axis direction of the rotating spindle 542 is indicated by an arrow Y. It is arranged so as to be positioned on a straight line in the index feed direction (Y-axis direction). The cutting blade 543 constituting the spindle unit 54 of the first cutting means 5a and the cutting blade (not shown) constituting the spindle unit 54 of the second cutting means 5b are arranged to face each other. . In the spindle housing 541 constituting the spindle unit 54 of the first cutting means 5a and the spindle unit 54 of the second cutting means 5b, the machining areas of the workpiece held on the first chuck table 34 are respectively provided. An image pickup means 540 for picking up images is provided.

図示の実施形態における第１の切削手段５ａと第２の切削手段５ｂは、上記割り出し移動基台５２を一対のＹ軸案内レール５１０、５１０に沿って割り出し送り方向（Ｙ軸方向）に移動するための割り出し送り手段５５を具備している。割り出し送り手段５５は、それぞれ一対のＹ軸案内レール５１０、５１０の間に平行に配設された雄ネジロッド５５１と、該雄ネジロッド５５１の一端部を回転可能に支持する軸受５５２と、雄ネジロッド５５１の他端に連結され該雄ネジロッド５５１を正転または逆転駆動するパルスモータ５５３とによって構成されている。なお、雄ネジロッド５５１は、上記割り出し移動基台５２に設けられた逃げ溝５２１とそれぞれ対応する高さ位置に配設されている。このように構成された割り出し送り手段５５は、それぞれ雄ネジロッド５５１が上記割り出し移動基台５２に形成された雌ネジ５２３に螺合される。従って、割り出し送り手段５５は、それぞれパルスモータ５５３を駆動して雄ネジロッド５５１を正転または逆転駆動することにより、割り出し移動基台５２を一対のＹ軸案内レール５１０、５１０に沿って割り出し送り方向（Ｙ軸方向）に移動することができる。この割り出し移動基台５２が移動する際に軸受５５２および雄ネジロッド５５１が、割り出し移動基台５２に設けられた逃げ溝５２１を挿通することにより、割り出し移動基台５２はその移動が許容される。   The first cutting means 5a and the second cutting means 5b in the illustrated embodiment move the index movement base 52 along the pair of Y axis guide rails 510, 510 in the index feed direction (Y axis direction). Indexing feeding means 55 is provided. The index feeding means 55 includes a male screw rod 551 disposed in parallel between the pair of Y-axis guide rails 510, 510, a bearing 552 that rotatably supports one end of the male screw rod 551, and a male screw rod 551. And a pulse motor 553 that is connected to the other end of the motor and drives the male screw rod 551 to rotate forward or backward. The male screw rod 551 is disposed at a height position corresponding to each of the relief grooves 521 provided in the indexing movement base 52. In the index feeding means 55 configured as described above, the male screw rod 551 is screwed into the female screw 523 formed on the index moving base 52. Therefore, the index feeding means 55 drives the pulse motor 553 to drive the male screw rod 551 in the normal direction or the reverse direction, thereby moving the index moving base 52 along the pair of Y-axis guide rails 510 and 510 in the index feeding direction. It can move in (Y-axis direction). When the indexing movement base 52 moves, the bearing 552 and the male screw rod 551 pass through the escape groove 521 provided in the indexing movement base 52, so that the movement of the indexing movement base 52 is allowed.

また、図示の実施形態における第１の切削手段５ａと第２の切削手段５ｂは、上記切り込み移動基台５３を割り出し移動基台５２に設けられた一対のＺ軸案内レール５２２、５２２に沿って切り込み送り方向（Ｚ軸方向）に移動するための切り込み送り手段５６を具備している。切り込み送り手段５６は、それぞれ一対のＺ軸案内レール５２２、５２２と平行に配設された雄ネジロッド５６１と、該雄ネジロッド５６１の一端部を回転可能に支持する図示しない軸受と、雄ネジロッド５６１の他端に連結され該雄ネジロッド５６１を正転または逆転駆動するパルスモータ５６２とによって構成されている。このように構成された切り込み送り手段５６は、それぞれ雄ネジロッド５６１が上記切り込み移動基台５３に形成された雌ネジ（図示せず）に螺合される。従って、切り込み送り手段５６は、それぞれパルスモータ５６２を駆動して雄ネジロッド５６１を正転または逆転駆動することにより、切り込み移動基台５３を一対のＺ軸案内レール５２２、５２２に沿って切り込み送り方向（Ｚ軸方向）に移動することができる。   Further, the first cutting means 5 a and the second cutting means 5 b in the illustrated embodiment follow the pair of Z-axis guide rails 522 and 522 provided on the moving movement base 52 by indexing the cutting movement base 53. A cutting feed means 56 for moving in the cutting feed direction (Z-axis direction) is provided. The notch feeding means 56 includes a male screw rod 561 disposed in parallel with the pair of Z-axis guide rails 522 and 522, a bearing (not shown) that rotatably supports one end of the male screw rod 561, and a male screw rod 561. A pulse motor 562 is connected to the other end and drives the male screw rod 561 to rotate forward or backward. In the cutting feed means 56 configured as described above, the male screw rod 561 is screwed into a female screw (not shown) formed on the cutting movement base 53. Therefore, the cutting feed means 56 drives the pulse motor 562 to drive the male screw rod 561 in the normal direction or the reverse direction, thereby moving the cutting base 53 along the pair of Z-axis guide rails 522 and 522. It can move in (Z-axis direction).

次に、第２の切削機構６について説明する。
第２の切削機構６は、上記第１の搬出入領域Ａ１と第２の搬出入領域Ａ２との中間位置を軸として上記第１の切削機構５と点対称の位置に配設されている。このように配設された第２の切削機構６は、上記第２のチャックテーブル機構４を跨ぐように配設された門型の支持フレーム６１と、該門型の支持フレーム６１を構成する支持部６１３の外側の側面６１３ａに配設された第１の切削手段６ａと第２の切削手段６ｂとを具備している。なお、門型の支持フレーム６１は上記第１の切削機構５の門型の支持フレーム５１と実質的に同様の構成であり、第１の切削手段６ａと第２の切削手段６ｂは上記第１の切削機構５の第１の切削手段５ａと第２の切削手段５ｂと実質的に同様の構成であるため説明を省略する。
以上のように、上記第１の切削機構５と第２の切削機構６は、上記第１の搬出入領域Ａ１と第２の搬出入領域Ａ２との中間位置を軸として点対称の位置に配設されているので、無駄な空間がなく切削装置を小型に構成することができるとともに、作業者が切削ブレードの交換等をする際にアクセスが良好で作業性が向上する。 Next, the second cutting mechanism 6 will be described.
The second cutting mechanism 6 is disposed at a point-symmetrical position with respect to the first cutting mechanism 5 with an intermediate position between the first carry-in / out area A1 and the second carry-in / out area A2 as an axis. The second cutting mechanism 6 disposed in this way includes a gate-shaped support frame 61 disposed so as to straddle the second chuck table mechanism 4 and a support constituting the gate-shaped support frame 61. A first cutting means 6a and a second cutting means 6b disposed on the outer side surface 613a of the portion 613 are provided. The portal support frame 61 has substantially the same configuration as the portal support frame 51 of the first cutting mechanism 5, and the first cutting means 6a and the second cutting means 6b are the first cutting means 6b. Since the first cutting means 5a and the second cutting means 5b of the cutting mechanism 5 have substantially the same configuration, the description thereof is omitted.
As described above, the first cutting mechanism 5 and the second cutting mechanism 6 are arranged at point-symmetrical positions around the intermediate position between the first carry-in / out area A1 and the second carry-in / out area A2. Therefore, the cutting device can be configured in a small size without wasting space, and the operator can easily access and improve workability when exchanging the cutting blade.

図示の実施形態における切削装置は、図１および図２に示すように第１のチャックテーブル３４が位置する第１の搬出入領域Ａ１と第２のチャックテーブル４４が位置する第２の搬出入領域Ａ２とを結ぶＹ軸方向の直線上に配設された洗浄手段７を具備している。この洗浄手段７は、第１のチャックテーブル３４上において上記第１の切削機構５によって切削加工された被加工物、および第２のチャックテーブル４４上において上記第２の切削機構６によって切削加工された被加工物をスピンナーテーブル７１上に保持して洗浄する周知のスピンナー洗浄機構によって構成されている。   As shown in FIGS. 1 and 2, the cutting device in the illustrated embodiment includes a first carry-in / out area A1 in which the first chuck table 34 is located and a second carry-in / out area in which the second chuck table 44 is located. The cleaning means 7 is provided on a straight line in the Y-axis direction connecting A2. The cleaning means 7 is cut by the second cutting mechanism 6 on the work piece cut by the first cutting mechanism 5 on the first chuck table 34 and the second chuck table 44. It is configured by a known spinner cleaning mechanism that holds and cleans the workpiece on the spinner table 71.

図１を参照して説明を続けると、図示の実施形態における切削装置は、上記洗浄手段７の上方に配設され切削加工前の被加工物を仮置きする仮置き手段８を具備している。この仮置き手段８は、図３に示すように断面がＬ字状に形成された２本の支持レール８１、８１と、該２本の支持レール８１、８１の基端部を支持するとともに２本の支持レール８１、８１を互いに接近する方向および互いに離反する方向に作動せしめる支持レール移動手段８２とからなっている。２本の支持レール８１、８１は、それぞれ水平部８１ａと垂直部８１ｂとからなっており、水平部８１ａに後述する被加工物である半導体ウエーハを支持する環状のフレームが支持されるようになっている。このように構成された仮置き手段８は、支持レール移動手段８２を作動することによって２本の支持レール８１、８１における垂直部８１ｂの内側間隔が後述する環状のフレームの外径幅に対応する寸法と、２本の支持レール８１、８１における水平部８１ａの内側間隔が後述する環状のフレームの外径幅より広くなるような寸法に調整することができる。   1, the cutting apparatus in the illustrated embodiment includes a temporary placing means 8 that is disposed above the cleaning means 7 and temporarily places a workpiece before cutting. . The temporary placing means 8 supports two support rails 81, 81 having a L-shaped cross section as shown in FIG. 3 and the base end portions of the two support rails 81, 81 and 2 It comprises support rail moving means 82 for operating the book support rails 81, 81 in directions approaching each other and in directions away from each other. Each of the two support rails 81 and 81 includes a horizontal portion 81a and a vertical portion 81b, and an annular frame that supports a semiconductor wafer as a workpiece to be described later is supported on the horizontal portion 81a. ing. The temporary placing means 8 configured in this manner operates the support rail moving means 82 so that the inner distance between the vertical portions 81b of the two support rails 81 and 81 corresponds to the outer diameter width of the annular frame described later. It is possible to adjust the dimensions and dimensions such that the inner distance between the horizontal portions 81a of the two support rails 81 and 81 is wider than the outer diameter width of the annular frame described later.

図１および図３を参照して説明を続けると、上記仮置き手段８のＸ軸方向に隣接して後述する被加工物である半導体ウエーハを収容するカセット１０（図１参照）を載置するカセットテーブル９１を備えたカセット載置手段９が配設されている。カセット載置手段９のカセットテーブル９１は、図示しない昇降手段によって昇降せしめられるようになっている。カセットテーブル９１に載置されるカセット１０は、図１に示すように環状のフレームＦに装着されたダイシングテープＴの表面に貼着された切削加工前の被加工物である半導体ウエーハＷを載置するための複数の載置棚を備えている。このように構成され切削加工前の半導体ウエーハＷを収容したカセット１０は、カセット載置手段９のカセットテーブル９１上に載置される。   1 and 3, the cassette 10 (see FIG. 1) for housing a semiconductor wafer, which will be described later, is placed adjacent to the temporary placement means 8 in the X-axis direction. A cassette mounting means 9 having a cassette table 91 is provided. The cassette table 91 of the cassette mounting means 9 can be moved up and down by a lifting means (not shown). As shown in FIG. 1, the cassette 10 placed on the cassette table 91 carries a semiconductor wafer W, which is a workpiece before cutting, attached to the surface of a dicing tape T attached to an annular frame F. A plurality of placement shelves are provided for placement. The cassette 10 configured as described above and containing the semiconductor wafer W before cutting is placed on the cassette table 91 of the cassette placing means 9.

図１および図３を参照して説明を続けると、図示に実施形態における切削装置は、上記カセットテーブル９１上に載置されたカセット１０に収容されている環状のフレームＦに装着されたダイシングテープＴの表面に貼着された切削加工前の半導体ウエーハＷ（以下単に半導体ウエーハＷという）を仮置き手段８に搬出するとともに、仮置き手段８から後述するように洗浄済の被加工物である半導体ウエーハＷをカセット１０に搬入する搬出入手段１１を備えている。この搬出入手段１１は、搬送アーム１１１と、該搬送アーム１１１の先端部にカセット載置手段９側に向けて配設された把持部材１１２と、搬送アーム１１１をＸ軸方向に沿って移動可能に支持する搬送アーム移動手段１１３を具備している。把持部材１１２は、図示しないエアシリンダから供給されるエアの圧力によって駆動され上記環状のフレームＦを把持するように構成されている。なお、搬送アーム移動手段１１３は、例えばパルスモータによって駆動される駆動プーリと、該駆動プーリと所定の間隔を置いて配設された従動プーリと、駆動プーリと従動プーリに圏回された作動ワイヤとによって構成される周知の作動機構を用いることができる。   1 and 3, the cutting apparatus in the illustrated embodiment is a dicing tape mounted on an annular frame F housed in a cassette 10 placed on the cassette table 91. The unprocessed semiconductor wafer W (hereinafter simply referred to as “semiconductor wafer W”) adhered to the surface of T is carried out to the temporary placing means 8 and is a workpiece that has been cleaned as described later from the temporary placing means 8. A loading / unloading means 11 for loading the semiconductor wafer W into the cassette 10 is provided. The carry-in / out means 11 is capable of moving the transport arm 111, a gripping member 112 disposed at the tip of the transport arm 111 toward the cassette mounting means 9, and the transport arm 111 along the X-axis direction. The transfer arm moving means 113 is supported. The gripping member 112 is configured to be driven by the pressure of air supplied from an air cylinder (not shown) and grip the annular frame F. The transfer arm moving means 113 includes, for example, a driving pulley driven by a pulse motor, a driven pulley disposed at a predetermined interval from the driving pulley, and an operating wire wound around the driving pulley and the driven pulley. A well-known operating mechanism constituted by the above can be used.

また、図示の実施形態における切削装置は、仮置き手段８に仮置きされた切削加工前の被加工物を第１の搬出入領域Ａ１に位置付けられた第１のチャックテーブル３４および第２の搬出入領域Ａ２に位置付けられた第２のチャックテーブル４４に搬送するとともに、洗浄手段７から洗浄済の被加工物を仮置き手段８に搬送し、また、第１の搬出入領域Ａ１に位置付けられた第１のチャックテーブル３４および第２の搬出入領域Ａ２に位置付けられた第２のチャックテーブル４４から切削加工済の被加工物を洗浄手段７に搬送する搬送手段１２を備えている。搬送手段１２は、図示の実施形態においては第１の搬送手段１３と第２の搬送手段１４とからなっている。第１の搬送手段１３は、先端部が下方に向けて突出した形成された搬送アーム１３１と、該搬送アーム１３１の先端部に上下方向に移動可能に配設された支持ロッド１３２と、該支持ロッド１３２の下端に装着され上記環状のフレームＦを吸引保持する４個の吸引パッド１３３と、搬送アーム１３１をＹ軸方向に沿って移動可能に支持する搬送アーム移動手段１３４を具備している。上記支持ロッド１３２は、搬送アーム１３１の先端部に配設された図示しないエアシリンダ等の昇降手段によって上下方向に移動せしめられる。また、第２の搬送手段１４は、上記第１の搬送手段１３と同様の構成をしており図示の実施形態においては第１の搬送手段１３の下側に配設される。第２の搬送手段１４は、上記第１の搬送手段１３と同様に先端部が下方に向けて突出した形成された搬送アーム１４１と、該搬送アーム１４１の先端部に上下方向に移動可能に配設された支持ロッド１４２と、該支持ロッド１４２の下端に装着され上記環状のフレームＦを吸引保持する４個の吸引パッド１４３と、搬送アーム１４１をＹ軸方向に沿って移動可能に支持する搬送アーム移動手段１４４を具備している。上記支持ロッド１４２は、搬送アーム１４１の先端部に配設された図示しないエアシリンダ等の昇降手段によって上下方向に移動せしめられる。   Further, the cutting apparatus in the illustrated embodiment includes the first chuck table 34 and the second unloading work piece, which are temporarily placed on the temporary placing means 8, and are positioned in the first carry-in / out area A1. In addition to being transported to the second chuck table 44 positioned in the entry area A2, the cleaned workpiece is transported from the cleaning means 7 to the temporary placing means 8, and is positioned in the first carry-in / out area A1. The first chuck table 34 and the second chuck table 44 positioned in the second carry-in / out area A2 are provided with a conveying means 12 that conveys a workpiece to be cleaned to the cleaning means 7. In the illustrated embodiment, the transport unit 12 includes a first transport unit 13 and a second transport unit 14. The first transport means 13 includes a transport arm 131 formed with a tip projecting downward, a support rod 132 disposed on the tip of the transport arm 131 so as to be movable in the vertical direction, and the support Four suction pads 133 attached to the lower end of the rod 132 and sucking and holding the annular frame F, and a transfer arm moving means 134 for supporting the transfer arm 131 movably along the Y-axis direction are provided. The support rod 132 is moved up and down by lifting means such as an air cylinder (not shown) disposed at the tip of the transfer arm 131. The second transport unit 14 has the same configuration as the first transport unit 13 and is disposed below the first transport unit 13 in the illustrated embodiment. Similar to the first transport means 13, the second transport means 14 has a transport arm 141 formed with a tip projecting downward, and is arranged to be movable in the vertical direction at the tip of the transport arm 141. Support rod 142 provided, four suction pads 143 attached to the lower end of the support rod 142 for sucking and holding the annular frame F, and transport for supporting the transport arm 141 movably along the Y-axis direction Arm moving means 144 is provided. The support rod 142 is moved in the vertical direction by an elevating means such as an air cylinder (not shown) disposed at the tip of the transfer arm 141.

このように構成された第１の搬送手段１３と第２の搬送手段１４は、図１に示すように上下に配設され４個の吸引パッド１３３および１４３が上記第１の搬出入領域Ａ１および第２の搬出入領域Ａ２と洗浄手段７をＹ軸方向に結ぶ直線上を移動するように構成されている。そして、図示の実施形態においては、第１の搬送手段１３は、仮置き手段８に仮置きされた切削加工前の被加工物を第１の搬出入領域Ａ１に位置付けられた第１のチャックテーブル３４および第２の搬出入領域Ａ２に位置付けられた第２のチャックテーブル４４に搬送するとともに、洗浄手段７から洗浄済の被加工物を仮置き手段８に搬送する。一方、第２の搬送手段１４は、第１の搬出入領域Ａ１に位置付けられた第１のチャックテーブル３４および第２の搬出入領域Ａ２に位置付けられた第２のチャックテーブル４４から切削加工済の被加工物を洗浄手段７に搬送する。即ち、第２の搬送手段１４は、切削加工によって生成される切削屑や切削水によって汚染された被加工物を洗浄手段７に搬送する役割を果たす。   As shown in FIG. 1, the first transport means 13 and the second transport means 14 configured as described above are arranged vertically, and the four suction pads 133 and 143 are arranged in the first carry-in / out area A1 and It is configured to move on a straight line connecting the second carry-in / out area A2 and the cleaning means 7 in the Y-axis direction. In the illustrated embodiment, the first transport means 13 includes a first chuck table in which the workpiece before cutting temporarily placed on the temporary placing means 8 is positioned in the first carry-in / out area A1. 34 and the second chuck table 44 positioned in the second loading / unloading area A2 and the cleaned workpiece from the cleaning means 7 to the temporary placement means 8. On the other hand, the second transfer means 14 has been cut from the first chuck table 34 positioned in the first carry-in / out area A1 and the second chuck table 44 positioned in the second carry-in / out area A2. The workpiece is conveyed to the cleaning means 7. That is, the second transport unit 14 plays a role of transporting to the cleaning unit 7 a workpiece contaminated with cutting waste or cutting water generated by the cutting process.

以上のように構成された第１の搬送手段１３および第２の搬送手段１４は、静止基台２上に適宜の支持手段によって支持されている。そして、第１の搬送手段１３および第２の搬送手段１４の搬送アーム１３１および１４１は、搬送作業を実施しないときには図３において２点鎖線で示す待機位置に位置付けられている。
なお、第１の搬送手段１３および第２の搬送手段１４の搬送アーム移動手段１３４および１４４は、上記搬出入手段１１の搬送アーム移動手段１１３と同様に、パルスモータによって駆動される駆動プーリと、該駆動プーリと所定の間隔を置いて配設された従動プーリと、駆動プーリと従動プーリに圏回された作動ワイヤとによって構成される周知の作動機構を用いることができる。 The first transport means 13 and the second transport means 14 configured as described above are supported on the stationary base 2 by appropriate support means. Then, the transfer arms 131 and 141 of the first transfer means 13 and the second transfer means 14 are positioned at a standby position indicated by a two-dot chain line in FIG. 3 when the transfer operation is not performed.
The transfer arm moving means 134 and 144 of the first transfer means 13 and the second transfer means 14 are, like the transfer arm moving means 113 of the carry-in / out means 11, a drive pulley driven by a pulse motor, It is possible to use a well-known operating mechanism including a driven pulley disposed at a predetermined interval from the driving pulley, and a driving pulley and an operating wire wound around the driven pulley.

図示の実施形態における切削装置は以上のように構成されており、以下その作用について主に図１を参照して説明する。
上述した切削装置を用いて被加工物である半導体ウエーハに切削加工を施すには、環状のフレームＦに装着されたダイシングテープＴの表面に貼着された切削加工前の半導体ウエーハＷを収容したカセット１０をカセット載置手段９のカセットテーブル９１上に載置する。次に、搬出入手段１１の搬送アーム移動手段１１３を作動して搬送アーム１１１をカセットテーブル９１上に載置されたカセット１０に向けて前進移動し、搬送アーム１１１に配設された把持部材１１２を作動してカセット１０の所定位置に収容された半導体ウエーハＷをダイシングテープＴを介して支持する環状のフレームＦを把持する。把持部材１１２によって環状のフレームＦを把持したならば、搬送アーム移動手段１１３を作動して搬送アーム１１１をカセット１０と反対側に向けて後退移動し、環状のフレームＦを仮置き手段８を構成する２本の支持レール８１、８１における水平部８１ａ上に搬出し、把持部材１１２による把持状態を解除して、環状のフレームＦを２本の支持レール８１，８１における水平部８１ａ上に仮置きする。そして、仮置き手段８の支持レール移動手段８２を作動して２本の支持レール８１、８１を互いに接近する方向に移動し、垂直部８１ｂによって環状のフレームＦを一時的に挟持することにより位置合わせを行う。 The cutting apparatus in the illustrated embodiment is configured as described above, and the operation thereof will be described mainly with reference to FIG.
In order to perform the cutting process on the semiconductor wafer, which is a workpiece, using the above-described cutting apparatus, the unprocessed semiconductor wafer W adhered to the surface of the dicing tape T mounted on the annular frame F is accommodated. The cassette 10 is placed on the cassette table 91 of the cassette placing means 9. Next, the transfer arm moving means 113 of the loading / unloading means 11 is operated to move the transfer arm 111 forward toward the cassette 10 placed on the cassette table 91, and the gripping member 112 disposed on the transfer arm 111. Is operated to hold the annular frame F that supports the semiconductor wafer W accommodated in a predetermined position of the cassette 10 via the dicing tape T. When the annular frame F is gripped by the gripping member 112, the transport arm moving means 113 is operated to move the transport arm 111 backward toward the opposite side of the cassette 10, and the annular frame F constitutes the temporary placing means 8. The two support rails 81 and 81 are carried out on the horizontal part 81a, released from the gripping state by the gripping member 112, and the annular frame F is temporarily placed on the two support rails 81 and 81 on the horizontal part 81a. To do. Then, the support rail moving means 82 of the temporary placing means 8 is actuated to move the two support rails 81 and 81 in a direction approaching each other, and the annular frame F is temporarily sandwiched by the vertical portion 81b. Align.

このようにして半導体ウエーハＷの位置合わせを実施したならば、搬出入手段１１の搬送アーム移動手段１１３を作動して搬送アーム１１１をカセット１０と反対側に向けて更に後退移動し、仮置き手段８の領域から離隔する。次に、第１の搬送手段１３の搬送アーム移動手段１３４を作動して搬送アーム１３１に配設された支持ロッド１３２に装着された吸引パッド１３３を仮置き手段８に仮置きされた半導体ウエーハＷの上方に位置付ける。そして、支持ロッド１３２を下方に移動して吸引パッド１３３を半導体ウエーハＷをダイシングテープＴを介して支持する環状のフレームＦの上面に接触せしめ、図示しない吸引手段を作動することにより吸引パッド１３３によって環状のフレームＦを吸引保持する。このようにして吸引パッド１３３によって環状のフレームＦを吸引保持したならば、支持ロッド１３２を上方に移動するとともに、搬送アーム移動手段１３４を作動して吸引パッド１３３によって保持された環状のフレームＦを第１の搬出入領域Ａ１に位置付けられた第１のチャックテーブル３４の上方に搬送する。次に、支持ロッド１３２を下方に移動して吸引パッド１３３に吸引保持された環状のフレームＦにダイシングテープＴを介して支持された半導体ウエーハＷを第１のチャックテーブル３４上に載置するとともに、吸引パッド１３３による環状のフレームＦの吸引保持を解除する。このようにして第１のチャックテーブル３４に載置された環状のフレームＦにダイシングテープＴを介して支持された半導体ウエーハＷは、図示しない吸引手段を作動することにより第１のチャックテーブル３４上に吸引保持される。そして、環状のフレームＦがクランプ３４３によって固定される。   When the alignment of the semiconductor wafer W is carried out in this way, the transfer arm moving means 113 of the carry-in / out means 11 is actuated to further move the transfer arm 111 backward toward the opposite side of the cassette 10, and the temporary placing means Separate from 8 regions. Next, the semiconductor wafer W in which the suction pad 133 mounted on the support rod 132 disposed on the transfer arm 131 is temporarily placed on the temporary placement means 8 by operating the transfer arm moving means 134 of the first transfer means 13. Position above. Then, the support rod 132 is moved downward to bring the suction pad 133 into contact with the upper surface of the annular frame F that supports the semiconductor wafer W via the dicing tape T, and the suction pad 133 is operated by operating suction means (not shown). The annular frame F is sucked and held. If the annular frame F is sucked and held by the suction pad 133 in this way, the support rod 132 is moved upward, and the transfer arm moving means 134 is operated to hold the annular frame F held by the suction pad 133. It is conveyed above the first chuck table 34 positioned in the first carry-in / out area A1. Next, the support rod 132 is moved downward and the semiconductor wafer W supported via the dicing tape T on the annular frame F sucked and held by the suction pad 133 is placed on the first chuck table 34. The suction holding of the annular frame F by the suction pad 133 is released. Thus, the semiconductor wafer W supported on the annular frame F placed on the first chuck table 34 via the dicing tape T operates on the first chuck table 34 by operating a suction means (not shown). Is sucked in. The annular frame F is fixed by the clamp 343.

このようにして仮置き手段８に仮置きされ位置合わせされた半導体ウエーハＷを第１のチャックテーブル３４に搬送する間に、上記搬出入手段１１を作動してカセット１０に収容されている次に切削加工すべき半導体ウエーハＷ（環状のフレームＦにダイシングテープＴを介して支持された状態）を仮置き手段８に搬出するとともに位置合わせが実施されている。従って、第１の搬送手段１３は、上述したように仮置き手段８に仮置きされ位置合わせされた半導体ウエーハＷを第１のチャックテーブル３４に搬送したならば、次に仮置き手段８に搬出され位置合わせされた半導体ウエーハＷを第２のチャックテーブル４４に搬送する。このようにして第２のチャックテーブル４４に載置された環状のフレームＦにダイシングテープＴを介して支持された半導体ウエーハＷは、図示しない吸引手段を作動することにより第２のチャックテーブル４４上に吸引保持される。そして、環状のフレームＦがクランプ４４３によって固定される。   While the semiconductor wafer W temporarily placed and aligned in the temporary placement means 8 in this way is transported to the first chuck table 34, the carry-in / out means 11 is operated to be stored in the cassette 10 next. The semiconductor wafer W to be cut (a state in which the semiconductor wafer W is supported on the annular frame F via the dicing tape T) is carried out to the temporary placement means 8 and aligned. Accordingly, if the first transport means 13 transports the semiconductor wafer W temporarily placed and positioned on the temporary placement means 8 as described above to the first chuck table 34, the first transport means 13 then carries it to the temporary placement means 8. The aligned semiconductor wafer W is transported to the second chuck table 44. Thus, the semiconductor wafer W supported on the annular frame F placed on the second chuck table 44 via the dicing tape T operates on the second chuck table 44 by operating a suction means (not shown). Is sucked in. The annular frame F is fixed by the clamp 443.

以上のようにして第１のチャックテーブル３４および第２のチャックテーブル４４に半導体ウエーハＷを吸引保持したならば、第１の加工送り手段３５を作動して第１のチャックテーブル３４を第１の切削機構５が配設された第１の切削領域Ｂ１に移動するとともに、第２の加工送り手段４５を作動して第２のチャックテーブル４４を第２の切削機構６が配設された第２の切削領域Ｂ２に移動する。そして、第１の切削領域Ｂ１に位置付けられた第１のチャックテーブル３４に保持された半導体ウエーハＷに対しては、第１の切削機構５を構成する第１の切削手段５ａおよび第２の切削手段５ｂにそれぞれ設けられた撮像手段５４０によって加工領域を検出するアライメント作業が実施される。次に、第１の切削機構５を構成する第１の切削手段５ａおよび第２の切削手段５ｂの切削ブレード５４３を作動して第１の切削領域Ｂ１に位置付けられた第１のチャックテーブル３４に保持されている半導体ウエーハＷに対して所定の切削加工を施す。また、第２の切削領域Ｂ２に位置付けられた第２のチャックテーブル４４に保持されている半導体ウエーハＷに対しては、第２の切削機構６を構成する第１の切削手段６ａと第２の切削手段６ｂによって上記アライメント作業を実施するとともに所定の切削加工を実施する。   When the semiconductor wafer W is sucked and held on the first chuck table 34 and the second chuck table 44 as described above, the first machining feed means 35 is operated to move the first chuck table 34 to the first chuck table 34. While moving to the 1st cutting field B1 in which cutting mechanism 5 was arranged, the 2nd cutting mechanism 6 was operated by operating the 2nd processing feed means 45, and the 2nd cutting mechanism 6 was arranged in the 2nd. To the cutting area B2. For the semiconductor wafer W held on the first chuck table 34 positioned in the first cutting area B1, the first cutting means 5a and the second cutting that constitute the first cutting mechanism 5 are used. An alignment operation for detecting the processing region is performed by the imaging means 540 provided in the means 5b. Next, the cutting blades 543 of the first cutting means 5a and the second cutting means 5b constituting the first cutting mechanism 5 are operated to move the first chuck table 34 positioned in the first cutting area B1. A predetermined cutting process is performed on the held semiconductor wafer W. Further, for the semiconductor wafer W held on the second chuck table 44 positioned in the second cutting region B2, the first cutting means 6a and the second cutting means 6 constituting the second cutting mechanism 6 are used. The above-described alignment operation is performed by the cutting means 6b and a predetermined cutting process is performed.

以上のように、図示の実施形態における切削装置においては、第１の切削領域Ｂ１に位置付けられた第１のチャックテーブル３４に保持された半導体ウエーハＷに対して第１の切削機構５を構成する第１の切削手段５ａと第２の切削手段５ｂの２個の切削ブレード５４３を作用させて切削加工を施すとともに、第２の切削領域Ｂ２に位置付けられた第２のチャックテーブル４４に保持された半導体ウエーハＷに対して第２の切削機構６を構成する第１の切削手段６ａと第２の切削手段６ｂの２個の切削ブレードを作用させて同時に所定の切削加工を施すことが可能となり、生産性をより向上させることができる。   As described above, in the cutting apparatus in the illustrated embodiment, the first cutting mechanism 5 is configured for the semiconductor wafer W held on the first chuck table 34 positioned in the first cutting region B1. The two cutting blades 543 of the first cutting means 5a and the second cutting means 5b are applied to perform cutting work, and are held by the second chuck table 44 positioned in the second cutting area B2. The semiconductor wafer W can be subjected to predetermined cutting simultaneously by applying two cutting blades of the first cutting means 6a and the second cutting means 6b constituting the second cutting mechanism 6 to the semiconductor wafer W. Productivity can be further improved.

上述したように第１のチャックテーブル３４に保持された半導体ウエーハＷおよび第２のチャックテーブル４４に保持された半導体ウエーハＷにそれぞれ所定の切削加工を施したならば、第１の加工送り手段３５を作動して第１のチャックテーブル３４を第１の搬出入領域Ａ１に戻すとともに、第２の加工送り手段４５を作動して第２のチャックテーブル４４を第２の搬出入領域Ａ２に戻す。次に、第２の搬送手段１４の搬送アーム移動手段１４４を作動して搬送アーム１４１に配設された支持ロッド１４２に装着された吸引パッド１４３を第１のチャックテーブル３４に載置された半導体ウエーハＷの上方に位置付ける。そして、支持ロッド１４２を下方に移動して吸引パッド１４３を半導体ウエーハＷをダイシングテープＴを介して支持する環状のフレームＦの上面に接触せしめ、該吸引パッド１４３によって環状のフレームＦを吸引保持する。このようにして吸引パッド１４３によって環状のフレームＦを吸引保持したならば、支持ロッド１４２を上方に移動するとともに、搬送アーム移動手段１４４を作動して吸引パッド１４３によって保持された環状のフレームＦを洗浄手段７の上方に搬送する。次に、支持ロッド１４２を下方に移動して吸引パッド１４３に吸引保持された環状のフレームＦにダイシングテープＴを介して支持された半導体ウエーハＷを洗浄手段７のスピンナーテーブル７１上に載置するとともに、吸引パッド１４３による環状のフレームＦの吸引保持を解除する。このとき、仮置き手段８を構成する２本の支持レール８１、８１における水平部８１ａの内側間隔は、環状のフレームＦの外径幅より広くなるような寸法に広げられている。このようにして、洗浄手段７のスピンナーテーブル７１に搬送された切削加工が施された半導体ウエーハＷは、スピンナー洗浄される。
なお、上述したように切削加工された半導体ウエーハＷを洗浄手段７のスピンナーテーブル７１に搬送した第２の搬送手段１４は、搬送アーム１３１を図３において２点鎖線で示す待機位置に位置付ける。 As described above, if the semiconductor wafer W held on the first chuck table 34 and the semiconductor wafer W held on the second chuck table 44 are respectively subjected to predetermined cutting, the first process feeding means 35 is provided. Is operated to return the first chuck table 34 to the first carry-in / out area A1, and the second processing feed means 45 is operated to return the second chuck table 44 to the second carry-in / out area A2. Next, by operating the transfer arm moving unit 144 of the second transfer unit 14, the suction pad 143 mounted on the support rod 142 disposed on the transfer arm 141 is mounted on the first chuck table 34. Position above the wafer W. Then, the support rod 142 is moved downward to bring the suction pad 143 into contact with the upper surface of the annular frame F that supports the semiconductor wafer W via the dicing tape T, and the annular frame F is sucked and held by the suction pad 143. . If the annular frame F is sucked and held by the suction pad 143 in this way, the support rod 142 is moved upward and the transfer arm moving means 144 is operated to hold the annular frame F held by the suction pad 143. It is conveyed above the cleaning means 7. Next, the support rod 142 is moved downward, and the semiconductor wafer W supported via the dicing tape T on the annular frame F sucked and held by the suction pad 143 is placed on the spinner table 71 of the cleaning means 7. At the same time, the suction holding of the annular frame F by the suction pad 143 is released. At this time, the inner distance between the horizontal portions 81a of the two support rails 81, 81 constituting the temporary placing means 8 is widened to be larger than the outer diameter width of the annular frame F. In this way, the semiconductor wafer W that has been subjected to the cutting process and transferred to the spinner table 71 of the cleaning means 7 is subjected to spinner cleaning.
In addition, the 2nd conveyance means 14 which conveyed the semiconductor wafer W cut as mentioned above to the spinner table 71 of the washing | cleaning means 7 positions the conveyance arm 131 in the stand-by position shown with a dashed-two dotted line in FIG.

上記のようにして切削加工された半導体ウエーハＷが洗浄手段７において洗浄されたならば、第１の搬送手段１３の搬送アーム移動手段１３４を作動して搬送アーム１３１に配設された支持ロッド１３２に装着された吸引パッド１３３を洗浄手段７において洗浄された半導体ウエーハＷの上方に位置付ける。そして、支持ロッド１３２を下方に移動して吸引パッド１３３を半導体ウエーハＷをダイシングテープＴを介して支持する環状のフレームＦの上面に接触せしめ、図示しない吸引手段を作動することにより吸引パッド１３３によって環状のフレームＦを吸引保持する。そして、支持ロッド１３２を上方に移動して吸引パッド１３３に吸引保持された環状のフレームＦを仮置き手段８の２本の支持レール８１、８１より上方に位置付ける。次に、仮置き手段８の２本の支持レール８１、８１における垂直部８１ｂの内側間隔を環状のフレームＦの外径幅より僅かに広い寸法に調整した後、第１の搬送手段１３の支持ロッド１３２を下方に移動して吸引パッド１３３に吸引保持されている環状のフレームＦを２本の支持レール８１、８１における水平部８１ａ上に載置するとともに吸引パッド１３３による吸引保持を解除する。このようにして半導体ウエーハＷをダイシングテープＴを介して支持する環状のフレームＦを仮置き手段８の２本の支持レール８１、８１における水平部８１ａ上に載置したならば、第１の搬送手段１３の吸引パッド１３３を仮置き手段８から離隔するとともに、搬出入手段１１を作動して洗浄済の半導体ウエーハＷをカセット１０の所定位置に搬入して収納する。   When the semiconductor wafer W cut as described above is cleaned in the cleaning unit 7, the support arm 132 disposed on the transfer arm 131 is operated by operating the transfer arm moving unit 134 of the first transfer unit 13. The suction pad 133 mounted on the semiconductor wafer W is positioned above the semiconductor wafer W cleaned by the cleaning means 7. Then, the support rod 132 is moved downward to bring the suction pad 133 into contact with the upper surface of the annular frame F that supports the semiconductor wafer W via the dicing tape T, and the suction pad 133 is operated by operating suction means (not shown). The annular frame F is sucked and held. Then, the support rod 132 is moved upward to position the annular frame F sucked and held by the suction pad 133 above the two support rails 81, 81 of the temporary placement means 8. Next, after adjusting the inner distance of the vertical part 81b of the two support rails 81, 81 of the temporary placing means 8 to a dimension slightly wider than the outer diameter width of the annular frame F, the support of the first conveying means 13 is performed. The rod 132 is moved downward to place the annular frame F sucked and held by the suction pad 133 on the horizontal portion 81a of the two support rails 81 and 81, and the suction holding by the suction pad 133 is released. If the annular frame F for supporting the semiconductor wafer W via the dicing tape T is placed on the horizontal portions 81a of the two support rails 81 and 81 of the temporary placing means 8 in this way, the first conveyance is performed. The suction pad 133 of the means 13 is separated from the temporary placing means 8 and the carry-in / out means 11 is operated to carry the cleaned semiconductor wafer W into a predetermined position of the cassette 10 for storage.

このようにして、第１の搬出入領域Ａ１に戻された第１のチャックテーブル３４に保持され切削加工が施された半導体ウエーハＷを洗浄手段７に搬送して洗浄し、洗浄済の半導体ウエーハＷをカセット１０の所定位置に搬入して収納したならば、第２の搬送手段１４を作動して第２の搬出入領域Ａ２に戻された第２のチャックテーブル４４に保持され切削加工が施された半導体ウエーハＷを洗浄手段７に搬送する。そして、洗浄手段７に搬送された切削加工された半導体ウエーハＷを洗浄手段７において洗浄した後、第１の搬送手段１３を作動して洗浄済みの半導体ウエーハＷを仮置き手段８に搬送し、搬出入手段１１を作動して仮置き手段８に搬送された洗浄済みの半導体ウエーハＷをカセット１０の所定位置に搬入して収納する。   In this manner, the semiconductor wafer W held by the first chuck table 34 returned to the first carry-in / out area A1 and subjected to the cutting is transported to the cleaning means 7 for cleaning, and the cleaned semiconductor wafer is obtained. When W is loaded and stored in a predetermined position of the cassette 10, the second conveying means 14 is operated and held by the second chuck table 44 returned to the second loading / unloading area A2, and cutting is performed. The semiconductor wafer W is transferred to the cleaning means 7. Then, after the semiconductor wafer W that has been cut and transferred to the cleaning means 7 is cleaned in the cleaning means 7, the first transfer means 13 is operated to transfer the cleaned semiconductor wafer W to the temporary placement means 8, By operating the carry-in / out means 11, the cleaned semiconductor wafer W conveyed to the temporary placement means 8 is carried into a predetermined position of the cassette 10 and stored.

以上のように、図示の実施形態においては、第１の搬出入領域Ａ１に位置付けられた第１のチャックテーブル３４および第２の搬出入領域Ａ２に位置付けられた第２のチャックテーブル４４から切削加工によって生成される切削屑や切削水によって汚染された被加工物を洗浄手段７に搬送する際には第２の搬送手段１４を使用し、その他の搬送即ち仮置き手段８に仮置きされた切削加工前の被加工物を第１の搬出入領域Ａ１に位置付けられた第１のチャックテーブル３４および第２の搬出入領域Ａ２に位置付けられた第２のチャックテーブル４４に搬送するとともに、洗浄手段７から洗浄済の被加工物を仮置き手段８に搬送する際には第１の搬送手段１３を使用するので、被加工物をダイシングテープＴを介して支持する環状のフレームＦが汚染されることがない。
なお、第１のチャックテーブル４３に保持され切削加工された半導体ウエーハＷを洗浄手段７において洗浄している最中に、搬出入手段１１を作動してカセット１０に収容されている半導体ウエーハＷを仮置き手段８に搬出し、第１の搬送手段１３を作動して仮置き手段８に搬出された半導体ウエーハＷを第１のチャックテーブル３４に搬送することが時間ロスをなくすために好ましい。
また、第２のチャックテーブル４４に保持され切削加工された半導体ウエーハＷを洗浄手段７において洗浄している最中に、搬出入手段１１を作動してカセット１０に収容されている半導体ウエーハＷを仮置き手段８に搬出し、第１の搬送手段１３を作動して仮置き手段８に搬出された半導体ウエーハＷを第２のチャックテーブル４４に搬送することが時間ロスをなくすために好ましい。 As described above, in the illustrated embodiment, cutting is performed from the first chuck table 34 positioned in the first carry-in / out area A1 and the second chuck table 44 positioned in the second carry-in / out area A2. When the workpiece contaminated with the cutting waste or cutting water generated by the above is transported to the cleaning means 7, the second transport means 14 is used, and the cutting temporarily placed on the other transport, that is, the temporary placing means 8. The workpiece before processing is transferred to the first chuck table 34 positioned in the first loading / unloading area A1 and the second chuck table 44 positioned in the second loading / unloading area A2, and the cleaning means 7 Since the first transport means 13 is used when transporting the cleaned workpiece to the temporary placement means 8, an annular frame F for supporting the workpiece via the dicing tape T is provided. It will not be dyed.
While the semiconductor wafer W held by the first chuck table 43 and being cut is being cleaned by the cleaning means 7, the loading / unloading means 11 is operated to move the semiconductor wafer W accommodated in the cassette 10. It is preferable to transport the semiconductor wafer W unloaded to the temporary placing means 8 and the first carrying means 13 to the first chuck table 34 by operating the first carrying means 13 in order to eliminate time loss.
In addition, while the semiconductor wafer W held by the second chuck table 44 and being cut is being cleaned by the cleaning means 7, the loading / unloading means 11 is operated to remove the semiconductor wafer W accommodated in the cassette 10. It is preferable to transport the semiconductor wafer W unloaded to the temporary placing means 8 and the first carrying means 13 to the second chuck table 44 by operating the first carrying means 13 in order to eliminate time loss.

以上、本発明を図示の実施形態に基づいて説明したが、本発明は実施形態のみに限定されるものではなく、本発明の趣旨の範囲で種々の変形は可能である。例えば、上述した実施形態においては、切削装置を単体で実施する例を示したが、例えば特開２０１５−８１９５号公報に開示されているように搬送ラインに沿って複数の装置を設置してオートメーションシステムを構築する場合に適用しても、第１の切削機構５と第２の切削機構６が第１の搬出入領域Ａ１と第２の搬出入領域Ａ２との中間位置を軸として点対称の位置に配設されているので、作業者が切削ブレードの交換等をする際にアクセスが良好でメンテナンスを迅速に行うことができる。   Although the present invention has been described based on the illustrated embodiment, the present invention is not limited to the embodiment, and various modifications are possible within the scope of the gist of the present invention. For example, in the above-described embodiment, an example in which the cutting device is implemented alone has been shown. However, for example, as disclosed in Japanese Patent Application Laid-Open No. 2015-8195, a plurality of devices are installed along a conveyance line to perform automation. Even if it is applied when constructing a system, the first cutting mechanism 5 and the second cutting mechanism 6 are point-symmetric about the intermediate position between the first carry-in / out area A1 and the second carry-in / out area A2. Since it is arranged at the position, when the operator replaces the cutting blade or the like, the access is good and the maintenance can be performed quickly.

２：静止基台
３：第１のチャックテーブル機構
３２：移動基台
３４：第１のチャックテーブル
３５：第１の加工送り手段
４：第２のチャックテーブル機構
４２：移動基台
４４：第２のチャックテーブル
４５：第２の加工送り手段
５：第１の切削機構
５ａ：第１の切削手段
５ｂ：第２の切削手段
５５：割り出し送り手段
６：第２の切削機構
６ａ：第１の切削手段
６ｂ：第２の切削手段
６５：割り出し送り手段
７：洗浄手段
８：仮置き手段
９：カセット載置手段
１０：カセット
１１：搬出入手段
１２：搬送手段
１３：第１の搬送手段
１４：第２の搬送手段
Ｆ：環状のフレーム
Ｔ：ダイシングテープ
Ｗ：半導体ウエーハ 2: stationary base 3: first chuck table mechanism 32: moving base 34: first chuck table 35: first processing feed means 4: second chuck table mechanism 42: moving base 44: second Chuck table 45: second machining feed means 5: first cutting mechanism 5a: first cutting means 5b: second cutting means 55: index feeding means 6: second cutting mechanism 6a: first cutting Means 6b: Second cutting means 65: Index feeding means 7: Cleaning means 8: Temporary placing means 9: Cassette placing means 10: Cassette 11: Loading / unloading means 12: Conveying means 13: First conveying means 14: First 2 transport means F: annular frame T: dicing tape W: semiconductor wafer

Claims (5)

被加工物に切削加工を施す切削装置であって、
被加工物を保持し加工送り方向（Ｘ軸方向）に移動可能に構成されＸ軸方向と直交する割り出し送り方向（Ｙ軸方向）に互いに隣接して配設される第１のチャックテーブルおよび第２のチャックテーブルと、
該第１のチャックテーブルおよび該第２のチャックテーブルに保持された被加工物にそれぞれ切削加工を施す第１の切削機構および第２の切削機構と、
該第１の切削機構および該第２の切削機構によって切削された被加工物を洗浄する洗浄手段と、を具備し、
該第１のチャックテーブルは被加工物を搬出入する第１の搬出入領域と該第１の切削機構が配設された第１の切削領域に位置付けられるように構成され、該第２のチャックテーブルは該第１の搬出入領域とＹ軸方向の直線上に隣接し被加工物を搬出入する第２の搬出入領域と該第２の切削機構が配設された第２の切削領域に位置付けられるように構成されており、
該第１の切削機構はＹ軸方向の直線上に配設された２本の回転スピンドルと該２本の回転スピンドルの互いに対向する端部にそれぞれ装着された切削ブレードとを備えた第１の切削手段および第２の切削手段とを具備し、該第２の切削機構はＹ軸方向の直線上に配設された２本の回転スピンドルと該２本の回転スピンドルの互いに対向する端部にそれぞれ装着された切削ブレードとを備えた第１の切削手段および第２の切削手段とを具備し、
該第１の切削機構と該第２の切削機構は該第１の搬出入領域と該第２の搬出入領域との中間位置を軸として点対称の位置に配設されており、
該洗浄手段は、該第１の搬出入領域と該第２の搬出入領域とを結ぶＹ軸方向の直線上に配設される、
ことを特徴とする切削装置。 A cutting device for cutting a workpiece,
A first chuck table configured to hold a workpiece and move in the machining feed direction (X-axis direction) and disposed adjacent to each other in an index feed direction (Y-axis direction) perpendicular to the X-axis direction; 2 chuck tables,
A first cutting mechanism and a second cutting mechanism that respectively cut the workpieces held by the first chuck table and the second chuck table;
Cleaning means for cleaning the workpiece cut by the first cutting mechanism and the second cutting mechanism,
The first chuck table is configured to be positioned in a first loading / unloading area for loading / unloading a workpiece and a first cutting area in which the first cutting mechanism is disposed, and the second chuck table The table is adjacent to the first loading / unloading area on the straight line in the Y-axis direction, and is provided in a second loading / unloading area for loading / unloading a workpiece and a second cutting area in which the second cutting mechanism is disposed. Configured to be positioned,
The first cutting mechanism includes a first rotary spindle arranged on a straight line in the Y-axis direction and a first cutting blade mounted on each of opposite ends of the two rotary spindles. Cutting means and second cutting means, and the second cutting mechanism has two rotary spindles arranged on a straight line in the Y-axis direction and ends of the two rotary spindles facing each other. A first cutting means and a second cutting means each having a cutting blade mounted thereon,
The first cutting mechanism and the second cutting mechanism are disposed at point-symmetrical positions around an intermediate position between the first carry-in / out area and the second carry-in / out area,
The cleaning means is disposed on a straight line in the Y-axis direction connecting the first carry-in / out area and the second carry-in / out area.
The cutting device characterized by the above. 該第１の搬出入領域と該第２の搬出入領域と該洗浄手段とに被加工物を搬送する搬送手段を備えている、請求項１記載の切削装置。   The cutting apparatus according to claim 1, further comprising a conveying unit configured to convey a workpiece to the first carry-in / out region, the second carry-in / out region, and the cleaning unit. 該洗浄手段の上方に被加工物を仮置きする２本のガイドレールが間隔調整可能に構成された仮置き手段が配設され、
該搬送手段は、該仮置き手段に仮置きされた切削加工前の被加工物を該第１の搬出入領域に位置付けられた該第１のチャックテーブルおよび該第２の搬出入領域に位置付けられた第２のチャックテーブルに搬送するとともに、該洗浄手段から洗浄済の被加工物を該仮置き手段に搬送し、また、該第１の搬出入領域に位置付けられた該第１のチャックテーブルおよび該第２の搬出入領域に位置付けられた第２のチャックテーブルから切削加工済の被加工物を該洗浄手段に搬送する、請求項２記載の切削装置。 Temporary placing means is arranged above the cleaning means so that the distance between the two guide rails for temporarily placing the workpiece can be adjusted.
The conveying means is positioned on the first chuck table and the second loading / unloading area, which are positioned on the first loading / unloading area, of the workpiece temporarily placed on the temporary placing means before cutting. The first chuck table that is transported to the second chuck table, transports the cleaned workpiece from the cleaning means to the temporary placing means, and is positioned in the first carry-in / out area; The cutting apparatus according to claim 2, wherein a workpiece to be cut is conveyed from the second chuck table positioned in the second carry-in / out area to the cleaning means. 該搬送手段は、第１の搬送手段と第２の搬送手段を具備し、
該第１の搬送手段は、該仮置き手段に仮置きされた切削加工前の被加工物を該第１の搬出入領域に位置付けられた該第１のチャックテーブルおよび該第２の搬出入領域に位置付けられた第２のチャックテーブルに搬送するとともに、該洗浄手段から洗浄済の被加工物を該仮置き手段に搬送し、
該第２の搬送手段、該第１の搬出入領域に位置付けられた該第１のチャックテーブルおよび該第２の搬出入領域に位置付けられた第２のチャックテーブルから切削加工済の被加工物を該洗浄手段に搬送する、請求項３記載の切削装置。 The conveying means comprises a first conveying means and a second conveying means,
The first conveying means includes the first chuck table and the second carry-in / out area, in which the workpiece that has been temporarily placed on the temporary placing means and is not yet cut is positioned in the first carry-in / out area. A second chuck table positioned at the same time, and a cleaned workpiece from the cleaning means to the temporary placement means,
A workpiece that has been cut from the second conveying means, the first chuck table positioned in the first carry-in / out region, and the second chuck table located in the second carry-in / out region. The cutting device according to claim 3, wherein the cutting device is transported to the cleaning means. 該仮置き手段に隣接してＸ軸方向に被加工物を収容したカセットが載置されるカセットテーブルが配設され、Ｘ軸方向に進退して該カセットテーブルに載置された該カセットに収容された切削加工前の被加工物を該仮置き手段に搬出するとともに該仮置き手段から洗浄済の被加工物を該カセットに搬入する搬出入手段が配設されている、請求項３又は４記載の切削装置。   A cassette table on which a cassette containing a workpiece in the X-axis direction is placed adjacent to the temporary placement means, and is moved forward and backward in the X-axis direction to be received in the cassette placed on the cassette table. 5. An unloading / unloading means for unloading the workpiece before cutting to the temporary placement means and loading the cleaned workpiece from the temporary placement means into the cassette is provided. The cutting device described.
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