JP2001196289A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JP2001196289A
JP2001196289A JP2000003119A JP2000003119A JP2001196289A JP 2001196289 A JP2001196289 A JP 2001196289A JP 2000003119 A JP2000003119 A JP 2000003119A JP 2000003119 A JP2000003119 A JP 2000003119A JP 2001196289 A JP2001196289 A JP 2001196289A
Authority
JP
Japan
Prior art keywords
film
semiconductor device
thin film
organic thin
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000003119A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001196289A5 (enExample
Inventor
Jiro Ito
次郎 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2000003119A priority Critical patent/JP2001196289A/ja
Publication of JP2001196289A publication Critical patent/JP2001196289A/ja
Publication of JP2001196289A5 publication Critical patent/JP2001196289A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Materials For Photolithography (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2000003119A 2000-01-12 2000-01-12 半導体装置の製造方法 Pending JP2001196289A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000003119A JP2001196289A (ja) 2000-01-12 2000-01-12 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000003119A JP2001196289A (ja) 2000-01-12 2000-01-12 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JP2001196289A true JP2001196289A (ja) 2001-07-19
JP2001196289A5 JP2001196289A5 (enExample) 2007-03-01

Family

ID=18532112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000003119A Pending JP2001196289A (ja) 2000-01-12 2000-01-12 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JP2001196289A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006310752A (ja) * 2005-04-30 2006-11-09 Hynix Semiconductor Inc 半導体素子の製造方法
CN1295750C (zh) * 2003-06-23 2007-01-17 松下电器产业株式会社 图案形成方法
JP2010153894A (ja) * 2010-02-19 2010-07-08 Tokyo Electron Ltd 半導体装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1295750C (zh) * 2003-06-23 2007-01-17 松下电器产业株式会社 图案形成方法
JP2006310752A (ja) * 2005-04-30 2006-11-09 Hynix Semiconductor Inc 半導体素子の製造方法
JP2010153894A (ja) * 2010-02-19 2010-07-08 Tokyo Electron Ltd 半導体装置の製造方法

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