JP2001188017A5 - - Google Patents

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Publication number
JP2001188017A5
JP2001188017A5 JP1999375212A JP37521299A JP2001188017A5 JP 2001188017 A5 JP2001188017 A5 JP 2001188017A5 JP 1999375212 A JP1999375212 A JP 1999375212A JP 37521299 A JP37521299 A JP 37521299A JP 2001188017 A5 JP2001188017 A5 JP 2001188017A5
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JP
Japan
Prior art keywords
scale
light
light receiving
receiving portion
light emitting
Prior art date
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Application number
JP1999375212A
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English (en)
Japanese (ja)
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JP4428781B2 (ja
JP2001188017A (ja
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Application filed filed Critical
Priority to JP37521299A priority Critical patent/JP4428781B2/ja
Priority claimed from JP37521299A external-priority patent/JP4428781B2/ja
Priority to US09/749,817 priority patent/US6639207B2/en
Publication of JP2001188017A publication Critical patent/JP2001188017A/ja
Publication of JP2001188017A5 publication Critical patent/JP2001188017A5/ja
Application granted granted Critical
Publication of JP4428781B2 publication Critical patent/JP4428781B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP37521299A 1999-12-28 1999-12-28 光学式ロータリエンコーダ及びモータ制御装置 Expired - Fee Related JP4428781B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP37521299A JP4428781B2 (ja) 1999-12-28 1999-12-28 光学式ロータリエンコーダ及びモータ制御装置
US09/749,817 US6639207B2 (en) 1999-12-28 2000-12-28 Optical rotary encoder and motor control apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP37521299A JP4428781B2 (ja) 1999-12-28 1999-12-28 光学式ロータリエンコーダ及びモータ制御装置

Publications (3)

Publication Number Publication Date
JP2001188017A JP2001188017A (ja) 2001-07-10
JP2001188017A5 true JP2001188017A5 (enExample) 2007-02-15
JP4428781B2 JP4428781B2 (ja) 2010-03-10

Family

ID=18505160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP37521299A Expired - Fee Related JP4428781B2 (ja) 1999-12-28 1999-12-28 光学式ロータリエンコーダ及びモータ制御装置

Country Status (2)

Country Link
US (1) US6639207B2 (enExample)
JP (1) JP4428781B2 (enExample)

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US7330326B2 (en) * 2004-03-09 2008-02-12 Hewlett-Packard Development Company, L.P. Recordable disk rotational speed error correction circuit
US7280049B2 (en) * 2004-05-17 2007-10-09 Xerox Corporation Encoder runout error correction circuit
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US7304295B2 (en) * 2005-09-30 2007-12-04 Avago Technologies Ecbuip (Singapore) Pte Ltd Method and system of detecting eccentricity and up/down movement of a code wheel of an optical encoder set
US7456386B2 (en) * 2005-10-03 2008-11-25 Hewlett-Packard Development Company, L.P. Averaging signals
US7385178B2 (en) * 2005-10-26 2008-06-10 Avago Technologies Ecbu Ip Pte Ltd Reflective encoders with various emitter-detector configurations
JP4005096B2 (ja) * 2005-11-29 2007-11-07 ファナック株式会社 エンコーダの信号処理回路
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EP2071611B1 (en) 2006-08-31 2019-05-01 Nikon Corporation Mobile body drive system and mobile body drive method, pattern formation apparatus and method, exposure apparatus and method, device manufacturing method, and decision method
KR101585370B1 (ko) 2006-08-31 2016-01-14 가부시키가이샤 니콘 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 장치, 노광 방법 및 장치, 그리고 디바이스 제조 방법
EP2990872B1 (en) 2006-08-31 2017-12-13 Nikon Corporation Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
TWI622084B (zh) 2006-09-01 2018-04-21 Nikon Corp Mobile body driving method, moving body driving system, pattern forming method and device, exposure method and device, component manufacturing method, and correction method
CN101405837B (zh) 2006-09-01 2012-08-29 株式会社尼康 移动体驱动方法、图案形成方法、曝光方法以及组件制造方法
JP4928206B2 (ja) * 2006-09-22 2012-05-09 キヤノン株式会社 エンコーダ
US7732756B2 (en) * 2006-11-01 2010-06-08 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. User navigation device with a code wheel and an encoder
US7507950B2 (en) * 2006-11-09 2009-03-24 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Encoder with a combined position and index track
EP1923670B1 (de) * 2006-11-17 2010-03-17 AMO Automatisierung Messtechnik Optik GmbH Positionsmesseinrichtung
US20080156973A1 (en) * 2006-12-29 2008-07-03 Weng Fei Wong Photosensor array for optical encoder
EP1944582A1 (de) * 2007-01-09 2008-07-16 Leica Geosystems AG Verfahren zur bestimmuing einer einflussgrosse auf die exzentrizitat in einem wineklmesser
US20080189072A1 (en) * 2007-02-01 2008-08-07 Nescom Inc. High resolution encoder within a swivel
DE102007019045A1 (de) * 2007-04-23 2008-11-06 Abb Ag Stellantrieb
JP2009042191A (ja) * 2007-08-10 2009-02-26 Toyohashi Univ Of Technology 回転振れ測定装置およびスケール部
WO2009087476A2 (en) * 2007-12-24 2009-07-16 Steorn Limited Torque measurement system
JP2010256081A (ja) * 2009-04-22 2010-11-11 Fujifilm Corp 光学式位置検出器及び光学装置
JP5263033B2 (ja) * 2009-06-26 2013-08-14 富士ゼロックス株式会社 速度検出装置、画像記録装置及び速度検出プログラム
KR20110093499A (ko) * 2010-02-12 2011-08-18 삼성전자주식회사 회전식 인코더 및 그 제어 방법
US9217731B2 (en) 2010-05-21 2015-12-22 Kabushiki Kaisha Toshiba Welding inspection method and apparatus thereof
US20110284508A1 (en) * 2010-05-21 2011-11-24 Kabushiki Kaisha Toshiba Welding system and welding method
JP5393598B2 (ja) * 2010-06-03 2014-01-22 キヤノン株式会社 ガルバノ装置及びレーザ加工装置
JP5610541B2 (ja) * 2010-08-30 2014-10-22 株式会社リガク 定量移動装置及びｘ線測定装置
JP4945674B2 (ja) * 2010-11-08 2012-06-06 株式会社安川電機 反射型エンコーダ、サーボモータ及びサーボユニット
US8525102B2 (en) 2011-02-15 2013-09-03 Avago Technologies General Ip (Singapore) Pte. Ltd. Optical encoding system and optical encoder having an array of incremental photodiodes and an index photodiode for use in an optical encoding system
CA2805599A1 (en) * 2012-02-09 2013-08-09 University Of Western Ontario Control system for ultrasonic motors
JP6003372B2 (ja) * 2012-08-07 2016-10-05 富士通株式会社 光学式ロータリーエンコーダ及びその補正方法
JP5954372B2 (ja) * 2014-08-06 2016-07-20 日本精工株式会社 光学式センサ
JP6724884B2 (ja) * 2017-11-27 2020-07-15 Tdk株式会社 演算処理装置、角度センサ及びステアリング装置
CN109506629B (zh) * 2018-10-24 2021-07-09 东华大学 一种水下核燃料组件检测装置旋转中心标定的方法

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US5038031A (en) * 1989-06-22 1991-08-06 Optec D.D. Melco Laboratory Co., Ltd. Optical rotary encoder having large and small numerical aperture fibers
JP3254737B2 (ja) 1992-06-17 2002-02-12 キヤノン株式会社 エンコーダー
JP3227206B2 (ja) 1992-06-30 2001-11-12 キヤノン株式会社 光学式エンコーダ
JP3170902B2 (ja) 1992-09-30 2001-05-28 キヤノン株式会社 信号処理方法及びそれを用いたエンコーダ
JPH07140844A (ja) 1993-06-22 1995-06-02 Fuji Xerox Co Ltd 画像形成装置の回転部材の角速度検出装置
US6215119B1 (en) * 1999-01-19 2001-04-10 Xerox Corporation Dual sensor encoder to counter eccentricity errors

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