JP2000330067A - ねじり揺動体 - Google Patents

ねじり揺動体

Info

Publication number
JP2000330067A
JP2000330067A JP11140211A JP14021199A JP2000330067A JP 2000330067 A JP2000330067 A JP 2000330067A JP 11140211 A JP11140211 A JP 11140211A JP 14021199 A JP14021199 A JP 14021199A JP 2000330067 A JP2000330067 A JP 2000330067A
Authority
JP
Japan
Prior art keywords
torsion spring
spring
torsion
leaf
torsional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11140211A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000330067A5 (OSRAM
Inventor
Hiroshi Miyajima
博志 宮島
Kenji Murakami
賢治 村上
Toshiji Hidaka
利治 日高
Tomoko Arikawa
知子 有川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP11140211A priority Critical patent/JP2000330067A/ja
Priority to US09/570,596 priority patent/US6445484B1/en
Priority to EP00110541A priority patent/EP1054285B1/en
Priority to DE60002121T priority patent/DE60002121T2/de
Publication of JP2000330067A publication Critical patent/JP2000330067A/ja
Publication of JP2000330067A5 publication Critical patent/JP2000330067A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G06K7/10643—Activating means
    • G06K7/10653—Activating means using flexible or piezoelectric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
JP11140211A 1999-05-20 1999-05-20 ねじり揺動体 Pending JP2000330067A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP11140211A JP2000330067A (ja) 1999-05-20 1999-05-20 ねじり揺動体
US09/570,596 US6445484B1 (en) 1999-05-20 2000-05-12 Torsional rocker
EP00110541A EP1054285B1 (en) 1999-05-20 2000-05-17 Torsional rocker
DE60002121T DE60002121T2 (de) 1999-05-20 2000-05-17 Torsionsoszillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11140211A JP2000330067A (ja) 1999-05-20 1999-05-20 ねじり揺動体

Publications (2)

Publication Number Publication Date
JP2000330067A true JP2000330067A (ja) 2000-11-30
JP2000330067A5 JP2000330067A5 (OSRAM) 2006-06-22

Family

ID=15263513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11140211A Pending JP2000330067A (ja) 1999-05-20 1999-05-20 ねじり揺動体

Country Status (4)

Country Link
US (1) US6445484B1 (OSRAM)
EP (1) EP1054285B1 (OSRAM)
JP (1) JP2000330067A (OSRAM)
DE (1) DE60002121T2 (OSRAM)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6882455B2 (en) 2001-09-19 2005-04-19 Olympus Corporation Movable structure, and deflection mirror element, optical switch element and shape variable mirror including the movable structure
JP2006317181A (ja) * 2005-05-10 2006-11-24 Matsushita Electric Works Ltd 加速度センサ
JP2008046512A (ja) * 2006-08-18 2008-02-28 Seiko Epson Corp アクチュエータ、光スキャナおよび画像形成装置
JP2008182304A (ja) * 2007-01-23 2008-08-07 Konica Minolta Opto Inc 調和発振装置
US7755824B2 (en) 2001-07-04 2010-07-13 Fujitsu Limited Micromirror unit with torsion connector having nonconstant width
WO2010101023A1 (ja) * 2009-03-04 2010-09-10 コニカミノルタホールディングス株式会社 平行移動機構および平行移動機構の製造方法
JP2011033980A (ja) * 2009-08-05 2011-02-17 Nippon Signal Co Ltd:The プレーナ型アクチュエータ
JP2012185418A (ja) * 2011-03-08 2012-09-27 Topcon Corp Ｍｅｍｓ揺動装置
JP2018105978A (ja) * 2016-12-26 2018-07-05 京セラ株式会社 ミラーデバイスおよび光走査装置
JP2018520892A (ja) * 2015-05-18 2018-08-02 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ マイクロマシン式のばねデバイス及びマイクロマシン式のばねデバイスの製造方法
WO2019216424A1 (ja) 2018-05-11 2019-11-14 浜松ホトニクス株式会社 光学デバイス
US12196949B2 (en) 2018-05-11 2025-01-14 Hamamatsu Photonics K.K. Optical device

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6831765B2 (en) * 2001-02-22 2004-12-14 Canon Kabushiki Kaisha Tiltable-body apparatus, and method of fabricating the same
CN1318878C (zh) * 2002-08-14 2007-05-30 富士通株式会社 具有扭杆的微型摇动元件
WO2007034777A1 (ja) * 2005-09-21 2007-03-29 Matsushita Electric Industrial Co., Ltd. アクチュエータ
WO2007121692A1 (de) * 2006-04-24 2007-11-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Oszillierend auslenkbares mikromechanisches element und verfahren zum betreiben des elementes
DE102006051207B4 (de) 2006-10-30 2019-09-12 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verfahren zum Abgleich eines Bauelements
KR100908120B1 (ko) * 2006-11-01 2009-07-16 삼성전기주식회사 전자기 마이크로 액츄에이터
DE102008006570A1 (de) * 2008-01-29 2009-07-30 Robert Bosch Gmbh Festkörpergelenk und mikromechanisches Bauelement
DE102010064218A1 (de) * 2010-12-27 2012-06-28 Robert Bosch Gmbh Magnetisch antreibbarer Mikrospiegel
DE102018207783B4 (de) * 2018-05-17 2022-11-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS-Array aus MEMS mit jeweils einem beweglichen Strukturelement
CN113495358A (zh) * 2020-04-02 2021-10-12 上海禾赛科技有限公司 一种激光扫描装置和包括该激光扫描装置的激光雷达

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63288464A (ja) 1987-05-21 1988-11-25 Teac Co 磁気ディスク装置
US5016072A (en) * 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
JP3003429B2 (ja) 1992-10-08 2000-01-31 富士電機株式会社 ねじり振動子および光偏向子
US5629790A (en) 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
JP2722314B2 (ja) 1993-12-20 1998-03-04 日本信号株式会社 プレーナー型ガルバノミラー及びその製造方法
US5739941A (en) 1995-07-20 1998-04-14 Texas Instruments Incorporated Non-linear hinge for micro-mechanical device
JP3684003B2 (ja) 1996-10-22 2005-08-17 オリンパス株式会社 光スキャナ
US5694237A (en) 1996-09-25 1997-12-02 University Of Washington Position detection of mechanical resonant scanner mirror
EP1012890A1 (en) 1997-04-01 2000-06-28 Xros, Inc. Adjusting operating characteristics of micromachined torsional oscillators

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7755824B2 (en) 2001-07-04 2010-07-13 Fujitsu Limited Micromirror unit with torsion connector having nonconstant width
US6882455B2 (en) 2001-09-19 2005-04-19 Olympus Corporation Movable structure, and deflection mirror element, optical switch element and shape variable mirror including the movable structure
US7054048B2 (en) 2001-09-19 2006-05-30 Olympus Corporation Shape variable mirror
JP2006317181A (ja) * 2005-05-10 2006-11-24 Matsushita Electric Works Ltd 加速度センサ
JP2008046512A (ja) * 2006-08-18 2008-02-28 Seiko Epson Corp アクチュエータ、光スキャナおよび画像形成装置
JP2008182304A (ja) * 2007-01-23 2008-08-07 Konica Minolta Opto Inc 調和発振装置
WO2010101023A1 (ja) * 2009-03-04 2010-09-10 コニカミノルタホールディングス株式会社 平行移動機構および平行移動機構の製造方法
JP2011033980A (ja) * 2009-08-05 2011-02-17 Nippon Signal Co Ltd:The プレーナ型アクチュエータ
JP2012185418A (ja) * 2011-03-08 2012-09-27 Topcon Corp Ｍｅｍｓ揺動装置
JP2018520892A (ja) * 2015-05-18 2018-08-02 ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ マイクロマシン式のばねデバイス及びマイクロマシン式のばねデバイスの製造方法
US10737930B2 (en) 2015-05-18 2020-08-11 Robert Bosch Gmbh Micromechanical spring device and method for manufacturing a micromechanical spring device
JP2018105978A (ja) * 2016-12-26 2018-07-05 京セラ株式会社 ミラーデバイスおよび光走査装置
WO2019216424A1 (ja) 2018-05-11 2019-11-14 浜松ホトニクス株式会社 光学デバイス
KR20210007947A (ko) 2018-05-11 2021-01-20 하마마츠 포토닉스 가부시키가이샤 광학 디바이스
US11899199B2 (en) 2018-05-11 2024-02-13 Hamamatsu Photonics K.K. Optical device
US12196949B2 (en) 2018-05-11 2025-01-14 Hamamatsu Photonics K.K. Optical device

Also Published As

Publication number Publication date
EP1054285B1 (en) 2003-04-16
DE60002121D1 (de) 2003-05-22
US6445484B1 (en) 2002-09-03
DE60002121T2 (de) 2003-10-16
EP1054285A1 (en) 2000-11-22

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