DE60002121T2 - Torsionsoszillator - Google Patents

Torsionsoszillator

Info

Publication number
DE60002121T2
DE60002121T2 DE60002121T DE60002121T DE60002121T2 DE 60002121 T2 DE60002121 T2 DE 60002121T2 DE 60002121 T DE60002121 T DE 60002121T DE 60002121 T DE60002121 T DE 60002121T DE 60002121 T2 DE60002121 T2 DE 60002121T2
Authority
DE
Germany
Prior art keywords
torsion oscillator
torsion
oscillator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60002121T
Other languages
English (en)
Other versions
DE60002121D1 (de
Inventor
Hiroshi Miyajima
Kenji Murakami
Toshiharu Hidaka
Tomoko Arikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Application granted granted Critical
Publication of DE60002121D1 publication Critical patent/DE60002121D1/de
Publication of DE60002121T2 publication Critical patent/DE60002121T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G06K7/10643—Activating means
    • G06K7/10653—Activating means using flexible or piezoelectric means
DE60002121T 1999-05-20 2000-05-17 Torsionsoszillator Expired - Fee Related DE60002121T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11140211A JP2000330067A (ja) 1999-05-20 1999-05-20 ねじり揺動体

Publications (2)

Publication Number Publication Date
DE60002121D1 DE60002121D1 (de) 2003-05-22
DE60002121T2 true DE60002121T2 (de) 2003-10-16

Family

ID=15263513

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60002121T Expired - Fee Related DE60002121T2 (de) 1999-05-20 2000-05-17 Torsionsoszillator

Country Status (4)

Country Link
US (1) US6445484B1 (de)
EP (1) EP1054285B1 (de)
JP (1) JP2000330067A (de)
DE (1) DE60002121T2 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112006003849B4 (de) * 2006-04-24 2012-09-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Betreiben eines oszillierend auslenkbaren mikromechanischen Elements
DE102006051207B4 (de) 2006-10-30 2019-09-12 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verfahren zum Abgleich eines Bauelements
DE102018207783A1 (de) * 2018-05-17 2019-11-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS mit einem beweglichen Strukturelement und MEMS-Array

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6831765B2 (en) 2001-02-22 2004-12-14 Canon Kabushiki Kaisha Tiltable-body apparatus, and method of fabricating the same
JP2003015064A (ja) 2001-07-04 2003-01-15 Fujitsu Ltd マイクロミラー素子
US6882455B2 (en) 2001-09-19 2005-04-19 Olympus Corporation Movable structure, and deflection mirror element, optical switch element and shape variable mirror including the movable structure
JP3905539B2 (ja) * 2002-08-14 2007-04-18 富士通株式会社 トーションバーを備えるマイクロ揺動素子
JP2006317181A (ja) * 2005-05-10 2006-11-24 Matsushita Electric Works Ltd 加速度センサ
JP4949254B2 (ja) * 2005-09-21 2012-06-06 パナソニック株式会社 アクチュエータ
JP4882595B2 (ja) * 2006-08-18 2012-02-22 セイコーエプソン株式会社 光スキャナおよび画像形成装置
KR100908120B1 (ko) * 2006-11-01 2009-07-16 삼성전기주식회사 전자기 마이크로 액츄에이터
JP2008182304A (ja) * 2007-01-23 2008-08-07 Konica Minolta Opto Inc 調和発振装置
DE102008006570A1 (de) * 2008-01-29 2009-07-30 Robert Bosch Gmbh Festkörpergelenk und mikromechanisches Bauelement
WO2010101023A1 (ja) * 2009-03-04 2010-09-10 コニカミノルタホールディングス株式会社 平行移動機構および平行移動機構の製造方法
JP5216715B2 (ja) * 2009-08-05 2013-06-19 日本信号株式会社 プレーナ型アクチュエータ
DE102010064218A1 (de) * 2010-12-27 2012-06-28 Robert Bosch Gmbh Magnetisch antreibbarer Mikrospiegel
JP5694007B2 (ja) * 2011-03-08 2015-04-01 株式会社トプコン Ｍｅｍｓ揺動装置
DE102015209030B4 (de) * 2015-05-18 2023-06-07 Robert Bosch Gmbh Mikromechanische Vorrichtung und Verfahren zum Herstellen einer mikromechanischen Vorrichtung
JP6732651B2 (ja) * 2016-12-26 2020-07-29 京セラ株式会社 ミラーデバイスおよび光走査装置
US11899199B2 (en) 2018-05-11 2024-02-13 Hamamatsu Photonics K.K. Optical device
CN113495358A (zh) * 2020-04-02 2021-10-12 上海禾赛科技有限公司 一种激光扫描装置和包括该激光扫描装置的激光雷达

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63288464A (ja) 1987-05-21 1988-11-25 Teac Co 磁気ディスク装置
US5016072A (en) * 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
JP3003429B2 (ja) 1992-10-08 2000-01-31 富士電機株式会社 ねじり振動子および光偏向子
US5629790A (en) 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
JP2722314B2 (ja) 1993-12-20 1998-03-04 日本信号株式会社 プレーナー型ガルバノミラー及びその製造方法
US5739941A (en) 1995-07-20 1998-04-14 Texas Instruments Incorporated Non-linear hinge for micro-mechanical device
JP3684003B2 (ja) 1996-10-22 2005-08-17 オリンパス株式会社 光スキャナ
US5694237A (en) 1996-09-25 1997-12-02 University Of Washington Position detection of mechanical resonant scanner mirror
JP2001519726A (ja) 1997-04-01 2001-10-23 クセロス・インク 微細加工捩り振動子の動的特性の調整

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE112006003849B4 (de) * 2006-04-24 2012-09-20 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum Betreiben eines oszillierend auslenkbaren mikromechanischen Elements
DE102006051207B4 (de) 2006-10-30 2019-09-12 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verfahren zum Abgleich eines Bauelements
DE102018207783A1 (de) * 2018-05-17 2019-11-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS mit einem beweglichen Strukturelement und MEMS-Array
DE102018207783B4 (de) 2018-05-17 2022-11-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. MEMS-Array aus MEMS mit jeweils einem beweglichen Strukturelement

Also Published As

Publication number Publication date
JP2000330067A (ja) 2000-11-30
US6445484B1 (en) 2002-09-03
EP1054285A1 (de) 2000-11-22
DE60002121D1 (de) 2003-05-22
EP1054285B1 (de) 2003-04-16

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee