JP2000260853A5 - - Google Patents

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Publication number
JP2000260853A5
JP2000260853A5 JP1999064764A JP6476499A JP2000260853A5 JP 2000260853 A5 JP2000260853 A5 JP 2000260853A5 JP 1999064764 A JP1999064764 A JP 1999064764A JP 6476499 A JP6476499 A JP 6476499A JP 2000260853 A5 JP2000260853 A5 JP 2000260853A5
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JP
Japan
Prior art keywords
notch
wafer
drive shaft
cassette
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999064764A
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English (en)
Japanese (ja)
Other versions
JP3916196B2 (ja
JP2000260853A (ja
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Publication date
Application filed filed Critical
Priority to JP6476499A priority Critical patent/JP3916196B2/ja
Priority claimed from JP6476499A external-priority patent/JP3916196B2/ja
Publication of JP2000260853A publication Critical patent/JP2000260853A/ja
Publication of JP2000260853A5 publication Critical patent/JP2000260853A5/ja
Application granted granted Critical
Publication of JP3916196B2 publication Critical patent/JP3916196B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP6476499A 1999-03-11 1999-03-11 切欠部整列方法および切欠部整列装置 Expired - Fee Related JP3916196B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6476499A JP3916196B2 (ja) 1999-03-11 1999-03-11 切欠部整列方法および切欠部整列装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6476499A JP3916196B2 (ja) 1999-03-11 1999-03-11 切欠部整列方法および切欠部整列装置

Publications (3)

Publication Number Publication Date
JP2000260853A JP2000260853A (ja) 2000-09-22
JP2000260853A5 true JP2000260853A5 (OSRAM) 2004-09-09
JP3916196B2 JP3916196B2 (ja) 2007-05-16

Family

ID=13267594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6476499A Expired - Fee Related JP3916196B2 (ja) 1999-03-11 1999-03-11 切欠部整列方法および切欠部整列装置

Country Status (1)

Country Link
JP (1) JP3916196B2 (OSRAM)

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