JP3916196B2 - 切欠部整列方法および切欠部整列装置 - Google Patents

切欠部整列方法および切欠部整列装置 Download PDF

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Publication number
JP3916196B2
JP3916196B2 JP6476499A JP6476499A JP3916196B2 JP 3916196 B2 JP3916196 B2 JP 3916196B2 JP 6476499 A JP6476499 A JP 6476499A JP 6476499 A JP6476499 A JP 6476499A JP 3916196 B2 JP3916196 B2 JP 3916196B2
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JP
Japan
Prior art keywords
notch
drive shaft
wafer
processed
notches
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Expired - Fee Related
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JP6476499A
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English (en)
Japanese (ja)
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JP2000260853A5 (OSRAM
JP2000260853A (ja
Inventor
靖 竹内
勝利 石井
伸治 宮崎
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Toshiba Corp
Tokyo Electron Ltd
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Toshiba Corp
Tokyo Electron Ltd
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Priority to JP6476499A priority Critical patent/JP3916196B2/ja
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Publication of JP2000260853A5 publication Critical patent/JP2000260853A5/ja
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Publication of JP3916196B2 publication Critical patent/JP3916196B2/ja
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP6476499A 1999-03-11 1999-03-11 切欠部整列方法および切欠部整列装置 Expired - Fee Related JP3916196B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6476499A JP3916196B2 (ja) 1999-03-11 1999-03-11 切欠部整列方法および切欠部整列装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6476499A JP3916196B2 (ja) 1999-03-11 1999-03-11 切欠部整列方法および切欠部整列装置

Publications (3)

Publication Number Publication Date
JP2000260853A JP2000260853A (ja) 2000-09-22
JP2000260853A5 JP2000260853A5 (OSRAM) 2004-09-09
JP3916196B2 true JP3916196B2 (ja) 2007-05-16

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JP6476499A Expired - Fee Related JP3916196B2 (ja) 1999-03-11 1999-03-11 切欠部整列方法および切欠部整列装置

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JP (1) JP3916196B2 (OSRAM)

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Publication number Publication date
JP2000260853A (ja) 2000-09-22

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