JP2000254771A5 - - Google Patents

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Publication number
JP2000254771A5
JP2000254771A5 JP1999060899A JP6089999A JP2000254771A5 JP 2000254771 A5 JP2000254771 A5 JP 2000254771A5 JP 1999060899 A JP1999060899 A JP 1999060899A JP 6089999 A JP6089999 A JP 6089999A JP 2000254771 A5 JP2000254771 A5 JP 2000254771A5
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JP
Japan
Prior art keywords
ladle
lining
granular
particle size
skull
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1999060899A
Other languages
English (en)
Japanese (ja)
Other versions
JP4087000B2 (ja
JP2000254771A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP06089999A priority Critical patent/JP4087000B2/ja
Priority claimed from JP06089999A external-priority patent/JP4087000B2/ja
Priority to US09/520,158 priority patent/US6284044B1/en
Publication of JP2000254771A publication Critical patent/JP2000254771A/ja
Publication of JP2000254771A5 publication Critical patent/JP2000254771A5/ja
Application granted granted Critical
Publication of JP4087000B2 publication Critical patent/JP4087000B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP06089999A 1999-03-08 1999-03-08 レードル及びレードルのライニング方法 Expired - Lifetime JP4087000B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP06089999A JP4087000B2 (ja) 1999-03-08 1999-03-08 レードル及びレードルのライニング方法
US09/520,158 US6284044B1 (en) 1999-03-08 2000-03-07 Film forming method and film forming apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP06089999A JP4087000B2 (ja) 1999-03-08 1999-03-08 レードル及びレードルのライニング方法

Publications (3)

Publication Number Publication Date
JP2000254771A JP2000254771A (ja) 2000-09-19
JP2000254771A5 true JP2000254771A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2005-06-23
JP4087000B2 JP4087000B2 (ja) 2008-05-14

Family

ID=13155675

Family Applications (1)

Application Number Title Priority Date Filing Date
JP06089999A Expired - Lifetime JP4087000B2 (ja) 1999-03-08 1999-03-08 レードル及びレードルのライニング方法

Country Status (2)

Country Link
US (1) US6284044B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JP4087000B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6551403B1 (en) * 2000-05-25 2003-04-22 Nec Electronics, Inc. Solvent pre-wet system for wafers
JP3754322B2 (ja) * 2001-05-24 2006-03-08 東京エレクトロン株式会社 塗布膜形成方法及びその装置
JP2004322168A (ja) * 2003-04-25 2004-11-18 Disco Abrasive Syst Ltd レーザー加工装置
JP4731913B2 (ja) * 2003-04-25 2011-07-27 株式会社半導体エネルギー研究所 パターンの形成方法および半導体装置の製造方法
US7713841B2 (en) * 2003-09-19 2010-05-11 Micron Technology, Inc. Methods for thinning semiconductor substrates that employ support structures formed on the substrates
TWI240952B (en) * 2003-10-28 2005-10-01 Samsung Electronics Co Ltd System for rinsing and drying semiconductor substrates and method therefor
KR100564582B1 (ko) * 2003-10-28 2006-03-29 삼성전자주식회사 전자 소자 기판의 표면 처리 장치 및 이를 이용한 표면처리 방법
JP2005161168A (ja) * 2003-12-01 2005-06-23 Tokyo Ohka Kogyo Co Ltd 被膜形成方法
US7244665B2 (en) * 2004-04-29 2007-07-17 Micron Technology, Inc. Wafer edge ring structures and methods of formation
KR100596783B1 (ko) * 2004-05-03 2006-07-04 주식회사 하이닉스반도체 감광액 도포장치
JP4343022B2 (ja) * 2004-05-10 2009-10-14 東京エレクトロン株式会社 基板の処理方法及び基板の処理装置
JP3988834B2 (ja) * 2004-06-03 2007-10-10 芝浦メカトロニクス株式会社 樹脂層形成方法及び樹脂層形成装置、ディスク及びディスク製造方法
US8158517B2 (en) * 2004-06-28 2012-04-17 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing wiring substrate, thin film transistor, display device and television device
JP4531502B2 (ja) * 2004-09-14 2010-08-25 東京エレクトロン株式会社 塗布処理装置
JP4216238B2 (ja) * 2004-09-24 2009-01-28 東京エレクトロン株式会社 塗布処理装置及び塗布処理方法
DE102004053139A1 (de) * 2004-11-03 2006-06-01 Süss Microtec Lithography Gmbh Drehbare Vorrichtung zum Halten eines Substrats
CN100592208C (zh) * 2006-07-03 2010-02-24 元太科技工业股份有限公司 防止静电聚集的光刻胶涂布机承载盘
US20080176004A1 (en) * 2007-01-19 2008-07-24 Tokyo Electron Limited Coating treatment apparatus, substrate treatment system, coating treatment method, and computer storage medium
JP5262117B2 (ja) * 2007-04-11 2013-08-14 株式会社リコー スピンコート装置及びその温度制御方法、並びに光ディスク製造装置及び光ディスク製造方法
CN109676839B (zh) * 2018-12-11 2022-02-22 上海航天控制技术研究所 一种用于多类型陀螺仪的智能固胶仪器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5609995A (en) * 1995-08-30 1997-03-11 Micron Technology, Inc. Method for forming a thin uniform layer of resist for lithography
JP3300624B2 (ja) 1997-01-24 2002-07-08 東京エレクトロン株式会社 基板端面の洗浄方法
US6094965A (en) * 1998-05-29 2000-08-01 Vlsi Technology, Inc. Semiconductor calibration structures and calibration wafers for ascertaining layer alignment during processing and calibrating multiple semiconductor wafer coating systems
US6121130A (en) * 1998-11-16 2000-09-19 Chartered Semiconductor Manufacturing Ltd. Laser curing of spin-on dielectric thin films

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