JP2000187330A5 - - Google Patents
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- Publication number
- JP2000187330A5 JP2000187330A5 JP1999275334A JP27533499A JP2000187330A5 JP 2000187330 A5 JP2000187330 A5 JP 2000187330A5 JP 1999275334 A JP1999275334 A JP 1999275334A JP 27533499 A JP27533499 A JP 27533499A JP 2000187330 A5 JP2000187330 A5 JP 2000187330A5
- Authority
- JP
- Japan
- Prior art keywords
- acid
- fluorine atom
- group
- compound
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052731 fluorine Inorganic materials 0.000 claims 23
- 125000001153 fluoro group Chemical group F* 0.000 claims 19
- 239000002253 acid Substances 0.000 claims 17
- 150000001875 compounds Chemical class 0.000 claims 17
- 238000010894 electron beam technology Methods 0.000 claims 13
- 238000004090 dissolution Methods 0.000 claims 6
- SRSXLGNVWSONIS-UHFFFAOYSA-N Benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 claims 5
- ILFFFKFZHRGICY-UHFFFAOYSA-N anthracene-1-sulfonic acid Chemical compound C1=CC=C2C=C3C(S(=O)(=O)O)=CC=CC3=CC2=C1 ILFFFKFZHRGICY-UHFFFAOYSA-N 0.000 claims 5
- 229940092714 benzenesulfonic acid Drugs 0.000 claims 5
- PSZYNBSKGUBXEH-UHFFFAOYSA-N naphthalene-1-sulfonic acid Chemical compound C1=CC=C2C(S(=O)(=O)O)=CC=CC2=C1 PSZYNBSKGUBXEH-UHFFFAOYSA-N 0.000 claims 5
- 239000011737 fluorine Substances 0.000 claims 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 4
- 239000011347 resin Substances 0.000 claims 4
- 229920005989 resin Polymers 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
- 229910052710 silicon Inorganic materials 0.000 claims 4
- 239000010703 silicon Substances 0.000 claims 4
- 239000004094 surface-active agent Substances 0.000 claims 4
- 125000006165 cyclic alkyl group Chemical group 0.000 claims 3
- 230000002401 inhibitory effect Effects 0.000 claims 3
- 125000003545 alkoxy group Chemical group 0.000 claims 2
- 125000003118 aryl group Chemical group 0.000 claims 2
- 125000004122 cyclic group Chemical group 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- 125000002252 acyl group Chemical group 0.000 claims 1
- 125000004423 acyloxy group Chemical group 0.000 claims 1
- 239000003513 alkali Substances 0.000 claims 1
- 125000004453 alkoxycarbonyl group Chemical group 0.000 claims 1
- 125000004390 alkyl sulfonyl group Chemical group 0.000 claims 1
- 125000004656 alkyl sulfonylamino group Chemical group 0.000 claims 1
- 125000005278 alkyl sulfonyloxy group Chemical group 0.000 claims 1
- 150000001450 anions Chemical class 0.000 claims 1
- 125000003710 aryl alkyl group Chemical group 0.000 claims 1
- 125000004657 aryl sulfonyl amino group Chemical group 0.000 claims 1
- 125000004391 aryl sulfonyl group Chemical group 0.000 claims 1
- 125000005279 aryl sulfonyloxy group Chemical group 0.000 claims 1
- 150000007514 bases Chemical class 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 125000005843 halogen group Chemical group 0.000 claims 1
- 125000004435 hydrogen atoms Chemical group [H]* 0.000 claims 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N oxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims 1
- 229910052717 sulfur Inorganic materials 0.000 claims 1
- 239000011593 sulfur Substances 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27533499A JP4007570B2 (ja) | 1998-10-16 | 1999-09-28 | ポジ型レジスト組成物 |
| KR1019990044865A KR100571314B1 (ko) | 1998-10-16 | 1999-10-16 | 포지티브 전자빔 또는 x선 레지스트 조성물 |
| US09/419,905 US6265135B1 (en) | 1998-10-16 | 1999-10-18 | Positive-working electron beam or X-ray resist composition |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29560998 | 1998-10-16 | ||
| JP10-295609 | 1998-10-16 | ||
| JP27533499A JP4007570B2 (ja) | 1998-10-16 | 1999-09-28 | ポジ型レジスト組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000187330A JP2000187330A (ja) | 2000-07-04 |
| JP2000187330A5 true JP2000187330A5 (US07494231-20090224-C00006.png) | 2005-07-07 |
| JP4007570B2 JP4007570B2 (ja) | 2007-11-14 |
Family
ID=26551420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27533499A Expired - Fee Related JP4007570B2 (ja) | 1998-10-16 | 1999-09-28 | ポジ型レジスト組成物 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6265135B1 (US07494231-20090224-C00006.png) |
| JP (1) | JP4007570B2 (US07494231-20090224-C00006.png) |
| KR (1) | KR100571314B1 (US07494231-20090224-C00006.png) |
Families Citing this family (42)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0952489B1 (en) * | 1998-04-22 | 2014-08-13 | FUJIFILM Corporation | Positive photosensitive resin composition |
| JP3963625B2 (ja) * | 1999-02-24 | 2007-08-22 | 富士フイルム株式会社 | ポジ型フォトレジスト組成物 |
| JP3281612B2 (ja) * | 1999-03-05 | 2002-05-13 | 松下電器産業株式会社 | パターン形成方法 |
| KR100538501B1 (ko) * | 1999-08-16 | 2005-12-23 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 신규한 오늄염, 레지스트 재료용 광산발생제, 레지스트재료 및 패턴 형성 방법 |
| JP4135276B2 (ja) * | 1999-10-12 | 2008-08-20 | Ｊｓｒ株式会社 | 感放射線性樹脂組成物 |
| TW495646B (en) * | 1999-12-27 | 2002-07-21 | Fuji Photo Film Co Ltd | Positive-working radiation-sensitive composition |
| TW548520B (en) * | 2000-02-18 | 2003-08-21 | Fuji Photo Film Co Ltd | Positive resist composition for X-rays or electron beams |
| US6692883B2 (en) * | 2000-04-21 | 2004-02-17 | Fuji Photo Film Co., Ltd. | Positive photoresist composition |
| JP2002006483A (ja) * | 2000-06-20 | 2002-01-09 | Sumitomo Chem Co Ltd | フォトレジスト組成物 |
| JP4150491B2 (ja) * | 2000-07-13 | 2008-09-17 | 富士フイルム株式会社 | ポジ型感光性組成物 |
| JP3956088B2 (ja) * | 2000-07-19 | 2007-08-08 | 信越化学工業株式会社 | 化学増幅ポジ型レジスト材料 |
| JP3712047B2 (ja) * | 2000-08-14 | 2005-11-02 | 信越化学工業株式会社 | レジスト材料及びパターン形成方法 |
| US6482567B1 (en) * | 2000-08-25 | 2002-11-19 | Shipley Company, L.L.C. | Oxime sulfonate and N-oxyimidosulfonate photoacid generators and photoresists comprising same |
| TWI226509B (en) * | 2000-09-12 | 2005-01-11 | Fuji Photo Film Co Ltd | Positive resist composition |
| KR100765245B1 (ko) * | 2000-09-25 | 2007-10-09 | 후지필름 가부시키가이샤 | 포지티브 포토레지스트 조성물 |
| JP4190167B2 (ja) * | 2000-09-26 | 2008-12-03 | 富士フイルム株式会社 | ポジ型レジスト組成物 |
| JP4438218B2 (ja) * | 2000-11-16 | 2010-03-24 | Ｊｓｒ株式会社 | 感放射線性樹脂組成物 |
| JP4190146B2 (ja) * | 2000-12-28 | 2008-12-03 | 富士フイルム株式会社 | 電子線またはｘ線用ポジ型レジスト組成物 |
| TW594383B (en) * | 2001-02-21 | 2004-06-21 | Fuji Photo Film Co Ltd | Positive resist composition for electron beam |
| TW562999B (en) * | 2001-05-09 | 2003-11-21 | Fuji Photo Film Co Ltd | Positive resist composition for electronic or X-rays |
| US6949329B2 (en) | 2001-06-22 | 2005-09-27 | Matsushita Electric Industrial Co., Ltd. | Pattern formation method |
| CN100339767C (zh) * | 2001-06-22 | 2007-09-26 | 和光纯药工业株式会社 | 抗蚀剂组合物 |
| JP2003186198A (ja) * | 2001-12-19 | 2003-07-03 | Sony Corp | レジスト材料及び露光方法 |
| JP2003186197A (ja) * | 2001-12-19 | 2003-07-03 | Sony Corp | レジスト材料及び露光方法 |
| US7214465B2 (en) | 2002-01-10 | 2007-05-08 | Fujifilm Corporation | Positive photosensitive composition |
| JP4025075B2 (ja) * | 2002-01-10 | 2007-12-19 | 富士フイルム株式会社 | ポジ型感光性組成物 |
| US7521168B2 (en) * | 2002-02-13 | 2009-04-21 | Fujifilm Corporation | Resist composition for electron beam, EUV or X-ray |
| JP2004004561A (ja) * | 2002-02-19 | 2004-01-08 | Sumitomo Chem Co Ltd | ポジ型レジスト組成物 |
| US6806026B2 (en) | 2002-05-31 | 2004-10-19 | International Business Machines Corporation | Photoresist composition |
| KR100973799B1 (ko) * | 2003-01-03 | 2010-08-03 | 삼성전자주식회사 | Ｍｍｎ 헤드 코터용 포토레지스트 조성물 |
| US7820369B2 (en) | 2003-12-04 | 2010-10-26 | International Business Machines Corporation | Method for patterning a low activation energy photoresist |
| US7193023B2 (en) * | 2003-12-04 | 2007-03-20 | International Business Machines Corporation | Low activation energy photoresists |
| US7217496B2 (en) | 2004-11-12 | 2007-05-15 | International Business Machines Corporation | Fluorinated photoresist materials with improved etch resistant properties |
| JP4562537B2 (ja) | 2005-01-28 | 2010-10-13 | 富士フイルム株式会社 | 感光性組成物、該感光性組成物に用いる化合物及び該感光性組成物を用いたパターン形成方法 |
| US8173348B2 (en) | 2006-06-27 | 2012-05-08 | Jsr Corporation | Method of forming pattern and composition for forming of organic thin-film for use therein |
| EP2048541A4 (en) | 2006-08-04 | 2010-12-01 | Jsr Corp | PROCESS FOR FORMING PATTERN, COMPOSITION FOR FORMING UPPER LAYER FILM, AND COMPOSITION FOR FORMING LOWER LAYER FILM |
| JP5522906B2 (ja) * | 2008-05-23 | 2014-06-18 | 日本カーバイド工業株式会社 | 新規な光酸発生剤及びそれを含むレジスト材料 |
| JP5544098B2 (ja) * | 2008-09-26 | 2014-07-09 | 富士フイルム株式会社 | 感活性光線性または感放射線性樹脂組成物、及び該感光性組成物を用いたパターン形成方法 |
| JP5514583B2 (ja) * | 2009-03-13 | 2014-06-04 | 富士フイルム株式会社 | 感活性光線性または感放射線性樹脂組成物及び該組成物を用いたパターン形成方法 |
| JP5740322B2 (ja) | 2012-02-06 | 2015-06-24 | 富士フイルム株式会社 | 感活性光線性又は感放射線性樹脂組成物、それを用いた感活性光線性又は感放射線性膜及びパターン形成方法、半導体デバイスの製造方法及び半導体デバイス、並びに、化合物 |
| JP6637676B2 (ja) * | 2015-05-11 | 2020-01-29 | 住友化学株式会社 | 塩、酸発生剤、レジスト組成物及びレジストパターンの製造方法 |
| KR102134381B1 (ko) * | 2017-07-31 | 2020-07-15 | 주식회사 엘지화학 | 포지티브형 포토레지스트 조성물, 이로부터 제조되는 패턴, 및 패턴 제조방법 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4112971A1 (de) * | 1991-04-20 | 1992-10-22 | Hoechst Ag | Sulfonsaeureester von 2,4,6-tris-(2-hydroxy-ethoxy)-(1,3,5)triazin, ein damit hergestelltes positiv arbeitendes strahlungsempfindliches gemisch und aufzeichnungsmaterial |
| JPH08110635A (ja) * | 1994-10-07 | 1996-04-30 | Shin Etsu Chem Co Ltd | 化学増幅ポジ型レジスト材料 |
| TW530192B (en) * | 1997-01-27 | 2003-05-01 | Shinetsu Chemical Co | Partially hydrogenated polymer compound and chemically sensitized positive resist material |
| TW574629B (en) * | 1997-02-28 | 2004-02-01 | Shinetsu Chemical Co | Polystyrene derivative chemically amplified positive resist compositions, and patterning method |
| KR100571313B1 (ko) * | 1998-03-17 | 2006-04-17 | 후지 샤신 필름 가부시기가이샤 | 포지티브 감광성 조성물 |
-
1999
- 1999-09-28 JP JP27533499A patent/JP4007570B2/ja not_active Expired - Fee Related
- 1999-10-16 KR KR1019990044865A patent/KR100571314B1/ko active IP Right Grant
- 1999-10-18 US US09/419,905 patent/US6265135B1/en not_active Expired - Lifetime
