JP2000171151A5 - - Google Patents
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- Publication number
- JP2000171151A5 JP2000171151A5 JP1998377308A JP37730898A JP2000171151A5 JP 2000171151 A5 JP2000171151 A5 JP 2000171151A5 JP 1998377308 A JP1998377308 A JP 1998377308A JP 37730898 A JP37730898 A JP 37730898A JP 2000171151 A5 JP2000171151 A5 JP 2000171151A5
- Authority
- JP
- Japan
- Prior art keywords
- dried
- gas
- heat
- constant temperature
- airtight tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 description 66
- 238000001035 drying Methods 0.000 description 41
- 230000002528 anti-freeze Effects 0.000 description 32
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 31
- 239000007788 liquid Substances 0.000 description 23
- 239000002826 coolant Substances 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 238000010992 reflux Methods 0.000 description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 10
- 229910052802 copper Inorganic materials 0.000 description 10
- 239000010949 copper Substances 0.000 description 10
- 238000001704 evaporation Methods 0.000 description 10
- 230000008020 evaporation Effects 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 230000006837 decompression Effects 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 238000003303 reheating Methods 0.000 description 7
- 238000009834 vaporization Methods 0.000 description 7
- 230000008016 vaporization Effects 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000011084 recovery Methods 0.000 description 4
- 241000209094 Oryza Species 0.000 description 3
- 235000007164 Oryza sativa Nutrition 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 235000013305 food Nutrition 0.000 description 3
- 235000009566 rice Nutrition 0.000 description 3
- 238000001291 vacuum drying Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 239000000110 cooling liquid Substances 0.000 description 2
- 238000004108 freeze drying Methods 0.000 description 2
- 238000013021 overheating Methods 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 235000011511 Diospyros Nutrition 0.000 description 1
- 244000236655 Diospyros kaki Species 0.000 description 1
- 235000005733 Raphanus sativus var niger Nutrition 0.000 description 1
- 244000155437 Raphanus sativus var. niger Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000002274 desiccant Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000010412 perfusion Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP37730898A JP4063432B2 (ja) | 1998-12-08 | 1998-12-08 | 真空乾燥機およびその駆動方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP37730898A JP4063432B2 (ja) | 1998-12-08 | 1998-12-08 | 真空乾燥機およびその駆動方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000171151A JP2000171151A (ja) | 2000-06-23 |
| JP2000171151A5 true JP2000171151A5 (enrdf_load_stackoverflow) | 2006-01-26 |
| JP4063432B2 JP4063432B2 (ja) | 2008-03-19 |
Family
ID=18508599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP37730898A Expired - Lifetime JP4063432B2 (ja) | 1998-12-08 | 1998-12-08 | 真空乾燥機およびその駆動方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4063432B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5742114B2 (ja) * | 2010-05-17 | 2015-07-01 | 日産自動車株式会社 | 乾燥方法及び乾燥装置 |
| US11713924B2 (en) | 2012-02-01 | 2023-08-01 | Revive Electronics, LLC | Methods and apparatuses for drying electronic devices |
| KR102169120B1 (ko) * | 2012-02-01 | 2020-10-22 | 리바이브 일렉트로닉스, 엘엘씨 | 전자 디바이스 건조 방법 및 장치 |
-
1998
- 1998-12-08 JP JP37730898A patent/JP4063432B2/ja not_active Expired - Lifetime
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