JP2000056235A - 検査顕微鏡システム - Google Patents

検査顕微鏡システム

Info

Publication number
JP2000056235A
JP2000056235A JP10228160A JP22816098A JP2000056235A JP 2000056235 A JP2000056235 A JP 2000056235A JP 10228160 A JP10228160 A JP 10228160A JP 22816098 A JP22816098 A JP 22816098A JP 2000056235 A JP2000056235 A JP 2000056235A
Authority
JP
Japan
Prior art keywords
observation
inspected
index
inspection
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10228160A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000056235A5 (https=
Inventor
Katsuji Murakami
勝治 村上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP10228160A priority Critical patent/JP2000056235A/ja
Publication of JP2000056235A publication Critical patent/JP2000056235A/ja
Publication of JP2000056235A5 publication Critical patent/JP2000056235A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP10228160A 1998-08-12 1998-08-12 検査顕微鏡システム Pending JP2000056235A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10228160A JP2000056235A (ja) 1998-08-12 1998-08-12 検査顕微鏡システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10228160A JP2000056235A (ja) 1998-08-12 1998-08-12 検査顕微鏡システム

Publications (2)

Publication Number Publication Date
JP2000056235A true JP2000056235A (ja) 2000-02-25
JP2000056235A5 JP2000056235A5 (https=) 2005-10-27

Family

ID=16872181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10228160A Pending JP2000056235A (ja) 1998-08-12 1998-08-12 検査顕微鏡システム

Country Status (1)

Country Link
JP (1) JP2000056235A (https=)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002148526A (ja) * 2000-11-06 2002-05-22 Nikon Corp 顕微鏡装置
JP2005189298A (ja) * 2003-12-24 2005-07-14 Nikon Corp 顕微鏡装置
JP2005202087A (ja) * 2004-01-15 2005-07-28 Olympus Corp 顕微鏡装置、顕微鏡装置の制御方法、及びプログラム
WO2006008025A1 (de) * 2004-07-16 2006-01-26 Carl Zeiss Meditec Ag Vorrichtung zur bearbeitung eines objektes mittels laser-strahlung
JP2007248360A (ja) * 2006-03-17 2007-09-27 Jeol Ltd 荷電粒子ビーム検査方法および装置
CN103630540A (zh) * 2013-11-15 2014-03-12 重庆大学 煤岩瓦斯吸附-膨胀变形光学计量仪
JP2019521334A (ja) * 2016-06-14 2019-07-25 ゼネラル・エレクトリック・カンパニイ 目視検査デバイスのアーティキュレーションのための方法およびシステム
JP2021021670A (ja) * 2019-07-30 2021-02-18 三菱パワー株式会社 外観検査装置
KR20220088156A (ko) * 2020-12-18 2022-06-27 주식회사 포스코 점상부식 결함 평가장치 및 평가방법

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002148526A (ja) * 2000-11-06 2002-05-22 Nikon Corp 顕微鏡装置
JP2005189298A (ja) * 2003-12-24 2005-07-14 Nikon Corp 顕微鏡装置
JP2005202087A (ja) * 2004-01-15 2005-07-28 Olympus Corp 顕微鏡装置、顕微鏡装置の制御方法、及びプログラム
US9498844B2 (en) 2004-07-16 2016-11-22 Carl Zeiss Meditec Ag Device for machining an object by means of laser radiation
WO2006008025A1 (de) * 2004-07-16 2006-01-26 Carl Zeiss Meditec Ag Vorrichtung zur bearbeitung eines objektes mittels laser-strahlung
US10531985B2 (en) 2004-07-16 2020-01-14 Carl Zeiss Meditec Ag Device for machining an object by application of laser radiation
US11369517B2 (en) 2004-07-16 2022-06-28 Carl Zeiss Meditec Ag Device for machining an object by application of laser radiation
JP2007248360A (ja) * 2006-03-17 2007-09-27 Jeol Ltd 荷電粒子ビーム検査方法および装置
CN103630540A (zh) * 2013-11-15 2014-03-12 重庆大学 煤岩瓦斯吸附-膨胀变形光学计量仪
JP2019521334A (ja) * 2016-06-14 2019-07-25 ゼネラル・エレクトリック・カンパニイ 目視検査デバイスのアーティキュレーションのための方法およびシステム
JP6997726B2 (ja) 2016-06-14 2022-01-18 ゼネラル・エレクトリック・カンパニイ 目視検査デバイスのアーティキュレーションのための方法およびシステム
JP2021021670A (ja) * 2019-07-30 2021-02-18 三菱パワー株式会社 外観検査装置
JP7291027B2 (ja) 2019-07-30 2023-06-14 三菱重工業株式会社 外観検査装置
KR20220088156A (ko) * 2020-12-18 2022-06-27 주식회사 포스코 점상부식 결함 평가장치 및 평가방법
KR102463020B1 (ko) 2020-12-18 2022-11-03 주식회사 포스코 점상부식 결함 평가장치 및 평가방법

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