JP2000047385A5 - - Google Patents
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- Publication number
- JP2000047385A5 JP2000047385A5 JP1998170197A JP17019798A JP2000047385A5 JP 2000047385 A5 JP2000047385 A5 JP 2000047385A5 JP 1998170197 A JP1998170197 A JP 1998170197A JP 17019798 A JP17019798 A JP 17019798A JP 2000047385 A5 JP2000047385 A5 JP 2000047385A5
- Authority
- JP
- Japan
- Prior art keywords
- acid
- resin composition
- photosensitive resin
- positive photosensitive
- molecular weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002253 acid Substances 0.000 claims 4
- 239000011342 resin composition Substances 0.000 claims 4
- 150000001875 compounds Chemical class 0.000 claims 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 239000003513 alkali Substances 0.000 claims 1
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- -1 nitrogen-containing basic compound Chemical class 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000004094 surface-active agent Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17019798A JP3832790B2 (ja) | 1998-05-26 | 1998-06-17 | ポジ型感光性樹脂組成物 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14443698 | 1998-05-26 | ||
| JP10-144436 | 1998-05-26 | ||
| JP17019798A JP3832790B2 (ja) | 1998-05-26 | 1998-06-17 | ポジ型感光性樹脂組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2000047385A JP2000047385A (ja) | 2000-02-18 |
| JP2000047385A5 true JP2000047385A5 (enExample) | 2005-02-24 |
| JP3832790B2 JP3832790B2 (ja) | 2006-10-11 |
Family
ID=26475846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17019798A Expired - Lifetime JP3832790B2 (ja) | 1998-05-26 | 1998-06-17 | ポジ型感光性樹脂組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3832790B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3430028B2 (ja) * | 1998-09-08 | 2003-07-28 | 松下電器産業株式会社 | パターン形成方法 |
| JP2002006483A (ja) * | 2000-06-20 | 2002-01-09 | Sumitomo Chem Co Ltd | フォトレジスト組成物 |
| JP3874092B2 (ja) | 2001-12-26 | 2007-01-31 | 信越化学工業株式会社 | 高分子化合物、レジスト材料及びパターン形成方法 |
| JP3912516B2 (ja) | 2002-08-09 | 2007-05-09 | 信越化学工業株式会社 | 高分子化合物、レジスト材料及びパターン形成方法 |
| JP4511383B2 (ja) | 2005-02-23 | 2010-07-28 | 富士フイルム株式会社 | ポジ型レジスト組成物及びそれを用いたパターン形成方法 |
| JP2013190497A (ja) * | 2012-03-12 | 2013-09-26 | Fujifilm Corp | 感活性光線性又は感放射線性樹脂組成物、およびそれを用いたパターン形成方法 |
-
1998
- 1998-06-17 JP JP17019798A patent/JP3832790B2/ja not_active Expired - Lifetime
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