IT202200006356A1 - Sistema di test per il test ad alta tensione ed alta corrente su una pluralità di dispositivi a semiconduttore di potenza compresi in un wafer, e sistema di contattazione - Google Patents
Sistema di test per il test ad alta tensione ed alta corrente su una pluralità di dispositivi a semiconduttore di potenza compresi in un wafer, e sistema di contattazione Download PDFInfo
- Publication number
- IT202200006356A1 IT202200006356A1 IT102022000006356A IT202200006356A IT202200006356A1 IT 202200006356 A1 IT202200006356 A1 IT 202200006356A1 IT 102022000006356 A IT102022000006356 A IT 102022000006356A IT 202200006356 A IT202200006356 A IT 202200006356A IT 202200006356 A1 IT202200006356 A1 IT 202200006356A1
- Authority
- IT
- Italy
- Prior art keywords
- wafer
- semiconductor devices
- power semiconductor
- devices included
- current testing
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
- G01R1/0491—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets for testing integrated circuits on wafers, e.g. wafer-level test cartridge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
- G01R31/2879—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Environmental & Geological Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT102022000006356A IT202200006356A1 (it) | 2022-03-31 | 2022-03-31 | Sistema di test per il test ad alta tensione ed alta corrente su una pluralità di dispositivi a semiconduttore di potenza compresi in un wafer, e sistema di contattazione |
PCT/IB2023/053180 WO2023187701A1 (en) | 2022-03-31 | 2023-03-30 | Test system for high-voltage and high-current testing on a plurality of power semiconductor devices comprised in a wafer, and contacting system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT102022000006356A IT202200006356A1 (it) | 2022-03-31 | 2022-03-31 | Sistema di test per il test ad alta tensione ed alta corrente su una pluralità di dispositivi a semiconduttore di potenza compresi in un wafer, e sistema di contattazione |
Publications (1)
Publication Number | Publication Date |
---|---|
IT202200006356A1 true IT202200006356A1 (it) | 2023-10-01 |
Family
ID=82385606
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT102022000006356A IT202200006356A1 (it) | 2022-03-31 | 2022-03-31 | Sistema di test per il test ad alta tensione ed alta corrente su una pluralità di dispositivi a semiconduttore di potenza compresi in un wafer, e sistema di contattazione |
Country Status (2)
Country | Link |
---|---|
IT (1) | IT202200006356A1 (it) |
WO (1) | WO2023187701A1 (it) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4482061B2 (ja) * | 2008-08-19 | 2010-06-16 | パナソニック株式会社 | 半導体素子の耐圧測定装置および耐圧測定方法 |
EP2546668A1 (en) * | 2010-03-12 | 2013-01-16 | Tokyo Electron Limited | Probe apparatus |
US20150241472A1 (en) * | 2014-02-25 | 2015-08-27 | Cascade Microtech, Inc. | Systems and methods for on-wafer dynamic testing of electronic devices |
WO2021240431A1 (en) | 2020-05-27 | 2021-12-02 | Crea Collaudi Elettronici Automatizzati S.R.L. | Safety system for needle probe card for high-voltage and high-current test on power semiconductor devices, related test machine and corresponding testing method |
US20220034956A1 (en) * | 2020-08-03 | 2022-02-03 | Chroma Ate Inc. | Wafer inspection system and wafer inspection equipment thereof |
-
2022
- 2022-03-31 IT IT102022000006356A patent/IT202200006356A1/it unknown
-
2023
- 2023-03-30 WO PCT/IB2023/053180 patent/WO2023187701A1/en unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4482061B2 (ja) * | 2008-08-19 | 2010-06-16 | パナソニック株式会社 | 半導体素子の耐圧測定装置および耐圧測定方法 |
EP2546668A1 (en) * | 2010-03-12 | 2013-01-16 | Tokyo Electron Limited | Probe apparatus |
US20150241472A1 (en) * | 2014-02-25 | 2015-08-27 | Cascade Microtech, Inc. | Systems and methods for on-wafer dynamic testing of electronic devices |
WO2021240431A1 (en) | 2020-05-27 | 2021-12-02 | Crea Collaudi Elettronici Automatizzati S.R.L. | Safety system for needle probe card for high-voltage and high-current test on power semiconductor devices, related test machine and corresponding testing method |
US20220034956A1 (en) * | 2020-08-03 | 2022-02-03 | Chroma Ate Inc. | Wafer inspection system and wafer inspection equipment thereof |
Also Published As
Publication number | Publication date |
---|---|
WO2023187701A1 (en) | 2023-10-05 |
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