IN2014MN02313A - - Google Patents

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Publication number
IN2014MN02313A
IN2014MN02313A IN2313MUN2014A IN2014MN02313A IN 2014MN02313 A IN2014MN02313 A IN 2014MN02313A IN 2313MUN2014 A IN2313MUN2014 A IN 2313MUN2014A IN 2014MN02313 A IN2014MN02313 A IN 2014MN02313A
Authority
IN
India
Prior art keywords
mask layer
processed
film
microrelief structure
energy ray
Prior art date
Application number
Other languages
English (en)
Inventor
Naoki Hosomi
Jun Koike
Fujito Yamaguchi
Original Assignee
Asahi Kasei E Materials Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kasei E Materials Corp filed Critical Asahi Kasei E Materials Corp
Publication of IN2014MN02313A publication Critical patent/IN2014MN02313A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/026—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing of layered or coated substantially flat surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/04—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/04—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts
    • B29C59/046—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing using rollers or endless belts for layered or coated substantially flat surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/16—Surface shaping of articles, e.g. embossing; Apparatus therefor by wave energy or particle radiation, e.g. infrared heating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2033/00—Use of polymers of unsaturated acids or derivatives thereof as moulding material
    • B29K2033/04—Polymers of esters
    • B29K2033/08—Polymers of acrylic acid esters, e.g. PMA, i.e. polymethylacrylate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
    • B29K2105/0005—Condition, form or state of moulded material or of the material to be shaped containing compounding ingredients
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24628—Nonplanar uniform thickness material

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Laminated Bodies (AREA)
  • Drying Of Semiconductors (AREA)
IN2313MUN2014 2012-05-08 2013-04-30 IN2014MN02313A (enExample)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012106937 2012-05-08
JP2012135005 2012-06-14
PCT/JP2013/062590 WO2013168634A1 (ja) 2012-05-08 2013-04-30 転写方法及び熱ナノインプリント装置

Publications (1)

Publication Number Publication Date
IN2014MN02313A true IN2014MN02313A (enExample) 2015-08-07

Family

ID=49550676

Family Applications (1)

Application Number Title Priority Date Filing Date
IN2313MUN2014 IN2014MN02313A (enExample) 2012-05-08 2013-04-30

Country Status (9)

Country Link
US (1) US20150111005A1 (enExample)
EP (2) EP2848391B1 (enExample)
JP (2) JP5560377B2 (enExample)
KR (2) KR101531143B1 (enExample)
CN (2) CN104865792A (enExample)
IN (1) IN2014MN02313A (enExample)
MY (1) MY171653A (enExample)
TW (2) TWI598211B (enExample)
WO (1) WO2013168634A1 (enExample)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI436405B (zh) * 2011-06-23 2014-05-01 旭化成電子材料股份有限公司 And a method for producing a layered product for forming a fine pattern and a fine pattern forming layer
JP6441036B2 (ja) * 2014-11-13 2018-12-19 旭化成株式会社 転写方法
TWI696108B (zh) * 2015-02-13 2020-06-11 日商半導體能源研究所股份有限公司 功能面板、功能模組、發光模組、顯示模組、位置資料輸入模組、發光裝置、照明設備、顯示裝置、資料處理裝置、功能面板的製造方法
JP6637243B2 (ja) * 2015-03-09 2020-01-29 デクセリアルズ株式会社 防曇防汚積層体、及びその製造方法、物品、及びその製造方法、並びに防汚方法
US10471646B2 (en) * 2015-05-19 2019-11-12 The University Of Massachusetts Methods and system for mass production, volume manufacturing of re-entrant structures
HK1253950A1 (zh) 2015-07-07 2019-07-05 Illumina, Inc. 经由纳米压印的选择性表面图案化
JP6502284B2 (ja) * 2016-02-26 2019-04-17 富士フイルム株式会社 感光性転写材料及び回路配線の製造方法
CN105818556A (zh) * 2016-03-25 2016-08-03 南京京晶光电科技有限公司 一种采用纳米压印工艺在基材表面加工cd纹的方法
US10549494B2 (en) * 2016-04-20 2020-02-04 Himax Technologies Limited Imprinting apparatus and imprinting method
TWI656965B (zh) * 2016-04-20 2019-04-21 奇景光電股份有限公司 壓印設備及壓印方法
KR101816838B1 (ko) * 2016-07-08 2018-01-09 주식회사 기가레인 나노 임프린트용 레플리카 몰드, 그 제조방법 및 나노 임프린트용 레플리카 몰드 제조장치
TWI672212B (zh) * 2016-08-25 2019-09-21 國立成功大學 奈米壓印組合體及其壓印方法
KR102743032B1 (ko) 2016-10-14 2024-12-17 삼성디스플레이 주식회사 임프린트용 가압 롤러 및 이를 이용한 임프린트 방법
JP6837352B2 (ja) * 2017-02-28 2021-03-03 芝浦機械株式会社 転写装置および転写方法
KR20180105433A (ko) * 2017-03-15 2018-09-28 주식회사 기가레인 임프린트 장치 및 임프린트 방법
KR102569627B1 (ko) * 2017-03-16 2023-08-22 위니베르시떼 덱스-마르세이유 나노임프린트 리소그래피 프로세스 및 그것으로부터 획득가능한 패터닝된 기재
US11571841B2 (en) * 2017-05-08 2023-02-07 Ykk Corporation Plastic molded product
CN108987573B (zh) * 2017-06-05 2020-01-24 Tcl集团股份有限公司 量子点薄膜的转印方法
CN109808319B (zh) * 2017-11-20 2020-09-22 Tcl科技集团股份有限公司 一种印章及其制备方法与量子点转印方法
JP7104577B2 (ja) * 2018-07-06 2022-07-21 キヤノン株式会社 平坦化層形成装置、平坦化層の製造方法、および物品製造方法
JP7196820B2 (ja) * 2019-11-11 2022-12-27 豊田合成株式会社 ホットスタンプ装置
KR20250153308A (ko) * 2019-12-02 2025-10-24 에베 그룹 에. 탈너 게엠베하 스탬프를 분리하는 방법 및 장치
US11728199B2 (en) * 2019-12-23 2023-08-15 Asmpt Nexx, Inc. Substrate support features and method of application
TWI889807B (zh) * 2020-05-01 2025-07-11 日商東京威力科創股份有限公司 圖案形成方法及圖案形成系統
US11520228B2 (en) * 2020-09-03 2022-12-06 International Business Machines Corporation Mass fabrication-compatible processing of semiconductor metasurfaces
EP4057065A1 (en) * 2021-03-10 2022-09-14 Obducat AB Method for pattern transfer
CN115167072B (zh) * 2022-01-24 2025-08-22 广东粤港澳大湾区国家纳米科技创新研究院 一种快速制备光刻胶掩膜的压印方法
KR102982418B1 (ko) 2022-03-29 2026-06-25 삼성디스플레이 주식회사 임프린트 장치
WO2025090161A1 (en) * 2023-10-26 2025-05-01 Applied Materials, Inc. Roll-based thin film loading system for manufacturing
WO2025188303A1 (en) * 2024-03-06 2025-09-12 University Of Houston System, Board Of Regents Dielectric polymer films

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135394B2 (enExample) 1972-09-01 1976-10-01
EP1362682A1 (en) * 2002-05-13 2003-11-19 ZBD Displays Ltd, Method and apparatus for liquid crystal alignment
JP2006164365A (ja) * 2004-12-06 2006-06-22 Tdk Corp 樹脂マスク層形成方法、情報記録媒体製造方法および樹脂マスク層形成装置
CN100541326C (zh) * 2004-12-30 2009-09-16 中国科学院电工研究所 纳米级别图形的压印制造方法及其装置
JP2007144995A (ja) * 2005-10-25 2007-06-14 Dainippon Printing Co Ltd 光硬化ナノインプリント用モールド及びその製造方法
FR2893610B1 (fr) * 2005-11-23 2008-07-18 Saint Gobain Procede de structuration de surface d'un produit verrier, produit verrier a surface structuree et utilisations
WO2008091571A2 (en) * 2007-01-22 2008-07-31 Nano Terra Inc. High-throughput apparatus for patterning flexible substrates and method of using the same
JP4943876B2 (ja) 2007-01-30 2012-05-30 東芝機械株式会社 熱ナノインプリント方法
US20080229941A1 (en) * 2007-03-19 2008-09-25 Babak Heidari Nano-imprinting apparatus and method
US8027086B2 (en) * 2007-04-10 2011-09-27 The Regents Of The University Of Michigan Roll to roll nanoimprint lithography
JP5106933B2 (ja) * 2007-07-04 2012-12-26 ラピスセミコンダクタ株式会社 半導体装置
JP4406452B2 (ja) * 2007-09-27 2010-01-27 株式会社日立製作所 ベルト状金型およびそれを用いたナノインプリント装置
JP2009190300A (ja) * 2008-02-15 2009-08-27 Toppan Printing Co Ltd インプリント法
JP5388539B2 (ja) * 2008-10-28 2014-01-15 旭化成イーマテリアルズ株式会社 パターン形成方法
JP4551957B2 (ja) * 2008-12-12 2010-09-29 株式会社東芝 磁気記録媒体の製造方法
KR20100068830A (ko) * 2008-12-15 2010-06-24 삼성전자주식회사 임프린트 몰드, 임프린트 장치 및 패턴 형성 방법
JP2010284814A (ja) * 2009-06-09 2010-12-24 Fuji Electric Device Technology Co Ltd スタンパの製造方法
KR101054916B1 (ko) * 2009-06-26 2011-08-05 주식회사 디엠에스 스템프 분리장치
JP5469941B2 (ja) 2009-07-13 2014-04-16 東芝機械株式会社 転写装置および転写方法
JP5372708B2 (ja) * 2009-11-09 2013-12-18 株式会社日立産機システム 微細構造転写装置
JP2011165855A (ja) * 2010-02-09 2011-08-25 Toshiba Corp パターン形成方法
JP2013110135A (ja) * 2010-03-12 2013-06-06 Bridgestone Corp 光硬化性転写シートを用いた凹凸パターンの形成方法、及びその方法に用いる装置
JP2011240643A (ja) * 2010-05-20 2011-12-01 Bridgestone Corp 樹脂製フィルムを用いた凹凸パターンの形成方法、その方法に使用する装置
JP5349404B2 (ja) * 2010-05-28 2013-11-20 株式会社東芝 パターン形成方法
EP2657299A4 (en) * 2011-06-21 2014-03-12 Asahi Kasei E Materials Corp INORGANIC COMPOSITION FOR TRANSMITTING A MICROROLE STRUCTURE
JP5872369B2 (ja) * 2012-04-19 2016-03-01 旭化成イーマテリアルズ株式会社 微細凹凸パターン付き基材の製造方法

Also Published As

Publication number Publication date
MY171653A (en) 2019-10-22
JP5560377B2 (ja) 2014-07-23
JP6162640B2 (ja) 2017-07-12
KR20150041161A (ko) 2015-04-15
KR101881200B1 (ko) 2018-07-24
KR101531143B1 (ko) 2015-06-23
CN104865792A (zh) 2015-08-26
US20150111005A1 (en) 2015-04-23
TW201505818A (zh) 2015-02-16
JPWO2013168634A1 (ja) 2016-01-07
EP2848391B1 (en) 2018-09-19
EP2979845A1 (en) 2016-02-03
EP2848391A1 (en) 2015-03-18
CN104271332B (zh) 2016-04-13
TWI495558B (zh) 2015-08-11
JP2014187376A (ja) 2014-10-02
TWI598211B (zh) 2017-09-11
KR20140144716A (ko) 2014-12-19
WO2013168634A8 (ja) 2014-01-16
EP2848391A4 (en) 2015-04-29
TW201408469A (zh) 2014-03-01
CN104271332A (zh) 2015-01-07
WO2013168634A1 (ja) 2013-11-14

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