IN166273B - - Google Patents

Info

Publication number
IN166273B
IN166273B IN726/MAS/85A IN726MA1985A IN166273B IN 166273 B IN166273 B IN 166273B IN 726MA1985 A IN726MA1985 A IN 726MA1985A IN 166273 B IN166273 B IN 166273B
Authority
IN
India
Application number
IN726/MAS/85A
Other languages
English (en)
Inventor
Hashimoto Takayoshi
Original Assignee
Takasago Thermal Engineering
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering filed Critical Takasago Thermal Engineering
Publication of IN166273B publication Critical patent/IN166273B/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24HEATING; RANGES; VENTILATING
    • F24FAIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Central Air Conditioning (AREA)
IN726/MAS/85A 1984-09-18 1985-09-17 IN166273B (sv)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP59195072A JPS6172947A (ja) 1984-09-18 1984-09-18 クリ−ンル−ムの形成法およびこの方法に使用する空気調和設備ユニツト
PCT/JP1985/000516 WO1986001879A1 (en) 1984-09-18 1985-09-17 Clean room constructing system

Publications (1)

Publication Number Publication Date
IN166273B true IN166273B (sv) 1990-04-07

Family

ID=16335085

Family Applications (1)

Application Number Title Priority Date Filing Date
IN726/MAS/85A IN166273B (sv) 1984-09-18 1985-09-17

Country Status (10)

Country Link
US (1) US4693175A (sv)
EP (1) EP0196333B1 (sv)
JP (1) JPS6172947A (sv)
KR (1) KR930009610B1 (sv)
DE (1) DE3570514D1 (sv)
GB (1) GB2176278B (sv)
IN (1) IN166273B (sv)
PH (1) PH22626A (sv)
SG (1) SG22089G (sv)
WO (1) WO1986001879A1 (sv)

Families Citing this family (83)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3484603D1 (de) * 1983-12-16 1991-06-20 Nitta Co Luftreiniger.
US5464774A (en) * 1984-03-05 1995-11-07 The Salk Institute For Biological Studies Bovine basic fibroblast growth factor
US4667579A (en) * 1985-10-03 1987-05-26 Daw, Incorporated Cleanroom structure
DE8630050U1 (de) * 1986-11-11 1987-01-15 Slee Semiconductor-Technik GmbH, 6500 Mainz Transportable Reinraumanlage
US4819549A (en) * 1988-02-05 1989-04-11 Donaldson Company Inc. End seal for clean room ceiling supports
JP2846891B2 (ja) * 1988-06-03 1999-01-13 東京エレクトロン株式会社 処理装置
US5175147A (en) * 1988-08-19 1992-12-29 Takeda Chemical Industries, Ltd Acid-resistant fgf composition and method of treating ulcerating diseases of the gastrointestinal tract
DE3836147C2 (de) * 1988-10-23 1996-03-21 Ltg Lufttechnische Gmbh Reinraumdecke
US4976757A (en) * 1989-05-04 1990-12-11 Comp-Aire Systems, Inc. Filtration plenum module constructed for on-site assembly
US5029518A (en) * 1989-10-16 1991-07-09 Clean Air Technology, Inc. Modular clean room structure
JPH03291436A (ja) * 1990-04-05 1991-12-20 N M B Semiconductor:Kk 半導体製造工場のクリーンルーム
EP0457747B1 (en) * 1990-05-11 1994-11-30 Albert Dupont Wine recorking apparatus and method
JP2561749B2 (ja) * 1990-10-11 1996-12-11 株式会社朝日工業社 クリ−ンル−ムの空気循環方法
DE4115171C2 (de) * 1991-05-09 1995-02-23 Daldrop & Dr Ing Huber Gmbh & Ventilator-Filtereinheit für Reinraumdecken
DE9116423U1 (de) * 1991-07-08 1992-09-17 Babcock-BSH AG vormals Büttner-Schilde-Haas AG, 4150 Krefeld Modul zum Aufbau einer Reinraumdecke
JP3309416B2 (ja) * 1992-02-13 2002-07-29 松下電器産業株式会社 連結式クリーン空間装置
US5417610A (en) * 1992-11-06 1995-05-23 Daw Technologies, Inc. Method and device for reducing vortices at a cleanroom ceiling
US5350336A (en) * 1993-04-23 1994-09-27 Industrial Technology Research Institute Building and method for manufacture of integrated semiconductor circuit devices
JP3470370B2 (ja) * 1994-01-24 2003-11-25 富士通株式会社 塵埃粒子発生位置特定装置および方法ならびにクリーンルーム
TW253028B (en) * 1994-03-22 1995-08-01 Daw Technologies Inc Method and device for improved unidirectional airflow in cleanroom
DE4412583C1 (de) * 1994-04-13 1995-09-14 Daldrop & Dr Ing Huber Gmbh & Ventilator-Filtereinheit für Reinraumdecken
US5641354A (en) * 1995-07-10 1997-06-24 Seh America, Inc. Puller cell
TW346443B (en) * 1995-11-02 1998-12-01 Toyo Koban Kk Method and apparatus for production of laminated metal sheet
JPH1130436A (ja) * 1997-07-11 1999-02-02 Nittetsu Semiconductor Kk クリーンルーム及びクリーンルームの改装方法
US5858041A (en) * 1997-08-22 1999-01-12 David Luetkemeyer Clean air system
JP3911904B2 (ja) * 1999-04-21 2007-05-09 株式会社日立プラントテクノロジー クリーンルーム構造
US6102977A (en) * 1998-06-18 2000-08-15 Seh America, Inc. Make-up air handler and method for supplying boron-free outside air to clean rooms
IL126866A (en) * 1998-11-02 2003-02-12 Orbotech Ltd Apparatus and method for fabricating flat workpieces
SE513220C2 (sv) * 1998-12-02 2000-07-31 Johnson Medical Dev Pte Ltd Sätt och anordning vid rumsventilation för s.k. renrum
US6174341B1 (en) * 1999-03-18 2001-01-16 Byron Burge Ceiling mounted air filtration system
US6378361B1 (en) 1999-07-16 2002-04-30 Vertical Wind Tunnel Corporation Method and apparatus for creating a wind tunnel by redirecting an air flow ninety degrees
JP4486727B2 (ja) * 1999-11-25 2010-06-23 高砂熱学工業株式会社 循環型クリーンルーム
DE10029200A1 (de) * 2000-02-21 2001-08-23 Data Disc Robots Gmbh Prozeßklimatisierung
US6471582B1 (en) * 2001-08-14 2002-10-29 Applied Optoelectronics, Inc. Adapter for coupling air duct to fan-driven vent
US7105037B2 (en) * 2002-10-31 2006-09-12 Advanced Technology Materials, Inc. Semiconductor manufacturing facility utilizing exhaust recirculation
US6676508B1 (en) * 2003-04-22 2004-01-13 Gerald Graham Magnetically controlled flow system
KR100524875B1 (ko) * 2003-06-28 2005-10-31 엘지.필립스 엘시디 주식회사 청정시스템
KR20050062366A (ko) * 2003-12-18 2005-06-23 엠 플러스 더블유 짠더 퍼실리티 엔지니어링 게엠베하 순환공기, 특히 청정공기의 공조장치
CN102208535A (zh) * 2004-09-09 2011-10-05 国立大学法人北海道大学 太阳能电池及光电转换元件
US7513822B2 (en) * 2005-06-18 2009-04-07 Flitsch Frederick A Method and apparatus for a cleanspace fabricator
US11024527B2 (en) 2005-06-18 2021-06-01 Frederick A. Flitsch Methods and apparatus for novel fabricators with Cleanspace
US10627809B2 (en) 2005-06-18 2020-04-21 Frederick A. Flitsch Multilevel fabricators
US10651063B2 (en) 2005-06-18 2020-05-12 Frederick A. Flitsch Methods of prototyping and manufacturing with cleanspace fabricators
WO2007058418A2 (en) * 2005-11-21 2007-05-24 Lg Electronics, Inc. Air conditioning system
JP2009002634A (ja) * 2007-06-25 2009-01-08 Unitec Inc ユニット型クリーンルーム
US8003067B2 (en) * 2007-09-20 2011-08-23 Applied Materials, Inc. Apparatus and methods for ambient air abatement of electronic manufacturing effluent
US7819935B2 (en) * 2007-12-14 2010-10-26 Ge-Hitachi Nuclear Energy Americas Llc Air filtration for nuclear reactor habitability area
TWI382144B (zh) * 2008-01-04 2013-01-11 Fih Hong Kong Ltd 風淋室
US9604245B2 (en) 2008-06-13 2017-03-28 Kateeva, Inc. Gas enclosure systems and methods utilizing an auxiliary enclosure
US9048344B2 (en) 2008-06-13 2015-06-02 Kateeva, Inc. Gas enclosure assembly and system
US11975546B2 (en) 2008-06-13 2024-05-07 Kateeva, Inc. Gas enclosure assembly and system
US12018857B2 (en) 2008-06-13 2024-06-25 Kateeva, Inc. Gas enclosure assembly and system
US10442226B2 (en) 2008-06-13 2019-10-15 Kateeva, Inc. Gas enclosure assembly and system
US8899171B2 (en) * 2008-06-13 2014-12-02 Kateeva, Inc. Gas enclosure assembly and system
US10434804B2 (en) 2008-06-13 2019-10-08 Kateeva, Inc. Low particle gas enclosure systems and methods
US8383202B2 (en) 2008-06-13 2013-02-26 Kateeva, Inc. Method and apparatus for load-locked printing
JP2010017662A (ja) * 2008-07-11 2010-01-28 Hitachi Appliances Inc 空気調和機用フィルタ及びそれを用いた空気調和機
CN102378945B (zh) 2008-12-23 2015-08-05 佐马美国有限公司 柔性制造系统
JP5401206B2 (ja) * 2009-08-10 2014-01-29 株式会社不二製作所 ブラスト室
KR101719498B1 (ko) 2009-08-16 2017-03-24 지-콘 메뉴팩츄어링 인코포레이티드 모듈식 자립형 이동식 청정실
US9795957B2 (en) * 2009-08-16 2017-10-24 G-Con Manufacturing, Inc. Modular, self-contained, mobile clean room
TW201217716A (en) * 2010-10-27 2012-05-01 Hon Hai Prec Ind Co Ltd Container data center
WO2012112775A2 (en) * 2011-02-16 2012-08-23 Fiorita John L Jr Clean room control system and method
FR2987388B1 (fr) * 2012-02-27 2014-03-21 Guy Tajouri Salle propre
NL2008520C2 (nl) * 2012-03-22 2013-09-25 Atrined Cleanair Technology B V Ventilatiesysteem in een plafond van een werkruimte.
WO2015100375A1 (en) 2013-12-26 2015-07-02 Kateeva, Inc. Thermal treatment of electronic devices
JP6113923B2 (ja) 2014-01-21 2017-04-12 カティーバ, インコーポレイテッド 電子デバイスのカプセル化のための装置および技術
KR102315014B1 (ko) 2014-04-30 2021-10-20 카티바, 인크. 가스 쿠션 장비 및 기판 코팅 기술
JP6570147B2 (ja) 2014-11-26 2019-09-04 カティーバ, インコーポレイテッド 環境的に制御されたコーティングシステム
JP2018513343A (ja) * 2015-04-20 2018-05-24 シネクシス・リミテッド・ライアビリティ・カンパニーSynexis LLC 希薄過酸化水素(dhp)ガスを含むクリーンルームおよびその使用方法
JP6576785B2 (ja) * 2015-10-16 2019-09-18 株式会社 ゼンショーホールディングス 無菌店舗システム
CN107796067A (zh) * 2017-03-06 2018-03-13 江苏嘉合建设有限公司 一种超净洁净室的建造方法
JP2019090576A (ja) * 2017-11-15 2019-06-13 株式会社桜アーク 清浄ユニット
AT16910U1 (de) * 2018-01-04 2020-12-15 Ing Siegfried Manschein Ges M B H Modulares Klimasystem sowie Verfahren zum Klimatisieren eines Innenraums
DE202018000123U1 (de) 2018-01-10 2018-02-07 ZLT Lüftungs- und Brandschutztechnik GmbH akustisch optiemiertes Einbaugehäuse
JP7183567B2 (ja) 2018-05-02 2022-12-06 Tdk株式会社 循環式efem
JP7240257B2 (ja) * 2019-05-29 2023-03-15 ダイキン工業株式会社 空調システム
US11624182B2 (en) * 2019-08-15 2023-04-11 G-Con Manufacturing, Inc. Removable panel roof for modular, self-contained, mobile clean room
US20210148600A1 (en) * 2019-11-19 2021-05-20 Patrick D. Moloney HVAC System Air Intake Manager and Method of Using Same
EP4071415A4 (en) * 2019-12-04 2023-08-02 Hitachi Global Life Solutions, Inc. CLIMATE CONTROL SYSTEM
US11492795B2 (en) 2020-08-31 2022-11-08 G-Con Manufacturing, Inc. Ballroom-style cleanroom assembled from modular buildings
JPWO2022080123A1 (sv) * 2020-10-16 2022-04-21
WO2022262553A1 (en) * 2021-06-17 2022-12-22 Intelligent Precision Micro-Systems Limited Clean room module

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3638404A (en) * 1969-09-30 1972-02-01 Westinghouse Electric Corp Vertical laminar-flow clean room of flexible design
US3880625A (en) * 1973-09-28 1975-04-29 Moore And Hanks Company Filter system
US3949809A (en) * 1975-01-22 1976-04-13 Lennox Industries, Inc. Air processing apparatus
US4191543A (en) * 1977-12-23 1980-03-04 Peters Max D Sterile air recycling apparatus
US4344784A (en) * 1981-02-27 1982-08-17 Dexon, Inc. Filter assembly for clean air rooms and work stations
GB2099034A (en) * 1981-05-26 1982-12-01 Smith David Trevor Modular partition panel for ventilated enclosure
JPS58182046A (ja) * 1982-04-20 1983-10-24 Kajima Corp クリ−ンル−ム
JPS59157432A (ja) * 1983-02-23 1984-09-06 Hitachi Plant Eng & Constr Co Ltd 組替式局所環境制御室
JPS6071830A (ja) * 1983-09-29 1985-04-23 Hitachi Plant Eng & Constr Co Ltd 組替式局所環境制御室

Also Published As

Publication number Publication date
EP0196333A4 (en) 1987-02-12
SG22089G (en) 1989-07-14
GB8610935D0 (en) 1986-06-11
WO1986001879A1 (en) 1986-03-27
KR880700219A (ko) 1988-02-20
DE3570514D1 (en) 1989-06-29
US4693175A (en) 1987-09-15
EP0196333B1 (en) 1989-05-24
EP0196333A1 (en) 1986-10-08
PH22626A (en) 1988-10-28
GB2176278A (en) 1986-12-17
JPS6172947A (ja) 1986-04-15
KR930009610B1 (ko) 1993-10-07
JPH0454140B2 (sv) 1992-08-28
GB2176278B (en) 1988-10-19

Similar Documents

Publication Publication Date Title
IN166273B (sv)
DE3422230C2 (sv)
DE3412981C2 (sv)
AU2557584A (sv)
CA1257250C (sv)
BG44829A1 (sv)
BE900712A (sv)
BG39778A1 (sv)
BG44718A1 (sv)
BG44723A1 (sv)
BG44737A1 (sv)
BG44749A1 (sv)
BG44806A1 (sv)
BG44830A1 (sv)
BG44848A1 (sv)
BG44917A1 (sv)
BG44933A1 (sv)
BG44935A1 (sv)
BG45025A1 (sv)
BG45042A3 (sv)
BG45043A3 (sv)
BG45054A1 (sv)
BG45060A1 (sv)
BG45079A1 (sv)
BG45080A1 (sv)