IL155358A0 - Pressure-type flow rate control apparatus - Google Patents

Pressure-type flow rate control apparatus

Info

Publication number
IL155358A0
IL155358A0 IL15535802A IL15535802A IL155358A0 IL 155358 A0 IL155358 A0 IL 155358A0 IL 15535802 A IL15535802 A IL 15535802A IL 15535802 A IL15535802 A IL 15535802A IL 155358 A0 IL155358 A0 IL 155358A0
Authority
IL
Israel
Prior art keywords
pressure
flow rate
control apparatus
rate control
type flow
Prior art date
Application number
IL15535802A
Other languages
English (en)
Original Assignee
Fujikin Kk
Tokyo Electron Ltd
Tadahiro Ohmi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=19189469&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=IL155358(A0) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Fujikin Kk, Tokyo Electron Ltd, Tadahiro Ohmi filed Critical Fujikin Kk
Publication of IL155358A0 publication Critical patent/IL155358A0/xx

Links

Classifications

    • H10P95/00—
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
IL15535802A 2001-12-28 2002-11-22 Pressure-type flow rate control apparatus IL155358A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001399433A JP4102564B2 (ja) 2001-12-28 2001-12-28 改良型圧力式流量制御装置
PCT/JP2002/012250 WO2003058363A1 (en) 2001-12-28 2002-11-22 Advanced pressure type flow control device

Publications (1)

Publication Number Publication Date
IL155358A0 true IL155358A0 (en) 2003-11-23

Family

ID=19189469

Family Applications (2)

Application Number Title Priority Date Filing Date
IL15535802A IL155358A0 (en) 2001-12-28 2002-11-22 Pressure-type flow rate control apparatus
IL155358A IL155358A (he) 2001-12-28 2003-04-10 התקן מסוג לחץ לבקרת ספיקה

Family Applications After (1)

Application Number Title Priority Date Filing Date
IL155358A IL155358A (he) 2001-12-28 2003-04-10 התקן מסוג לחץ לבקרת ספיקה

Country Status (10)

Country Link
US (1) US6964279B2 (he)
EP (1) EP1475684B1 (he)
JP (1) JP4102564B2 (he)
KR (1) KR100601803B1 (he)
CN (1) CN1279416C (he)
CA (1) CA2423342C (he)
DE (1) DE60219365T2 (he)
IL (2) IL155358A0 (he)
TW (1) TW552491B (he)
WO (1) WO2003058363A1 (he)

Families Citing this family (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7431045B2 (en) * 2002-08-28 2008-10-07 Horiba Stec, Co., Ltd. Flow restrictor
JP4204400B2 (ja) 2003-07-03 2009-01-07 忠弘 大見 差圧式流量計及び差圧式流量制御装置
JP4331539B2 (ja) 2003-07-31 2009-09-16 株式会社フジキン チャンバへのガス供給装置及びこれを用いたチャンバの内圧制御方法
US8376312B2 (en) 2003-08-28 2013-02-19 Horiba, Ltd. Flow restrictor
JP4399227B2 (ja) * 2003-10-06 2010-01-13 株式会社フジキン チャンバの内圧制御装置及び内圧被制御式チャンバ
JP4406292B2 (ja) * 2004-01-20 2010-01-27 株式会社フジキン 流体通路のウォータハンマーレス開放方法及びこれを用いたウォータハンマーレス開放装置
US7740024B2 (en) 2004-02-12 2010-06-22 Entegris, Inc. System and method for flow monitoring and control
US6973375B2 (en) * 2004-02-12 2005-12-06 Mykrolis Corporation System and method for flow monitoring and control
JP2005307233A (ja) * 2004-04-19 2005-11-04 Tokyo Electron Ltd 成膜装置及び成膜方法及びプロセスガスの供給方法
RU2289155C2 (ru) * 2004-11-16 2006-12-10 Государственное образовательное учреждение высшего профессионального образования "Тверской государственный технический университет" Исполнительное устройство для регулирования потоков жидких сред в трубопроводах
JP4572139B2 (ja) * 2005-05-23 2010-10-27 株式会社フジキン 改良型圧力式流量制御装置
JP4856905B2 (ja) * 2005-06-27 2012-01-18 国立大学法人東北大学 流量レンジ可変型流量制御装置
US9921089B2 (en) 2005-06-27 2018-03-20 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
US9383758B2 (en) 2005-06-27 2016-07-05 Fujikin Incorporated Flow rate range variable type flow rate control apparatus
JP2007034667A (ja) * 2005-07-27 2007-02-08 Surpass Kogyo Kk 流量コントローラ、これに用いるレギュレータユニット、バルブユニット
JP2007058352A (ja) * 2005-08-22 2007-03-08 Asahi Organic Chem Ind Co Ltd 流体制御装置
JP2007058337A (ja) * 2005-08-22 2007-03-08 Asahi Organic Chem Ind Co Ltd 流体制御装置
JP4690827B2 (ja) 2005-08-26 2011-06-01 株式会社フジキン ガスケット型オリフィス及びこれを用いた圧力式流量制御装置
JP4866682B2 (ja) 2005-09-01 2012-02-01 株式会社フジキン 圧力センサを保有する流量制御装置を用いた流体供給系の異常検出方法
KR101275004B1 (ko) * 2006-12-19 2013-06-14 재단법인 포항산업과학연구원 압축공기 사용량 측정 방법 및 장치
JP5372353B2 (ja) * 2007-09-25 2013-12-18 株式会社フジキン 半導体製造装置用ガス供給装置
US8265794B2 (en) * 2007-10-01 2012-09-11 Westlock Controls Corporation Knowledge based valve control method
JP5054500B2 (ja) * 2007-12-11 2012-10-24 株式会社フジキン 圧力制御式流量基準器
JP5461786B2 (ja) * 2008-04-01 2014-04-02 株式会社フジキン 気化器を備えたガス供給装置
CN102037423B (zh) * 2008-05-21 2014-02-05 株式会社富士金 使用压力流量控制装置的流体非连续式流量切换控制方法
JP5195527B2 (ja) * 2009-03-03 2013-05-08 株式会社明電舎 流量制御装置及びプロセス装置
WO2011067877A1 (ja) 2009-12-01 2011-06-09 株式会社フジキン 圧力式流量制御装置
JP5669402B2 (ja) * 2010-01-08 2015-02-12 三菱重工業株式会社 ヒートポンプ及びヒートポンプの熱媒流量演算方法
US8747029B2 (en) * 2010-05-03 2014-06-10 Mac Equipment, Inc. Low pressure continuous dense phase convey system using a non-critical air control system
JP5761960B2 (ja) 2010-10-29 2015-08-12 三菱重工業株式会社 熱源装置
KR101284052B1 (ko) 2011-04-15 2013-07-10 한국건설기술연구원 차압을 이용한 분배기 분배유량 산출방법
JP5175965B2 (ja) * 2011-10-03 2013-04-03 国立大学法人東北大学 流量レンジ可変型流量制御装置
US20130240045A1 (en) * 2012-03-15 2013-09-19 Xiufeng Pang Method for Determining a Fluid Flow Rate With a Fluid Control Valve
PL2667159T3 (pl) * 2012-05-24 2022-05-02 Air Products And Chemicals, Inc. Sposób oraz urządzenie dla mierzenia masowego natężenia przepływu gazu
US20130312421A1 (en) * 2012-05-24 2013-11-28 Solar Turbines Incorporated Fuel control system for a gas turbine engine
JP5768186B2 (ja) * 2012-05-31 2015-08-26 株式会社フジキン ビルドダウン方式流量モニタ付流量制御装置及びこれを用いたモニタ付流量制御方法。
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP5797246B2 (ja) * 2013-10-28 2015-10-21 株式会社フジキン 流量計及びそれを備えた流量制御装置
WO2015064035A1 (ja) * 2013-10-31 2015-05-07 株式会社フジキン 圧力式流量制御装置
JP6372998B2 (ja) * 2013-12-05 2018-08-15 株式会社フジキン 圧力式流量制御装置
JP6321972B2 (ja) * 2014-01-21 2018-05-09 株式会社フジキン 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法
CN106660213B (zh) * 2014-07-15 2019-01-01 株式会社富士 检查方法
JP6416529B2 (ja) 2014-07-23 2018-10-31 株式会社フジキン 圧力式流量制御装置
US9904299B2 (en) * 2015-04-08 2018-02-27 Tokyo Electron Limited Gas supply control method
EP3320408A1 (en) * 2015-07-10 2018-05-16 Pivotal Systems Corporation Method and apparatus for gas flow control
WO2017040100A1 (en) * 2015-08-31 2017-03-09 Mks Instruments, Inc. Method and apparatus for pressure-based flow measurement in non-critical flow conditions
JP6541584B2 (ja) * 2015-09-16 2019-07-10 東京エレクトロン株式会社 ガス供給系を検査する方法
JP6600568B2 (ja) * 2015-09-16 2019-10-30 東京エレクトロン株式会社 流量制御器の出力流量を求める方法
US10274972B2 (en) * 2015-09-16 2019-04-30 Tokyo Electron Limited Method of inspecting gas supply system
JP6771772B2 (ja) * 2015-09-24 2020-10-21 株式会社フジキン 圧力式流量制御装置及びその異常検知方法
US11313756B2 (en) * 2015-12-25 2022-04-26 Futikin Incorporated Flow rate control device and abnormality detection method using flow rate control device
JP6600854B2 (ja) * 2016-08-24 2019-11-06 株式会社フジキン 圧力式流量制御装置、その流量算出方法および流量制御方法
CN106352931B (zh) 2016-10-09 2018-02-13 无锡洋湃科技有限公司 一种测量多相流中气液两相各自流量的临界流喷嘴流量计及测量方法
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
US10865635B2 (en) 2017-03-14 2020-12-15 Baker Hughes Oilfield Operations, Llc Method of controlling a gas vent system for horizontal wells
US11390951B2 (en) * 2017-07-25 2022-07-19 Fujikin Incorporated Fluid control device
KR102314330B1 (ko) * 2017-11-30 2021-10-19 가부시키가이샤 후지킨 유량 제어 장치
CN107830902A (zh) * 2017-12-12 2018-03-23 杭州天马计量科技有限公司 一种气体流量计
US11002461B2 (en) 2018-02-15 2021-05-11 Johnson Controls Technology Company System and method for output compensation in flow sensors
US10558227B2 (en) * 2018-02-15 2020-02-11 Johnson Controls Technology Company System and method for output compensation in flow sensors using pulse width modulation
US11269362B2 (en) * 2018-04-27 2022-03-08 Fujikin Incorporated Flow rate control method and flow rate control device
CN111103020B (zh) * 2018-10-29 2022-06-03 北京七星华创流量计有限公司 流量检测装置、流量控制系统及流量检测方法
CN110543192A (zh) * 2018-10-31 2019-12-06 北京七星华创流量计有限公司 基于压力检测的质量流量控制方法及装置
WO2020218138A1 (ja) * 2019-04-25 2020-10-29 株式会社フジキン 流量制御装置
US12259739B2 (en) * 2019-04-30 2025-03-25 Illinois Tool Works Inc. Advanced pressure based mass flow controllers and diagnostics
LU101299B1 (en) * 2019-07-08 2021-01-11 Luxembourg Inst Science & Tech List Volume flowmeter and method for determining a volumetric flow rate
US12334355B2 (en) * 2019-12-25 2025-06-17 Fujikin Incorporated Pressure control device
CN113324605B (zh) * 2021-05-26 2023-05-23 北京七星华创流量计有限公司 气体质量流量控制器和气体质量流量控制方法
US20230036266A1 (en) * 2021-07-27 2023-02-02 Pratt & Whitney Canada Corp. Controlling gaseous fuel flow
KR20250073548A (ko) * 2021-08-13 2025-05-27 티에스아이 인코포레이티드 차압 액체 유동 제어기
JP7797184B2 (ja) * 2021-12-02 2026-01-13 桑名金属工業株式会社 バルブ減肉予測システム及びバルブ減肉予測方法
US20240281007A1 (en) * 2023-02-17 2024-08-22 Mks Instruments, Inc. Method and Apparatus for Integrated Pressure and Flow Controller
CN118567397A (zh) * 2023-02-28 2024-08-30 北京七星华创流量计有限公司 气体质量流量控制器及方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4222403A (en) * 1978-10-12 1980-09-16 Fuji Kinzoku Kohsaku Co., Ltd. Automatic drain exhaust valve
FR2594541A1 (fr) * 1986-02-14 1987-08-21 Air Liquide Procede de controle du debit d'un fluide dans une vanne et appareil pour la mise en oeuvre de ce procede
US5365795A (en) * 1993-05-20 1994-11-22 Brower Jr William B Improved method for determining flow rates in venturis, orifices and flow nozzles involving total pressure and static pressure measurements
JPH09189586A (ja) * 1996-01-10 1997-07-22 Toshiba Corp オリフィス式流量測定装置
US5868159A (en) * 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
JP3580645B2 (ja) 1996-08-12 2004-10-27 忠弘 大見 圧力式流量制御装置
JP3684307B2 (ja) 1998-10-19 2005-08-17 シーケーディ株式会社 ガス供給制御装置
US6510746B1 (en) * 1999-07-12 2003-01-28 Ford Global Technologies, Inc. Gas flow measurement
JP2001027556A (ja) * 1999-07-15 2001-01-30 Toshiharu Kagawa 可変開口型オリフィス流量計
JP2001201376A (ja) * 1999-11-09 2001-07-27 Nikkiso Co Ltd 気体混合粉体中の粉体の流量を測定する粉体流量測定装置および方法
JP2001201414A (ja) * 2000-01-20 2001-07-27 Smc Corp 複合センサ及び複合センサを備えたフローコントローラ
US6539968B1 (en) * 2000-09-20 2003-04-01 Fugasity Corporation Fluid flow controller and method of operation

Also Published As

Publication number Publication date
US20040204794A1 (en) 2004-10-14
JP2003195948A (ja) 2003-07-11
JP4102564B2 (ja) 2008-06-18
TW552491B (en) 2003-09-11
WO2003058363A1 (en) 2003-07-17
CA2423342A1 (en) 2003-06-28
EP1475684B1 (en) 2007-04-04
CN1279416C (zh) 2006-10-11
CN1494672A (zh) 2004-05-05
IL155358A (he) 2006-10-05
EP1475684A1 (en) 2004-11-10
EP1475684A4 (en) 2005-09-07
KR20030074743A (ko) 2003-09-19
US6964279B2 (en) 2005-11-15
DE60219365D1 (de) 2007-05-16
KR100601803B1 (ko) 2006-07-19
TW200301414A (en) 2003-07-01
CA2423342C (en) 2007-03-06
DE60219365T2 (de) 2007-08-09

Similar Documents

Publication Publication Date Title
IL155358A0 (en) Pressure-type flow rate control apparatus
GB2390383B (en) Flow control regulation methods
GB2363414B (en) Downhole flow rate control device
IL149796A0 (en) Fluid control apparatus
GB2379996B (en) Flow means
GB0201219D0 (en) Base-pipe flow control mechanism
GB2395997B (en) Flow control device
GB2388209B (en) Control apparatus
EP1631811A4 (en) CONTROL OF FLOW SPEED
GB2362873B (en) Apparatus to control fluid flow rates
EP1430243A4 (en) FLOW CONTROL DEVICE
PL375436A1 (en) Flow control system
GB2387927B (en) Control apparatus
GB2372704B (en) Respiratory flow rate determination
GB0031006D0 (en) Flow control apparatus
GB0116970D0 (en) Flow controller
GB2390141B (en) Water flow control device
GB2388193B (en) Flow apparatus
AU2002219621A1 (en) Flow rate controller
GB2372519B (en) Fluid flow control apparatus
GB2402735B (en) Flow control device
GB2392178B (en) Base-pipe flow control mechanism
GB0512819D0 (en) Water flow control system
TW472900U (en) Flowing rate control structure
GB0126161D0 (en) Line control apparatus

Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees