IL148633A0 - Thermal sensor and method of making same - Google Patents
Thermal sensor and method of making sameInfo
- Publication number
- IL148633A0 IL148633A0 IL14863300A IL14863300A IL148633A0 IL 148633 A0 IL148633 A0 IL 148633A0 IL 14863300 A IL14863300 A IL 14863300A IL 14863300 A IL14863300 A IL 14863300A IL 148633 A0 IL148633 A0 IL 148633A0
- Authority
- IL
- Israel
- Prior art keywords
- thermal sensor
- making same
- detector
- vanadium
- resistivity
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910052720 vanadium Inorganic materials 0.000 abstract 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 abstract 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0853—Optical arrangements having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/142—Energy conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/1446—Devices controlled by radiation in a repetitive configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Manufacturing & Machinery (AREA)
- Sustainable Development (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Energy (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Glass Compositions (AREA)
- Measuring Fluid Pressure (AREA)
- Thermistors And Varistors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/394,154 US6144285A (en) | 1999-09-13 | 1999-09-13 | Thermal sensor and method of making same |
PCT/US2000/024957 WO2001020280A1 (en) | 1999-09-13 | 2000-09-13 | Thermal sensor and method of making same |
Publications (1)
Publication Number | Publication Date |
---|---|
IL148633A0 true IL148633A0 (en) | 2002-09-12 |
Family
ID=23557792
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL14863300A IL148633A0 (en) | 1999-09-13 | 2000-09-13 | Thermal sensor and method of making same |
IL148633A IL148633A (en) | 1999-09-13 | 2002-03-12 | Thermal sensor and method of making same |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL148633A IL148633A (en) | 1999-09-13 | 2002-03-12 | Thermal sensor and method of making same |
Country Status (12)
Country | Link |
---|---|
US (1) | US6144285A (ko) |
EP (1) | EP1212592B1 (ko) |
JP (1) | JP3532551B2 (ko) |
KR (1) | KR100704948B1 (ko) |
AT (1) | ATE246346T1 (ko) |
AU (1) | AU1327301A (ko) |
CA (1) | CA2384937C (ko) |
DE (1) | DE60004251T2 (ko) |
DK (1) | DK1212592T3 (ko) |
IL (2) | IL148633A0 (ko) |
RU (1) | RU2240516C2 (ko) |
WO (1) | WO2001020280A1 (ko) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6621083B2 (en) * | 2000-12-29 | 2003-09-16 | Honeywell International Inc. | High-absorption wide-band pixel for bolometer arrays |
US6667479B2 (en) * | 2001-06-01 | 2003-12-23 | Raytheon Company | Advanced high speed, multi-level uncooled bolometer and method for fabricating same |
KR100538996B1 (ko) | 2003-06-19 | 2005-12-27 | 한국전자통신연구원 | 적외선 흡수층으로 실리콘 산화막을 사용한 적외선 센서및 그 제조 방법 |
DE60331692D1 (de) * | 2003-10-02 | 2010-04-22 | Honeywell Int Inc | Verfahren zur herstellung thermischer detektorstrukturen |
US7170059B2 (en) * | 2003-10-03 | 2007-01-30 | Wood Roland A | Planar thermal array |
KR100517428B1 (ko) * | 2003-12-17 | 2005-09-28 | 한국과학기술원 | 적외선 볼로메타 |
WO2006025430A1 (ja) | 2004-09-01 | 2006-03-09 | Sumitomo Electric Industries, Ltd. | 軟磁性材料、圧粉磁心および圧粉磁心の製造方法 |
FR2877492B1 (fr) * | 2004-10-28 | 2006-12-08 | Commissariat Energie Atomique | Detecteur bolometrique a isolation thermique par constriction et dispositif de detection infrarouge mettant en oeuvre un tel detecteur bolometrique |
CN101248337B (zh) * | 2005-08-17 | 2011-06-15 | 松下电工株式会社 | 红外传感器单元及其制造工艺 |
JP4899715B2 (ja) * | 2005-08-17 | 2012-03-21 | パナソニック電工株式会社 | 赤外線センサユニットの製造方法 |
US7628907B2 (en) * | 2005-08-26 | 2009-12-08 | Honeywell International Inc. | Gas sensor |
KR100930590B1 (ko) * | 2007-12-14 | 2009-12-09 | 한국전자통신연구원 | 뒤틀림 현상이 개선된 멤스형 적외선 센서 및 그 제조 방법 |
FR2930639B1 (fr) * | 2008-04-29 | 2011-07-01 | Ulis | Detecteur thermique a haute isolation |
US8248737B2 (en) * | 2008-12-16 | 2012-08-21 | Seagate Technology Llc | Magnetic sensor including an element for generating signals related to resistance changes |
US7842533B2 (en) * | 2009-01-07 | 2010-11-30 | Robert Bosch Gmbh | Electromagnetic radiation sensor and method of manufacture |
US7915585B2 (en) * | 2009-03-31 | 2011-03-29 | Bae Systems Information And Electronic Systems Integration Inc. | Microbolometer pixel and fabrication method utilizing ion implantation |
KR101530118B1 (ko) * | 2009-07-10 | 2015-06-18 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | 진성 정류기를 갖는 멤리스티브 접합 |
KR101182406B1 (ko) * | 2009-08-21 | 2012-09-13 | 한국전자통신연구원 | 적외선 감지 센서 및 그 제조 방법 |
US8314769B2 (en) | 2010-04-28 | 2012-11-20 | Honeywell International Inc. | High performance detection pixel |
CN101881667B (zh) * | 2010-06-24 | 2015-09-09 | 电子科技大学 | 一种非制冷微测辐射热计及其制备方法 |
CN101886261B (zh) * | 2010-07-09 | 2013-04-24 | 电子科技大学 | 一种用于微测辐射热计的氧化钒薄膜及其制作方法 |
CN101995297A (zh) * | 2010-09-30 | 2011-03-30 | 烟台睿创微纳技术有限公司 | 一种红外桥式测温传感器 |
US8765514B1 (en) | 2010-11-12 | 2014-07-01 | L-3 Communications Corp. | Transitioned film growth for conductive semiconductor materials |
CN102315329B (zh) * | 2011-09-13 | 2013-05-22 | 烟台睿创微纳技术有限公司 | 一种热敏薄膜红外探测器制备方法 |
CN102874738B (zh) * | 2012-10-08 | 2016-06-15 | 上海集成电路研发中心有限公司 | 红外探测器及其制造方法 |
CN104649213B (zh) * | 2013-11-19 | 2016-04-13 | 上海巨哥电子科技有限公司 | 一种微桥结构及其制备方法 |
CN103940518B (zh) * | 2014-04-23 | 2016-10-19 | 电子科技大学 | 一种低热导的太赫兹探测单元微桥结构及其制备方法 |
DE102014213369B4 (de) * | 2014-07-09 | 2018-11-15 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Strahlungsdetektor und verfahren zur herstellung eines strahlungsdetektors und array von solchen strahlungsdetektoren |
RU2595306C1 (ru) * | 2015-07-03 | 2016-08-27 | Общество с ограниченной ответственностью "Фотоэлектронные приборы" | Датчик теплового излучения и способ его изготовления |
CN105565249B (zh) * | 2015-12-28 | 2017-08-22 | 上海集成电路研发中心有限公司 | 一种微辐射探测器的微桥结构及其阵列 |
CN106092335B (zh) * | 2016-05-30 | 2019-02-05 | 上海集成电路研发中心有限公司 | 红外探测器中微桥结构的制备方法 |
CN108358157B (zh) * | 2018-02-28 | 2020-07-17 | 电子科技大学 | 一种超材料微桥结构及其制备方法 |
KR102113320B1 (ko) * | 2018-11-27 | 2020-05-20 | 한국과학기술원 | 열고립 특성이 향상된 비냉각형 적외선 센서 픽셀의 구조 및 이를 포함하는 적외선 열화상 장치 |
CN110940419B (zh) * | 2019-08-30 | 2021-04-30 | 上海集成电路研发中心有限公司 | 一种红外探测器及其制备方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US36136A (en) * | 1862-08-12 | Improvement in plows | ||
US5220188A (en) * | 1983-07-06 | 1993-06-15 | Honeywell Inc. | Integrated micromechanical sensor element |
US5450053A (en) * | 1985-09-30 | 1995-09-12 | Honeywell Inc. | Use of vanadium oxide in microbolometer sensors |
US5300915A (en) * | 1986-07-16 | 1994-04-05 | Honeywell Inc. | Thermal sensor |
US5286976A (en) * | 1988-11-07 | 1994-02-15 | Honeywell Inc. | Microstructure design for high IR sensitivity |
US5288649A (en) * | 1991-09-30 | 1994-02-22 | Texas Instruments Incorporated | Method for forming uncooled infrared detector |
US5399897A (en) * | 1993-11-29 | 1995-03-21 | Raytheon Company | Microstructure and method of making such structure |
US5801383A (en) * | 1995-11-22 | 1998-09-01 | Masahiro Ota, Director General, Technical Research And Development Institute, Japan Defense Agency | VOX film, wherein X is greater than 1.875 and less than 2.0, and a bolometer-type infrared sensor comprising the VOX film |
JP3003853B2 (ja) * | 1997-09-09 | 2000-01-31 | 本田技研工業株式会社 | ブリッジ構造を有するセンサ |
JPH11148861A (ja) * | 1997-09-09 | 1999-06-02 | Honda Motor Co Ltd | マイクロブリッジ構造 |
US5900799A (en) * | 1997-10-03 | 1999-05-04 | Mcdonnell Douglas Corporation | High responsivity thermochromic infrared detector |
WO2000004354A1 (en) * | 1998-07-14 | 2000-01-27 | Daewoo Electronics Co., Ltd. | Method for manufacturing a three level bolometer |
-
1999
- 1999-09-13 US US09/394,154 patent/US6144285A/en not_active Expired - Lifetime
-
2000
- 2000-09-13 DE DE60004251T patent/DE60004251T2/de not_active Expired - Lifetime
- 2000-09-13 AT AT00975192T patent/ATE246346T1/de active
- 2000-09-13 IL IL14863300A patent/IL148633A0/xx active IP Right Grant
- 2000-09-13 KR KR1020027003332A patent/KR100704948B1/ko not_active IP Right Cessation
- 2000-09-13 CA CA2384937A patent/CA2384937C/en not_active Expired - Fee Related
- 2000-09-13 WO PCT/US2000/024957 patent/WO2001020280A1/en active IP Right Grant
- 2000-09-13 AU AU13273/01A patent/AU1327301A/en not_active Abandoned
- 2000-09-13 EP EP00975192A patent/EP1212592B1/en not_active Expired - Lifetime
- 2000-09-13 RU RU2002109218/28A patent/RU2240516C2/ru not_active IP Right Cessation
- 2000-09-13 DK DK00975192T patent/DK1212592T3/da active
- 2000-09-13 JP JP2001523817A patent/JP3532551B2/ja not_active Expired - Fee Related
-
2002
- 2002-03-12 IL IL148633A patent/IL148633A/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
RU2002109218A (ru) | 2004-01-20 |
EP1212592B1 (en) | 2003-07-30 |
US6144285A (en) | 2000-11-07 |
KR100704948B1 (ko) | 2007-04-10 |
WO2001020280A1 (en) | 2001-03-22 |
ATE246346T1 (de) | 2003-08-15 |
DK1212592T3 (da) | 2003-09-29 |
JP2003509682A (ja) | 2003-03-11 |
AU1327301A (en) | 2001-04-17 |
KR20020039670A (ko) | 2002-05-27 |
DE60004251T2 (de) | 2004-05-27 |
CA2384937A1 (en) | 2001-03-22 |
DE60004251D1 (de) | 2003-09-04 |
CA2384937C (en) | 2010-04-13 |
IL148633A (en) | 2006-09-05 |
RU2240516C2 (ru) | 2004-11-20 |
EP1212592A1 (en) | 2002-06-12 |
JP3532551B2 (ja) | 2004-05-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IL148633A0 (en) | Thermal sensor and method of making same | |
EP0376721A3 (en) | Moisture-sensitive device | |
CA2316891A1 (en) | Time lag approach for measuring thermal conductivity and specific heat | |
EP0467133A3 (en) | Temperature sensor or sensing devices made of glass-ceramics with contacting film-resistances | |
ATE132262T1 (de) | Gassensor | |
JPS6258893U (ko) | ||
ATE481910T1 (de) | Friteuse mit verbesserter temperatursteuerung | |
EP1217873A3 (de) | Verfahren und Vorrichtung zur Erfassung der Temperatur eines Kochgefässes | |
JPS55112523A (en) | Gas flow rate measuring unit | |
CA2133081A1 (en) | Use of abx in microbolometer sensors | |
AU6423200A (en) | Thermal flow meter | |
EP0334614A3 (en) | Catalytic gas detector | |
WO2002068947A3 (en) | Infrared thermographic screening technique for semiconductor-based chemical sensors | |
JPS5693038A (en) | Semiconductor gas sensor | |
EP1081986A3 (de) | Rohrheizkörper mit NTC/PTC-Absicherung | |
AU4080599A (en) | Network based multiple sensor and control device with temperature sensing and control | |
JPS5666745A (en) | Humidity detector | |
JPS5627839A (en) | Laying type electric room heater | |
EP0348243A3 (en) | Calibration of thermal conductivity and specific heat devices | |
ES474969A1 (es) | Perfeccionamientos en los circuitos reguladores de tempera- tura para planchas para ropa | |
JPS55149834A (en) | Detecting element for contact combustion type inflammable gas | |
JPS5616876A (en) | Effective value detecting element | |
JPS5740640A (en) | Temperature compensating method in humidity measuring device | |
JPS5558466A (en) | Resistance measuring circuit | |
CN206413205U (zh) | 一种基于厚膜加热技术的低温加热烟具及加热元件 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FF | Patent granted | ||
KB | Patent renewed |