IL147607A0 - Method and system for measuring the relief of an object - Google Patents

Method and system for measuring the relief of an object

Info

Publication number
IL147607A0
IL147607A0 IL14760700A IL14760700A IL147607A0 IL 147607 A0 IL147607 A0 IL 147607A0 IL 14760700 A IL14760700 A IL 14760700A IL 14760700 A IL14760700 A IL 14760700A IL 147607 A0 IL147607 A0 IL 147607A0
Authority
IL
Israel
Prior art keywords
reference object
grid
camera
pixel
projecting
Prior art date
Application number
IL14760700A
Other languages
English (en)
Original Assignee
Solvision Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Solvision Inc filed Critical Solvision Inc
Publication of IL147607A0 publication Critical patent/IL147607A0/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Image Processing (AREA)
IL14760700A 1999-07-14 2000-07-14 Method and system for measuring the relief of an object IL147607A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CA002277855A CA2277855A1 (fr) 1999-07-14 1999-07-14 Methode et systeme de mesure de la hauteur des billes de soudure d'un circuit imprime
PCT/CA2000/000834 WO2001006210A1 (fr) 1999-07-14 2000-07-14 Procede et systeme de mesure du relief d'un objet

Publications (1)

Publication Number Publication Date
IL147607A0 true IL147607A0 (en) 2002-08-14

Family

ID=4163790

Family Applications (2)

Application Number Title Priority Date Filing Date
IL14760700A IL147607A0 (en) 1999-07-14 2000-07-14 Method and system for measuring the relief of an object
IL147607A IL147607A (en) 1999-07-14 2002-01-13 Method and system for measuring the prominence of an object

Family Applications After (1)

Application Number Title Priority Date Filing Date
IL147607A IL147607A (en) 1999-07-14 2002-01-13 Method and system for measuring the prominence of an object

Country Status (13)

Country Link
US (2) USRE42899E1 (fr)
EP (1) EP1192414B1 (fr)
JP (1) JP4112858B2 (fr)
KR (2) KR100815503B1 (fr)
CN (1) CN1181313C (fr)
AT (1) ATE266188T1 (fr)
AU (1) AU6143300A (fr)
CA (3) CA2277855A1 (fr)
DE (1) DE60010462T2 (fr)
HK (1) HK1047470B (fr)
IL (2) IL147607A0 (fr)
TW (1) TW544509B (fr)
WO (1) WO2001006210A1 (fr)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6115491A (en) 1996-02-27 2000-09-05 Cyberoptics Corporation Apparatus and method for estimating background tilt and offset
US6750899B1 (en) 2000-01-07 2004-06-15 Cyberoptics Corporation Solder paste inspection system
US6549647B1 (en) 2000-01-07 2003-04-15 Cyberoptics Corporation Inspection system with vibration resistant video capture
US6593705B1 (en) 2000-01-07 2003-07-15 Cyberoptics Corporation Rapid-firing flashlamp discharge circuit
US6577405B2 (en) 2000-01-07 2003-06-10 Cyberoptics Corporation Phase profilometry system with telecentric projector
CA2301822A1 (fr) 2000-03-24 2001-09-24 9071 9410 Quebec Inc. Projection simultanee de plusieurs patrons avec acquisition simultanee pour l'inspection d'objets en trois dimensions
FR2817042B1 (fr) 2000-11-22 2003-06-20 Saint Gobain Procede et dispositif d'analyse de la surface d'un substrat
FR2820198A1 (fr) * 2001-01-26 2002-08-02 Esic Sn Dispositif de mesure par projection optique
FR2830079B1 (fr) * 2001-09-26 2004-04-30 Holo 3 Procede et dispositif de mesure d'au moins une grandeur geometrique d'une surface optiquement reflechissante
JP3930333B2 (ja) 2002-01-31 2007-06-13 Ｄｏｗａホールディングス株式会社 物品表面の検査システム
JP2005515910A (ja) 2002-01-31 2005-06-02 ブレインテック カナダ インコーポレイテッド シングルカメラ３ｄビジョンガイドロボティクスの方法および装置
US7700561B2 (en) 2002-02-22 2010-04-20 Shire Llc Abuse-resistant amphetamine prodrugs
US7659253B2 (en) 2002-02-22 2010-02-09 Shire Llc Abuse-resistant amphetamine prodrugs
US7223735B2 (en) 2003-05-29 2007-05-29 New River Pharmaceuticals Inc. Abuse resistant lysine amphetamine compounds
KR100483345B1 (ko) * 2002-06-18 2005-04-15 한국과학기술연구원 이중파장 영사식 모아레 기반 형상측정장치 및 레지스트레이션을 이용한 멀티헤드 시스템용 자동 캘리브레이션 방법
WO2004046645A2 (fr) * 2002-11-21 2004-06-03 Solvision Procede et systeme de mesure rapide de hauteur d'un objet 3d
KR20060052699A (ko) * 2003-06-11 2006-05-19 솔비젼 인코포레이티드 감도 및 다이내믹 레인지가 증가된 3ｄ 및 2ｄ 측정장치 및방법
US7433058B2 (en) * 2004-07-12 2008-10-07 Solvision Inc. System and method for simultaneous 3D height measurements on multiple sides of an object
US20060072122A1 (en) * 2004-09-30 2006-04-06 Qingying Hu Method and apparatus for measuring shape of an object
US7551272B2 (en) * 2005-11-09 2009-06-23 Aceris 3D Inspection Inc. Method and an apparatus for simultaneous 2D and 3D optical inspection and acquisition of optical inspection data of an object
US7830528B2 (en) * 2005-12-14 2010-11-09 Koh Young Technology, Inc. 3D image measuring apparatus and method thereof
WO2008036354A1 (fr) * 2006-09-19 2008-03-27 Braintech Canada, Inc. Système et procédé de détermination de la pose d'un objet
US20080240510A1 (en) * 2006-09-30 2008-10-02 Greg Dale Method and system for examining a surface
US20080117438A1 (en) * 2006-11-16 2008-05-22 Solvision Inc. System and method for object inspection using relief determination
US7535560B2 (en) * 2007-02-26 2009-05-19 Aceris 3D Inspection Inc. Method and system for the inspection of integrated circuit devices having leads
KR20100087103A (ko) * 2007-09-16 2010-08-03 마하비전 아이엔씨. 주기적 패턴 조명과 ｔｄｉ를 구비한 이미지 측정 시스템
US8059280B2 (en) 2008-01-31 2011-11-15 Cyberoptics Corporation Method for three-dimensional imaging using multi-phase structured light
CN201974159U (zh) * 2008-04-01 2011-09-14 感知器公司 包括mems反射镜的轮廓传感器
US9170097B2 (en) * 2008-04-01 2015-10-27 Perceptron, Inc. Hybrid system
US8559699B2 (en) 2008-10-10 2013-10-15 Roboticvisiontech Llc Methods and apparatus to facilitate operations in image based systems
JP4715944B2 (ja) * 2009-04-03 2011-07-06 オムロン株式会社 三次元形状計測装置、三次元形状計測方法、および三次元形状計測プログラム
WO2010132794A2 (fr) * 2009-05-15 2010-11-18 University Of Delaware Procédé et appareil pour mesurer le microrelief d'un objet
JP5256251B2 (ja) * 2009-07-03 2013-08-07 コー・ヤング・テクノロジー・インコーポレーテッド 測定対象物の検査方法
US8855403B2 (en) * 2010-04-16 2014-10-07 Koh Young Technology Inc. Method of discriminating between an object region and a ground region and method of measuring three dimensional shape by using the same
KR101340336B1 (ko) 2010-04-29 2013-12-13 주식회사 미르기술 비전검사장치
GB2481459B (en) * 2010-06-25 2017-05-03 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E V Capturing a surface structure of an object surface
JP5683002B2 (ja) * 2011-02-01 2015-03-11 Ｊｕｋｉオートメーションシステムズ株式会社 ３次元測定装置、３次元測定方法及びプログラム
EP2573508B1 (fr) * 2011-03-14 2014-01-29 Panasonic Corporation Procédé et dispositif de détection de la hauteur d'une brasure
US20140198185A1 (en) * 2013-01-17 2014-07-17 Cyberoptics Corporation Multi-camera sensor for three-dimensional imaging of a circuit board
US10126252B2 (en) 2013-04-29 2018-11-13 Cyberoptics Corporation Enhanced illumination control for three-dimensional imaging
CN103673934A (zh) * 2013-12-31 2014-03-26 中国矿业大学 一种基于网格投影的pcb板平整度检测方法
CN104101611A (zh) * 2014-06-06 2014-10-15 华南理工大学 一种类镜面物体表面光学成像装置及其成像方法
CN107923735B (zh) * 2015-08-17 2020-06-16 Qso干涉系统股份公司 用于推导物体表面的形貌的方法和设备
CN107356214A (zh) * 2017-08-23 2017-11-17 苏州岸肯电子科技有限公司 一种玻璃平整度检测装置
US10701259B2 (en) * 2017-09-15 2020-06-30 Quality Vision International Inc. Video measuring system with dual-acting reticle projector for focusing and alignment
KR102632562B1 (ko) * 2018-08-22 2024-02-02 삼성전자주식회사 Si 기반 검사 장치와 검사 방법, 및 그 검사 방법을 포함한 반도체 소자 제조방법
CN112866549B (zh) * 2019-11-12 2022-04-12 Oppo广东移动通信有限公司 图像处理方法和装置、电子设备、计算机可读存储介质
TWI735330B (zh) 2020-09-03 2021-08-01 由田新技股份有限公司 球體高度量測系統及其方法
CN113358030B (zh) * 2021-07-15 2022-09-30 中国科学院长春光学精密机械与物理研究所 色散共焦测量系统及其误差修正方法
CN114111637A (zh) * 2021-11-25 2022-03-01 天津工业大学 一种基于虚拟双目的条纹结构光三维重建方法

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3821558A (en) 1972-08-09 1974-06-28 Fleet Electronics Ltd Determination or monitoring of the distances of surfaces from reference positions
US3943278A (en) 1974-08-22 1976-03-09 Stanford Research Institute Surface deformation gauging system by moire interferometry
DE2501015C2 (de) 1975-01-13 1976-08-19 Siemens Ag Beruehrungsfreies Dickenmessverfahren
US4053234A (en) 1975-02-18 1977-10-11 United Biscuits Limited Thickness measurement
US4192612A (en) 1976-01-09 1980-03-11 Siemens Aktiengesellschaft Device for contact-free thickness measurement
US4051483A (en) 1976-09-03 1977-09-27 Fuji Photo Optical Co., Ltd. System for measuring and recording three dimensional configuration of object
SE412286B (sv) 1978-07-10 1980-02-25 Saab Scania Ab Sett och anordning for fotoelektrisk avmetning av breder eller liknande geometriskt obestemda foremal
DD151902A1 (de) 1980-06-09 1981-11-11 Frank Schumann Verfahren zur bestimmung der dicke von klebstoffschichten auf buchblockruecken
US4525858A (en) 1983-01-03 1985-06-25 General Electric Company Method and apparatus for reconstruction of three-dimensional surfaces from interference fringes
DE3338802A1 (de) 1983-10-26 1985-05-09 Feldmühle AG, 4000 Düsseldorf Vorrichtung und verfahren zum pruefen von materialbahnen
US4657394A (en) * 1984-09-14 1987-04-14 New York Institute Of Technology Apparatus and method for obtaining three dimensional surface contours
EP0214954A3 (fr) 1985-09-11 1989-03-22 RSF-Elektronik Gesellschaft m.b.H. Dispositif pour déterminer sans toucher des mesures selon le procédé de projection d'ombres
JPS62239005A (ja) 1986-04-11 1987-10-19 Fuji Photo Film Co Ltd 表面形状検査装置
US4736108A (en) 1986-07-29 1988-04-05 Santana Engineering Systems Apparatus and method for testing coplanarity of semiconductor components
US4794550A (en) * 1986-10-15 1988-12-27 Eastman Kodak Company Extended-range moire contouring
US5085502A (en) 1987-04-30 1992-02-04 Eastman Kodak Company Method and apparatus for digital morie profilometry calibrated for accurate conversion of phase information into distance measurements in a plurality of directions
US4803371A (en) 1987-09-30 1989-02-07 The Coe Manufacturing Company Optical scanning method and apparatus useful for determining the configuration of an object
DE3803353A1 (de) 1988-02-05 1989-08-17 Truetzschler & Co Vorrichtung zur gewinnung von messgroessen, die der dicke von in der spinnereivorbereitung anfallenden faserverbaenden, z.b. kardenbaendern o. dgl. entsprechen
DE3817559C1 (fr) 1988-05-24 1989-12-07 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
JPH0224502A (ja) 1988-07-12 1990-01-26 Dainippon Screen Mfg Co Ltd 膜厚測定方法
JPH0641851B2 (ja) 1989-04-05 1994-06-01 日本鋼管株式会社 ３次元曲面形状の測定装置
US4959898A (en) 1990-05-22 1990-10-02 Emhart Industries, Inc. Surface mount machine with lead coplanarity verifier
JP2949853B2 (ja) 1990-12-21 1999-09-20 株式会社ニコン 試料の厚さ測定装置
US5133601A (en) 1991-06-12 1992-07-28 Wyko Corporation Rough surface profiler and method
DE4130237A1 (de) 1991-09-11 1993-03-18 Zeiss Carl Fa Verfahren und vorrichtung zur dreidimensionalen optischen vermessung von objektoberflaechen
US5175601A (en) 1991-10-15 1992-12-29 Electro-Optical Information Systems High-speed 3-D surface measurement surface inspection and reverse-CAD system
US5327082A (en) 1992-01-13 1994-07-05 Valmet Automation (Canada) Ltd. On line electromagnetic web thickness measuring apparatus incorporating a servomechanism with optical distance measuring
CA2067400A1 (fr) 1992-04-28 1993-10-29 Robert E. Bredberg Dispositif de mesure d'epaisseur au laser
US5319445A (en) 1992-09-08 1994-06-07 Fitts John M Hidden change distribution grating and use in 3D moire measurement sensors and CMM applications
US5396332A (en) 1993-02-08 1995-03-07 Ciszek; Theodoer F. Apparatus and method for measuring the thickness of a semiconductor wafer
EP0651231B1 (fr) 1993-10-29 1997-06-18 Ferag AG Procédé et dispositif pour mesurer l'épaisseur de produits d'imprimerie, comme des journaux, des revues ou similaires
JP3370418B2 (ja) * 1994-03-18 2003-01-27 株式会社資生堂 ３次元形状測定システム
US5473432A (en) 1994-09-12 1995-12-05 Hewlett-Packard Company Apparatus for measuring the thickness of a moving film utilizing an adjustable numerical aperture lens
WO1998055826A2 (fr) * 1997-06-05 1998-12-10 Electronic Packaging Services, Ltd. Co. Mesure de la planeite d'une surface a l'aide d'une technique des franges moirees et d'un traitement d'image a echelonnement de phase

Also Published As

Publication number Publication date
IL147607A (en) 2006-12-10
USRE42899E1 (en) 2011-11-08
KR20070058652A (ko) 2007-06-08
DE60010462D1 (de) 2004-06-09
HK1047470A1 (en) 2003-02-21
JP2003504634A (ja) 2003-02-04
US7023559B1 (en) 2006-04-04
ATE266188T1 (de) 2004-05-15
EP1192414B1 (fr) 2004-05-06
HK1047470B (zh) 2005-01-14
CN1181313C (zh) 2004-12-22
CA2378867C (fr) 2007-05-29
WO2001006210A1 (fr) 2001-01-25
TW544509B (en) 2003-08-01
CA2378867A1 (fr) 2001-01-25
KR100858521B1 (ko) 2008-09-12
EP1192414A1 (fr) 2002-04-03
DE60010462T2 (de) 2005-04-21
CA2579563A1 (fr) 2001-01-25
KR20020060151A (ko) 2002-07-16
AU6143300A (en) 2001-02-05
KR100815503B1 (ko) 2008-03-20
JP4112858B2 (ja) 2008-07-02
CN1375053A (zh) 2002-10-16
CA2277855A1 (fr) 2001-01-14

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