JP5256251B2 - 測定対象物の検査方法 - Google Patents
測定対象物の検査方法 Download PDFInfo
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- JP5256251B2 JP5256251B2 JP2010151711A JP2010151711A JP5256251B2 JP 5256251 B2 JP5256251 B2 JP 5256251B2 JP 2010151711 A JP2010151711 A JP 2010151711A JP 2010151711 A JP2010151711 A JP 2010151711A JP 5256251 B2 JP5256251 B2 JP 5256251B2
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- 238000000034 method Methods 0.000 title claims abstract description 65
- 238000007689 inspection Methods 0.000 title claims abstract description 33
- 238000005259 measurement Methods 0.000 title abstract description 132
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 230000001678 irradiating effect Effects 0.000 claims description 14
- 230000032258 transport Effects 0.000 claims 3
- 238000005286 illumination Methods 0.000 description 57
- 238000012546 transfer Methods 0.000 description 19
- 238000010586 diagram Methods 0.000 description 12
- 230000002950 deficient Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000000605 extraction Methods 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2531—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object using several gratings, projected with variable angle of incidence on the object, and one detection device
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/50—Depth or shape recovery
- G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Optics & Photonics (AREA)
- Quality & Reliability (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Analysis (AREA)
Description
Vi(x、y)=Bi(x、y)/Ai(x、y)
100 測定ステージ部
200 イメージ撮影部
300 第1照明部
400 第2照明部
500 イメージ獲得部
600 モジュール制御部
700 中央制御部
800 形状テンプレート
810 素子
820 ターゲット素子
900 シャドウテンプレート
910 素子
920 ターゲット素子
1110 第1照明部
1120 第2照明部
1130 カメラ
1140 ステージ
1150 基板
1152 測定対象物
1154 シャドウ領域
1156 ノイズ領域
ROI 検査領域
Claims (5)
- 基板に装着された素子の検査方法において、
前記素子に対応する形状テンプレートを生成する段階と、
光源、前記光源から入射された光を格子パターン光に変換させる格子ユニットおよび前記格子ユニットを移送させる格子移送ユニットを含み、前記格子移送ユニットによる前記格子ユニットの移送により前記基板に前記格子パターン光をN回(前記Nは、2以上の自然数)照射する照明部によって前記格子パターン光を前記N回前記基板に照射してピクセル別高さ情報を獲得する段階と、
前記基板に照射されたN個の前記格子パターン光をカメラで撮影して前記基板のピクセル別視認性情報を獲得する段階と、
前記ピクセル別高さ情報に対応してコントラストマップを生成する段階と、
前記コントラストマップと前記形状テンプレートとを比較する段階と、を含み、
前記コントラストマップは、前記ピクセル別高さ情報に前記ピクセル別視認性情報を乗算した値に定義されることを特徴とする検査方法。 - 前記コントラストマップと前記形状テンプレートとを比較して、前記形状テンプレートに対応する前記素子の大きさ、位置、及び回転情報のうち、少なくとも1つ以上を獲得する段階を更に含むことを特徴とする請求項1に記載の検査方法。
- 前記ピクセル別視認性情報は、前記ピクセル別に撮影されたイメージの明るさ信号において、振幅(Bi(x、y))の平均(Ai(x、y))に対する比として、
Vi(x、y)=Bi(x、y)/Ai(x、y)
と定義されることを特徴とする請求項1に記載の検査方法。 - 前記コントラストマップと前記形状テンプレートとは、前記テンプレートの所定許容値の範囲内で比較されることを特徴とする請求項1に記載の検査方法。
- 前記形状テンプレートと前記コントラストマップとを比較する段階は、
前記形状テンプレート上にピクセル座標により0、1に設定された値と、前記コントラストマップと重なる部分のコントラスト値とを互いに乗算した後、得られた値を互いに合算する段階と、
前記形状テンプレートの位置の順次移動により最大値を示す位置を前記素子が存在する位置と定める段階と、
前記最大値が基準値以上であれば、前記素子が前記形状テンプレートに対応する素子であることを決定する段階と、を含むことを特徴とする請求項1に記載の検査方法。
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2009-0060542 | 2009-07-03 | ||
KR1020090060542A KR101056995B1 (ko) | 2009-07-03 | 2009-07-03 | 3차원 형상 검사방법 |
KR10-2010-0008689 | 2010-01-29 | ||
KR1020100008689A KR101133641B1 (ko) | 2010-01-29 | 2010-01-29 | 3차원 형상 검사방법 |
KR10-2010-0060945 | 2010-06-28 | ||
KR1020100060945A KR101216453B1 (ko) | 2010-06-28 | 2010-06-28 | 측정대상물 검사방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011013220A JP2011013220A (ja) | 2011-01-20 |
JP5256251B2 true JP5256251B2 (ja) | 2013-08-07 |
Family
ID=43384145
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010151711A Active JP5256251B2 (ja) | 2009-07-03 | 2010-07-02 | 測定対象物の検査方法 |
Country Status (5)
Country | Link |
---|---|
US (3) | US8369603B2 (ja) |
JP (1) | JP5256251B2 (ja) |
CN (2) | CN102980533B (ja) |
DE (2) | DE102010030859B4 (ja) |
TW (2) | TWI467128B (ja) |
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2010
- 2010-07-02 DE DE102010030859.5A patent/DE102010030859B4/de active Active
- 2010-07-02 DE DE102010064635.0A patent/DE102010064635B4/de active Active
- 2010-07-02 TW TW102148712A patent/TWI467128B/zh active
- 2010-07-02 JP JP2010151711A patent/JP5256251B2/ja active Active
- 2010-07-02 US US12/829,670 patent/US8369603B2/en active Active
- 2010-07-02 TW TW099121806A patent/TWI432699B/zh active
- 2010-07-05 CN CN201210445858.XA patent/CN102980533B/zh active Active
- 2010-07-05 CN CN201010224622.4A patent/CN101943572B/zh active Active
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Also Published As
Publication number | Publication date |
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US8548224B2 (en) | 2013-10-01 |
US8369603B2 (en) | 2013-02-05 |
TWI432699B (zh) | 2014-04-01 |
DE102010030859B4 (de) | 2019-01-24 |
DE102010064635B4 (de) | 2024-03-14 |
CN102980533B (zh) | 2015-04-01 |
JP2011013220A (ja) | 2011-01-20 |
CN101943572B (zh) | 2014-04-09 |
US8724883B2 (en) | 2014-05-13 |
US20130077849A1 (en) | 2013-03-28 |
TW201113500A (en) | 2011-04-16 |
US20110002529A1 (en) | 2011-01-06 |
CN102980533A (zh) | 2013-03-20 |
CN101943572A (zh) | 2011-01-12 |
DE102010030859A1 (de) | 2011-01-27 |
US20130294679A1 (en) | 2013-11-07 |
TW201418665A (zh) | 2014-05-16 |
TWI467128B (zh) | 2015-01-01 |
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