IL141386A0 - Transport system with integrated transport carrier and directors - Google Patents
Transport system with integrated transport carrier and directorsInfo
- Publication number
- IL141386A0 IL141386A0 IL14138600A IL14138600A IL141386A0 IL 141386 A0 IL141386 A0 IL 141386A0 IL 14138600 A IL14138600 A IL 14138600A IL 14138600 A IL14138600 A IL 14138600A IL 141386 A0 IL141386 A0 IL 141386A0
- Authority
- IL
- Israel
- Prior art keywords
- transport
- carrier
- directors
- director
- integrated
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G19/00—Conveyors comprising an impeller or a series of impellers carried by an endless traction element and arranged to move articles or materials over a supporting surface or underlying material, e.g. endless scraper conveyors
- B65G19/02—Conveyors comprising an impeller or a series of impellers carried by an endless traction element and arranged to move articles or materials over a supporting surface or underlying material, e.g. endless scraper conveyors for articles, e.g. for containers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
- B65G35/06—Mechanical conveyors not otherwise provided for comprising a load-carrier moving along a path, e.g. a closed path, and adapted to be engaged by any one of a series of traction elements spaced along the path
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
- B65G37/02—Flow-sheets for conveyor combinations in warehouses, magazines or workshops
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Conductive Materials (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Attitude Control For Articles On Conveyors (AREA)
- Relays Between Conveyors (AREA)
- Control Of Conveyors (AREA)
- Intermediate Stations On Conveyors (AREA)
- Structure Of Belt Conveyors (AREA)
- Discharge Of Articles From Conveyors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/365,457 US6308818B1 (en) | 1999-08-02 | 1999-08-02 | Transport system with integrated transport carrier and directors |
PCT/US2000/020954 WO2001009016A1 (en) | 1999-08-02 | 2000-08-01 | Transport system with integrated transport carrier and directors |
Publications (1)
Publication Number | Publication Date |
---|---|
IL141386A0 true IL141386A0 (en) | 2002-03-10 |
Family
ID=23438996
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IL14138600A IL141386A0 (en) | 1999-08-02 | 2000-08-01 | Transport system with integrated transport carrier and directors |
Country Status (12)
Country | Link |
---|---|
US (1) | US6308818B1 (ja) |
EP (1) | EP1124745B1 (ja) |
JP (1) | JP3749176B2 (ja) |
KR (1) | KR100443597B1 (ja) |
AT (1) | ATE256620T1 (ja) |
AU (1) | AU6395000A (ja) |
CA (1) | CA2339813A1 (ja) |
DE (1) | DE60007271D1 (ja) |
HK (1) | HK1039104B (ja) |
IL (1) | IL141386A0 (ja) |
TW (1) | TW477772B (ja) |
WO (1) | WO2001009016A1 (ja) |
Families Citing this family (79)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6533101B2 (en) * | 1998-06-24 | 2003-03-18 | Asyst Technologies, Inc. | Integrated transport carrier and conveyor system |
US6223886B1 (en) * | 1998-06-24 | 2001-05-01 | Asyst Technologies, Inc. | Integrated roller transport pod and asynchronous conveyor |
US6308818B1 (en) * | 1999-08-02 | 2001-10-30 | Asyst Technologies, Inc. | Transport system with integrated transport carrier and directors |
US6742978B1 (en) * | 1999-12-07 | 2004-06-01 | Btu International, Inc. | Wafer indexing device |
NL1014170C2 (nl) * | 2000-01-25 | 2001-07-26 | Vanderlande Ind Nederland | Werkwijze en inrichting voor het transporteren van voorwerpen. |
JP3508130B2 (ja) * | 2000-09-21 | 2004-03-22 | 村田機械株式会社 | 搬送システム |
JP2002289671A (ja) * | 2001-03-28 | 2002-10-04 | Toshiba Corp | 半導体製造装置及び半導体装置の製造システム |
DE10135591A1 (de) * | 2001-07-20 | 2003-01-30 | Bosch Gmbh Robert | Staufähiges Kurvenelement für ein Transfersystem |
DE10157161A1 (de) * | 2001-11-22 | 2003-06-12 | Knapp Logistik Automation | Fördereinrichtung zum Fördern von Fördergut auf Paletten oder dergleichen mit Richtungswechsel |
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US6688453B2 (en) * | 2001-12-27 | 2004-02-10 | Texas Instruments Incorporated | Railing for a boat conveyor system |
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FR2836463B1 (fr) * | 2002-02-27 | 2005-09-09 | Teleflex Gallet | Procede de transfert de colis et installation de transport de colis |
US7165927B2 (en) | 2002-06-19 | 2007-01-23 | Brooks Automation, Inc. | Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists |
KR101515775B1 (ko) * | 2002-10-11 | 2015-04-29 | 무라다기카이가부시끼가이샤 | 오버헤드 호이스트를 탑재한 오버헤드 호이스트 수송 차량 |
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DE102005033946B4 (de) * | 2005-07-20 | 2018-06-28 | Bosch Rexroth Aktiengesellschaft | Fördersystem |
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JP2007217078A (ja) * | 2006-02-14 | 2007-08-30 | Asyst Shinko Inc | 方向転換装置 |
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CN101164846B (zh) * | 2007-09-27 | 2012-01-25 | 宁波东港紧固件制造有限公司 | 轨道转盘装置 |
ATE447449T1 (de) * | 2007-10-20 | 2009-11-15 | Trumpf Sachsen Gmbh | Maschinelle anordnung für die blechbearbeitung mit einer blechbearbeitungseinrichtung sowie mit einer transportvorrichtung |
TWI588075B (zh) * | 2009-03-03 | 2017-06-21 | Ats自動模具系統股份有限公司 | 多模態蝸形凸輪輸送機系統 |
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RU2015137152A (ru) | 2013-03-15 | 2017-04-24 | Дзе Проктер Энд Гэмбл Компани | Композиции для личной гигиены |
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US9670002B2 (en) * | 2013-10-28 | 2017-06-06 | Murata Machinery, Ltd. | Conveyor device |
DE102014208022A1 (de) * | 2014-04-29 | 2015-10-29 | Robert Bosch Gmbh | Greifeinrichtung mit beweglichem Druckstück |
DE102014009191A1 (de) | 2014-06-20 | 2015-12-24 | Servus Intralogistics Gmbh | Transportroboter mit veränderbarer Fahrtrichtung |
CN104192519B (zh) * | 2014-09-29 | 2016-01-13 | 四川成焊宝玛焊接装备工程有限公司 | 用于积放式输送的小车转运装置 |
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KR102185264B1 (ko) * | 2019-07-29 | 2020-12-01 | 세메스 주식회사 | 이송 장치 |
CN114258584A (zh) * | 2019-08-14 | 2022-03-29 | 应用材料公司 | 路径切换组件、具有该路径切换组件的腔室和基板处理系统及其方法 |
CN111452014A (zh) * | 2020-04-16 | 2020-07-28 | 佛山职业技术学院 | 一种光伏电站运维通道和光伏电站 |
CN111725119B (zh) * | 2020-07-01 | 2023-01-31 | 湖南艾科威智能装备有限公司 | 一种适用于硅片电池片料盒的万向传输装置 |
KR20220060261A (ko) * | 2020-11-04 | 2022-05-11 | 세메스 주식회사 | 인터페이스 장치 및 이를 구비하는 컨테이너 이송 시스템 |
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CN113697008A (zh) * | 2021-07-28 | 2021-11-26 | 广东嘉腾机器人自动化有限公司 | 工业作业车辆生产方法 |
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US6308818B1 (en) * | 1999-08-02 | 2001-10-30 | Asyst Technologies, Inc. | Transport system with integrated transport carrier and directors |
-
1999
- 1999-08-02 US US09/365,457 patent/US6308818B1/en not_active Expired - Fee Related
-
2000
- 2000-07-31 TW TW089115347A patent/TW477772B/zh not_active IP Right Cessation
- 2000-08-01 AT AT00950923T patent/ATE256620T1/de not_active IP Right Cessation
- 2000-08-01 CA CA002339813A patent/CA2339813A1/en not_active Abandoned
- 2000-08-01 KR KR10-2001-7004220A patent/KR100443597B1/ko not_active IP Right Cessation
- 2000-08-01 JP JP2001514224A patent/JP3749176B2/ja not_active Expired - Fee Related
- 2000-08-01 EP EP00950923A patent/EP1124745B1/en not_active Expired - Lifetime
- 2000-08-01 WO PCT/US2000/020954 patent/WO2001009016A1/en active IP Right Grant
- 2000-08-01 DE DE60007271T patent/DE60007271D1/de not_active Expired - Lifetime
- 2000-08-01 AU AU63950/00A patent/AU6395000A/en not_active Abandoned
- 2000-08-01 IL IL14138600A patent/IL141386A0/xx unknown
-
2002
- 2002-01-11 HK HK02100201.3A patent/HK1039104B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US6308818B1 (en) | 2001-10-30 |
TW477772B (en) | 2002-03-01 |
DE60007271D1 (de) | 2004-01-29 |
EP1124745A1 (en) | 2001-08-22 |
EP1124745A4 (en) | 2002-05-15 |
ATE256620T1 (de) | 2004-01-15 |
JP2003506289A (ja) | 2003-02-18 |
HK1039104A1 (en) | 2002-04-12 |
AU6395000A (en) | 2001-02-19 |
KR100443597B1 (ko) | 2004-08-09 |
CA2339813A1 (en) | 2001-02-08 |
KR20010075558A (ko) | 2001-08-09 |
JP3749176B2 (ja) | 2006-02-22 |
WO2001009016A1 (en) | 2001-02-08 |
EP1124745B1 (en) | 2003-12-17 |
HK1039104B (zh) | 2004-04-16 |
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