IL130889A - Qcm sensor - Google Patents

Qcm sensor

Info

Publication number
IL130889A
IL130889A IL13088998A IL13088998A IL130889A IL 130889 A IL130889 A IL 130889A IL 13088998 A IL13088998 A IL 13088998A IL 13088998 A IL13088998 A IL 13088998A IL 130889 A IL130889 A IL 130889A
Authority
IL
Israel
Prior art keywords
qcm sensor
qcm
sensor
Prior art date
Application number
IL13088998A
Other languages
English (en)
Other versions
IL130889A0 (en
Original Assignee
Meidensha Electric Mfg Co Ltd
Noboru Oyama
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Electric Mfg Co Ltd, Noboru Oyama filed Critical Meidensha Electric Mfg Co Ltd
Publication of IL130889A0 publication Critical patent/IL130889A0/xx
Publication of IL130889A publication Critical patent/IL130889A/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/13—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing having piezoelectric or piezoresistive properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/018—Impedance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G01N2291/0215—Mixtures of three or more gases, e.g. air
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/022—Liquids
    • G01N2291/0224—Mixtures of three or more liquids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/106—Number of transducers one or more transducer arrays

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
IL13088998A 1998-11-02 1998-11-02 Qcm sensor IL130889A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1998/004948 WO2000026636A1 (fr) 1998-11-02 1998-11-02 Capteur qcm

Publications (2)

Publication Number Publication Date
IL130889A0 IL130889A0 (en) 2001-01-28
IL130889A true IL130889A (en) 2003-11-23

Family

ID=14209317

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13088998A IL130889A (en) 1998-11-02 1998-11-02 Qcm sensor

Country Status (7)

Country Link
US (1) US6544478B1 (xx)
EP (1) EP1058109A4 (xx)
CN (1) CN1289900C (xx)
AU (1) AU737757B2 (xx)
CA (1) CA2282703C (xx)
IL (1) IL130889A (xx)
WO (1) WO2000026636A1 (xx)

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JP3933340B2 (ja) * 1999-03-30 2007-06-20 昇 小山 マルチチャンネルｑｃｍセンサデバイス
ATE360815T1 (de) * 2000-08-08 2007-05-15 Akubio Ltd Quartzkristall sensorzelle
US6835552B2 (en) * 2000-12-14 2004-12-28 The Regents Of The University Of California Impedance measurements for detecting pathogens attached to antibodies
US20030022361A1 (en) * 2001-02-22 2003-01-30 Kenneth Houston Smart culture vessel
WO2002099765A1 (en) * 2001-06-01 2002-12-12 Joergensen Poul Richter Resonance circuit
CA2357522A1 (en) * 2001-09-20 2003-03-20 Michael Thompson Enhancement of acoustic wave sensor response by electrode modification
US7052622B2 (en) * 2001-10-17 2006-05-30 Applied Materials, Inc. Method for measuring etch rates during a release process
AT414274B (de) * 2002-11-07 2006-10-15 Avl List Gmbh Verfahren zur bestimmung physikalischer oder chemischer parameter einer dünnen materialschicht
JP4213061B2 (ja) * 2003-03-28 2009-01-21 シチズンホールディングス株式会社 Ｑｃｍセンサーおよびｑｃｍセンサー装置
JP4477364B2 (ja) * 2004-01-13 2010-06-09 日本電波工業株式会社 水晶振動子
US7335336B1 (en) 2004-06-01 2008-02-26 The United States Of America As Represented By The Secretary Of The Army Sensor array using lateral field excited resonators
US7993584B1 (en) 2004-06-01 2011-08-09 The United States Of America As Represented By The Secretary Of The Army Caustic, corrosive or conductive liquid/gas sensor using lateral-field-excited resonator
US7869013B2 (en) 2004-09-15 2011-01-11 Agency For Science, Technology And Research Surface plasmon resonance and quartz crystal microbalance sensor
CN100458425C (zh) * 2005-05-12 2009-02-04 复旦大学 特高频双晶振混频式气体传感单元
JP4530361B2 (ja) * 2005-06-29 2010-08-25 日本碍子株式会社 物質検出素子の製造方法
JP4897408B2 (ja) * 2005-09-15 2012-03-14 日本電波工業株式会社 水晶発振器
JP2011252932A (ja) * 2005-09-15 2011-12-15 Nippon Dempa Kogyo Co Ltd 水晶発振器及び感知装置
JP4707104B2 (ja) * 2005-10-31 2011-06-22 日本碍子株式会社 振動素子の製造方法
US7715743B2 (en) * 2007-02-16 2010-05-11 Xerox Corporation Charger with a probe and controller
JP2009229353A (ja) * 2008-03-25 2009-10-08 Seiko Epson Corp 気体センサデバイス及び気体センサシステム
JP5066551B2 (ja) * 2008-05-20 2012-11-07 日本電波工業株式会社 圧電センサ及び感知装置
JP5130422B2 (ja) * 2008-11-07 2013-01-30 独立行政法人産業技術総合研究所 検出センサ
CN101435836B (zh) * 2008-12-17 2011-01-26 重庆大学 采用文氏桥振荡电路测量液体电导率的频率检测器
JP4792098B2 (ja) * 2009-04-16 2011-10-12 日本電波工業株式会社 感知装置
US8718956B2 (en) 2010-09-29 2014-05-06 Phillip 66 Company High-pressure quartz crystal microbalance
JP6036828B2 (ja) * 2012-08-10 2016-11-30 富士通株式会社 Ｑｃｍセンサとその製造方法
JP6199128B2 (ja) * 2012-12-17 2017-09-20 セイコーインスツル株式会社 Ｑｃｍセンサ
CN104422630A (zh) * 2013-09-10 2015-03-18 河南圣玛斯光电科技有限公司 多通道石英晶体微天平阵列以及基于该阵列的测量系统
CN103471950A (zh) * 2013-09-23 2013-12-25 东南大学 多通道石英晶体微天平检测装置
CN104729945A (zh) * 2013-12-23 2015-06-24 河南天钧实业有限公司 基于多通道石英晶体微天平阵列的测量系统
CN103991837B (zh) * 2014-03-07 2016-10-12 中山大学 一种基于压电基底薄片的微纳米有序通孔阵列金属薄膜传感器的制造方法
CN104535449B (zh) * 2015-01-21 2017-02-22 山东师范大学 监测强腐蚀性气体的非接触电极压电传感器装置与方法
FR3048776B1 (fr) 2016-03-09 2020-02-07 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif de detection d'au moins un compose chimique dans un fluide
JP2018155576A (ja) * 2017-03-17 2018-10-04 太陽誘電株式会社 検出素子及び検出装置
CN107917955B (zh) * 2017-12-07 2019-12-03 江苏大学 新型光辅助石英晶体微天平及其检测方法
EP3547088B1 (en) * 2017-12-27 2021-03-24 Shenzhen Goodix Technology Co., Ltd. Noise detection method and electronic device
CN108169051B (zh) * 2017-12-29 2020-11-03 东南大学 多参数在线检测的石英晶体微天平系统
CN113784911A (zh) * 2019-02-11 2021-12-10 加州理工学院 基于超导腔光机械学的高复用nems阵列读出系统
EP3978916A1 (en) * 2020-09-30 2022-04-06 Nokia Technologies Oy Oscillator apparatus

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5201215A (en) 1991-10-17 1993-04-13 The United States Of America As Represented By The United States Department Of Energy Method for simultaneous measurement of mass loading and fluid property changes using a quartz crystal microbalance
JP3499277B2 (ja) * 1993-12-27 2004-02-23 東京電波株式会社 匂い物質センサと匂い測定装置
US5706840A (en) 1995-03-03 1998-01-13 Sandia Corporation Precision cleaning apparatus and method
US5684276A (en) * 1995-12-12 1997-11-04 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Micromechanical oscillating mass balance
US6033852A (en) * 1996-09-27 2000-03-07 University Of Maine Monolithic piezoelectric sensor (MPS) for sensing chemical, biochemical and physical measurands

Also Published As

Publication number Publication date
EP1058109A4 (en) 2007-08-22
IL130889A0 (en) 2001-01-28
CA2282703A1 (en) 2000-05-02
AU737757B2 (en) 2001-08-30
WO2000026636A1 (fr) 2000-05-11
US6544478B1 (en) 2003-04-08
EP1058109A1 (en) 2000-12-06
AU9651898A (en) 2000-05-22
CA2282703C (en) 2002-10-29
CN1269885A (zh) 2000-10-11
CN1289900C (zh) 2006-12-13

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Legal Events

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MM9K Patent not in force due to non-payment of renewal fees