IL126530A - התקן לבקרת נוזלים - Google Patents

התקן לבקרת נוזלים

Info

Publication number
IL126530A
IL126530A IL12653098A IL12653098A IL126530A IL 126530 A IL126530 A IL 126530A IL 12653098 A IL12653098 A IL 12653098A IL 12653098 A IL12653098 A IL 12653098A IL 126530 A IL126530 A IL 126530A
Authority
IL
Israel
Prior art keywords
fluid control
fluid
blocklike
control apparatus
members
Prior art date
Application number
IL12653098A
Other languages
English (en)
Other versions
IL126530A0 (en
Original Assignee
Tadahiro Ohmi
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tadahiro Ohmi, Fujikin Kk filed Critical Tadahiro Ohmi
Publication of IL126530A0 publication Critical patent/IL126530A0/xx
Publication of IL126530A publication Critical patent/IL126530A/he

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Control Of Fluid Pressure (AREA)
  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
  • Flow Control (AREA)
  • Pipeline Systems (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
IL12653098A 1997-10-13 1998-10-09 התקן לבקרת נוזלים IL126530A (he)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27849597A JP4378553B2 (ja) 1997-10-13 1997-10-13 流体制御装置

Publications (2)

Publication Number Publication Date
IL126530A0 IL126530A0 (en) 1999-08-17
IL126530A true IL126530A (he) 2002-07-25

Family

ID=17598122

Family Applications (1)

Application Number Title Priority Date Filing Date
IL12653098A IL126530A (he) 1997-10-13 1998-10-09 התקן לבקרת נוזלים

Country Status (8)

Country Link
US (1) US6273139B1 (he)
EP (1) EP0908930B8 (he)
JP (1) JP4378553B2 (he)
KR (1) KR100622954B1 (he)
CA (1) CA2249925C (he)
DE (1) DE69840204D1 (he)
IL (1) IL126530A (he)
TW (1) TW360758B (he)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6293310B1 (en) * 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
JP4378553B2 (ja) * 1997-10-13 2009-12-09 忠弘 大見 流体制御装置
US6817381B2 (en) 1999-08-24 2004-11-16 Tokyo Electron Limited Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus
JP2001147722A (ja) * 1999-11-22 2001-05-29 Ace:Kk ガス流量制御装置
JP3482601B2 (ja) * 2000-06-30 2003-12-22 東京エレクトロン株式会社 流体制御装置
JP2002089798A (ja) * 2000-09-11 2002-03-27 Ulvac Japan Ltd 流体制御装置およびこれを用いたガス処理装置
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
US20030079786A1 (en) * 2001-10-30 2003-05-01 Diana Michael J. Modular fluid pressure regulator with bypass
EP1543544A2 (en) * 2002-08-27 2005-06-22 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
JP4092164B2 (ja) * 2002-09-20 2008-05-28 シーケーディ株式会社 ガス供給ユニット
JP2004183771A (ja) * 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
JP2004340199A (ja) * 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
JP4874576B2 (ja) * 2004-08-11 2012-02-15 サーパス工業株式会社 流量制御システム
JP2006083959A (ja) 2004-09-16 2006-03-30 Fujikin Inc センサ付き継手部材
JP4677805B2 (ja) * 2005-03-22 2011-04-27 株式会社フジキン 流体制御装置
JP2007034667A (ja) * 2005-07-27 2007-02-08 Surpass Kogyo Kk 流量コントローラ、これに用いるレギュレータユニット、バルブユニット
JP2007046697A (ja) * 2005-08-10 2007-02-22 Fujikin Inc 継手付き流体制御器
US7410519B1 (en) * 2005-08-16 2008-08-12 Ewald Dieter H Sandwich filter block
JP5085867B2 (ja) 2006-01-24 2012-11-28 株式会社フジキン 圧力センサ装置および圧力センサ内蔵流体制御機器
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
US7854299B2 (en) * 2006-02-17 2010-12-21 Cameron International Corporation Integrated lubrication module for compressors
JP5096696B2 (ja) * 2006-03-02 2012-12-12 サーパス工業株式会社 流体機器ユニット構造
JP2007327542A (ja) * 2006-06-07 2007-12-20 Surpass Kogyo Kk 流体機器ユニット構造
KR101423586B1 (ko) * 2006-08-25 2014-07-25 폴 코포레이션 정화 요소를 포함하는 유체 조립체
WO2008024682A2 (en) * 2006-08-25 2008-02-28 Pall Corporation Purification assemblies, purification units, and methods of assembling purification assemblies
US7841363B1 (en) * 2007-04-03 2010-11-30 Spx Corporation Modular upgradeable pneumatic/hydraulic manifold
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US8499892B2 (en) * 2007-07-13 2013-08-06 Cameron International Corporation Integrated rotary valve
JP4505009B2 (ja) * 2007-12-28 2010-07-14 株式会社堀場エステック 集積タイプのマスフローコントローラ及びガス供給ライン
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
TWI534922B (zh) * 2009-06-10 2016-05-21 威士塔戴爾泰克有限責任公司 極端流量和／或高溫流體輸送基板
CN102549393B (zh) * 2009-10-01 2013-09-11 株式会社堀场Stec 压力或流量测量机构、质量流量控制器以及压力传感器
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
US9696727B2 (en) * 2013-03-08 2017-07-04 Fujikin Incorporated Fluid control apparatus and thermal sensor installation structure with respect to fluid control apparatus
WO2016114266A1 (ja) * 2015-01-16 2016-07-21 株式会社キッツエスシーティー ブロック弁と原料容器用ブロック弁
JP6632804B2 (ja) * 2015-03-18 2020-01-22 株式会社フジキン 継手および流体制御装置
JP7128306B2 (ja) * 2021-01-15 2022-08-30 アイコール・システムズ・インク 液体送達システム
US20220372997A1 (en) * 2021-05-24 2022-11-24 Festo Se & Co. Kg Fluid control system

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US126530A (en) * 1872-05-07 Improvement in printing-telegraphs
US2249925A (en) * 1940-05-15 1941-07-22 Frank J Wittmann Dough molder
US3654960A (en) * 1969-12-31 1972-04-11 Hydro Stack Mfg Corp Modular hydraulic system
US3831951A (en) * 1972-04-26 1974-08-27 Weatherhead Co Face type o-ring seal groove and method of producing same
US4142860A (en) * 1976-06-23 1979-03-06 Mayeaux Donald P Apparatus for producing a calibration sample for analytical instrumentation
JPS5325775A (en) * 1976-08-24 1978-03-09 Miller Fluid Power Corp Module type fluid flow control element
DE2648751C2 (de) * 1976-10-27 1986-04-30 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Vorrichtung für die Zuführung flüssiger oder gasförmiger Substanzen zu einem Verarbeitungsgefäß
US4524807A (en) * 1982-05-21 1985-06-25 Humphrey Products Company Snap-together modular manifold construction
US4930401A (en) * 1988-10-28 1990-06-05 Ross Operating Valve Company Valve system and arrangement for on-line valve replacement
JP2731080B2 (ja) * 1991-05-31 1998-03-25 株式会社本山製作所 ガス制御装置
JP3021798B2 (ja) * 1991-07-09 2000-03-15 エスエムシー株式会社 流体制御機構付マニホールド
US5368062A (en) * 1992-01-29 1994-11-29 Kabushiki Kaisha Toshiba Gas supplying system and gas supplying apparatus
EP0585692A3 (en) * 1992-08-31 1995-02-01 Eaton Corp Modular valve assembly.
JP2875958B2 (ja) * 1993-02-10 1999-03-31 シーケーディ株式会社 開閉弁取付構造
JP2568365B2 (ja) * 1993-02-10 1997-01-08 株式会社東芝 ガス供給装置
JP2698530B2 (ja) * 1993-04-12 1998-01-19 シーケーディ株式会社 電磁弁マニホールド
US5605179A (en) * 1995-03-17 1997-02-25 Insync Systems, Inc. Integrated gas panel
JP3605705B2 (ja) * 1995-07-19 2004-12-22 株式会社フジキン 流体制御器
KR100232112B1 (ko) * 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
US5720317A (en) * 1996-08-21 1998-02-24 Pgi International, Ltd. Low profile flanged manifold valve
US5992463A (en) * 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
JP4022696B2 (ja) * 1996-11-20 2007-12-19 忠弘 大見 遮断開放器
JPH10300000A (ja) * 1997-02-28 1998-11-13 Benkan Corp 集積化ガス制御装置
JP4378553B2 (ja) * 1997-10-13 2009-12-09 忠弘 大見 流体制御装置

Also Published As

Publication number Publication date
TW360758B (en) 1999-06-11
EP0908930B8 (en) 2009-03-25
IL126530A0 (en) 1999-08-17
EP0908930A3 (en) 2002-09-25
CA2249925C (en) 2008-01-15
KR19990037044A (ko) 1999-05-25
KR100622954B1 (ko) 2007-06-07
EP0908930B1 (en) 2008-11-12
EP0908930A2 (en) 1999-04-14
DE69840204D1 (de) 2008-12-24
US6273139B1 (en) 2001-08-14
JP4378553B2 (ja) 2009-12-09
CA2249925A1 (en) 1999-04-13
JPH11118054A (ja) 1999-04-30

Similar Documents

Publication Publication Date Title
US6273139B1 (en) Fluid control apparatus
US6035893A (en) Shutoff-opening devices and fluid control apparatus comprising such devices
US6116283A (en) Fluid control device
KR101163851B1 (ko) 유체 제어 장치
JP5150628B2 (ja) 流体制御装置
US6868867B2 (en) Fluid control apparatus
EP0806573B1 (en) Fluid control device
US6615871B2 (en) Fluid control apparatus
US6116282A (en) Fluid control device
KR101230747B1 (ko) 유체 제어 장치 및 그 조립 방법
US20060048830A1 (en) Fluid control device
KR20080002914A (ko) 유체 제어 장치
JP2922453B2 (ja) ガス供給集積ユニット
EP1001456B1 (en) Method of fabricating a coupling member for use in fluid flow control apparatus
JP2005044278A (ja) 圧力制御装置

Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
KB Patent renewed
KB Patent renewed
KB Patent renewed
KB Patent renewed
EXP Patent expired