IL121664A - Pressure detector - Google Patents

Pressure detector

Info

Publication number
IL121664A
IL121664A IL12166497A IL12166497A IL121664A IL 121664 A IL121664 A IL 121664A IL 12166497 A IL12166497 A IL 12166497A IL 12166497 A IL12166497 A IL 12166497A IL 121664 A IL121664 A IL 121664A
Authority
IL
Israel
Prior art keywords
diaphragm
passive
base
state film
pressure detector
Prior art date
Application number
IL12166497A
Other languages
English (en)
Hebrew (he)
Other versions
IL121664A0 (en
Original Assignee
Tadahiro Ohmi Miyagi And Fujik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tadahiro Ohmi Miyagi And Fujik filed Critical Tadahiro Ohmi Miyagi And Fujik
Priority to IL13748797A priority Critical patent/IL137487A/xx
Publication of IL121664A0 publication Critical patent/IL121664A0/xx
Priority to IL13748700A priority patent/IL137487A0/xx
Publication of IL121664A publication Critical patent/IL121664A/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061Electrical connection means
    • G01L19/0084Electrical connection means to the outside of the housing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627Protection against aggressive medium in general
    • G01L19/0645Protection against aggressive medium in general using isolation membranes, specially adapted for protection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14Housings
    • G01L19/142Multiple part housings
    • G01L19/143Two part housings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
IL12166497A 1996-09-10 1997-08-31 Pressure detector IL121664A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IL13748797A IL137487A (en) 1996-09-10 1997-08-31 Pressure detector
IL13748700A IL137487A0 (en) 1996-09-10 2000-07-25 Pressure detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23870696A JP3403294B2 (ja) 1996-09-10 1996-09-10 圧力検出器

Publications (2)

Publication Number Publication Date
IL121664A0 IL121664A0 (en) 1998-02-08
IL121664A true IL121664A (en) 2002-11-10

Family

ID=17034078

Family Applications (1)

Application Number Title Priority Date Filing Date
IL12166497A IL121664A (en) 1996-09-10 1997-08-31 Pressure detector

Country Status (9)

Country Link
US (1) US6116092A (ja)
EP (1) EP0828147B1 (ja)
JP (1) JP3403294B2 (ja)
KR (1) KR100258678B1 (ja)
CA (1) CA2215083C (ja)
DE (1) DE69707798T2 (ja)
IL (1) IL121664A (ja)
SG (1) SG53053A1 (ja)
TW (1) TW342445B (ja)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3494594B2 (ja) * 1999-08-05 2004-02-09 忠弘 大見 圧力検出器の取付け構造
JP2002071491A (ja) * 2000-08-25 2002-03-08 Denso Corp 圧力センサ
US6684709B2 (en) * 2001-10-29 2004-02-03 Dwight N. Johnson Pressure transducer with captured non compressible liquid volume defining neutral condition
US7981561B2 (en) 2005-06-15 2011-07-19 Ati Properties, Inc. Interconnects for solid oxide fuel cells and ferritic stainless steels adapted for use with solid oxide fuel cells
US8158057B2 (en) 2005-06-15 2012-04-17 Ati Properties, Inc. Interconnects for solid oxide fuel cells and ferritic stainless steels adapted for use with solid oxide fuel cells
US7842434B2 (en) 2005-06-15 2010-11-30 Ati Properties, Inc. Interconnects for solid oxide fuel cells and ferritic stainless steels adapted for use with solid oxide fuel cells
KR20040024324A (ko) * 2002-09-13 2004-03-20 주식회사 케이이씨 압력센서 패키지
JP4085012B2 (ja) * 2003-02-13 2008-04-30 忠弘 大見 真空排気系用バルブ
JP3863505B2 (ja) 2003-06-20 2006-12-27 忠弘 大見 圧力センサ及び圧力制御装置並びに圧力式流量制御装置の自動零点補正装置
US8518234B2 (en) * 2003-09-03 2013-08-27 Ati Properties, Inc. Oxidation resistant ferritic stainless steels
JP2004045424A (ja) * 2003-09-22 2004-02-12 Tadahiro Omi 圧力検出器の取付け構造
JP2005241279A (ja) * 2004-02-24 2005-09-08 Fujikin Inc 耐食金属製流体用センサ及びこれを用いた流体供給機器
DE102004052950A1 (de) * 2004-10-29 2006-05-04 Endress + Hauser Gmbh + Co. Kg Druckaufnehmer mit hydraulischer Druckübertragung
DE102005020569B4 (de) * 2005-04-30 2010-08-05 Aesculap Ag Implantierbare Vorrichtung zur Erfassung von intrakorporalen Drücken
US20080202235A1 (en) * 2005-07-20 2008-08-28 The Timken Company Sensor Assembly
JP5616591B2 (ja) 2008-06-20 2014-10-29 株式会社日立国際電気 半導体装置の製造方法及び基板処理装置
KR101151343B1 (ko) 2010-08-11 2012-06-08 한국생산기술연구원 압력 센서
US8371176B2 (en) * 2011-01-06 2013-02-12 Honeywell International Inc. Media isolated pressure sensor
DE102011102837A1 (de) 2011-05-30 2012-12-06 Epcos Ag Drucksensor und Verfahren zur Herstellung eines Drucksensors
JP5833936B2 (ja) * 2012-01-17 2015-12-16 株式会社不二工機 圧力センサ
US8516897B1 (en) 2012-02-21 2013-08-27 Honeywell International Inc. Pressure sensor
DE102012210752A1 (de) * 2012-06-25 2014-01-23 Robert Bosch Gmbh Druckerfassungsmodul sowie Drucksensorvorrichtung mit einem solchen Druckerfassungsmodul
JP6115935B2 (ja) * 2013-01-25 2017-04-19 セイコーインスツル株式会社 二相ステンレス鋼からなる時効熱処理加工材とそれを用いたダイヤフラムと圧力センサとダイヤフラムバルブ及び二相ステンレス鋼の製造方法
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6327633B2 (ja) * 2013-09-19 2018-05-23 セイコーインスツル株式会社 二相ステンレス鋼からなるダイヤフラム
US9574961B2 (en) * 2014-04-09 2017-02-21 Continental Automotive Systems, Inc. Humidity resistant sensors and methods of making same
US9915577B2 (en) * 2014-12-02 2018-03-13 Sensata Technologies, Inc. Case isolated oil filled MEMS pressure sensor
JP6449726B2 (ja) * 2015-06-17 2019-01-09 日本特殊陶業株式会社 圧力センサ
JP6834405B2 (ja) * 2016-11-25 2021-02-24 日本電産トーソク株式会社 油圧センサ取付構造
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
DE102017212422A1 (de) * 2017-07-20 2019-01-24 Robert Bosch Gmbh Drucksensoranordnung und Verfahren zu deren Herstellung
WO2020075600A1 (ja) 2018-10-09 2020-04-16 株式会社フジキン 圧力センサ
US11460363B2 (en) * 2019-03-29 2022-10-04 Honeywell International Inc. Pressure sensors and methods of manufacturing a pressure sensor
JP2020197469A (ja) * 2019-06-04 2020-12-10 アズビル株式会社 封入液の封止装置
DE102020214796A1 (de) 2020-11-25 2022-05-25 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zum Herstellen eines Sensors sowie Sensor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5543819A (en) * 1978-09-22 1980-03-27 Hitachi Ltd Pressure detecting equipment
US4950499A (en) * 1987-01-27 1990-08-21 The Foxboro Company Method of making a compliant fluid-impermeable element
DE68919471T2 (de) * 1988-07-26 1995-04-06 Hitachi Construction Machinery Drucksensor.
KR930011091B1 (ko) * 1990-06-08 1993-11-20 미쯔비시 덴끼 가부시끼가이샤 압력 센서
US5243222A (en) * 1991-04-05 1993-09-07 International Business Machines Corporation Copper alloy metallurgies for VLSI interconnection structures
US5230248A (en) * 1991-07-12 1993-07-27 Rosemount Inc. Corrosion resistant isolator
US5569334A (en) * 1992-12-08 1996-10-29 Hitachi Metals, Ltd. Stainless steel member for semiconductor fabrication equipment and surface treatment method therefor
JPH0719981A (ja) * 1993-06-01 1995-01-20 Nippondenso Co Ltd 高温用圧力センサ
DE4435909C2 (de) * 1993-10-08 2000-06-15 Hitachi Ltd Druckmeßvorrichtung mit einer Membran
JP2987754B2 (ja) * 1996-01-17 1999-12-06 岩谷産業株式会社 高純度ガスの配管路での不動態化処理方法

Also Published As

Publication number Publication date
EP0828147A3 (en) 1998-09-23
KR19980024431A (ko) 1998-07-06
JPH1082707A (ja) 1998-03-31
CA2215083C (en) 2001-10-16
DE69707798T2 (de) 2002-05-23
SG53053A1 (en) 1998-09-28
DE69707798D1 (de) 2001-12-06
IL121664A0 (en) 1998-02-08
TW342445B (en) 1998-10-11
US6116092A (en) 2000-09-12
EP0828147B1 (en) 2001-10-31
JP3403294B2 (ja) 2003-05-06
CA2215083A1 (en) 1998-03-10
KR100258678B1 (ko) 2000-06-15
EP0828147A2 (en) 1998-03-11

Similar Documents

Publication Publication Date Title
US6116092A (en) Fluid pressure detector using a diaphragm
US5665921A (en) Gas tight pressure sensor sealed with flexible metallic adaptor and having ceramic sensor element
US5869766A (en) Non-contaminating pressure transducer module
JP3494594B2 (ja) 圧力検出器の取付け構造
JPS641733B2 (ja)
US4321578A (en) Pressure transducer
EP1311818A1 (en) Sensor usable in ultra pure and highly corrosive environments
JP7157477B2 (ja) 圧力センサ
JP2858882B2 (ja) 感圧要素
USRE38557E1 (en) Non-contaminating pressure transducer module
JPH02501593A (ja) フローティングダイヤフラム装置
JP3370593B2 (ja) 圧力検出器の取付け構造
EP0962753A1 (en) Differential pressure detecting apparatus
JP3314349B2 (ja) 圧力伝送器
KR20020033106A (ko) 직통로를 구비한 압력계
JP3571149B2 (ja) 圧力センサ
JP3962677B2 (ja) 圧力センサ
JPH07128170A (ja) 差圧検出装置
JPH04370726A (ja) 半導体圧力センサ
JPH04194718A (ja) 差圧測定装置
JPH0618346A (ja) 差圧測定装置
JPS60238732A (ja) 差圧発信器
JPH06307961A (ja) 差圧測定装置
JPH0592673U (ja) 差圧・圧力発信器
JPH07113711A (ja) 差圧測定装置

Legal Events

Date Code Title Description
FF Patent granted
KB Patent renewed
KB Patent renewed
KB Patent renewed
MM9K Patent not in force due to non-payment of renewal fees