IL110813A - Method and system for depositing copper on a substrate - Google Patents

Method and system for depositing copper on a substrate

Info

Publication number
IL110813A
IL110813A IL110813A IL11081394A IL110813A IL 110813 A IL110813 A IL 110813A IL 110813 A IL110813 A IL 110813A IL 11081394 A IL11081394 A IL 11081394A IL 110813 A IL110813 A IL 110813A
Authority
IL
Israel
Prior art keywords
hydroxide
acid
salt
solution
activator
Prior art date
Application number
IL110813A
Other languages
English (en)
Hebrew (he)
Other versions
IL110813A0 (en
Original Assignee
Lilly Ind Usa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lilly Ind Usa filed Critical Lilly Ind Usa
Publication of IL110813A0 publication Critical patent/IL110813A0/xx
Publication of IL110813A publication Critical patent/IL110813A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C23C18/38—Coating with copper
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemically Coating (AREA)
  • Catalysts (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Medicinal Preparation (AREA)
  • Chemical Vapour Deposition (AREA)
IL110813A 1993-11-22 1994-08-29 Method and system for depositing copper on a substrate IL110813A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/153,548 US5419926A (en) 1993-11-22 1993-11-22 Ammonia-free deposition of copper by disproportionation

Publications (2)

Publication Number Publication Date
IL110813A0 IL110813A0 (en) 1994-11-11
IL110813A true IL110813A (en) 1998-06-15

Family

ID=22547667

Family Applications (1)

Application Number Title Priority Date Filing Date
IL110813A IL110813A (en) 1993-11-22 1994-08-29 Method and system for depositing copper on a substrate

Country Status (32)

Country Link
US (1) US5419926A (bg)
EP (1) EP0730500B1 (bg)
JP (1) JP3372256B2 (bg)
KR (1) KR100330632B1 (bg)
CN (1) CN1082842C (bg)
AT (1) ATE201337T1 (bg)
AU (1) AU676949B2 (bg)
BG (1) BG100606A (bg)
BR (1) BR9408092A (bg)
CA (1) CA2175909C (bg)
CZ (1) CZ289089B6 (bg)
DE (1) DE69427307T2 (bg)
DK (1) DK0730500T3 (bg)
ES (1) ES2158904T3 (bg)
FI (1) FI104270B (bg)
GR (1) GR3036329T3 (bg)
HU (1) HU216336B (bg)
IL (1) IL110813A (bg)
MY (1) MY114660A (bg)
NO (1) NO962085L (bg)
NZ (1) NZ274723A (bg)
PH (1) PH31318A (bg)
PL (1) PL314589A1 (bg)
PT (1) PT730500E (bg)
RO (1) RO113871B1 (bg)
RU (1) RU2118568C1 (bg)
SA (1) SA94150179A (bg)
SK (1) SK283024B6 (bg)
TW (1) TW342415B (bg)
UA (1) UA44259C2 (bg)
WO (1) WO1995014538A1 (bg)
ZA (1) ZA946707B (bg)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69735999T2 (de) 1997-04-07 2007-05-03 Okuno Chemical Industries Co., Ltd. Verfahren zur elektrobeschichtung eines nichtleitenden geformten kunststoffgegenstands
US6017580A (en) 1998-08-28 2000-01-25 Lilly Industries, (Usa), Inc. Silver film incorporating protective insoluble metallic salt precipitate
MY128333A (en) * 1998-09-14 2007-01-31 Ibiden Co Ltd Printed wiring board and its manufacturing method
EP1020543A1 (en) * 1999-01-15 2000-07-19 Interuniversitair Micro-Elektronica Centrum Vzw Deposition of copper on an activated surface of a substrate
JP3444276B2 (ja) * 2000-06-19 2003-09-08 株式会社村田製作所 無電解銅めっき浴、無電解銅めっき方法および電子部品
US6979478B1 (en) 2002-08-01 2005-12-27 Hilemn, Llc Paint for silver film protection and method
TW200813255A (en) * 2006-07-07 2008-03-16 Rohm & Haas Elect Mat Environmentally friendly electroless copper compositions
TWI347373B (en) * 2006-07-07 2011-08-21 Rohm & Haas Elect Mat Formaldehyde free electroless copper compositions
TWI348499B (en) * 2006-07-07 2011-09-11 Rohm & Haas Elect Mat Electroless copper and redox couples
TWI347982B (en) * 2006-07-07 2011-09-01 Rohm & Haas Elect Mat Improved electroless copper compositions
JP4687599B2 (ja) * 2006-07-26 2011-05-25 住友金属鉱山株式会社 銅微粉とその製造方法及び導電性ペースト
ES2402317B1 (es) * 2011-09-26 2013-12-26 Abengoa Solar New Technologies S.A. Procedimiento de trabajo de un sistema de espejado parcial de tubos de vidrio y dicho sistema.
US10036097B2 (en) 2012-12-21 2018-07-31 Okuno Chemical Industries Co., Ltd. Conductive coating film forming bath
KR101799347B1 (ko) 2014-01-27 2017-11-20 오꾸노 케미칼 인더스트리즈 컴파니,리미티드 도전성 피막 형성 욕
CN109797387B (zh) * 2019-01-24 2020-11-06 山东科技大学 金属表面纳米铜\微合金层自润滑耐磨蚀复合改性方法
CN110102778B (zh) * 2019-06-14 2021-11-02 珠海银波科技发展有限公司 一种低温烧结高结晶度银粉的制备方法

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2977244A (en) * 1958-02-01 1961-03-28 Pilkington Brothers Ltd Method of depositing metallic copper
US2967112A (en) * 1958-03-11 1961-01-03 Pilkington Brothers Ltd Method and apparatus for applying metal-depositing solutions
US3033703A (en) * 1958-12-08 1962-05-08 Photocircuits Corp Electroless plating of copper
US3093509A (en) * 1959-09-28 1963-06-11 Wein Samuel Process for making copper films
US3257215A (en) * 1963-06-18 1966-06-21 Day Company Electroless copper plating
US3403035A (en) * 1964-06-24 1968-09-24 Process Res Company Process for stabilizing autocatalytic metal plating solutions
US3962494A (en) * 1971-07-29 1976-06-08 Photocircuits Division Of Kollmorgan Corporation Sensitized substrates for chemical metallization
BE795373A (fr) * 1972-07-13 1973-08-13 London Laboratories Procede et produit pour deposer de l'argent metallique sans apport de courant electrique exterieur
US3963842A (en) * 1974-06-20 1976-06-15 London Laboratories Limited Co. Deposition of copper
US3983266A (en) * 1974-10-09 1976-09-28 Peacock Laboratories, Inc. Method for applying metallic silver to a substrate
US4315055A (en) * 1976-12-29 1982-02-09 Ppg Industries, Inc. Direct electroless deposition of cuprous oxide films
US4192686A (en) * 1977-10-11 1980-03-11 London Laboratories Limited Co. Compositions and method for inhibiting formation of explosive compounds and conditions in silvering concentrates for electroless deposition of silver
US4220678A (en) * 1978-08-17 1980-09-02 Nathan Feldstein Dispersions for activating non-conductors for electroless plating
US4301196A (en) * 1978-09-13 1981-11-17 Kollmorgen Technologies Corp. Electroless copper deposition process having faster plating rates
US4450191A (en) * 1982-09-02 1984-05-22 Omi International Corporation Ammonium ions used as electroless copper plating rate controller
US4563217A (en) * 1983-07-25 1986-01-07 Hitachi, Ltd. Electroless copper plating solution
JPS60104246A (ja) * 1983-11-11 1985-06-08 C Uyemura & Co Ltd 化学銅めつき浴中のホルムアルデヒドの分析方法
US4552787A (en) * 1984-02-29 1985-11-12 International Business Machines Corporation Deposition of a metal from an electroless plating composition
US4525390A (en) * 1984-03-09 1985-06-25 International Business Machines Corporation Deposition of copper from electroless plating compositions
US4581256A (en) * 1984-11-19 1986-04-08 Chemline Industries Electroless plating composition and method of use
US4617205A (en) * 1984-12-21 1986-10-14 Omi International Corporation Formaldehyde-free autocatalytic electroless copper plating
US4814009A (en) * 1986-11-14 1989-03-21 Nippondenso Co., Ltd. Electroless copper plating solution
JPS63134639A (ja) * 1986-11-22 1988-06-07 Haikawa Kk 金属銅の無電解析出用廃液の処理方法
US4737188A (en) * 1987-05-18 1988-04-12 London Laboratories Limited Reducing agent and method for the electroless deposition of silver
JPH0379100A (ja) * 1989-08-22 1991-04-04 Matsushita Electric Ind Co Ltd 光透過ペーストおよびそれを用いた金属銅析出方法
US5075134A (en) * 1990-01-11 1991-12-24 Lilly Industrial Coatings, Inc. Mirrorback coating
US5094881A (en) * 1990-01-11 1992-03-10 Lilly Industrial Coatings, Inc. Mirrorback coating

Also Published As

Publication number Publication date
FI104270B1 (fi) 1999-12-15
SK283024B6 (sk) 2003-02-04
CN1142204A (zh) 1997-02-05
RO113871B1 (ro) 1998-11-30
NO962085D0 (no) 1996-05-22
CZ148296A3 (en) 1997-12-17
PT730500E (pt) 2001-08-30
AU7926994A (en) 1995-06-13
HU216336B (hu) 1999-06-28
CA2175909A1 (en) 1995-06-01
NZ274723A (en) 1997-08-22
US5419926A (en) 1995-05-30
MY114660A (en) 2002-12-31
TW342415B (en) 1998-10-11
ZA946707B (en) 1995-04-03
FI962133A (fi) 1996-05-21
EP0730500B1 (en) 2001-05-23
JPH09509219A (ja) 1997-09-16
EP0730500A1 (en) 1996-09-11
AU676949B2 (en) 1997-03-27
EP0730500A4 (en) 1997-01-29
HUT76864A (en) 1997-12-29
RU2118568C1 (ru) 1998-09-10
KR960705638A (ko) 1996-11-08
PH31318A (en) 1998-07-06
WO1995014538A1 (en) 1995-06-01
SK64396A3 (en) 1997-01-08
FI962133A0 (fi) 1996-05-21
IL110813A0 (en) 1994-11-11
KR100330632B1 (ko) 2002-08-19
CA2175909C (en) 2006-01-03
FI104270B (fi) 1999-12-15
GR3036329T3 (en) 2001-11-30
CN1082842C (zh) 2002-04-17
BG100606A (bg) 1996-11-29
BR9408092A (pt) 1997-08-12
ES2158904T3 (es) 2001-09-16
JP3372256B2 (ja) 2003-01-27
DE69427307D1 (de) 2001-06-28
ATE201337T1 (de) 2001-06-15
HU9601385D0 (en) 1996-07-29
DK0730500T3 (da) 2001-07-02
PL314589A1 (en) 1996-09-16
DE69427307T2 (de) 2001-10-11
SA94150179A (ar) 2005-12-03
NO962085L (no) 1996-05-22
UA44259C2 (uk) 2002-02-15
CZ289089B6 (cs) 2001-10-17

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Legal Events

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KB Patent renewed
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MM9K Patent not in force due to non-payment of renewal fees