IL107971A - Microwave monolithic integrated circuit testing - Google Patents

Microwave monolithic integrated circuit testing

Info

Publication number
IL107971A
IL107971A IL10797193A IL10797193A IL107971A IL 107971 A IL107971 A IL 107971A IL 10797193 A IL10797193 A IL 10797193A IL 10797193 A IL10797193 A IL 10797193A IL 107971 A IL107971 A IL 107971A
Authority
IL
Israel
Prior art keywords
fabricating
transistors
monolithic integrated
test
microwave monolithic
Prior art date
Application number
IL10797193A
Other languages
English (en)
Other versions
IL107971A0 (en
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of IL107971A0 publication Critical patent/IL107971A0/xx
Publication of IL107971A publication Critical patent/IL107971A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/20—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by the properties tested or measured, e.g. structural or electrical properties
    • H10P74/207—Electrical properties, e.g. testing or measuring of resistance, deep levels or capacitance-voltage characteristics

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
IL10797193A 1992-12-14 1993-12-09 Microwave monolithic integrated circuit testing IL107971A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/993,767 US5457399A (en) 1992-12-14 1992-12-14 Microwave monolithic integrated circuit fabrication, test method and test probes

Publications (2)

Publication Number Publication Date
IL107971A0 IL107971A0 (en) 1994-07-31
IL107971A true IL107971A (en) 1996-09-12

Family

ID=25539913

Family Applications (1)

Application Number Title Priority Date Filing Date
IL10797193A IL107971A (en) 1992-12-14 1993-12-09 Microwave monolithic integrated circuit testing

Country Status (6)

Country Link
US (1) US5457399A (ja)
EP (1) EP0605812A1 (ja)
JP (2) JPH06244263A (ja)
AU (1) AU664502B2 (ja)
CA (1) CA2111187A1 (ja)
IL (1) IL107971A (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2898493B2 (ja) * 1992-11-26 1999-06-02 三菱電機株式会社 ミリ波またはマイクロ波ｉｃのレイアウト設計方法及びレイアウト設計装置
JP4278202B2 (ja) 1998-03-27 2009-06-10 株式会社ルネサステクノロジ 半導体装置の設計方法、半導体装置及び記録媒体
US6956448B1 (en) 2002-12-17 2005-10-18 Itt Manufacturing Enterprises, Inc. Electromagnetic energy probe with integral impedance matching
WO2005093437A1 (ja) * 2004-03-26 2005-10-06 Nec Corporation 電気特性測定方法及び電気特性測定装置
US7202673B1 (en) 2006-07-27 2007-04-10 Raytheon Company Tuned MMIC probe pads
US8610439B2 (en) * 2011-04-14 2013-12-17 Apple Inc. Radio-frequency test probes with integrated matching circuitry for testing transceiver circuitry
JP5782824B2 (ja) * 2011-05-18 2015-09-24 三菱電機株式会社 高周波特性測定装置
FR2978557A1 (fr) 2011-07-26 2013-02-01 St Microelectronics Sa Structure de test de transistor
US10114040B1 (en) 2013-12-20 2018-10-30 The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration High/low temperature contactless radio frequency probes
DE202014002841U1 (de) * 2014-04-01 2014-06-25 Rosenberger Hochfrequenztechnik Gmbh & Co. Kg Kontaktieranordnung, insbesondere HF-Messspitze
CN113433348A (zh) * 2021-06-03 2021-09-24 中北大学 一种用于微波测试的探针
CN114264891B (zh) * 2021-12-24 2023-08-08 电子科技大学 一种高功率微波效应实验测试方法及自动化测试系统

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS579219B2 (ja) * 1973-03-24 1982-02-20
JPS5793542A (en) * 1980-12-03 1982-06-10 Hitachi Ltd Semiconductor integrated circuit device
EP0128986B1 (en) * 1982-12-23 1991-02-27 Sumitomo Electric Industries Limited Monolithic microwave integrated circuit and method for selecting it
JPS62190750A (ja) * 1986-02-17 1987-08-20 Nec Corp 半導体装置
JPS6341041A (ja) * 1986-08-06 1988-02-22 Mitsubishi Electric Corp 半導体装置
JPH0812929B2 (ja) * 1987-03-11 1996-02-07 富士通株式会社 マイクロ波集積回路の製造方法
US4894612A (en) * 1987-08-13 1990-01-16 Hypres, Incorporated Soft probe for providing high speed on-wafer connections to a circuit
US4983910A (en) * 1988-05-20 1991-01-08 Stanford University Millimeter-wave active probe
CA1278106C (en) * 1988-11-02 1990-12-18 Gordon Glen Rabjohn Tunable microwave wafer probe
JP2675411B2 (ja) * 1989-02-16 1997-11-12 三洋電機株式会社 半導体集積回路の製造方法
JPH03196540A (ja) * 1989-12-25 1991-08-28 Mitsubishi Electric Corp マイクロ波ウエハプローブ
JP3128820B2 (ja) * 1990-11-20 2001-01-29 日本電気株式会社 半導体装置の製造方法
JPH04299548A (ja) * 1991-03-28 1992-10-22 Nec Corp 半導体測定装置
JPH04342152A (ja) * 1991-05-17 1992-11-27 Nec Corp 半導体測定装置
EP0522460A3 (en) * 1991-07-09 1993-03-24 Sumitomo Electric Industries, Ltd. Semiconductor device testing apparatus
JPH0521544A (ja) * 1991-07-12 1993-01-29 Sumitomo Electric Ind Ltd バンプ付き半導体素子の測定方法および測定装置

Also Published As

Publication number Publication date
AU664502B2 (en) 1995-11-16
CA2111187A1 (en) 1994-06-15
IL107971A0 (en) 1994-07-31
AU5233093A (en) 1994-06-23
JPH06244263A (ja) 1994-09-02
JPH10248U (ja) 1998-10-13
US5457399A (en) 1995-10-10
EP0605812A1 (en) 1994-07-13

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Legal Events

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FF Patent granted