IL106252A - Apparatus and method for handling articles - Google Patents

Apparatus and method for handling articles

Info

Publication number
IL106252A
IL106252A IL106252A IL10625293A IL106252A IL 106252 A IL106252 A IL 106252A IL 106252 A IL106252 A IL 106252A IL 10625293 A IL10625293 A IL 10625293A IL 106252 A IL106252 A IL 106252A
Authority
IL
Israel
Prior art keywords
orifice
article
fluid
working surface
outlet
Prior art date
Application number
IL106252A
Other languages
English (en)
Other versions
IL106252A0 (en
Original Assignee
Minnesota Mining & Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/078,380 external-priority patent/US5788425A/en
Application filed by Minnesota Mining & Mfg filed Critical Minnesota Mining & Mfg
Publication of IL106252A0 publication Critical patent/IL106252A0/xx
Publication of IL106252A publication Critical patent/IL106252A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B15/00—Driving, starting or stopping record carriers of filamentary or web form; Driving both such record carriers and heads; Guiding such record carriers or containers therefor; Control thereof; Control of operating function
    • G11B15/60—Guiding record carrier
    • G11B15/605—Guiding record carrier without displacing the guiding means
    • G11B15/607—Pneumatic guiding
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B17/00—Guiding record carriers not specifically of filamentary or web form, or of supports therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Advancing Webs (AREA)
  • Manipulator (AREA)
IL106252A 1992-07-15 1993-07-06 Apparatus and method for handling articles IL106252A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US91476592A 1992-07-15 1992-07-15
US91477592A 1992-07-15 1992-07-15
US08/078,380 US5788425A (en) 1992-07-15 1993-06-22 Flexible system for handling articles

Publications (2)

Publication Number Publication Date
IL106252A0 IL106252A0 (en) 1993-11-15
IL106252A true IL106252A (en) 1998-02-08

Family

ID=27373272

Family Applications (1)

Application Number Title Priority Date Filing Date
IL106252A IL106252A (en) 1992-07-15 1993-07-06 Apparatus and method for handling articles

Country Status (7)

Country Link
EP (1) EP0650456B1 (fr)
JP (1) JPH08503680A (fr)
AU (1) AU4654593A (fr)
CA (1) CA2137921A1 (fr)
DE (1) DE69306581T2 (fr)
IL (1) IL106252A (fr)
WO (1) WO1994002396A1 (fr)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5839722A (en) * 1996-11-26 1998-11-24 Xerox Corporation Paper handling system having embedded control structures
JP4510241B2 (ja) * 2000-06-30 2010-07-21 不二越機械工業株式会社 ウェーハの収納装置
DE10133623A1 (de) * 2001-07-13 2003-01-30 Klaus Nendel Vorrichtung zum Führen von kleinen Stückgütern, grobkörnigem Schüttgut geringer Dichte und/oder Flachformgut
ES2396037T3 (es) 2008-06-19 2013-02-18 Rena Gmbh Procedimiento y dispositivo para transportar objetos
JP5239564B2 (ja) * 2008-07-04 2013-07-17 セイコーエプソン株式会社 チャック装置および吸引保持ハンド
JP5380980B2 (ja) * 2008-09-29 2014-01-08 セイコーエプソン株式会社 ワーク移動テーブルおよびこれを備えた液滴吐出装置
DE102009029945A1 (de) 2009-06-19 2010-12-23 Rena Gmbh Prozessmodul zur Inline-Behandlung von Substraten
DE102009047085A1 (de) 2009-11-24 2011-06-01 J. Schmalz Gmbh Druckluftbetriebener Unterdruckerzeuger
JP2014218342A (ja) * 2013-05-09 2014-11-20 オイレス工業株式会社 支持用エアプレートおよびその気体流抵抗器
JP6128050B2 (ja) 2014-04-25 2017-05-17 トヨタ自動車株式会社 非接触型搬送ハンド
JP6302758B2 (ja) * 2014-06-10 2018-03-28 株式会社ディスコ チャックテーブル
CN108701639B (zh) * 2016-03-10 2022-09-16 三菱电机株式会社 基板吸附台、基板处理装置、基板处理方法
KR102666266B1 (ko) * 2019-03-25 2024-05-14 케이엘에이 코포레이션 휘어진 반도체 웨이퍼를 평탄화하는 진공 홀드-다운 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3411830A (en) * 1966-11-14 1968-11-19 Leon W. Smith Air-cushioning pneumatic conveyor
US3761002A (en) * 1972-11-15 1973-09-25 Ibm Fluid bearing having discrete holes formed by vortex restrictors
US3890508A (en) * 1973-12-28 1975-06-17 Texas Instruments Inc Workpiece alignment system

Also Published As

Publication number Publication date
CA2137921A1 (fr) 1994-03-02
IL106252A0 (en) 1993-11-15
AU4654593A (en) 1994-02-14
DE69306581D1 (de) 1997-01-23
WO1994002396A1 (fr) 1994-02-03
EP0650456B1 (fr) 1996-12-11
JPH08503680A (ja) 1996-04-23
EP0650456A1 (fr) 1995-05-03
DE69306581T2 (de) 1997-06-05

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Legal Events

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FF Patent granted
RH Patent void