IE801200L - Semiconductor manufacture - Google Patents
Semiconductor manufactureInfo
- Publication number
- IE801200L IE801200L IE120080A IE120080A IE801200L IE 801200 L IE801200 L IE 801200L IE 120080 A IE120080 A IE 120080A IE 120080 A IE120080 A IE 120080A IE 801200 L IE801200 L IE 801200L
- Authority
- IE
- Ireland
- Prior art keywords
- stage
- bonding
- pellets
- iii
- pellet
- Prior art date
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68313—Auxiliary support including a cavity for storing a finished device, e.g. IC package, or a partly finished device, e.g. die, during manufacturing or mounting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/75—Apparatus for connecting with bump connectors or layer connectors
- H01L2224/7525—Means for applying energy, e.g. heating means
- H01L2224/753—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/75301—Bonding head
- H01L2224/75302—Shape
- H01L2224/75303—Shape of the pressing surface
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/838—Bonding techniques
- H01L2224/8385—Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01027—Cobalt [Co]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01039—Yttrium [Y]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/06—Polymers
- H01L2924/078—Adhesive characteristics other than chemical
- H01L2924/07802—Adhesive characteristics other than chemical not being an ohmic electrical conductor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Die Bonding (AREA)
Abstract
A system for bonding pellets, for example semiconductor chips (1, 1n) to supports, for example lead frames (6), has a pellet supply stage (I), a bonding stage (II) and an intermediate stage (III). Pellets (1, 1n) are transferred from the supply stage (I) onto a table (3) of the intermediate stage (II). The position of the table (3) in the X-Y directions and the angular position of the X-Y plane are controlled by control means (13) to bring a pellet (1, 1n) on the table to a desired position for transfer to the bonding stage (III) for bonding to a support (6). <IMAGE>
[GB2056766A]
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7371979A JPS55165643A (en) | 1979-06-12 | 1979-06-12 | Device for bonding pellet |
Publications (2)
Publication Number | Publication Date |
---|---|
IE801200L true IE801200L (en) | 1980-12-12 |
IE49684B1 IE49684B1 (en) | 1985-11-27 |
Family
ID=13526306
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IE120080A IE49684B1 (en) | 1979-06-12 | 1980-06-11 | Systems for bonding pellets,for example semiconductor chips,to supports |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS55165643A (en) |
GB (1) | GB2056766B (en) |
IE (1) | IE49684B1 (en) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4372802A (en) * | 1980-06-02 | 1983-02-08 | Tokyo Denki Kagaku Kogyo Kabushiki Kaisha | Apparatus for mounting chip type circuit elements on printed circuit boards |
JPS5896739A (en) * | 1981-12-04 | 1983-06-08 | Toshiba Seiki Kk | Hybrid bonding method of semiconductor pellet |
JPS59210647A (en) * | 1983-05-14 | 1984-11-29 | Matsushita Electric Ind Co Ltd | Pellet bonding device |
JPS61112336A (en) * | 1984-11-07 | 1986-05-30 | Nec Corp | Die bonder |
JPH0519953Y2 (en) * | 1985-06-26 | 1993-05-25 | ||
JPS6237942A (en) * | 1985-08-13 | 1987-02-18 | Matsushita Electronics Corp | Pellet positioning apparatus |
JPS6362241A (en) * | 1986-09-02 | 1988-03-18 | Toshiba Corp | Wire bonding method |
JPS62162335A (en) * | 1986-11-07 | 1987-07-18 | Toshiba Seiki Kk | Bonding device for semiconductor pellet |
KR910006367B1 (en) * | 1987-07-09 | 1991-08-21 | 스미도모덴기고오교오 가부시기가이샤 | Chip package device |
CH676695A5 (en) * | 1988-05-19 | 1991-02-28 | Bobst Sa | |
JPH027992A (en) * | 1988-06-27 | 1990-01-11 | Brother Ind Ltd | Pattern registering machine |
NL8900388A (en) * | 1989-02-17 | 1990-09-17 | Philips Nv | METHOD FOR JOINING TWO OBJECTS |
JPH02239637A (en) * | 1989-03-14 | 1990-09-21 | Nec Corp | Manufacturing device for semiconductor device |
US5115545A (en) * | 1989-03-28 | 1992-05-26 | Matsushita Electric Industrial Co., Ltd. | Apparatus for connecting semiconductor devices to wiring boards |
JPH0450517U (en) * | 1990-09-05 | 1992-04-28 | ||
JPH0521544A (en) * | 1991-07-12 | 1993-01-29 | Sumitomo Electric Ind Ltd | Method and apparatus for measuring semiconductor element provided with bump |
DE4228012C2 (en) * | 1992-08-24 | 1996-08-22 | Siemens Ag | Method for spacing two components |
JP2007158102A (en) * | 2005-12-06 | 2007-06-21 | Shibuya Kogyo Co Ltd | Bonding equipment |
WO2009072659A1 (en) * | 2007-12-03 | 2009-06-11 | Panasonic Corporation | Chip mounting system |
JP5065969B2 (en) * | 2008-03-31 | 2012-11-07 | 株式会社日立ハイテクインスツルメンツ | Component mounting equipment |
CN116387209B (en) * | 2023-06-06 | 2023-09-05 | 北京中科同志科技股份有限公司 | Chip packaging system and chip packaging method |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49126268A (en) * | 1973-04-04 | 1974-12-03 | ||
JPS51131274A (en) * | 1975-05-10 | 1976-11-15 | Fujitsu Ltd | Tip bonding method |
JPS52149070A (en) * | 1976-06-07 | 1977-12-10 | Toshiba Corp | Locating and inspecting method for semiconductor parts and die bonding device using the same |
JPS5310968A (en) * | 1976-07-19 | 1978-01-31 | Hitachi Ltd | Pellet bonding method |
-
1979
- 1979-06-12 JP JP7371979A patent/JPS55165643A/en active Granted
-
1980
- 1980-06-10 GB GB8018970A patent/GB2056766B/en not_active Expired
- 1980-06-11 IE IE120080A patent/IE49684B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
GB2056766B (en) | 1984-04-26 |
JPS55165643A (en) | 1980-12-24 |
IE49684B1 (en) | 1985-11-27 |
GB2056766A (en) | 1981-03-18 |
JPS6318326B2 (en) | 1988-04-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Patent lapsed |