HUE052702T2 - Eljárás hordozóadapter elõállítására és félvezetõ elem csatlakoztatására - Google Patents

Eljárás hordozóadapter elõállítására és félvezetõ elem csatlakoztatására

Info

Publication number
HUE052702T2
HUE052702T2 HUE15729156A HUE15729156A HUE052702T2 HU E052702 T2 HUE052702 T2 HU E052702T2 HU E15729156 A HUE15729156 A HU E15729156A HU E15729156 A HUE15729156 A HU E15729156A HU E052702 T2 HUE052702 T2 HU E052702T2
Authority
HU
Hungary
Prior art keywords
contacting
producing
semiconductor element
substrate adapter
adapter
Prior art date
Application number
HUE15729156A
Other languages
English (en)
Inventor
Elisa Wieseler
Frank Krueger
Martin Bleifuss
Michael Schäfer
Andreas Hinrich
Andreas Steffen Klein
Christian Bachmann
Holger Ulrich
Frank Osterwald
David Benning
Jacek Rudzki
Lars Paulsen
Frank Schefuss
Martin Becker
Original Assignee
Heraeus Deutschland Gmbh & Co Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Deutschland Gmbh & Co Kg filed Critical Heraeus Deutschland Gmbh & Co Kg
Publication of HUE052702T2 publication Critical patent/HUE052702T2/hu

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    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
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    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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    • H01L2224/484—Connecting portions
    • H01L2224/48475—Connecting portions connected to auxiliary connecting means on the bonding areas, e.g. pre-ball, wedge-on-ball, ball-on-ball
    • H01L2224/48476—Connecting portions connected to auxiliary connecting means on the bonding areas, e.g. pre-ball, wedge-on-ball, ball-on-ball between the wire connector and the bonding area
    • H01L2224/48491—Connecting portions connected to auxiliary connecting means on the bonding areas, e.g. pre-ball, wedge-on-ball, ball-on-ball between the wire connector and the bonding area being an additional member attached to the bonding area through an adhesive or solder, e.g. buffer pad
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8319—Arrangement of the layer connectors prior to mounting
    • H01L2224/83191—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/838—Bonding techniques
    • H01L2224/8384—Sintering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/84—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
    • H01L2224/848—Bonding techniques
    • H01L2224/8484—Sintering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
    • H01L24/36—Structure, shape, material or disposition of the strap connectors prior to the connecting process
    • H01L24/37—Structure, shape, material or disposition of the strap connectors prior to the connecting process of an individual strap connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Die Bonding (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)
HUE15729156A 2014-07-11 2015-06-15 Eljárás hordozóadapter elõállítására és félvezetõ elem csatlakoztatására HUE052702T2 (hu)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE201410109766 DE102014109766B3 (de) 2014-07-11 2014-07-11 Verfahren zum Herstellen eines Substratadapters, Substratadapter und Verfahren zum Kontaktieren eines Halbleiterelements

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HUE052702T2 true HUE052702T2 (hu) 2021-05-28

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EP (1) EP3167481B1 (hu)
JP (1) JP6457637B2 (hu)
KR (1) KR102015995B1 (hu)
CN (1) CN106575632B (hu)
DE (1) DE102014109766B3 (hu)
HU (1) HUE052702T2 (hu)
TW (1) TWI573207B (hu)
WO (1) WO2016005146A1 (hu)

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Publication number Priority date Publication date Assignee Title
DE102015113421B4 (de) * 2015-08-14 2019-02-21 Danfoss Silicon Power Gmbh Verfahren zum Herstellen von Halbleiterchips
EP3154079A1 (de) * 2015-10-08 2017-04-12 Heraeus Deutschland GmbH & Co. KG Verfahren zum verbinden einer substratanordnung mit einem elektronikbauteil mit verwendung eines auf eine kontaktierungsmaterialschicht aufgebrachten vorfixiermittels, entsprechende substratanordnung und verfahren zu ihrem herstellen
DE102017121015A1 (de) * 2017-09-12 2019-03-14 Rogers Germany Gmbh Adapterelement zum Anbinden eines Bauelements wie einer Laserdiode an einen Kühlkörper, ein System aus einer Laserdiode, einem Kühlkörper und einem Adapterelement und Verfahren zur Herstellung eines Adapterelements

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JP2005136184A (ja) * 2003-10-30 2005-05-26 Seiko Epson Corp 基板接合体の製造方法及び製造装置、基板接合体、電気光学装置
DE102005047566C5 (de) * 2005-10-05 2011-06-09 Semikron Elektronik Gmbh & Co. Kg Anordnung mit einem Leistungshalbleiterbauelement und mit einem Gehäuse sowie Herstellungsverfahren hierzu
JP4156637B2 (ja) * 2006-07-31 2008-09-24 シャープ株式会社 半導体装置、電子回路の製造方法および電子回路の製造装置
JP4996961B2 (ja) * 2007-03-30 2012-08-08 ニッタ株式会社 チップ型電子部品の外部電極形成方法
DE102009018541A1 (de) * 2009-04-24 2010-10-28 W.C. Heraeus Gmbh Kontaktierungsmittel und Verfahren zur Kontaktierung elektrischer Bauteile
US8120158B2 (en) * 2009-11-10 2012-02-21 Infineon Technologies Ag Laminate electronic device
DE102011005322B4 (de) * 2011-03-10 2017-04-06 Semikron Elektronik Gmbh & Co. Kg Verfahren zur Herstellung eines Leistungshalbleitersubstrates
DE102011083926A1 (de) * 2011-09-30 2013-04-04 Robert Bosch Gmbh Schichtverbund aus einer Trägerfolie und einer Schichtanordnung umfassend eine sinterbare Schicht aus mindestens einem Metallpulver und eine Lotschicht
DE102011115886B4 (de) * 2011-10-15 2020-06-18 Danfoss Silicon Power Gmbh Verfahren zur Schaffung einer Verbindung eines Leistungshalbleiterchips mit oberseitigen Potentialflächen zu Dickdrähten
DE102013104572A1 (de) * 2013-05-03 2014-11-06 Osram Opto Semiconductors Gmbh Verfahren zum Ausbilden einer optoelektronischen Baugruppe und optoelektronische Baugruppe

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JP6457637B2 (ja) 2019-01-23
JP2017522739A (ja) 2017-08-10
DE102014109766B3 (de) 2015-04-02
KR20170030542A (ko) 2017-03-17
KR102015995B1 (ko) 2019-10-21
CN106575632B (zh) 2020-01-14
TWI573207B (zh) 2017-03-01
CN106575632A (zh) 2017-04-19
WO2016005146A1 (de) 2016-01-14
EP3167481B1 (de) 2020-11-25
EP3167481A1 (de) 2017-05-17
TW201611141A (zh) 2016-03-16

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