HK25787A - Apparatus for measuring the thickness of thin layers - Google Patents

Apparatus for measuring the thickness of thin layers Download PDF

Info

Publication number
HK25787A
HK25787A HK257/87A HK25787A HK25787A HK 25787 A HK25787 A HK 25787A HK 257/87 A HK257/87 A HK 257/87A HK 25787 A HK25787 A HK 25787A HK 25787 A HK25787 A HK 25787A
Authority
HK
Hong Kong
Prior art keywords
layer
mirror
ray beam
region
thickness
Prior art date
Application number
HK257/87A
Other languages
English (en)
Inventor
Fischer Helmut
Original Assignee
Helmut Fischer Gmbh & Co., Institut Fur Elektronik Und Messtechnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helmut Fischer Gmbh & Co., Institut Fur Elektronik Und Messtechnik filed Critical Helmut Fischer Gmbh & Co., Institut Fur Elektronik Und Messtechnik
Publication of HK25787A publication Critical patent/HK25787A/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
HK257/87A 1982-10-23 1987-03-26 Apparatus for measuring the thickness of thin layers HK25787A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19823239379 DE3239379A1 (de) 1982-10-23 1982-10-23 Vorrichtung zum messen der dicke duenner schichten

Publications (1)

Publication Number Publication Date
HK25787A true HK25787A (en) 1987-04-03

Family

ID=6176500

Family Applications (1)

Application Number Title Priority Date Filing Date
HK257/87A HK25787A (en) 1982-10-23 1987-03-26 Apparatus for measuring the thickness of thin layers

Country Status (6)

Country Link
US (2) US4597093A (cs)
JP (2) JPS5975109A (cs)
DE (1) DE3239379A1 (cs)
GB (1) GB2129127B (cs)
HK (1) HK25787A (cs)
SG (1) SG10386G (cs)

Families Citing this family (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3239379A1 (de) * 1982-10-23 1984-04-26 Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen Vorrichtung zum messen der dicke duenner schichten
DE3522779A1 (de) * 1984-07-03 1986-01-09 Twin City International, Inc., Amherst, N.Y. Dickenmessinstrument mit stationaerem probenbeobachtungsspiegel
DE3444270A1 (de) * 1984-12-05 1986-06-05 Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen Vorrichtung zum messen der dicke duenner schichten
JPH0539449Y2 (cs) * 1985-09-30 1993-10-06
US4860329A (en) * 1986-02-24 1989-08-22 Upa Technology, Inc. X-ray fluorescence thickness measuring device
DE3710437A1 (de) * 1987-04-01 1988-10-20 Helmut Fischer Elektronik & Me Vorrichtung zum messen der dicke duenner schichten
US4928293A (en) * 1987-09-23 1990-05-22 Behncke Hans H Apparatus for stabilization of X-ray fluorescence layer thickness measuring instruments for stabilization SNF process thereof
US4962518A (en) * 1987-12-07 1990-10-09 Twin City International, Inc. Apparatus for measuring the thickness of a coating
US4979203A (en) * 1989-06-19 1990-12-18 Princeton X-Ray Laser X-ray laser microscope apparatus
DE4021388A1 (de) * 1990-07-05 1992-01-16 Twin City Int Inc Vorrichtung zum messen der staerke eines ueberzuges
DE4203887C2 (de) * 1992-02-11 1998-07-23 Helmut Fischer Gmbh & Co Positioniervorrichtung für ein Meßgerät
US5309495A (en) * 1992-03-18 1994-05-03 Helmut Fischer Positioning device for an x-ray thickness measuring system
DE19710420C2 (de) * 1997-03-13 2001-07-12 Helmut Fischer Gmbh & Co Verfahren und Vorrichtung zum Messen der Dicken dünner Schichten mittels Röntgenfluoreszenz
DE19739321C2 (de) * 1997-09-09 2001-09-27 Helmut Fischer Gmbh & Co Verfahren und Einrichtung zum Bestimmen der Meßunsicherheit bei Röntgenfluoreszenz-Schichtdickenmessungen
RU2168166C2 (ru) * 1998-03-30 2001-05-27 Войсковая часть 75360 Рентгенооптический эндоскоп
GB9906011D0 (en) 1999-03-16 1999-05-12 Whiley Foils Ltd Fluorescent materials
US6345086B1 (en) * 1999-09-14 2002-02-05 Veeco Instruments Inc. X-ray fluorescence system and method
JP3811089B2 (ja) * 2002-04-15 2006-08-16 株式会社東芝 摩耗量測定方法
DE10259696B4 (de) * 2002-12-18 2018-07-05 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Vorrichtung zum Messen der Dicke dünner Schichten
US7023954B2 (en) * 2003-09-29 2006-04-04 Jordan Valley Applied Radiation Ltd. Optical alignment of X-ray microanalyzers
DE102004020370B4 (de) * 2004-04-23 2006-11-16 Sirona Dental Systems Gmbh Röntgenstrahler und Verfahren zur Erzeugung und Darstellung von Röntgenbildern
US20080302461A1 (en) * 2007-06-08 2008-12-11 E. I. Du Pont De Nemours And Company Transparent Colored High Modulus Interlayers and Laminates Therefrom
US20080318063A1 (en) * 2007-06-22 2008-12-25 Anderson Jerrel C Glass laminates with improved weatherability
US20090155576A1 (en) * 2007-12-18 2009-06-18 E. I. Du Pont De Nemours And Company Glass-less glazing laminates
EP2251454B1 (en) 2009-05-13 2014-07-23 SiO2 Medical Products, Inc. Vessel coating and inspection
WO2013170052A1 (en) 2012-05-09 2013-11-14 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US7985188B2 (en) * 2009-05-13 2011-07-26 Cv Holdings Llc Vessel, coating, inspection and processing apparatus
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
CA2855353C (en) 2011-11-11 2021-01-19 Sio2 Medical Products, Inc. Passivation, ph protective or lubricity coating for pharmaceutical package, coating process and apparatus
US20150297800A1 (en) 2012-07-03 2015-10-22 Sio2 Medical Products, Inc. SiOx BARRIER FOR PHARMACEUTICAL PACKAGE AND COATING PROCESS
US9664626B2 (en) 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
AU2013352436B2 (en) 2012-11-30 2018-10-25 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
US20160015898A1 (en) 2013-03-01 2016-01-21 Sio2 Medical Products, Inc. Plasma or cvd pre-treatment for lubricated pharmaceutical package, coating process and apparatus
DE102013102270A1 (de) * 2013-03-07 2014-09-11 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Optischer Spiegel, Röntgenfluoreszenzanalysegerät und Verfahren zur Röntgenfluoreszenzanalyse
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
JP6453841B2 (ja) 2013-03-11 2019-01-16 エスアイオーツー・メディカル・プロダクツ・インコーポレイテッド 被覆包装
US20160017490A1 (en) 2013-03-15 2016-01-21 Sio2 Medical Products, Inc. Coating method
EP3122917B1 (en) 2014-03-28 2020-05-06 SiO2 Medical Products, Inc. Antistatic coatings for plastic vessels
KR102786617B1 (ko) 2015-08-18 2025-03-26 에스아이오2 메디컬 프로덕츠, 엘엘씨 산소 전달률이 낮은, 의약품 및 다른 제품의 포장용기
CN109323653B (zh) * 2018-11-14 2024-03-08 江苏一六仪器有限公司 一种x光光斑定位仪及其定位方法

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Publication number Priority date Publication date Assignee Title
US1976179A (en) * 1930-04-28 1934-10-09 Mannl Rudolf Adjusting device for x-ray tubes
DE1084044B (de) * 1958-04-01 1960-06-23 Berthold W Schumacher Dipl Phy Satz dynamischer Druckstufen
US3717768A (en) * 1970-02-09 1973-02-20 Medinova Ab X-ray filter device in combination with a positioning light converging means
JPS51121388A (en) * 1975-04-16 1976-10-23 Nec Corp Apparatus for adjusting a specimen for x-ray diffration camera
AT354160B (de) * 1977-12-21 1979-12-27 Oesterr Studien Atomenergie Einrichtung zur bestimmung des spezifischen gewichtes von ausgewaehlten bereichen von mikroskopisch kleinen, planprallelen probe- teilen
JPS5489596A (en) * 1977-12-27 1979-07-16 Nec Corp Swing and iris set for x-rays
JPS5758300U (cs) * 1980-09-22 1982-04-06
JPS57129156U (cs) * 1981-02-04 1982-08-12
JPS57197454A (en) * 1981-05-29 1982-12-03 Rigaku Denki Kogyo Kk X-ray analysing apparatus
JPS58133239A (ja) * 1982-02-02 1983-08-08 株式会社堀場製作所 照射ｘ線領域モニタ−装置
DE3239379A1 (de) * 1982-10-23 1984-04-26 Helmut Fischer GmbH & Co Institut für Elektronik und Meßtechnik, 7032 Sindelfingen Vorrichtung zum messen der dicke duenner schichten

Also Published As

Publication number Publication date
DE3239379A1 (de) 1984-04-26
GB8310802D0 (en) 1983-05-25
JPS5975109A (ja) 1984-04-27
US4799246A (en) 1989-01-17
DE3239379C2 (cs) 1989-04-20
US4597093A (en) 1986-06-24
JPH02236106A (ja) 1990-09-19
GB2129127A (en) 1984-05-10
GB2129127B (en) 1985-11-13
SG10386G (en) 1987-09-18
JPH0244363B2 (cs) 1990-10-03
JPH0526122B2 (cs) 1993-04-15

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