HK180296A - Improved slurry polisher using ultrasonic agitation - Google Patents

Improved slurry polisher using ultrasonic agitation Download PDF

Info

Publication number
HK180296A
HK180296A HK180296A HK180296A HK180296A HK 180296 A HK180296 A HK 180296A HK 180296 A HK180296 A HK 180296A HK 180296 A HK180296 A HK 180296A HK 180296 A HK180296 A HK 180296A
Authority
HK
Hong Kong
Prior art keywords
pad
ultrasonic
slurry
polishing
agitator
Prior art date
Application number
HK180296A
Other languages
German (de)
English (en)
French (fr)
Inventor
Lorimer Miller Gabriel
Richard Wagner Eric
Original Assignee
At&T Corp.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by At&T Corp. filed Critical At&T Corp.
Publication of HK180296A publication Critical patent/HK180296A/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
HK180296A 1992-04-02 1996-09-26 Improved slurry polisher using ultrasonic agitation HK180296A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/862,044 US5245796A (en) 1992-04-02 1992-04-02 Slurry polisher using ultrasonic agitation

Publications (1)

Publication Number Publication Date
HK180296A true HK180296A (en) 1996-10-04

Family

ID=25337489

Family Applications (1)

Application Number Title Priority Date Filing Date
HK180296A HK180296A (en) 1992-04-02 1996-09-26 Improved slurry polisher using ultrasonic agitation

Country Status (8)

Country Link
US (1) US5245796A (enExample)
EP (1) EP0566258B1 (enExample)
JP (1) JP2981079B2 (enExample)
KR (1) KR930022483A (enExample)
DE (1) DE69303109T2 (enExample)
ES (1) ES2088228T3 (enExample)
HK (1) HK180296A (enExample)
TW (1) TW197531B (enExample)

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Also Published As

Publication number Publication date
EP0566258A1 (en) 1993-10-20
TW197531B (enExample) 1993-01-01
US5245796A (en) 1993-09-21
DE69303109T2 (de) 1996-10-10
ES2088228T3 (es) 1996-08-01
JP2981079B2 (ja) 1999-11-22
KR930022483A (ko) 1993-11-24
DE69303109D1 (de) 1996-07-18
JPH068134A (ja) 1994-01-18
EP0566258B1 (en) 1996-06-12

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