HK1215330A1 - 曝光裝置、移動體裝置以及器件製造方法 - Google Patents

曝光裝置、移動體裝置以及器件製造方法

Info

Publication number
HK1215330A1
HK1215330A1 HK16103227.1A HK16103227A HK1215330A1 HK 1215330 A1 HK1215330 A1 HK 1215330A1 HK 16103227 A HK16103227 A HK 16103227A HK 1215330 A1 HK1215330 A1 HK 1215330A1
Authority
HK
Hong Kong
Prior art keywords
exposure
manufacturing
mobile
mobile device
device manufacturing
Prior art date
Application number
HK16103227.1A
Other languages
English (en)
Inventor
Tomoki Miyakawa
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of HK1215330A1 publication Critical patent/HK1215330A1/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G03F7/70725—Stages control

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Electron Beam Exposure (AREA)
HK16103227.1A 2012-11-20 2016-03-21 曝光裝置、移動體裝置以及器件製造方法 HK1215330A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012253984 2012-11-20
PCT/JP2013/081323 WO2014080957A1 (ja) 2012-11-20 2013-11-20 露光装置、移動体装置、及びデバイス製造方法

Publications (1)

Publication Number Publication Date
HK1215330A1 true HK1215330A1 (zh) 2016-08-19

Family

ID=50776136

Family Applications (1)

Application Number Title Priority Date Filing Date
HK16103227.1A HK1215330A1 (zh) 2012-11-20 2016-03-21 曝光裝置、移動體裝置以及器件製造方法

Country Status (7)

Country Link
US (3) US9798252B2 (zh)
EP (1) EP2947679A4 (zh)
JP (2) JP6252869B2 (zh)
KR (1) KR20150087296A (zh)
CN (2) CN104937696B (zh)
HK (1) HK1215330A1 (zh)
WO (1) WO2014080957A1 (zh)

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JP6252869B2 (ja) * 2012-11-20 2017-12-27 株式会社ニコン 露光装置、移動体装置、及びデバイス製造方法
EP3038137B1 (en) * 2013-06-28 2019-10-30 Nikon Corporation Mobile body apparatus, exposure apparatus, and device manufacturing method
JP6629014B2 (ja) * 2015-09-08 2020-01-15 株式会社ミツトヨ エンコーダ
CN105589495B (zh) * 2016-03-25 2017-10-20 苏州昇特智能科技有限公司 多功能夹子的控制方法
JP2018092994A (ja) * 2016-11-30 2018-06-14 キヤノン株式会社 ステージ装置、検知方法、及び物品の製造方法
KR20190031430A (ko) * 2017-09-15 2019-03-26 어플라이드 머티어리얼스, 인코포레이티드 캐리어 부상 시스템의 정렬을 결정하기 위한 방법
KR102164594B1 (ko) * 2018-11-15 2020-10-12 한국기계연구원 리니어 모터 및 그 제어 시스템
CN111490662B (zh) * 2019-01-29 2022-04-26 苏州隐冠半导体技术有限公司 一种平面电机位移装置
CN111948917B (zh) * 2020-08-26 2021-06-25 清华大学 基于光刻机双工件台运动系统的垂向保护方法及装置
CN113533334B (zh) * 2021-08-26 2024-09-20 福州理工学院 一种计算机视觉测量装置
TWI776680B (zh) * 2021-09-16 2022-09-01 日商新川股份有限公司 安裝裝置以及安裝裝置中的平行度檢測方法

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JP2008078499A (ja) * 2006-09-22 2008-04-03 Canon Inc 支持装置、露光装置及びデバイス製造方法
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JP2010050291A (ja) * 2008-08-22 2010-03-04 Nikon Corp 露光方法及び露光装置、並びにデバイス製造方法
JP2010205867A (ja) * 2009-03-03 2010-09-16 Canon Inc 位置検出装置及び露光装置
WO2010109574A1 (ja) * 2009-03-23 2010-09-30 株式会社アドバンテスト ステージ装置及びステージクリーニング方法
US20110075120A1 (en) * 2009-09-30 2011-03-31 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
US20110085150A1 (en) * 2009-09-30 2011-04-14 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
JP5757397B2 (ja) * 2010-03-29 2015-07-29 株式会社ニコン 露光方法及び露光装置、並びにデバイス製造方法
JP6252869B2 (ja) * 2012-11-20 2017-12-27 株式会社ニコン 露光装置、移動体装置、及びデバイス製造方法

Also Published As

Publication number Publication date
US10185229B2 (en) 2019-01-22
US9798252B2 (en) 2017-10-24
CN104937696B (zh) 2019-03-15
US20180046093A1 (en) 2018-02-15
JP6252869B2 (ja) 2017-12-27
EP2947679A1 (en) 2015-11-25
WO2014080957A1 (ja) 2014-05-30
JP6573136B2 (ja) 2019-09-11
JPWO2014080957A1 (ja) 2017-01-05
EP2947679A4 (en) 2017-02-08
JP2018060215A (ja) 2018-04-12
CN104937696A (zh) 2015-09-23
US20160033883A1 (en) 2016-02-04
KR20150087296A (ko) 2015-07-29
CN109976103A (zh) 2019-07-05
US20190113854A1 (en) 2019-04-18

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