GB945735A - Process for etching semiconductors in the fabrication of miniature semiconductor networks comprising a single semiconductor block - Google Patents

Process for etching semiconductors in the fabrication of miniature semiconductor networks comprising a single semiconductor block

Info

Publication number
GB945735A
GB945735A GB16066/60A GB1606660A GB945735A GB 945735 A GB945735 A GB 945735A GB 16066/60 A GB16066/60 A GB 16066/60A GB 1606660 A GB1606660 A GB 1606660A GB 945735 A GB945735 A GB 945735A
Authority
GB
United Kingdom
Prior art keywords
etched
miniature
fabrication
semi
edges
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB16066/60A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Publication of GB945735A publication Critical patent/GB945735A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/61—Electrolytic etching
    • H10P50/613—Electrolytic etching of Group IV materials
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/12—Etching of semiconducting materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Weting (AREA)
GB16066/60A 1959-05-06 1960-05-06 Process for etching semiconductors in the fabrication of miniature semiconductor networks comprising a single semiconductor block Expired GB945735A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US81129659A 1959-05-06 1959-05-06

Publications (1)

Publication Number Publication Date
GB945735A true GB945735A (en) 1964-01-08

Family

ID=25206147

Family Applications (1)

Application Number Title Priority Date Filing Date
GB16066/60A Expired GB945735A (en) 1959-05-06 1960-05-06 Process for etching semiconductors in the fabrication of miniature semiconductor networks comprising a single semiconductor block

Country Status (3)

Country Link
GB (1) GB945735A (enExample)
LU (1) LU38604A1 (enExample)
MY (1) MY6900297A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4096619A (en) * 1977-01-31 1978-06-27 International Telephone & Telegraph Corporation Semiconductor scribing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4096619A (en) * 1977-01-31 1978-06-27 International Telephone & Telegraph Corporation Semiconductor scribing method

Also Published As

Publication number Publication date
MY6900297A (en) 1969-12-31
LU38604A1 (enExample) 1960-07-05

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