GB932668A - Improvements in or relating to methods of and apparatus for heat treatment of semi-conductor material - Google Patents
Improvements in or relating to methods of and apparatus for heat treatment of semi-conductor materialInfo
- Publication number
- GB932668A GB932668A GB32426/60A GB3242660A GB932668A GB 932668 A GB932668 A GB 932668A GB 32426/60 A GB32426/60 A GB 32426/60A GB 3242660 A GB3242660 A GB 3242660A GB 932668 A GB932668 A GB 932668A
- Authority
- GB
- United Kingdom
- Prior art keywords
- rod
- relating
- semi
- methods
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/52—Means for observation of the coating process
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/16—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/28—Controlling or regulating
- C30B13/30—Stabilisation or shape controlling of the molten zone, e.g. by concentrators, by electromagnetic fields; Controlling the section of the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
- C30B15/26—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
- Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
- Y10T117/1088—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone including heating or cooling details
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electromagnetism (AREA)
- Thermal Sciences (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL243734A NL108788C (de) | 1959-09-24 | 1959-09-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB932668A true GB932668A (en) | 1963-07-31 |
Family
ID=19751951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB32426/60A Expired GB932668A (en) | 1959-09-24 | 1960-09-21 | Improvements in or relating to methods of and apparatus for heat treatment of semi-conductor material |
Country Status (5)
Country | Link |
---|---|
US (1) | US3124686A (de) |
DE (1) | DE1146722B (de) |
FR (1) | FR1268179A (de) |
GB (1) | GB932668A (de) |
NL (1) | NL108788C (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3384732A (en) * | 1964-01-08 | 1968-05-21 | Taylor Winfield Corp | Induction annealing of strip joints |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2054382A (en) * | 1935-07-16 | 1936-09-15 | United States Steel Corp | Radiation pyrometer device |
US2166824A (en) * | 1936-01-14 | 1939-07-18 | Gen Electric | High temperature pyrometer |
US2234328A (en) * | 1937-09-24 | 1941-03-11 | Rca Corp | Radiant energy receiving device |
US2591561A (en) * | 1943-04-28 | 1952-04-01 | Elgin Nat Watch Co | Apparatus for producing refractory rods |
US2692950A (en) * | 1952-01-04 | 1954-10-26 | Bell Telephone Labor Inc | Valve for infrared energy |
US2982856A (en) * | 1955-06-27 | 1961-05-02 | Rca Corp | Tunable infrared apparatus and methods |
US2870309A (en) * | 1957-06-11 | 1959-01-20 | Emil R Capita | Zone purification device |
US3031576A (en) * | 1957-11-06 | 1962-04-24 | Philips Corp | Device for measuring and detecting radiations |
US2916593A (en) * | 1958-07-25 | 1959-12-08 | Gen Electric | Induction heating apparatus and its use in silicon production |
US2997590A (en) * | 1959-06-26 | 1961-08-22 | Ibm | Infrared radiation entrance window |
-
0
- US US3124686D patent/US3124686A/en not_active Expired - Lifetime
-
1959
- 1959-09-24 NL NL243734A patent/NL108788C/xx active
-
1960
- 1960-09-20 DE DEN18937A patent/DE1146722B/de active Pending
- 1960-09-21 GB GB32426/60A patent/GB932668A/en not_active Expired
- 1960-09-22 FR FR839294A patent/FR1268179A/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE1146722B (de) | 1963-04-04 |
US3124686A (en) | 1964-03-10 |
FR1268179A (fr) | 1961-07-28 |
NL108788C (de) | 1964-04-15 |
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