JPS5210807A - Process and apparatus for zone melting of semiconductor crystal rod without aid of crucible - Google Patents

Process and apparatus for zone melting of semiconductor crystal rod without aid of crucible

Info

Publication number
JPS5210807A
JPS5210807A JP8285576A JP8285576A JPS5210807A JP S5210807 A JPS5210807 A JP S5210807A JP 8285576 A JP8285576 A JP 8285576A JP 8285576 A JP8285576 A JP 8285576A JP S5210807 A JPS5210807 A JP S5210807A
Authority
JP
Japan
Prior art keywords
crucible
aid
semiconductor crystal
crystal rod
zone melting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8285576A
Other languages
Japanese (ja)
Inventor
Keraa Uorufugangu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS5210807A publication Critical patent/JPS5210807A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/285—Crystal holders, e.g. chucks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP8285576A 1975-07-11 1976-07-12 Process and apparatus for zone melting of semiconductor crystal rod without aid of crucible Pending JPS5210807A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19752531099 DE2531099B2 (en) 1975-07-11 1975-07-11 Device for supporting the rod end containing the seed crystal during crucible-free zone melting by a funnel sleeve

Publications (1)

Publication Number Publication Date
JPS5210807A true JPS5210807A (en) 1977-01-27

Family

ID=5951315

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8285576A Pending JPS5210807A (en) 1975-07-11 1976-07-12 Process and apparatus for zone melting of semiconductor crystal rod without aid of crucible

Country Status (2)

Country Link
JP (1) JPS5210807A (en)
DE (1) DE2531099B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141595A (en) * 1979-04-20 1980-11-05 C Uyemura & Co Ltd Controlling device of surface treating process
JPS56146899A (en) * 1980-04-14 1981-11-14 Sansha Electric Mfg Co Ltd Surface treating apparatus
JPS6056100A (en) * 1983-09-06 1985-04-01 Nippon Light Metal Co Ltd Surface treating device of aluminum or aluminum alloy
JPH0514161U (en) * 1991-08-08 1993-02-23 株式会社中央製作所 Surface treatment equipment

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141595A (en) * 1979-04-20 1980-11-05 C Uyemura & Co Ltd Controlling device of surface treating process
JPS56146899A (en) * 1980-04-14 1981-11-14 Sansha Electric Mfg Co Ltd Surface treating apparatus
JPS6056100A (en) * 1983-09-06 1985-04-01 Nippon Light Metal Co Ltd Surface treating device of aluminum or aluminum alloy
JPH0514161U (en) * 1991-08-08 1993-02-23 株式会社中央製作所 Surface treatment equipment

Also Published As

Publication number Publication date
DE2531099C3 (en) 1978-12-14
DE2531099B2 (en) 1978-04-06
DE2531099A1 (en) 1977-01-13

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