JPS5326705A - Apparatus for zone melting of semiconductor rod without crucible - Google Patents

Apparatus for zone melting of semiconductor rod without crucible

Info

Publication number
JPS5326705A
JPS5326705A JP10101277A JP10101277A JPS5326705A JP S5326705 A JPS5326705 A JP S5326705A JP 10101277 A JP10101277 A JP 10101277A JP 10101277 A JP10101277 A JP 10101277A JP S5326705 A JPS5326705 A JP S5326705A
Authority
JP
Japan
Prior art keywords
crucible
zone melting
semiconductor rod
semiconductor
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10101277A
Other languages
Japanese (ja)
Other versions
JPS6050758B2 (en
Inventor
Keraa Uorufugangu
Uiidoru Noruberuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of JPS5326705A publication Critical patent/JPS5326705A/en
Publication of JPS6050758B2 publication Critical patent/JPS6050758B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Induction Heating (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Furnace Details (AREA)
JP10101277A 1976-08-23 1977-08-23 Crucible-less zone melting equipment for semiconductor rods Expired JPS6050758B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19762637939 DE2637939C3 (en) 1976-08-23 1976-08-23 Device for the crucible-free zone melting of semiconductor rods
DE2637939.5 1976-08-23

Publications (2)

Publication Number Publication Date
JPS5326705A true JPS5326705A (en) 1978-03-13
JPS6050758B2 JPS6050758B2 (en) 1985-11-09

Family

ID=5986149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10101277A Expired JPS6050758B2 (en) 1976-08-23 1977-08-23 Crucible-less zone melting equipment for semiconductor rods

Country Status (4)

Country Link
JP (1) JPS6050758B2 (en)
DE (1) DE2637939C3 (en)
DK (1) DK372977A (en)
IT (1) IT1086508B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008025466A (en) * 2006-07-21 2008-02-07 Toyota Motor Corp V-type engine
US20180058642A1 (en) * 2016-08-30 2018-03-01 Nichia Corporation Light emitting device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2929119A1 (en) * 1979-07-18 1981-02-05 Siemens Ag Crucibleless zone melting generator - cut off by sparkover causing capacitor discharge and relay response
US7113535B2 (en) * 2004-05-21 2006-09-26 Ajax Tocco Magnethermic Corporation Induction furnace for melting granular materials

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008025466A (en) * 2006-07-21 2008-02-07 Toyota Motor Corp V-type engine
US20180058642A1 (en) * 2016-08-30 2018-03-01 Nichia Corporation Light emitting device

Also Published As

Publication number Publication date
IT1086508B (en) 1985-05-28
DK372977A (en) 1978-02-24
DE2637939C3 (en) 1979-07-26
DE2637939B2 (en) 1978-11-30
DE2637939A1 (en) 1978-03-02
JPS6050758B2 (en) 1985-11-09

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