GB785878A - A method of carrying out industrial processes in a glow discharge - Google Patents

A method of carrying out industrial processes in a glow discharge

Info

Publication number
GB785878A
GB785878A GB4499/54A GB449954A GB785878A GB 785878 A GB785878 A GB 785878A GB 4499/54 A GB4499/54 A GB 4499/54A GB 449954 A GB449954 A GB 449954A GB 785878 A GB785878 A GB 785878A
Authority
GB
United Kingdom
Prior art keywords
cathodes
glow
discharge
fringes
distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4499/54A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of GB785878A publication Critical patent/GB785878A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018Glow discharge
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34Methods of heating
    • C21D1/38Heating by cathodic discharges
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Vapour Deposition (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
GB4499/54A 1953-02-17 1954-02-16 A method of carrying out industrial processes in a glow discharge Expired GB785878A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH785878X 1953-02-17

Publications (1)

Publication Number Publication Date
GB785878A true GB785878A (en) 1957-11-06

Family

ID=4536581

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4499/54A Expired GB785878A (en) 1953-02-17 1954-02-16 A method of carrying out industrial processes in a glow discharge

Country Status (7)

Country Link
US (1) US2955998A (nl)
BE (1) BE526527A (nl)
CH (1) CH314340A (nl)
DE (1) DE976529C (nl)
FR (1) FR1097674A (nl)
GB (1) GB785878A (nl)
NL (2) NL178001B (nl)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3256818A (en) * 1955-11-26 1966-06-21 Berghaus Bernhard Method of reducing barrel wear
DE3029339A1 (de) * 1979-09-14 1981-03-26 Hitachi, Ltd., Tokio/Tokyo Verfahren und vorrichtung zur behandlung elektrisch leitenden materials durch glimmentladung
GB2170350A (en) * 1984-12-13 1986-07-30 Stc Plc Plasma reactor vessel and process
US4749589A (en) * 1984-12-13 1988-06-07 Stc Plc Method of surface treatment
US9212416B2 (en) 2009-08-07 2015-12-15 Swagelok Company Low temperature carburization under soft vacuum
US9617632B2 (en) 2012-01-20 2017-04-11 Swagelok Company Concurrent flow of activating gas in low temperature carburization

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3231484A (en) * 1956-10-27 1966-01-25 Berghaus Elektrophysik Anst Method of sustaining a glow discharge in a high pressure area
CH404010A (de) * 1961-03-30 1965-12-15 Berghaus Elektrophysik Anst Verfahren und Vorrichtung zur Durchführung technischer Prozesse unter Einwirkung einer elektrischen Glimmentladung
DE1271267B (de) * 1961-04-14 1968-06-27 Litton Systems Inc Niederdruck-Quecksilberdampfentladungsroehre
US3239368A (en) * 1962-04-26 1966-03-08 Nra Inc Method of preparing thin films on substrates by an electrical discharge
GB1052029A (nl) * 1962-09-20
US3314873A (en) * 1962-11-28 1967-04-18 Western Electric Co Method and apparatus for cathode sputtering using a cylindrical cathode
US3423562A (en) * 1965-06-24 1969-01-21 Gen Electric Glow discharge apparatus
CH551496A (de) * 1970-09-21 1974-07-15 Berghaus Bernhard Elektrophysi Verfahren zur verfestigung der oberflaeche von werkstuecken aus eisen und stahl.
FR2119930B1 (nl) * 1970-12-31 1974-08-19 Ibm
US3723289A (en) * 1971-08-12 1973-03-27 Celanese Corp Method and apparatus for plasma treatment of substrates
DE2811942C2 (de) * 1977-03-23 1986-09-18 Vide et Traitement S.A., Neuilly-en-Thelle Ofen zur ionischen Nitrierbehandlung von metallischen Werkstücken
CH659346A5 (de) * 1983-05-10 1987-01-15 Balzers Hochvakuum Vorrichtung zum behandeln der innenwand eines rohres.
DE19652633A1 (de) * 1996-09-13 1998-03-19 Euromat Gmbh Verfahren und Vorrichtung zum Innenbeschichten metallischer Bauteile
DE19722056A1 (de) * 1997-05-27 1998-12-03 Roland Dr Gesche Verfahren und Anordnung zum Herstellen dünner Schichten mittels Niederdruck-Gasentladung in einer Hohlkathode

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1162149A (en) * 1914-10-22 1915-11-30 Engelhardt A Eckhardt Process of making wear-withstanding coat.
US2164595A (en) * 1936-12-07 1939-07-04 Siemens Ag Method of coating electrodes
DE722131C (de) * 1937-08-15 1942-07-01 Bernhard Berghaus Anordnung und Verfahren zum Metallisieren von Gegenstaenden mittels Kathodenzerstaeubung
FR841904A (fr) * 1937-08-26 1939-06-01 Procédé pour métalliser ou revêtir des articles d'une matière vaporisée thermiquement
US2237328A (en) * 1938-02-19 1941-04-08 Birdseye Electric Corp Metal-coating bulbs or the like
US2438561A (en) * 1942-04-30 1948-03-30 Gen Electric Electrothermal deposition apparatus
US2434931A (en) * 1944-12-01 1948-01-27 Bell Telephone Labor Inc Method and apparatus for ionic discharge coating
NL163085B (nl) * 1950-08-03 Siemens Ag Schakelinrichting voor het overdragen van berichten over een uit verscheidene parallel geschakelde lijnen bestaande overdrachtsweg.

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3256818A (en) * 1955-11-26 1966-06-21 Berghaus Bernhard Method of reducing barrel wear
DE3029339A1 (de) * 1979-09-14 1981-03-26 Hitachi, Ltd., Tokio/Tokyo Verfahren und vorrichtung zur behandlung elektrisch leitenden materials durch glimmentladung
GB2170350A (en) * 1984-12-13 1986-07-30 Stc Plc Plasma reactor vessel and process
US4749589A (en) * 1984-12-13 1988-06-07 Stc Plc Method of surface treatment
US9212416B2 (en) 2009-08-07 2015-12-15 Swagelok Company Low temperature carburization under soft vacuum
US10156006B2 (en) 2009-08-07 2018-12-18 Swagelok Company Low temperature carburization under soft vacuum
US10934611B2 (en) 2009-08-07 2021-03-02 Swagelok Company Low temperature carburization under soft vacuum
US9617632B2 (en) 2012-01-20 2017-04-11 Swagelok Company Concurrent flow of activating gas in low temperature carburization
US10246766B2 (en) 2012-01-20 2019-04-02 Swagelok Company Concurrent flow of activating gas in low temperature carburization
US11035032B2 (en) 2012-01-20 2021-06-15 Swagelok Company Concurrent flow of activating gas in low temperature carburization

Also Published As

Publication number Publication date
NL83318C (nl)
US2955998A (en) 1960-10-11
FR1097674A (fr) 1955-07-08
BE526527A (nl)
NL178001B (nl)
DE976529C (de) 1963-10-24
CH314340A (de) 1956-06-15

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