GB749293A - Method and apparatus for deposition of materials by thermal decomposition - Google Patents

Method and apparatus for deposition of materials by thermal decomposition

Info

Publication number
GB749293A
GB749293A GB781254A GB781254A GB749293A GB 749293 A GB749293 A GB 749293A GB 781254 A GB781254 A GB 781254A GB 781254 A GB781254 A GB 781254A GB 749293 A GB749293 A GB 749293A
Authority
GB
United Kingdom
Prior art keywords
chamber
carbonyl
workpiece
anode
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB781254A
Inventor
Herman Nack
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commonwealth Engineering Company of Ohio
Original Assignee
Commonwealth Engineering Company of Ohio
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commonwealth Engineering Company of Ohio filed Critical Commonwealth Engineering Company of Ohio
Priority to GB781254A priority Critical patent/GB749293A/en
Publication of GB749293A publication Critical patent/GB749293A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/452—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation

Abstract

749,293. Coating metals. COMMONWEALTH ENGINEERING CO. OF OHIO. March 17, 1954, No. 7812/54. Class 82(2). Workpieces are coated with metals by subjecting them in a chamber to the action of a gaseous metal carbonyl in a high voltage unidirectional electric field, the work piece forming the cathode. The outlet of the chamber may constitute the anode. A hollow member containing radium or uranium may be inserted into the gas stream to ionise the gas before entry into the chamber. The workpiece may be heated to the decomposition temperature of the carbonyl. Coating metals include Cr, Fe W, Co, Mo, Re, Ni, and may be deposited on e.g. the following bases : steel, Cu or brass, cast iron, Al, Mg. The carbonyl is admitted to the chamber 1 through a pipe 2. The workpiece 6 is supported on an electric heater 4 by electrically insulating members 15 and is connected at 7 to the negative pole of a D.C. supply. The outlet 3 of the chamber forms the anode.
GB781254A 1954-03-17 1954-03-17 Method and apparatus for deposition of materials by thermal decomposition Expired GB749293A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB781254A GB749293A (en) 1954-03-17 1954-03-17 Method and apparatus for deposition of materials by thermal decomposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB781254A GB749293A (en) 1954-03-17 1954-03-17 Method and apparatus for deposition of materials by thermal decomposition

Publications (1)

Publication Number Publication Date
GB749293A true GB749293A (en) 1956-05-23

Family

ID=9840218

Family Applications (1)

Application Number Title Priority Date Filing Date
GB781254A Expired GB749293A (en) 1954-03-17 1954-03-17 Method and apparatus for deposition of materials by thermal decomposition

Country Status (1)

Country Link
GB (1) GB749293A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3293074A (en) * 1963-11-05 1966-12-20 Siemens Ag Method and apparatus for growing monocrystalline layers on monocrystalline substrates of semiconductor material
WO1981003669A1 (en) * 1980-06-13 1981-12-24 Science & Techn Ets Method for manufacturing a thin layer with orientated structure,device for implementing such method and products obtained thereby

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3293074A (en) * 1963-11-05 1966-12-20 Siemens Ag Method and apparatus for growing monocrystalline layers on monocrystalline substrates of semiconductor material
WO1981003669A1 (en) * 1980-06-13 1981-12-24 Science & Techn Ets Method for manufacturing a thin layer with orientated structure,device for implementing such method and products obtained thereby

Similar Documents

Publication Publication Date Title
GB848623A (en) Improvements in and relating to high speed plasma generators
GB828699A (en) An improved process for the treatment of tubes of iron, steel or iron alloys
GB1162832A (en) A Process and Device for Coating Surfaces
GB982766A (en) Process and apparatus for decomposing gaseous metal compounds
GB1453100A (en) Method of and apparatus for plasma working of conductive materials
GB749293A (en) Method and apparatus for deposition of materials by thermal decomposition
GB897577A (en) Improvements in or relating to apparatus for producing a jet consisting of a plasma of ions and electrons
Von Engel et al. The calorelectric effect in flames
GB869791A (en) Material deposition process employing a collimated electric arc
GB830328A (en) Improvements in article and method of joining vitreous material
US3616383A (en) Method of ionitriding objects made of high-alloyed particularly stainless iron and steel
GB907355A (en) Improvements in or relating to methods of facing metals
GB893445A (en) Improvements in regulating the flow to the chill mould in continuous-casting plant
ES235635A1 (en) Constricted arc metal removal
GB734201A (en) Improvements in or relating to methods and apparatus for transforming thermic energy of high temperature into electrical energy
GB1242788A (en) Process and device for ionizing a stream of gas flowing at supersonic speed
GB1072742A (en) Process for sputtering a metal coating onto a metal workpiece
GB1109667A (en) Improvements in or relating to the surface melting of metal bodies
GB914969A (en) A method of cementation in which fluidised carbon powder particles are employed
GB570570A (en) Improvements in or relating to nitriding processes
GB567308A (en) Improvements in or relating to the casting of rare earth metals
GB887506A (en) Improvements in the heat treatment of metals by plasma heating
GB1115738A (en) An improved process of, and apparatus for, the manufacture of products of sprayed metal or having a coating so formed
GB751523A (en) Carbonyl-metal plated product
GB999509A (en) Improvements in or relating to the process of, and apparatus for, welding metals