CH314340A - Verfahren zur Durchführung technischer Prozesse in einer Glimmentladung - Google Patents

Verfahren zur Durchführung technischer Prozesse in einer Glimmentladung

Info

Publication number
CH314340A
CH314340A CH314340DA CH314340A CH 314340 A CH314340 A CH 314340A CH 314340D A CH314340D A CH 314340DA CH 314340 A CH314340 A CH 314340A
Authority
CH
Switzerland
Prior art keywords
carrying
glow discharge
out technical
technical processes
processes
Prior art date
Application number
Other languages
English (en)
Inventor
Berghaus Bernhard
Bucek Hans
Original Assignee
Berghaus Elektrophysik Anst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berghaus Elektrophysik Anst filed Critical Berghaus Elektrophysik Anst
Publication of CH314340A publication Critical patent/CH314340A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34—Methods of heating
    • C21D1/38—Heating by cathodic discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
CH314340D 1953-02-17 1953-02-17 Verfahren zur Durchführung technischer Prozesse in einer Glimmentladung CH314340A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH785878X 1953-02-17

Publications (1)

Publication Number Publication Date
CH314340A true CH314340A (de) 1956-06-15

Family

ID=4536581

Family Applications (1)

Application Number Title Priority Date Filing Date
CH314340D CH314340A (de) 1953-02-17 1953-02-17 Verfahren zur Durchführung technischer Prozesse in einer Glimmentladung

Country Status (7)

Country Link
US (1) US2955998A (de)
BE (1) BE526527A (de)
CH (1) CH314340A (de)
DE (1) DE976529C (de)
FR (1) FR1097674A (de)
GB (1) GB785878A (de)
NL (2) NL83318C (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3256818A (en) * 1955-11-26 1966-06-21 Berghaus Bernhard Method of reducing barrel wear
DE1271267B (de) * 1961-04-14 1968-06-27 Litton Systems Inc Niederdruck-Quecksilberdampfentladungsroehre

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3231484A (en) * 1956-10-27 1966-01-25 Berghaus Elektrophysik Anst Method of sustaining a glow discharge in a high pressure area
CH404010A (de) * 1961-03-30 1965-12-15 Berghaus Elektrophysik Anst Verfahren und Vorrichtung zur Durchführung technischer Prozesse unter Einwirkung einer elektrischen Glimmentladung
US3239368A (en) * 1962-04-26 1966-03-08 Nra Inc Method of preparing thin films on substrates by an electrical discharge
GB1052029A (de) * 1962-09-20
US3314873A (en) * 1962-11-28 1967-04-18 Western Electric Co Method and apparatus for cathode sputtering using a cylindrical cathode
US3423562A (en) * 1965-06-24 1969-01-21 Gen Electric Glow discharge apparatus
CH551496A (de) * 1970-09-21 1974-07-15 Berghaus Bernhard Elektrophysi Verfahren zur verfestigung der oberflaeche von werkstuecken aus eisen und stahl.
FR2119930B1 (de) * 1970-12-31 1974-08-19 Ibm
US3723289A (en) * 1971-08-12 1973-03-27 Celanese Corp Method and apparatus for plasma treatment of substrates
DE2811942C2 (de) * 1977-03-23 1986-09-18 Vide et Traitement S.A., Neuilly-en-Thelle Ofen zur ionischen Nitrierbehandlung von metallischen Werkstücken
DE3029339C2 (de) * 1979-09-14 1984-11-22 Hitachi, Ltd., Tokio/Tokyo Glimmentladungs-Oberflächenbehandlungsverfahren und -vorrichtung
CH659346A5 (de) * 1983-05-10 1987-01-15 Balzers Hochvakuum Vorrichtung zum behandeln der innenwand eines rohres.
GB8431422D0 (en) * 1984-12-13 1985-01-23 Standard Telephones Cables Ltd Plasma reactor vessel
US4749589A (en) * 1984-12-13 1988-06-07 Stc Plc Method of surface treatment
DE19652633A1 (de) * 1996-09-13 1998-03-19 Euromat Gmbh Verfahren und Vorrichtung zum Innenbeschichten metallischer Bauteile
DE19722056A1 (de) * 1997-05-27 1998-12-03 Roland Dr Gesche Verfahren und Anordnung zum Herstellen dünner Schichten mittels Niederdruck-Gasentladung in einer Hohlkathode
US9212416B2 (en) 2009-08-07 2015-12-15 Swagelok Company Low temperature carburization under soft vacuum
US9617632B2 (en) 2012-01-20 2017-04-11 Swagelok Company Concurrent flow of activating gas in low temperature carburization

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1162149A (en) * 1914-10-22 1915-11-30 Engelhardt A Eckhardt Process of making wear-withstanding coat.
US2164595A (en) * 1936-12-07 1939-07-04 Siemens Ag Method of coating electrodes
DE722131C (de) * 1937-08-15 1942-07-01 Bernhard Berghaus Anordnung und Verfahren zum Metallisieren von Gegenstaenden mittels Kathodenzerstaeubung
FR841904A (fr) * 1937-08-26 1939-06-01 Procédé pour métalliser ou revêtir des articles d'une matière vaporisée thermiquement
US2237328A (en) * 1938-02-19 1941-04-08 Birdseye Electric Corp Metal-coating bulbs or the like
US2438561A (en) * 1942-04-30 1948-03-30 Gen Electric Electrothermal deposition apparatus
US2434931A (en) * 1944-12-01 1948-01-27 Bell Telephone Labor Inc Method and apparatus for ionic discharge coating
NL163085B (nl) * 1950-08-03 Siemens Ag Schakelinrichting voor het overdragen van berichten over een uit verscheidene parallel geschakelde lijnen bestaande overdrachtsweg.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3256818A (en) * 1955-11-26 1966-06-21 Berghaus Bernhard Method of reducing barrel wear
DE1271267B (de) * 1961-04-14 1968-06-27 Litton Systems Inc Niederdruck-Quecksilberdampfentladungsroehre

Also Published As

Publication number Publication date
GB785878A (en) 1957-11-06
DE976529C (de) 1963-10-24
NL83318C (de)
NL178001B (nl)
BE526527A (de)
FR1097674A (fr) 1955-07-08
US2955998A (en) 1960-10-11

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