CH314340A - Method for carrying out technical processes in a glow discharge - Google Patents

Method for carrying out technical processes in a glow discharge

Info

Publication number
CH314340A
CH314340A CH314340DA CH314340A CH 314340 A CH314340 A CH 314340A CH 314340D A CH314340D A CH 314340DA CH 314340 A CH314340 A CH 314340A
Authority
CH
Switzerland
Prior art keywords
carrying
glow discharge
out technical
technical processes
processes
Prior art date
Application number
Other languages
German (de)
Inventor
Berghaus Bernhard
Bucek Hans
Original Assignee
Berghaus Elektrophysik Anst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Berghaus Elektrophysik Anst filed Critical Berghaus Elektrophysik Anst
Publication of CH314340A publication Critical patent/CH314340A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/34—Methods of heating
    • C21D1/38—Heating by cathodic discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
CH314340D 1953-02-17 1953-02-17 Method for carrying out technical processes in a glow discharge CH314340A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH785878X 1953-02-17

Publications (1)

Publication Number Publication Date
CH314340A true CH314340A (en) 1956-06-15

Family

ID=4536581

Family Applications (1)

Application Number Title Priority Date Filing Date
CH314340D CH314340A (en) 1953-02-17 1953-02-17 Method for carrying out technical processes in a glow discharge

Country Status (7)

Country Link
US (1) US2955998A (en)
BE (1) BE526527A (en)
CH (1) CH314340A (en)
DE (1) DE976529C (en)
FR (1) FR1097674A (en)
GB (1) GB785878A (en)
NL (2) NL178001B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3256818A (en) * 1955-11-26 1966-06-21 Berghaus Bernhard Method of reducing barrel wear
DE1271267B (en) * 1961-04-14 1968-06-27 Litton Systems Inc Low pressure mercury vapor discharge tubes

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3231484A (en) * 1956-10-27 1966-01-25 Berghaus Elektrophysik Anst Method of sustaining a glow discharge in a high pressure area
CH404010A (en) * 1961-03-30 1965-12-15 Berghaus Elektrophysik Anst Method and device for carrying out technical processes under the influence of an electric glow discharge
US3239368A (en) * 1962-04-26 1966-03-08 Nra Inc Method of preparing thin films on substrates by an electrical discharge
NL298098A (en) * 1962-09-20
US3314873A (en) * 1962-11-28 1967-04-18 Western Electric Co Method and apparatus for cathode sputtering using a cylindrical cathode
US3423562A (en) * 1965-06-24 1969-01-21 Gen Electric Glow discharge apparatus
CH551496A (en) * 1970-09-21 1974-07-15 Berghaus Bernhard Elektrophysi PROCESS FOR STRENGTHENING THE SURFACE OF WORKPIECES MADE OF IRON AND STEEL.
FR2119930B1 (en) * 1970-12-31 1974-08-19 Ibm
US3723289A (en) * 1971-08-12 1973-03-27 Celanese Corp Method and apparatus for plasma treatment of substrates
DE2811942C2 (en) * 1977-03-23 1986-09-18 Vide et Traitement S.A., Neuilly-en-Thelle Furnace for the ionic nitriding treatment of metallic workpieces
DE3029339C2 (en) * 1979-09-14 1984-11-22 Hitachi, Ltd., Tokio/Tokyo Glow discharge surface treatment method and apparatus
CH659346A5 (en) * 1983-05-10 1987-01-15 Balzers Hochvakuum DEVICE FOR TREATING THE INTERNAL WALL OF A TUBE.
US4749589A (en) * 1984-12-13 1988-06-07 Stc Plc Method of surface treatment
GB8431422D0 (en) * 1984-12-13 1985-01-23 Standard Telephones Cables Ltd Plasma reactor vessel
DE19652634C2 (en) * 1996-09-13 2002-12-19 Euromat Ges Fuer Werkstofftech Process for the internal coating of a metallic component, in particular a component with a cylindrical cavity, a device for carrying it out and the use of the method
DE19722056A1 (en) * 1997-05-27 1998-12-03 Roland Dr Gesche Method and apparatus for production of thin layers by low pressure gas discharge in a hollow cathode
DK2462253T3 (en) 2009-08-07 2021-05-31 Swagelok Co COOLING AT LOW TEMPERATURE UNDER LOW VACUUM
US9617632B2 (en) 2012-01-20 2017-04-11 Swagelok Company Concurrent flow of activating gas in low temperature carburization

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1162149A (en) * 1914-10-22 1915-11-30 Engelhardt A Eckhardt Process of making wear-withstanding coat.
US2164595A (en) * 1936-12-07 1939-07-04 Siemens Ag Method of coating electrodes
DE722131C (en) * 1937-08-15 1942-07-01 Bernhard Berghaus Arrangement and method for metallizing objects by means of cathode sputtering
FR841904A (en) * 1937-08-26 1939-06-01 Method for metallizing or coating articles with a thermally vaporized material
US2237328A (en) * 1938-02-19 1941-04-08 Birdseye Electric Corp Metal-coating bulbs or the like
US2438561A (en) * 1942-04-30 1948-03-30 Gen Electric Electrothermal deposition apparatus
US2434931A (en) * 1944-12-01 1948-01-27 Bell Telephone Labor Inc Method and apparatus for ionic discharge coating
NL163085B (en) * 1950-08-03 Siemens Ag SWITCHING DEVICE FOR TRANSMISSION OF MESSAGES ON A TRANSMISSION ROAD CONSISTING OF SEVERAL PARALLEL CONNECTED LINES.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3256818A (en) * 1955-11-26 1966-06-21 Berghaus Bernhard Method of reducing barrel wear
DE1271267B (en) * 1961-04-14 1968-06-27 Litton Systems Inc Low pressure mercury vapor discharge tubes

Also Published As

Publication number Publication date
NL178001B (en)
NL83318C (en)
US2955998A (en) 1960-10-11
GB785878A (en) 1957-11-06
BE526527A (en)
DE976529C (en) 1963-10-24
FR1097674A (en) 1955-07-08

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